摘要:
An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.
摘要:
A reflective liquid crystal display (1) is provided with a front illumination unit. The front illumination unit comprises a flat waveguide (2), at least one surface of which is provided with a diffraction grating (7). A period of the diffraction grating (7) is of the order of the wavelength of the light. A light source (4) generates light of one or more colors, and the colors of light are sequentially coupled into the flat waveguide (2). The diffraction grating (7) is divided into separate areas (10, 11, 12). Each of these separate areas (10, 11, 12) is tuned to one particular wavelength of the light generated by the light source (4). Each separate area (10, 11, 12) is subdivided into various small areas so that the surface of the flat waveguide is subdivided into a large number of small areas (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41). Each small area (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41) is bounded by small areas (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41) tuned to other light wavelengths. A polarizer (6) is present above the waveguide (2) to reflect light polarized in one direction back to the reflective liquid crystal display (1) and to transmit image-wise polarized light in a direction transverse to the one direction.
摘要:
For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.
摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.
摘要:
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.
摘要:
Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.
摘要:
Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.
摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.