公开(公告)号：US20070132466A1

公开(公告)日：2007-06-14

申请号：US11302650

申请日：2005-12-14

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/02

CPC classification number: G01R1/07357 ,  G01R1/07371

Abstract: Method and apparatus using a retention arrangement with a potting enclosure for holding a plurality of probes by their retention portions, the probes being of the type having contacting tips for establishing electrical contact with pads or bumps of a device under test (DUT) to perform an electrical test. The retention arrangement has a top plate with top openings for the probes, a bottom plate with bottom openings for the probes, the plates being preferably made of ceramic with laser-machined openings, and a potting enclosure between the plates for admitting a potting agent that upon curing pots the retaining portions of the probes. In some embodiments a spacer is positioned between the top and bottom plates for defining the potting enclosure. Alternatively, the retention arrangement has intermediate plates located in the potting enclosure and having probe guiding openings to guide the probes.

Abstract translation: 使用具有用于通过其保持部分保持多个探针的封装外壳的保持装置的方法和装置，所述探针具有用于与被测器件（DUT）的焊盘或凸块建立电接触的接触尖端，以执行 电气测试。 保持装置具有顶板，其具有用于探针的顶部开口，具有用于探针的底部开口的底板，该板优选地由具有激光加工孔的陶瓷制成，并且在该板之间的灌封封套用于容纳灌封剂， 在固化罐时，探针的保持部分。 在一些实施例中，间隔件定位在顶板和底板之间，用于限定灌封罩。 或者，保持装置具有位于灌封封壳中的中间板，并且具有用于引导探针的探针引导开口。

公开(公告)号：US20050174136A1

公开(公告)日：2005-08-11

申请号：US10775828

申请日：2004-02-09

Applicant: Jiachun Zhou ,  January Kister

Inventor： Jiachun Zhou ,  January Kister

IPC: G01R1/067 ,  G01R1/073 ,  H01R13/24 ,  H01R13/426 ,  H01R13/631 ,  H01R43/00 ,  G01R31/02

CPC classification number: G01R1/06733 ,  G01R1/07314 ,  H01R13/2414 ,  H01R13/426 ,  H01R13/6315 ,  H01R43/007 ,  H01R2201/20

Abstract: A probe apparatus for preferably testing packaged circuit chips combines an ACE with plunger pins placed in between the ACE and the test contact. A plunger pin provides a contact end for contacting the test contacts and a back end configured for indenting the ACE. The contact end may be configured in conjunction with the test contacts particularities whereas the plunger pins' back ends have a curvature that corresponds to the ACE's deformation behavior in the impinging vicinity such wear relevant ACE deformations are kept to a minimum. The plunger pins are arrayed in a removable frame. For contacting ball grid arrays, the plunger pins feature on their front ends self centering interacting concentrically arrayed crown peaks.

Abstract translation: 用于优选地测试封装电路芯片的探针装置将ACE和放置在ACE和测试触点之间的柱塞针组合。 柱塞销提供用于接触测试触点的接触端和配置用于压缩ACE的后端。 接触端可以结合测试触头的特性来配置，而柱塞销的后端具有对应于冲击附近的ACE变形行为的曲率，这样的磨损相关的ACE变形被保持在最小。 柱塞销排列在可拆卸的框架中。 为了接触球栅阵列，柱塞销在其前端具有自对中心相互作用的同心排列的冠峰。

公开(公告)号：US20050095879A1

公开(公告)日：2005-05-05

申请号：US10700401

申请日：2003-11-03

Applicant: January Kister ,  James Jaquette ,  Steve Fahrner

Inventor： January Kister ,  James Jaquette ,  Steve Fahrner

IPC: H01R12/04 ,  H01R13/24 ,  H01R12/00

CPC classification number: H01R13/2407 ,  H01R12/714 ,  H01R13/2428 ,  H01R13/2485

