Method and apparatus for transferring an article to be processed and processing apparatus
    21.
    发明授权
    Method and apparatus for transferring an article to be processed and processing apparatus 有权
    用于转移待处理物品的处理装置和方法

    公开(公告)号:US07246984B2

    公开(公告)日:2007-07-24

    申请号:US10801007

    申请日:2004-03-16

    IPC分类号: H01L21/677

    摘要: A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.

    摘要翻译: 传送装置将由承载装置携带的待处理物品传送到设置在由处理容器限定的处理室中的保持器,并适于将物品保持在指定的处理位置。 传送装置包括临时保持构件,并且在远离保持器的中间位置接收由托架装置承载的物品并暂时保持物品后,将物品从中间位置传送到处理位置。 在传送物品之后,临时保持构件缩回到处理容器的外部的位置。

    RANGING AND POSITIONING SYSTEM, RANGING AND POSITIONING METHOD, AND RADIO COMMUNICATION APPARATUS
    22.
    发明申请
    RANGING AND POSITIONING SYSTEM, RANGING AND POSITIONING METHOD, AND RADIO COMMUNICATION APPARATUS 有权
    范围和定位系统,定位和定位方法和无线电通信装置

    公开(公告)号:US20070099646A1

    公开(公告)日:2007-05-03

    申请号:US11563959

    申请日:2006-11-28

    IPC分类号: H04B7/00 H04Q7/20

    摘要: A system and method for performing ranging and positioning as follows by using the procedure for packet transmission and reception between a sender and a recipient. A first radio set transmits packets to a second radio set as a recipient. The second radio set returns the packets without fail after the lapse of time (from the detection of packets) which corresponds to an integral multiple of a prescribed unit time. The first radio set counts, by using its counter, the time which has elapsed from its transmission of packets to its detection of packets from the second radio set. The remainder of the thus counted time after subtraction of the time taken by the second radio set from packet detection to packet return and the processing time of the first radio set itself is converted into the distance of propagation between the first radio set and the second radio set as a recipient.

    摘要翻译: 通过使用发送方和接收方之间的分组发送和接收的过程来执行如下的测距和定位的系​​统和方法。 第一无线电设备将分组发送到作为接收者的第二无线电设备。 第二无线电设备在经过时间(从分组的检测)之后返回分组,这对应于规定的单位时间的整数倍。 第一个无线电设备通过使用其计数器来计数从其传输数据包到从第二个无线电设备检测数据包所经过的时间。 在将第二无线电设备从分组检测到分组返回所消耗的时间和第一无线电设备本身的处理时间减去之后的计数时间的其余部分被转换为第一无线电设备和第二无线电设备之间的传播距离 设为收件人

    Transmission method, transmitter, reception method, and receiver
    23.
    发明授权
    Transmission method, transmitter, reception method, and receiver 有权
    传输方式,发射机,接收方式和接收机

    公开(公告)号:US07162213B2

    公开(公告)日:2007-01-09

    申请号:US10764448

    申请日:2004-01-27

    IPC分类号: H04B1/04

    摘要: For the purpose of efficient transmission based on the UWB system, first and second baseband waveforms are generated at a cycle equivalent to an integral multiple of a carrier to have a specified phase difference from each other. The first baseband waveform is multiplied by the carrier and a first transmission data sequence to acquire a first transmission waveform. The second baseband waveform is multiplied by a phase shifted carrier and a second transmission data sequence to acquire a second transmission waveform. The first transmission waveform is mixed with the second transmission waveform to acquire a transmission signal. The transmission signal is transmitted as a π/2 shift BPSK signal to transmit a UWB signal. Selecting the baseband waveforms and the carrier makes it possible to configure the transmission band and easily provide division multiplexing transmission.

    摘要翻译: 为了基于UWB系统的有效传输的目的,第一和第二基带波形以等于载波的整数倍的周期产生,以具有指定的相位差。 将第一基带波形乘以载波和第一传输数据序列以获取第一传输波形。 将第二基带波形与相移载波和第二发送数据序列相乘以获取第二发送波形。 第一传输波形与第二传输波形混合以获取传输信号。 发送信号作为pi / 2移位BPSK信号发送以发送UWB信号。 选择基带波形和载波使得可以配置传输频带并轻松提供分路复用传输。

    High pressure processing apparatus and method
    25.
    发明授权
    High pressure processing apparatus and method 失效
    高压加工设备及方法

    公开(公告)号:US07080651B2

    公开(公告)日:2006-07-25

    申请号:US10147742

    申请日:2002-05-16

    IPC分类号: B08B3/04

    摘要: When the hatch of a substrate washing chamber 5 is opened to receive a substrate, certain valves are closed, and one valve is opened, to supply CO2 to purge the substrate washing chamber 5 to and exclude air. When the hatch is closed, another valve is opened to vent substrate washing chamber 5 so that the CO2 expels any gas and unwanted air from the substrate washing chamber 5 and the conduits. Thereafter, supercritical CO2 is used to wash the substrate and clean the circulation line. The flow of supercritical CO2 is sent to the substrate washing chamber 5. After flowing through the circulation line, including a circulation channel 11, it passes through a bypass channel 12 to a decompressor 7. Any chemicals or organic substances left in the circulation line are continuously sent to separation/recovery bath 8 together with the flow.

