Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole
    21.
    发明申请
    Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole 有权
    通过使用双镶嵌工艺制造半导体器件的方法和用于制造具有连通孔的制品的方法

    公开(公告)号:US20070128850A1

    公开(公告)日:2007-06-07

    申请号:US11606874

    申请日:2006-12-01

    IPC分类号: H01L21/4763

    摘要: A method for manufacturing a semiconductor device is provided, in which the lengths of a wiring trench and a via hole in a depth direction are easily controlled. A component having a first insulating film is prepared on a substrate, and a layer is disposed on the above-described first insulating film. A mold having a pattern is imprinted on the above-described layer so as to form a second insulating film having a wiring trench and a first via, the pattern corresponding to the wiring trench and the first via. Thereafter, the above-described first insulating film is etched by using the above-described second insulating film as a mask so as to form a second via, which is connected to the first via, in the first insulating film.

    摘要翻译: 提供一种制造半导体器件的方法,其中容易控制布线沟槽和通孔在深度方向上的长度。 在基板上制备具有第一绝缘膜的部件,在上述第一绝缘膜上设置有层。 具有图案的模具被印刷在上述层上,以形成具有布线沟槽和第一通孔的第二绝缘膜,该图案对应于布线沟槽和第一通孔。 此后,通过使用上述第二绝缘膜作为掩模来蚀刻上述第一绝缘膜,以便在第一绝缘膜中形成连接到第一通孔的第二通孔。

    Breather structure of engine
    22.
    发明申请
    Breather structure of engine 有权
    发动机呼吸机结构

    公开(公告)号:US20070062500A1

    公开(公告)日:2007-03-22

    申请号:US11518310

    申请日:2006-09-11

    IPC分类号: F02B25/06 F01M13/00

    摘要: The invention provides a breather structure of an engine which can improve strength of a cylinder and can prevent an increase of weight of the engine. The engine has a crank case and a cylinder fastened to an upper side of the crank case. The breather structure is provided with a breather chamber integrally formed with the cylinder in an outer peripheral wall of the cylinder, and the breather chamber separates an air including an oil mist within the crank case into oil component and gas component, returns the oil component into an oil reservoir of the engine, and discharges the gas component out of the crank case.

    摘要翻译: 本发明提供一种发动机的通气结构,其可以提高气缸的强度并且可以防止发动机的重量的增加。 发动机具有曲轴箱和紧固在曲轴箱的上侧的气缸。 通气结构在气缸的外周壁上设置有与气缸一体形成的通气室,并且通气室将包括曲轴箱内的油雾的空气分离成油组分和气体组分,将油组分返回 发动机的储油器,并将气体成分从曲轴箱排出。

    Two-dimensional phase element and method of manufacturing the same
    23.
    发明授权
    Two-dimensional phase element and method of manufacturing the same 有权
    二维相元件及其制造方法

    公开(公告)号:US06803154B1

    公开(公告)日:2004-10-12

    申请号:US09654038

    申请日:2000-09-01

    申请人: Ichiro Tanaka

    发明人: Ichiro Tanaka

    IPC分类号: G03C500

    摘要: Disclosed is a method of manufacturing a two-dimensional phase type element, which includes the steps of forming, on a substrate, a first etching mask in a checkered pattern, forming segments of multiple levels at a portion not covered by the first mask, forming a second etching mask corresponding to an inversion of the first etching mask, removing the first etching mask, and forming segments of multiple levels at a portion not covered by the second etching mask.