Abstract: An interconnect assembly includes a number of interconnect stages combined in a carrier structure. Each interconnect stage includes at least two contact sets having an upwards pointing cantilever contact and a downwards pointing cantilever contact. The cantilever contacts are attached to the carrier structure and are arranged around openings in the carrier structure such that the downward pointing cantilevers may reach through the carrier structure. Each contact set defines an independent conductive path between a single pair of opposing chip and test apparatus contacts such that multiple conductive paths are available for each interconnect stage for increased transmission reliability and reduced resistance. The cantilever contacts have a meandering contour and are either combined in symmetrical pairs at their respective tips or are free pivoting. The meandering contour provides a maximum deflectable cantilever length within an available footprint defined by the pitch of the tested chip.

Abstract translation: 互连组件包括以载体结构组合的多个互连级。 每个互连级包括至少两个具有向上指向的悬臂接触和向下指向悬臂接触的触头组。 悬臂接触件附接到载体结构并且布置在载体结构中的开口周围，使得向下指向的悬臂可以穿过载体结构。 每个触点组限定了一对相对的芯片和测试装置触点之间的独立导电路径，使得多个导电路径可用于每个互连级，以增加传输可靠性和降低的电阻。 悬臂触点具有曲折的轮廓，并且在其各自的尖端处以对称对组合或者是自由枢转。 曲折轮廓提供了由测试芯片的间距所限定的可用占空比内的最大可偏转悬臂长度。

公开(公告)号：US06570396B1

公开(公告)日：2003-05-27

申请号：US09721910

申请日：2000-11-24

Applicant: January Kister

Inventor： January Kister

IPC: G01R3102

CPC classification number: G01R1/07357 ,  G01R1/07364

Abstract: Mass produced organic I.C. chip package designed to permanently package chips are used as MLO space transformers of a probe apparatus having buckling beam probes. The chip carriers have a solder mask layer with holes exposing trace areas from which interface structures are electrochemically grown. Dependent on the amount of grown metal, the interface structure is formed either as a stud bump protruding from the hole or as a flange overlapping the hole and supporting itself on the layer surface surrounding the hole. The structure's contacting surface may be planed for an area contact with the probe end of a buckling beam.

Abstract translation: 大量生产有机物I.C. 用于永久封装芯片的芯片封装被用作具有屈曲束探针的探针装置的MLO空间变压器。 芯片载体具有焊接掩模层，其具有暴露痕量区域的孔，界面结构从该区域电化学生长。 取决于生长金属的量，界面结构形成为从孔突出的柱状凸块或与凸起重叠的凸缘并且将其自身支撑在围绕孔的层表面上。 结构的接触表面可以被平面化以与屈曲梁的探针端部进行区域接触。

公开(公告)号：US06419500B1

公开(公告)日：2002-07-16

申请号：US09264599

申请日：1999-03-08

Applicant: January Kister

Inventor： January Kister

IPC: H01R1200

CPC classification number: G01R1/07357 ,  G01R3/00 ,  H01L2924/00013 ,  H01R12/714 ,  H01R13/24 ,  H01R2201/20 ,  Y10S29/044 ,  Y10T29/49144 ,  Y10T29/49147 ,  Y10T29/49149 ,  Y10T29/49155 ,  H01L2224/29099

Abstract: The present invention provides a method for sanding heads of buckling beam probes while the probes are disposed within a probe assembly between a lower die and upper die. Sanding provides that all the probes within a probe assembly have the same total length from tip to head. The method calls for contacting the probe tips to a flat fiducial plate such as a glass plate to ensure that the probe tips are coplanar. Then, the heads are sanded to a plane which is parallel with the fiducial plate. Preferably, the heads are sanded by placing the assembly and fiducial plate onto a Z-stage capable of moving in a Z direction. The Z-stage is located under a top surface of a table having a hole directly above the Z-stage. Raising the Z-stage lifts the probe heads to extend above the top surface of the table. Then, an abrasive plate resting on the top surface of the table is rubbed on the heads. Material is removed from the heads until all the probes are the same length. Probe assemblies made according to the present invention have probe heads with characteristic sanded top surfaces and the probes have the same length, generally to within 0.0001 inches.

