摘要:
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.
摘要:
A system and method for performing ranging and positioning as follows by using the procedure for packet transmission and reception between a sender and a recipient. A first radio set transmits packets to a second radio set as a recipient. The second radio set returns the packets without fail after the lapse of time (from the detection of packets) which corresponds to an integral multiple of a prescribed unit time. The first radio set counts, by using its counter, the time which has elapsed from its transmission of packets to its detection of packets from the second radio set. The remainder of the thus counted time after subtraction of the time taken by the second radio set from packet detection to packet return and the processing time of the first radio set itself is converted into the distance of propagation between the first radio set and the second radio set as a recipient.
摘要:
For the purpose of efficient transmission based on the UWB system, first and second baseband waveforms are generated at a cycle equivalent to an integral multiple of a carrier to have a specified phase difference from each other. The first baseband waveform is multiplied by the carrier and a first transmission data sequence to acquire a first transmission waveform. The second baseband waveform is multiplied by a phase shifted carrier and a second transmission data sequence to acquire a second transmission waveform. The first transmission waveform is mixed with the second transmission waveform to acquire a transmission signal. The transmission signal is transmitted as a π/2 shift BPSK signal to transmit a UWB signal. Selecting the baseband waveforms and the carrier makes it possible to configure the transmission band and easily provide division multiplexing transmission.
摘要:
The present invention is directed to a gas supply nozzle plate constructed by laminating a plurality of metal members each having a fluid path and branch. A fluid nozzle plate member provided by the invention has high sealing at a joined part, and high reliability even when used in high vacuum or at a high temperature. The fluid nozzle plate member comprises a plurality of plate-like metal members each having a fluid path and/or a branch. In this case, the plurality of plate-like metal members are laminated, and the laminated surfaces thereof are joined together by press forging.
摘要:
When the hatch of a substrate washing chamber 5 is opened to receive a substrate, certain valves are closed, and one valve is opened, to supply CO2 to purge the substrate washing chamber 5 to and exclude air. When the hatch is closed, another valve is opened to vent substrate washing chamber 5 so that the CO2 expels any gas and unwanted air from the substrate washing chamber 5 and the conduits. Thereafter, supercritical CO2 is used to wash the substrate and clean the circulation line. The flow of supercritical CO2 is sent to the substrate washing chamber 5. After flowing through the circulation line, including a circulation channel 11, it passes through a bypass channel 12 to a decompressor 7. Any chemicals or organic substances left in the circulation line are continuously sent to separation/recovery bath 8 together with the flow.
摘要:
A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member. The fluid discharging means includes a fluid discharging port formed in a certain position of the communicating channel closer to the processing chamber than the sealing portion to discharge the high-pressure fluid.
摘要:
The center of rotation of a disk medium 1 when servo information is written thereto coincides as accurately as possible with its center of rotation in the drive into which the disk medium 1 is assembled.The magnetic disk medium 1 is fixed to a spindle hub 4. A centering pin 8a of a push-aside mechanism 9 pushes aside the magnetic disk medium 1 with respect to the center of the spindle hub 4 until the disk-to-hub gap is moved to one side. Then, with a centering pin 8b of a come-back mechanism 10 placed in the same line intersecting with the center of the spindle, the magnetic disk medium 1 is pushed back to the opposite side.
摘要:
In a semiconductor device, re-wiring is provided on a circuit element formation region of a semiconductor substrate. A columnar electrode for connection with a circuit board is provided on the rewiring. A first insulating film is provided over the semiconductor substrate excluding a connection pad, and a ground potential layer connected to a ground potential is provided on an upper surface of the first insulating film. A re-wiring is provided over the ground potential layer with a second insulating film interposed. The ground potential layer serves as a barrier layer for preventing crosstalk between the re-wiring and circuit element formation region. A thin-film circuit element is provided on the second insulating film, and a second ground potential layer is provided as a second barrier layer over the thin-film circuit element with an insulating film interposed. Re-wiring is provided over the second ground potential layer.
摘要:
A hermetically sealed chamber and the method of manufacturing same, which comprises the steps of: (a) preparing two aluminum or aluminum alloy material members which face each other; (b) forming at least one extending groove portions on a surface to be metal-bonded of one of the two aluminum or aluminum alloy material members, which groove portion extends in a manner to make an enclosure; (c) forming at least one corresponding extending protruding portions on a surface to be metal-bonded of the other of the two aluminum or aluminum alloy material members, which protruding portion extends in a manner to make a corresponding enclosure; and (d) receiving internally packaged parts therebetween, inserting the at least one extending protruding portions into the at least one corresponding extending groove portions so as to be fitted, and causing the at least one extending protruding portions and the at least one extending groove portions to be metal-bonded by press-forging.