公开(公告)号：US20090210971A1

公开(公告)日：2009-08-20

申请号：US12063860

申请日：2006-08-09

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

IPC分类号： G01N13/10 ,  G01B9/02 ,  G01B11/02

CPC分类号： G01Q20/02 ,  G01B9/02014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/02076 ,  G01B2290/45 ,  G01B2290/70 ,  G01S17/50

摘要： The present invention provides a displacement measurement method, an apparatus thereof, a probe microscope. which make it possible to stably measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air, mechanical vibration.Specifically, with the present invention, a pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. Then, an optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

摘要翻译： 本发明提供一种位移测量方法，其装置，探针显微镜。 这使得可以在不受空气波动，机械振动等干扰的影响的情况下以亚纳米级或更低的精度来稳定地测量被测物体的位移量和移动距离。 具体地说，利用本发明，将脉冲光束分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束以相同的方向通过相同的延迟光路，直到被测物体的延迟为一个脉冲周期，然后被测量对象反射。 然后，通过对两个脉冲光束进行干涉来获得由测量对象的运动引起的光学相位变化。

公开(公告)号：US07498589B2

公开(公告)日：2009-03-03

申请号：US11251795

申请日：2005-10-18

申请人： Shigenobu Maruyama ,  Mineo Nomoto ,  Toru Kurenuma ,  Yuichi Kunitomo ,  Yukio Kembo

发明人： Shigenobu Maruyama ,  Mineo Nomoto ,  Toru Kurenuma ,  Yuichi Kunitomo ,  Yukio Kembo

IPC分类号： G21K7/00

CPC分类号： G01Q10/04

摘要： A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe which is brought into close proximity to or contact with the surface of the sample mounted on the sample stage and scans the sample surface; a probe-driving unit for moving the probe three-dimensionally; a probe deflection detector for detecting a deflection of the probe; and an observation optical system which has an objective lens and observes the probe disposed on substantially the optical axis of the objective lens, and the sample. The probe-driving unit is disposed with three sets of paired drive sources arranged essentially with symmetry with respect to the optical axis of the objective lens.

摘要翻译： 一种扫描探针显微镜，用于通过使探针靠近或接触样品的表面并扫描样品表面来测量样品的表面轮廓，包括：可在至少一个轴向移动的样品台; 该探头与安装在样品台上的样品的表面紧密接触或接触并扫描样品表面; 用于三维移动探头的探针驱动单元; 探针偏转检测器，用于检测探针的偏转; 以及观察光学系统，其具有物镜并观察设置在物镜的基本光轴上的探针和样品。 探针驱动单元设置有三组成对的驱动源，其基本上相对于物镜的光轴对称布置。

公开(公告)号：US07215807B2

公开(公告)日：2007-05-08

申请号：US11190220

申请日：2005-07-26

申请人： Mineo Nomoto ,  Daiske Katsuta ,  Toshio Asano ,  Kaoru Sakai ,  Tetsuo Taguchi ,  Isao Tanaka

发明人： Mineo Nomoto ,  Daiske Katsuta ,  Toshio Asano ,  Kaoru Sakai ,  Tetsuo Taguchi ,  Isao Tanaka

IPC分类号： G06K9/00

CPC分类号： G06K9/4652 ,  G01N21/91

摘要： The present invention relates to a method for inspecting a crack in a metal surface or the like, and, particularly, to an inspection method and apparatus for nondestructive inspection such as liquid penetrant inspection and magnetic particle testing. The present invention provides a flaw inspection method that essentially comprises the steps of illuminating a surface of a sample to be inspected, obtaining an image of the surface, characterizing a potential flaw on the inspected surface by processing the obtained image, displaying an image of the potential flaw, verifying that the potential flaw is a true flaw, and storing an image of the verified flaw in memory.