Abstract translation: 本发明提供了一种用于在探针设置在下模和上模之间的探针组件内的情况下对屈曲光束探头进行打磨头的方法。 砂光提供探头组件内的所有探头具有从头到头相同的总长度。 该方法要求将探针尖端接触到平坦的基准板（例如玻璃板），以确保探针尖端是共面的。 然后，头部被磨砂到与基准平面平行的平面上。 优选地，通过将​​组件和基准板放置在能够沿Z方向移动的Z台上来打磨头部。 Z级位于具有直接在Z级上方的孔的桌子的顶表面下方。 升高Z档升降机的探针头延伸到桌子的顶部表面之上。 然后，将搁置在桌子顶部表面上的研磨板摩擦在头部上。 将材料从头部移除，直到所有的探头长度相同。 根据本发明制造的探针组件具有具有特征砂形顶表面的探头，并且探头具有相同的长度，通常在0.0001英寸以内。

公开(公告)号：US09121868B2

公开(公告)日：2015-09-01

申请号：US13526759

申请日：2012-06-19

Applicant: January Kister

Inventor： January Kister

IPC: G01R1/067 ,  G01R3/00

CPC classification number: G01R1/06733 ,  G01R1/06738 ,  G01R3/00

Abstract: A probe having a conductive body and a contacting tip that is terminated by one or more blunt skates for engaging a conductive pad of a device under test (DUT) for performing electrical testing. The contacting tip has a certain width and the blunt skate is narrower than the tip width. The skate is aligned along a scrub direction and also has a certain curvature along the scrub direction such that it may undergo both a scrub motion and a self-cleaning rotation upon application of a contact force between the skate and the conductive pad. While the scrub motion clears oxide from the pad to establish electrical contact, the rotation removes debris from the skate and thus preserves a low contact resistance between the skate and the pad. The use of probes with one or more blunt skates and methods of using such self-cleaning probes are especially advantageous when testing DUTs with low-K conductive pads or other mechanically fragile pads that tend to be damaged by large contact force concentration.

Abstract translation: 一种探针，其具有导电体和接触尖端，所述接触尖端由一个或多个钝头溜冰鞋端接，用于接合待测器件（DUT）的导电焊盘，用于进行电气测试。 接触尖端具有一定的宽度，并且钝溜冰鞋比尖端宽度窄。 溜冰鞋沿着洗涤方向对准，并且沿擦洗方向也具有一定的曲率，使得它可以在施加滑板和导电垫之间的接触力的同时进行擦洗运动和自清洁旋转。 当擦洗动作从衬垫中清除氧化物以建立电接触时，旋转从溜冰鞋去除碎屑，从而保持溜冰鞋和衬垫之间的低接触电阻。 使用具有一个或多个钝头溜冰鞋的探头以及使用这种自清洁探针的方法在使用低K导电垫或其他易受大接触力浓度损伤的机械脆性垫进行测试时尤为有利。

公开(公告)号：US09097740B2

公开(公告)日：2015-08-04

申请号：US12703063

申请日：2010-02-09

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/02 ,  G01R1/067

CPC classification number: G01R1/06761 ,  G01R1/06738 ,  G01R1/07314 ,  G01R1/07357

Abstract: A probe for testing an electrical device under test. The probe has at least two outer layers and a core layer that is highly conductive. The core layer is disposed between the outer layers.

Abstract translation: 用于测试被测电气设备的探头。 探针具有至少两个外层和高度导电的芯层。 芯层设置在外层之间。

公开(公告)号：US20120194212A1

公开(公告)日：2012-08-02

申请号：US12931260

申请日：2011-01-27

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/00

CPC classification number: G01R1/07357 ,  G01R1/06716

Abstract: Probes suitable for use with densely packed fine-pitch 2-D contact arrays are provided by use of an electrically insulating guide plate in connection with vertical probes, where the vertical probes have probe flexures that are either vertically folded sections, or coils having a horizontal axis. Preferably, the probes are configured such that the probe flexures are inside the guide plate holes, and the parts of the probes extending past the guide plate are relatively rigid. This configuration alleviates problems associate with probe shorting, because the probe flexures are enclosed by the guide plate holes, and are therefore unable to come into contact with flexures from other probes during probing.

