公开(公告)号：US20170084488A1

公开(公告)日：2017-03-23

申请号：US15365435

申请日：2016-11-30

Applicant: MediaTek Inc.

Inventor： Cheng-Chou HUNG ,  Ming-Tzong YANG ,  Tung-Hsing LEE ,  Wei-Che HUANG ,  Yu-Hua HUANG ,  Tzu-Hung LIN

IPC: H01L21/768 ,  H01L23/00 ,  H01L29/06 ,  H01L23/48 ,  H01L21/761

CPC classification number: H01L21/76898 ,  H01L21/761 ,  H01L23/481 ,  H01L23/49816 ,  H01L23/49827 ,  H01L24/11 ,  H01L29/0619 ,  H01L29/0623 ,  H01L2224/13 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for forming a semiconductor package structure is provided. The method for forming a semiconductor package structure includes providing a substrate, wherein the substrate has a front side and a back side, forming a first guard ring doped region and a second guard ring doped region in the substrate, wherein the first guard ring doped region and the second guard ring doped region have different conductive types, forming a trench through the substrate from a back side of the substrate, conformally forming an insulating layer lining the back side of the substrate, a bottom surface and sidewalls of the trench, removing a portion of the insulating layer on the back side of the substrate to form a through via, and forming a conductive material in the through via, wherein a through silicon via (TSV) interconnect structure is formed by the insulating layer and the conductive material.

公开(公告)号：US20140070346A1

公开(公告)日：2014-03-13

申请号：US13790060

申请日：2013-03-08

Applicant: MEDIATEK INC.

Inventor： Ming-Tzong YANG ,  Cheng-Chou HUNG ,  Tung-Hsing LEE ,  Wei-Che HUANG ,  Yu-Hua HUANG

IPC: H01L23/522 ,  H01L31/18

CPC classification number: H01L21/76898 ,  H01L21/02107 ,  H01L21/268 ,  H01L21/30625 ,  H01L23/481 ,  H01L23/5227 ,  H01L23/66 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L31/18 ,  H01L2223/6616 ,  H01L2224/13025 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2924/11 ,  H01L2924/12042 ,  H01L2924/014 ,  H01L2924/00014 ,  H01L2924/00

Abstract: The invention provides a radio-frequency (RF) device package and a method for fabricating the same. An exemplary embodiment of a radio-frequency (RF) device package includes a base, wherein a radio-frequency (RF) device chip is mounted on the base. The RF device chip includes a semiconductor substrate having a front side and a back side. A radio-frequency (RF) component is disposed on the front side of the semiconductor substrate. An interconnect structure is disposed on the RF component, wherein the interconnect structure is electrically connected to the RF component, and a thickness of the semiconductor substrate is less than that of the interconnect structure. A through hole is formed through the semiconductor substrate from the back side of the semiconductor substrate, and is connected to the interconnect structure. A TSV structure is disposed in the through hole.

Abstract translation: 本发明提供一种射频（RF）器件封装及其制造方法。 射频（RF）器件封装的示例性实施例包括基座，其中射频（RF）器件芯片安装在基座上。 RF器件芯片包括具有前侧和后侧的半导体衬底。 射频（RF）部件设置在半导体衬底的前侧。 互连结构设置在RF部件上，其中互连结构电连接到RF部件，并且半导体衬底的厚度小于互连结构的厚度。 从半导体衬底的背面穿过半导体衬底形成一个通孔，并连接到互连结构。 TSV结构设置在通孔中。