    摘要翻译: 公开了一种制造二维相型元件的方法,其包括以下步骤:在基板上形成方格图案中的第一蚀刻掩模,在未被第一掩模覆盖的部分上形成多个级的段,形成 对应于第一蚀刻掩模的反转的第二蚀刻掩模,去除第一蚀刻掩模,以及在未被第二蚀刻掩模覆盖的部分处形成多个级的段。

    High-pressure mercury discharge lamp and lighting apparatus using the lamp
    24.
    发明授权
    High-pressure mercury discharge lamp and lighting apparatus using the lamp 失效
    高压汞放电灯和使用灯的照明装置

    公开(公告)号:US06762559B1

    公开(公告)日:2004-07-13

    申请号:US09737822

    申请日:2000-12-18

    IPC分类号: H01J1720

    CPC分类号: H01J61/20 H01J61/86

    摘要: A high-pressure mercury discharge lamp comprises a light-transmitting discharge vessel having a region surrounding a discharge space and seal portion, a spaced apart electrodes disposed in the discharge vessel and defining a discharge path, and a filling contained in the discharge vessel including mercury, halogen and lithium (Li). Components of the filling are selected such that a ratio of relative spectral energies B/A is within a range 0.15 to 0.45; wherein A represents the relative spectral energy of mercury (Hg) within a wavelenth range of 402.5 nm to 407.5 nm, and B represents the rlative spectral energy of lithium (Li) within a wavelength range of 667.5 nm to 672.5 nm.

    摘要翻译: 一种高压汞放电灯包括具有围绕放电空间和密封部分的区域的光透射放电容器,设置在放电容器中并限定放电路径的间隔开的电极,以及包含在包括汞的放电容器中的填充物 ,卤素和锂(Li)。 选择填充物的成分,使得相对光谱能量B / A的比例在0.15〜0.45的范围内; 其中A表示在402.5nm至407.5nm的波长范围内的汞(Hg)的相对光谱能,B表示在667.5nm至672.5nm的波长范围内的锂(Li)的烧蚀光谱能。

    DC glow discharge lamp, and ignition apparatus, flood-light apparatus
and projector apparatus for dc glow discharge lamp
    27.
    发明授权
    DC glow discharge lamp, and ignition apparatus, flood-light apparatus and projector apparatus for dc glow discharge lamp 失效
    DC辉光放电灯,点火装置,用于直流辉光放电灯的泛光灯装置和投影仪装置

    公开(公告)号:US5789850A

    公开(公告)日:1998-08-04

    申请号:US799545

    申请日:1997-02-13

    CPC分类号: H01J61/368 H01J61/86

    摘要: A DC glow discharge lamp is disclosed, in which one the pinch seal portions of an arc tube of quartz glass with an anode and a cathode arranged therein in opposed relation to each other is bonded to a base by means of a ceramic adhesive containing a binder, and a conductive member connected around the cathode-side pinch seal portion is mounted in such a manner as to assume the same potential as the cathode. Even in the case where the binder mixed in the ceramic adhesive for improving the bonding strength is vaporized, it attaches to the conductive member and assumes a negative potential and thus is prevented from attaching to the cathode-side pinch seal portion. The devitrification of the pinch seal portion or the leakage therefrom which otherwise might occur due to the binder are thus suppressed, thereby providing a DC glow discharge lamp with an improved service life.

    摘要翻译: 公开了一种直流辉光放电灯,其中一个具有彼此相对设置的阳极和阴极的石英玻璃的电弧管的夹紧密封部分通过含有粘合剂的陶瓷粘合剂粘合到基底上 并且以与阴极相同的电位的方式安装连接在阴极侧压紧密封部分周围的导电构件。 即使在用于提高粘合强度的陶瓷粘合剂中混合的粘结剂被蒸发的情况下,也附着在导电部件上并呈现负电位,从而防止其附着于阴极侧夹送密封部。 由此可以抑制夹紧密封部的失透或由于粘合剂而可能发生的泄漏,从而提供具有改善的使用寿命的DC辉光放电灯。

    Value guide member formed of Fe-based sintered alloy having excellent
wear and abrasion resistance
    28.
    发明授权
    Value guide member formed of Fe-based sintered alloy having excellent wear and abrasion resistance 失效
    由Fe系烧结合金构成的值导向件具有优异的耐磨性