Abstract translation: 适用于密集包装的细间距2-D接触阵列的探针通过使用与垂直探针结合的电绝缘导板提供，其中垂直探针具有探针弯曲部，其为垂直折叠部分或具有水平的线圈 轴。 优选地，探针被构造成使得探针弯曲部位在引导板孔内部，并且延伸穿过引导板的探针部分是相对刚性的。 这种构造减轻了与探针短路相关的问题，因为探针弯曲被导板孔包围，因此在探测期间不能与其它探针的挠曲接触。

公开(公告)号：US07944224B2

公开(公告)日：2011-05-17

申请号：US12684272

申请日：2010-01-08

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/20 ,  G01R31/067

CPC classification number: G01R1/06733

Abstract: A vertically folded probe is provided that can provide improved scrub performance in cases where the probe height is limited. More specifically, such a probe includes a base and a tip, and an arm extending from the base to the tip as a single continuous member. The probe arm is vertically folded, such that it includes three or more vertical arm portions. The vertical arm portions have substantial vertical overlap, and are laterally displaced from each other. When such a probe is vertically brought down onto a device under test, the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other. Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance.

Abstract translation: 提供垂直折叠的探针，其可以在探针高度受限的情况下提供改善的擦洗性能。 更具体地，这种探针包括基部和尖端，以及从基部到尖端作为单个连续部件延伸的臂。 探针臂垂直折叠，使得其包括三个或更多个垂直臂部分。 垂直臂部具有相当大的垂直重叠，并且彼此横向移位。 当这种探针垂直向下放置在被测设备上时，探头变形。 在探针变形期间，至少两个垂直臂部彼此接触。 臂部之间的这种接触可以有利地增加探针尖端处的横向擦洗运动，并且还可以有利地减小探针电感。

公开(公告)号：US07759949B2

公开(公告)日：2010-07-20

申请号：US11480302

申请日：2006-06-29

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/28

CPC classification number: G01R1/06733 ,  G01R1/06738 ,  G01R3/00

Abstract: A probe having a conductive body and a contacting tip that is terminated by one or more blunt skates for engaging a conductive pad of a device under test (DUT) for performing electrical testing. The contacting tip has a certain width and the blunt skate is narrower than the tip width. The skate is aligned along a scrub direction and also has a certain curvature along the scrub direction such that it may undergo both a scrub motion and a self-cleaning rotation upon application of a contact force between the skate and the conductive pad. While the scrub motion clears oxide from the pad to establish electrical contact, the rotation removes debris from the skate and thus preserves a low contact resistance between the skate and the pad. The use of probes with one or more blunt skates and methods of using such self-cleaning probes are especially advantageous when testing DUTs with low-K conductive pads or other mechanically fragile pads that tend to be damaged by large contact force concentration.

Abstract translation: 一种探针，其具有导电体和接触尖端，所述接触尖端由一个或多个钝头溜冰鞋端接，用于接合待测器件（DUT）的导电焊盘，用于进行电气测试。 接触尖端具有一定的宽度，并且钝溜冰鞋比尖端宽度窄。 溜冰鞋沿着洗涤方向对准，并且沿擦洗方向也具有一定的曲率，使得它可以在施加滑板和导电垫之间的接触力的同时进行擦洗运动和自清洁旋转。 当擦洗动作从衬垫中清除氧化物以建立电接触时，旋转从溜冰鞋去除碎屑，从而保持溜冰鞋和衬垫之间的低接触电阻。 使用具有一个或多个钝头溜冰鞋的探头以及使用这种自清洁探针的方法在使用低K导电垫或其他易受大接触力浓度损伤的机械脆性垫进行测试时尤为有利。