摘要翻译： 本发明涉及一种检查金属表面等中的裂纹的方法，特别涉及液体渗透检查和磁性粒子测试等非破坏性检查的检查方法和装置。 本发明提供了一种缺陷检查方法，其基本上包括以下步骤：照射要检查的样品的表面，获得表面的图像，通过处理所获得的图像来表征被检查表面上的潜在缺陷，显示所述图像的图像 潜在的缺陷，验证潜在的缺陷是一个真正的缺陷，并将验证的缺陷的图像存储在内存中。

公开(公告)号：US07057744B2

公开(公告)日：2006-06-06

申请号：US10082520

申请日：2002-02-22

申请人： Mineo Nomoto ,  Takenori Hirose ,  Keiya Saito

发明人： Mineo Nomoto ,  Takenori Hirose ,  Keiya Saito

IPC分类号： G01B11/28

CPC分类号： B24B37/013 ,  B24B49/12 ,  G01B11/0683 ,  G01N21/55 ,  G01N21/8422

摘要： A method for high-precision measurement of film thickness and the distribution of film thickness of a transparent film is disclosed. The method is performed during a CMP process, without being affected by the film thickness distribution among the LSI regions or on the semiconductor wafer surface. The film thickness is measured by specifying relatively level measurement regions, according to a characteristic quantity of the spectral waveform of the reflected light from the transparent film, such as the reflection intensity, frequency spectrum intensity. This permits highly accurate control of film thickness. The leveling process in CMP processing can be optimized on the basis of the film thickness distribution.

公开(公告)号：US20060102608A1

公开(公告)日：2006-05-18

申请号：US11270600

申请日：2005-11-10

申请人： Daisuke Katsuta ,  Mineo Nomoto ,  Kazushi Yoshimura

发明人： Daisuke Katsuta ,  Mineo Nomoto ,  Kazushi Yoshimura

IPC分类号： B23K26/03

CPC分类号： B23K26/032 ,  B23K26/03 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0853 ,  B23K2101/40

摘要： The laser beam machine of the present invention includes: an XY stage on which to rest a workpiece with multiple machining objects arrayed on it, and which moves the workpiece in an XY direction on the basis of NC data; an image acquisition head which is provided in an image acquisition station and has oblique illumination optical system and detection optical system; and a laser machining head which is provided in a laser machining station and has a laser light source, an XY optical beam deflector for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object that have been acquired by the image acquisition head, and an irradiation lens for admitting the above-deflected laser beam into each machining object from a substantially perpendicular direction.

摘要翻译： 本发明的激光束机包括：XY台，其上放置有多个加工对象的工件，并且基于NC数据在XY方向上移动工件; 图像获取头，设置在图像采集站中，具有倾斜照明光学系统和检测光学系统; 以及激光加工头，其设置在激光加工台中并具有激光光源，XY光束偏转器，用于根据根据来自于...的图像信号获得的偏转控制数据在XY方向上偏转激光束 由图像获取头获取的每个加工对象以及用于从大致垂直的方向将上述偏转的激光束进入每个加工对象的照射透镜。

公开(公告)号：US20060003478A1

公开(公告)日：2006-01-05

申请号：US11209742

申请日：2005-08-24

申请人： Mikio Hongo ,  Sachio Uto ,  Mineo Nomoto ,  Toshihiko Nakata ,  Mutsuko Hatano ,  Shinya Yamaguchi ,  Nakoto Ohkura

发明人： Mikio Hongo ,  Sachio Uto ,  Mineo Nomoto ,  Toshihiko Nakata ,  Mutsuko Hatano ,  Shinya Yamaguchi ,  Nakoto Ohkura

IPC分类号： H01L21/00

CPC分类号： H01L29/04 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0665 ,  B23K26/0732 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02683 ,  H01L21/268 ,  H01L27/1285 ,  H01L27/1296 ,  H01L29/66757 ,  H01L29/78675

摘要： Arrangements (e.g., methods) for manufacturing a display device, including irradiating an amorphous semiconductor film formed on a substrate with an excimer laser beam to convert the amorphous semiconductor film into a polycrystalline semiconductor film; and irradiating predetermined areas of the polycrystalline semiconductor film intermittently with a continuous wave laser beam while a position of the substrate with respect to the continuous wave laser beam is scanned, crystal grains larger than those of the polycrystalline semiconductor film other than the predetermined areas are formed in each of the predetermined areas locally in the polycrystalline semiconductor film, wherein first thin film transistors are formed in the predetermined areas while second thin film transistors are formed in the polycrystalline semiconductor film other than the predetermined areas thereof.

