摘要:
A method for manufacturing a semiconductor device is provided, in which the lengths of a wiring trench and a via hole in a depth direction are easily controlled. A component having a first insulating film is prepared on a substrate, and a layer is disposed on the above-described first insulating film. A mold having a pattern is imprinted on the above-described layer so as to form a second insulating film having a wiring trench and a first via, the pattern corresponding to the wiring trench and the first via. Thereafter, the above-described first insulating film is etched by using the above-described second insulating film as a mask so as to form a second via, which is connected to the first via, in the first insulating film.
摘要:
The invention provides a breather structure of an engine which can improve strength of a cylinder and can prevent an increase of weight of the engine. The engine has a crank case and a cylinder fastened to an upper side of the crank case. The breather structure is provided with a breather chamber integrally formed with the cylinder in an outer peripheral wall of the cylinder, and the breather chamber separates an air including an oil mist within the crank case into oil component and gas component, returns the oil component into an oil reservoir of the engine, and discharges the gas component out of the crank case.
摘要:
Disclosed is a method of manufacturing a two-dimensional phase type element, which includes the steps of forming, on a substrate, a first etching mask in a checkered pattern, forming segments of multiple levels at a portion not covered by the first mask, forming a second etching mask corresponding to an inversion of the first etching mask, removing the first etching mask, and forming segments of multiple levels at a portion not covered by the second etching mask.
摘要:
A high-pressure mercury discharge lamp comprises a light-transmitting discharge vessel having a region surrounding a discharge space and seal portion, a spaced apart electrodes disposed in the discharge vessel and defining a discharge path, and a filling contained in the discharge vessel including mercury, halogen and lithium (Li). Components of the filling are selected such that a ratio of relative spectral energies B/A is within a range 0.15 to 0.45; wherein A represents the relative spectral energy of mercury (Hg) within a wavelenth range of 402.5 nm to 407.5 nm, and B represents the rlative spectral energy of lithium (Li) within a wavelength range of 667.5 nm to 672.5 nm.
摘要:
The non-oriented electrical steel sheet having the following chemical composition: C: 0.01% or less, Si: 2.5% or less, Mn: 2% or less, Al: 1 to 5%, Si+Al+0.5×Mn: 2.5 to 5%, with a sheet thickness of 0.1 to 0.4 mm, an average grain diameter of 50 to 180 &mgr;m and a Vickers hardness of 130 to 210. The steel sheet is excellent in workability such as punchability and interlocking performance for forming it into cores for motors and also has a lower iron loss and higher magnetic flux density, and thus when used as a core in a motor, achieves the high a motor efficiency. The steel sheet is particularly suitable as a material for cores in inverter-controlled motors.
摘要:
The present invention provides a method for producing high purity aluminum by immersing a cooling body in molten aluminum, and forming and growing crystals of the high purity aluminum on the cooling body by rotating the cooling body and introducing bubbles of a gas into the rotating molten aluminum by the rotation of the cooling body.
摘要:
A DC glow discharge lamp is disclosed, in which one the pinch seal portions of an arc tube of quartz glass with an anode and a cathode arranged therein in opposed relation to each other is bonded to a base by means of a ceramic adhesive containing a binder, and a conductive member connected around the cathode-side pinch seal portion is mounted in such a manner as to assume the same potential as the cathode. Even in the case where the binder mixed in the ceramic adhesive for improving the bonding strength is vaporized, it attaches to the conductive member and assumes a negative potential and thus is prevented from attaching to the cathode-side pinch seal portion. The devitrification of the pinch seal portion or the leakage therefrom which otherwise might occur due to the binder are thus suppressed, thereby providing a DC glow discharge lamp with an improved service life.
摘要:
A valve guide member for internal combustion engines is formed of an Fe-based sintered alloy having excellent wear and abrasion resistance, consisting essentially, by weight %, of 1 to 4% C, 1.5 to 6% Cu, 0.1 to 0.8% P, and if required 0.05 to 1% Mo, and the balance of Fe and inevitable impurities, the Fe-based sintered alloy having a structure having a matrix formed mainly of pearlite, in which are dispersed hard Fe--C--P compounds and free graphite, or alternatively hard Fe--C--P compounds, carbides, and free graphite when the alloy contains Mo, the free graphite including 0.5 to 10 area % coarse free graphite having a particle diameter of 70 to 500 .mu.m.
摘要:
One-step method for preparing 17 .alpha.-ester-21-halo pregnanes by reacting 17 .alpha., 21-cyclic orthoesters of 17 .alpha., 21-dihydroxy pregnanes with a halo compound in the presence of an organic polar solvent, simultaneously resulting in halogenation at 21-position and esterification at 17 .alpha.-position of said 17 .alpha., 21-cyclic orthoesters, the reaction proceeding in a short period of time without, or substantially without, any unfavorable side-reactions.
摘要:
A lithographic apparatus which performs drawing on a substrate with a charged-particle beam, includes an optical system having an aperture plate in which a first number of apertures are formed to pass a first number of charged-particle beams to perform the drawing, a substrate holder, a cleaning unit configured to clean the aperture plate, and a chamber containing the optical system and the substrate holder. The cleaning unit includes a case having an emitting hole plate in which a second number of emitting holes are formed, the second number being smaller than the first number, an active species source configured to generate active species in the case, and a driving mechanism configured to move the case.