    公开(公告)号:US5507257A

    公开(公告)日:1996-04-16

    申请号:US230124

    申请日:1994-04-20

    IPC分类号: C22C33/02 F01L3/02 F01L3/08

    CPC分类号: C22C33/0257 F02B2275/18

    摘要: A valve guide member for internal combustion engines is formed of an Fe-based sintered alloy having excellent wear and abrasion resistance, consisting essentially, by weight %, of 1 to 4% C, 1.5 to 6% Cu, 0.1 to 0.8% P, and if required 0.05 to 1% Mo, and the balance of Fe and inevitable impurities, the Fe-based sintered alloy having a structure having a matrix formed mainly of pearlite, in which are dispersed hard Fe--C--P compounds and free graphite, or alternatively hard Fe--C--P compounds, carbides, and free graphite when the alloy contains Mo, the free graphite including 0.5 to 10 area % coarse free graphite having a particle diameter of 70 to 500 .mu.m.

    摘要翻译: 用于内燃机的阀导向件由具有优异耐磨性的Fe基烧结合金形成,其基本上由重量百分比组成为1至4%C,1.5至6%Cu,0.1至0.8%P, 并且如果需要0.05-1%Mo,余量为Fe和不可避免的杂质,则具有主要由珠光体形成的基体的结构的Fe基烧结合金,其中分散有硬的Fe-CP化合物和游离石墨,或者备选地 硬质Fe-CP化合物,碳化物和游离石墨当合金含有Mo时,游离石墨包括0.5至10面积%的粒径为70-500μm的粗游离石墨。

    Method for preparing 17 .alpha.-ester-21-halo pregnanes
    29.
    发明授权
    Method for preparing 17 .alpha.-ester-21-halo pregnanes 失效
    制备17 {60-二酯-2-卤代孕烷的方法

    公开(公告)号:US4113680A

    公开(公告)日:1978-09-12

    申请号:US671693

    申请日:1976-03-29

    IPC分类号: C07J7/00 C07J71/00 C07J5/00

    CPC分类号: C07J71/0015 C07J7/0085

    摘要: One-step method for preparing 17 .alpha.-ester-21-halo pregnanes by reacting 17 .alpha., 21-cyclic orthoesters of 17 .alpha., 21-dihydroxy pregnanes with a halo compound in the presence of an organic polar solvent, simultaneously resulting in halogenation at 21-position and esterification at 17 .alpha.-position of said 17 .alpha., 21-cyclic orthoesters, the reaction proceeding in a short period of time without, or substantially without, any unfavorable side-reactions.

    摘要翻译: 通过在有机极性溶剂的存在下,将17α,21-二羟基孕烷的17α,21-环状原酸酯与卤素化合物反应制备17α-二酯-21-卤代孕烷的一步法,同时导致 在所述17α,21-环状原酸酯的17α位上的21位和酯化,反应在短时间内进行而没有或基本上没有任何不利的副反应。

    In situ cleaning device for lithographic apparatus
    30.
    发明授权
    In situ cleaning device for lithographic apparatus 有权
    光刻设备原位清洁装置

    公开(公告)号:US08921807B2

    公开(公告)日:2014-12-30

    申请号:US13462013

    申请日:2012-05-02

    IPC分类号: H01J37/30 B08B5/00 H01J37/317

    摘要: A lithographic apparatus which performs drawing on a substrate with a charged-particle beam, includes an optical system having an aperture plate in which a first number of apertures are formed to pass a first number of charged-particle beams to perform the drawing, a substrate holder, a cleaning unit configured to clean the aperture plate, and a chamber containing the optical system and the substrate holder. The cleaning unit includes a case having an emitting hole plate in which a second number of emitting holes are formed, the second number being smaller than the first number, an active species source configured to generate active species in the case, and a driving mechanism configured to move the case.

    摘要翻译: 在带有带电粒子束的基板上进行拉伸的光刻设备包括具有孔板的光学系统,其中形成有第一数量的孔以通过第一数量的带电粒子束以进行绘图;基板 配置为清洁孔板的清洁单元和容纳光学系统和基板保持器的室。 清洁单元包括具有发射孔板的壳体,其中形成有第二数量的发射孔,第二数量小于第一数量,被配置为在壳体中产生活性物种的活性物质源和被配置为 移动案件。