摘要翻译： 包括用于制造显示装置的布置（例如，方法），包括用准分子激光束照射形成在衬底上的非晶半导体膜，以将非晶半导体膜转换为多晶半导体膜; 并且在扫描基板相对于连续波激光束的位置时，用连续波激光束间歇地照射多晶半导体膜的预定区域，形成比除了预定区域以外的多晶半导体膜的晶粒大的晶粒 在多晶半导体膜中局部的每个预定区域中，其中第一薄膜晶体管形成在预定区域中，而第二薄膜晶体管形成在除了其预定区域之外的多晶半导体膜中。

公开(公告)号：US20050259861A1

公开(公告)日：2005-11-24

申请号：US11190220

申请日：2005-07-26

申请人： Mineo Nomoto ,  Daiske Katsuta ,  Toshio Asano ,  Kaoru Sakai ,  Tetsuo Taguchi ,  Isao Tanaka

发明人： Mineo Nomoto ,  Daiske Katsuta ,  Toshio Asano ,  Kaoru Sakai ,  Tetsuo Taguchi ,  Isao Tanaka

IPC分类号： G01N27/82 ,  G01N21/91 ,  G06K9/00

CPC分类号： G06K9/4652 ,  G01N21/91

摘要： The present invention relates to a method for inspecting a crack in a metal surface or the like, and, particularly, to an inspection method and apparatus for nondestructive inspection such as liquid penetrant inspection and magnetic particle testing. The present invention provides a flaw inspection method that essentially comprises the steps of illuminating a surface of a sample to be inspected, obtaining an image of the surface, characterizing a potential flaw on the inspected surface by processing the obtained image, displaying an image of the potential flaw, verifying that the potential flaw is a true flaw, and storing an image of the verified flaw in memory.

摘要翻译： 本发明涉及一种检查金属表面等中的裂纹的方法，特别涉及液体渗透检查和磁性粒子测试等非破坏性检查的检查方法和装置。 本发明提供了一种缺陷检查方法，其基本上包括以下步骤：照射要检查的样品的表面，获得表面的图像，通过处理所获得的图像来表征被检查表面上的潜在缺陷，显示所述图像的图像 潜在的缺陷，验证潜在的缺陷是一个真正的缺陷，并将验证的缺陷的图像存储在内存中。

公开(公告)号：US08659761B2

公开(公告)日：2014-02-25

申请号：US13302948

申请日：2011-11-22

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02003 ,  G01B9/02081 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70775

摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

摘要翻译： 在使用光干涉的位移测量装置中，探针光路在空间上与参考光路分离。 因此，当通过空气等的波动或机械振动产生温度或折射率分布时，光路差在两个光路之间波动，并且产生测量误差。 在该解决方案中，将探测光的光轴靠近参考光的光轴不受任何干扰影响的距离，用探测光照射样品，用参考光照射参考表面，反射光 允许光束彼此干涉，并且从所得到的干涉光中获得样品的位移，从而防止由于光程差的波动而产生测量误差。

公开(公告)号：US20120327429A1

公开(公告)日：2012-12-27

申请号：US13605395

申请日：2012-09-06

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

IPC分类号： G01B11/14

CPC分类号： G01Q20/02 ,  G01B9/02014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/02076 ,  G01B2290/45 ,  G01B2290/70 ,  G01S17/50

摘要： A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

摘要翻译： 位移测量方法，其装置和探针显微镜。 这使得能够以亚纳米级或更低的精度稳定地测量被测物体的位移量和移动距离，而不受诸如空气波动和机械振动之类的扰动的影响。 脉冲束被分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束在相对的方向上通过相同的延迟光路被发送到被测物体的一个脉冲周期的延迟，然后被测量对象反射。 通过对两束脉冲光束进行干涉而获得由测量对象的运动引起的光学相位变化。

公开(公告)号：US08064066B2

公开(公告)日：2011-11-22

申请号：US12605089

申请日：2009-10-23

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02003 ,  G01B9/02081 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70775

摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

摘要翻译： 在使用光干涉的位移测量装置中，探针光路在空间上与参考光路分离。 因此，当通过空气等的波动或机械振动产生温度或折射率分布时，光路差在两个光路之间波动，并且产生测量误差。 在该解决方案中，将探测光的光轴靠近参考光的光轴不受任何干扰影响的距离，用探测光照射样品，用参考光照射参考表面，反射光 允许光束彼此干涉，并且从所得到的干涉光中获得样品的位移，从而防止由于光程差的波动而产生测量误差。