    摘要翻译: 当基板清洗室5的开口打开以接收基板时,某些阀关闭,并且一个阀打开以供应CO 2以清洗基板清洗室5并排除空气。 当舱口关闭时,打开另一个阀以排放基板清洗室5,使得CO 2从基板清洗室5和导管排出任何气体和不需要的空气。 此后,使用超临界CO 2 2洗涤基底并清洁循环线。 超临界CO 2 2的流动被送到衬底洗涤室5。 在流过包括循环通道11的循环管线之后,它通过旁路通道12到达减压器7。 残留在循环管线中的任何化学物质或有机物质与流动一起连续地送到分离/回收槽8中。

    Servo pattern writing method and apparatus thereof
    27.
    发明授权
    Servo pattern writing method and apparatus thereof 失效
    伺服模式写入方法及其装置

    公开(公告)号:US06947244B2

    公开(公告)日:2005-09-20

    申请号:US10306103

    申请日:2002-11-27

    CPC分类号: G11B5/59633

    摘要: The center of rotation of a disk medium 1 when servo information is written thereto coincides as accurately as possible with its center of rotation in the drive into which the disk medium 1 is assembled.The magnetic disk medium 1 is fixed to a spindle hub 4. A centering pin 8a of a push-aside mechanism 9 pushes aside the magnetic disk medium 1 with respect to the center of the spindle hub 4 until the disk-to-hub gap is moved to one side. Then, with a centering pin 8b of a come-back mechanism 10 placed in the same line intersecting with the center of the spindle, the magnetic disk medium 1 is pushed back to the opposite side.

    摘要翻译: 当伺服信息被写入时,磁盘介质1的旋转中心与其中组装磁盘介质1的驱动器中的其旋转中心尽可能精确地重合。 磁盘介质1固定在主轴毂4上。 推入机构9的定心销8a将磁盘介质1相对于主轴毂4的中心推开,直到盘对轮毂间隙移动到一侧。 然后,通过放置在与主轴中心相交的同一条线上的后退机构10的定心销8b,磁盘介质1被推回到相对侧。

    Semiconductor device having a thin-film circuit element provided above an integrated circuit
    28.
    发明授权
    Semiconductor device having a thin-film circuit element provided above an integrated circuit 失效
    具有设置在集成电路上方的薄膜电路元件的半导体器件

    公开(公告)号:US06870256B2

    公开(公告)日:2005-03-22

    申请号:US10254222

    申请日:2002-09-25

    摘要: In a semiconductor device, re-wiring is provided on a circuit element formation region of a semiconductor substrate. A columnar electrode for connection with a circuit board is provided on the rewiring. A first insulating film is provided over the semiconductor substrate excluding a connection pad, and a ground potential layer connected to a ground potential is provided on an upper surface of the first insulating film. A re-wiring is provided over the ground potential layer with a second insulating film interposed. The ground potential layer serves as a barrier layer for preventing crosstalk between the re-wiring and circuit element formation region. A thin-film circuit element is provided on the second insulating film, and a second ground potential layer is provided as a second barrier layer over the thin-film circuit element with an insulating film interposed. Re-wiring is provided over the second ground potential layer.

    摘要翻译: 在半导体器件中,在半导体衬底的电路元件形成区域上设置再布线。 在重新布线时提供用于与电路板连接的柱状电极。 第一绝缘膜设置在除了连接焊盘之外的半导体衬底上,并且在第一绝缘膜的上表面上设置连接到接地电位的接地电位层。 在地电位层上提供再布线,其中插入有第二绝缘膜。 地电位层用作防止重新布线和电路元件形成区域之间的串扰的阻挡层。 薄膜电路元件设置在第二绝缘膜上,第二接地电位层设置在薄膜电路元件上,作为第二阻挡层,绝缘膜被插入。 在第二接地电位层上提供重新布线。

    Highly gas tight substrate holder and method of manufacturing the same
    29.
    发明授权
    Highly gas tight substrate holder and method of manufacturing the same 有权
    高气密基板支架及其制造方法

    公开(公告)号:US06376815B1

    公开(公告)日:2002-04-23

    申请号:US09228356

    申请日:1999-01-11

    申请人: Katsumi Watanabe

    发明人: Katsumi Watanabe

    IPC分类号: H05B302

    摘要: A hermetically sealed chamber and the method of manufacturing same, which comprises the steps of: (a) preparing two aluminum or aluminum alloy material members which face each other; (b) forming at least one extending groove portions on a surface to be metal-bonded of one of the two aluminum or aluminum alloy material members, which groove portion extends in a manner to make an enclosure; (c) forming at least one corresponding extending protruding portions on a surface to be metal-bonded of the other of the two aluminum or aluminum alloy material members, which protruding portion extends in a manner to make a corresponding enclosure; and (d) receiving internally packaged parts therebetween, inserting the at least one extending protruding portions into the at least one corresponding extending groove portions so as to be fitted, and causing the at least one extending protruding portions and the at least one extending groove portions to be metal-bonded by press-forging.

    摘要翻译: 一种气密密封室及其制造方法,包括以下步骤:(a)制备两个相互面对的铝或铝合金材料构件;(b)在金属表面上形成至少一个延伸槽部分, 将所述两个铝或铝合金材料构件中的一个接合,所述槽部分以形成外壳的方式延伸;(c)在所述两个铝或铝合金材料构件中的另一个的金属粘合表面上形成至少一个对应的延伸突出部分 铝或铝合金材料构件,该突出部分以形成相应外壳的方式延伸; 以及(d)在其间接收内部包装的部件,将所述至少一个延伸的突出部分插入所述至少一个对应的延伸槽部分中以便被装配,并且使所述至少一个延伸突出部分和所述至少一个延伸槽部分 通过压锻进行金属粘合。