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公开(公告)号:US20070254247A1
公开(公告)日:2007-11-01
申请号:US11269761
申请日:2005-11-09
IPC分类号: G03C1/043
CPC分类号: G03F7/0045 , G03F7/0397 , Y10S430/106 , Y10S430/111
摘要: A radiation-sensitive resin composition comprising (A) a resin which comprises at least one recurring unit (I-1), (I-2), or (I-3), and a recurring unit (II), and is insoluble or scarcely soluble in alkali, but becomes alkali soluble by action of an acid, (B) a photoacid generator, and (C) a polycyclic compound. The resin composition is used as a chemically-amplified resist for microfabrication utilizing deep UV rays.
摘要翻译: 一种辐射敏感性树脂组合物,其包含(A)包含至少一个重复单元(I-1),(I-2)或(I-3)和重复单元(II)的树脂, 几乎不溶于碱,但通过酸的作用变得碱溶,(B)光酸产生剂,和(C)多环化合物。 该树脂组合物用作利用深紫外线的微细加工的化学增幅抗蚀剂。
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公开(公告)号:US06964840B2
公开(公告)日:2005-11-15
申请号:US10867892
申请日:2004-06-16
申请人: Yukio Nishimura , Noboru Yamahara , Masafumi Yamamoto , Toru Kajita , Tsutomu Shimokawa , Hiroshi Ito
发明人: Yukio Nishimura , Noboru Yamahara , Masafumi Yamamoto , Toru Kajita , Tsutomu Shimokawa , Hiroshi Ito
CPC分类号: G03F7/0046 , G03F7/0233 , G03F7/0395 , G03F7/0397 , Y10S430/106 , Y10S430/108 , Y10S430/111
摘要: A radiation-sensitive resin composition comprising an acid-labile group-containing resin and a photoacid generator is disclosed. The resin has a structure of the formula (1), wherein R1 represents a hydrogen atom, a monovalent acid-labile group, an alkyl group having 1-6 carbon atoms which does not have an acid-labile group, or an alkylcarbonyl group having 2-7 carbon atoms which does not have an acid-labile group, X1 represents a linear or branched fluorinated alkyl group having 1-4 carbon atoms, and R2 represents a hydrogen atom, a linear or branched alkyl group having 1-10 carbon atoms, or a linear or branched fluorinated alkyl group having 1-10 carbon atoms. The resin composition exhibits high transmittance of radiation, high sensitivity, resolution, and pattern shape, and is useful as a chemically amplified resist in producing semiconductors at a high yield.
摘要翻译: 公开了一种包含含酸不稳定基团的树脂和光致酸发生剂的辐射敏感性树脂组合物。 树脂具有式(1)的结构,其中R 1表示氢原子,一价酸不稳定基团,具有1-6个碳原子的烷基,其不具有酸 - 不稳定基团或不具有酸不稳定基团的具有2-7个碳原子的烷基羰基,X 1表示具有1-4个碳原子的直链或支链氟代烷基, SUP> 2表示氢原子,具有1-10个碳原子的直链或支链烷基或具有1-10个碳原子的直链或支链氟代烷基。 树脂组合物表现出高的透射率,高灵敏度,分辨率和图案形状,并且可以以高产率制造半导体的化学放大抗蚀剂。
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公开(公告)号:US06677419B1
公开(公告)日:2004-01-13
申请号:US10293740
申请日:2002-11-13
申请人: Phillip J. Brock , Eiichi Kobayashi , Isao Nishimura , Yukio Nishimura , Thomas I. Wallow , Masafumi Yamamoto
发明人: Phillip J. Brock , Eiichi Kobayashi , Isao Nishimura , Yukio Nishimura , Thomas I. Wallow , Masafumi Yamamoto
IPC分类号: C08F1000
CPC分类号: C08F232/08 , C08F220/06 , C08F220/18 , C08F220/28
摘要: A scaleable and high-yielding method of preparing copolymers that is useful as a component of a radiation sensitive resin composition is provided. The method includes the step of reacting at least one monomer A which is an unsaturated alicyclic monomer and forms a polymer main chain by dissociation of the unsaturated bond, and at least one unsaturated monomer B, which also forms a polymer chain by dissociation of an unsaturated bond, wherein less than two electron-withdrawing groups are directly appended to said unsaturation, and where said monomer B is other than the unsaturated alicyclic monomer and forms a polymer main chain, in the presence of a free radical initiator. The reacting step is carried out in a stoichiometric excess of monomer A as compared to monomer B. By carrying out the reacting step in an excess of monomer A as compared to monomer B, the resultant copolymer will have a greater molar concentration of monomer A than is obtainable using other methods.
摘要翻译: 提供了可用作辐射敏感性树脂组合物的组分的共聚物的可扩展和高产率的方法。 所述方法包括使至少一种不饱和脂环族单体的单体A与不饱和键解离形成聚合物主链的至少一种不饱和单体B,其通过不饱和键解离形成聚合物链 键,其中少于两个吸电子基团直接连接到所述不饱和基团上,并且其中所述单体B不同于不饱和脂环族单体并形成聚合物主链,在自由基引发剂存在下。 与单体B相比,反应步骤在化学计量过量的单体A中进行。通过与单体B相比,通过进行过量单体A的反应步骤,所得共聚物将具有比单体A更大的摩尔浓度 可以使用其他方法获得。
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公开(公告)号:US06232116B1
公开(公告)日:2001-05-15
申请号:US08482981
申请日:1995-06-07
IPC分类号: A61K3909
CPC分类号: A61K39/092 , A61K39/00 , C07K14/28 , C07K14/3156 , C07K14/7151 , C07K2319/00 , C07K2319/02 , C12N15/74 , C12N15/746 , C12Q1/689 , Y02A50/472
摘要: Oral or peroral administration, including intragastrically, of killed whole pneumococci, lysate of pneumococci and isolated and purified PspA, as well as immunogenic fragments thereof, particularly when administered with an adjuvant such as cholera toxin provides protection in a host, animal or human, against pneumococcal infection, including colonization, and systemic infection, such as sepsis. The ability to elicit protection against pneumococcal colonization in a host prevents carriage among immunized individuals, which can lead to elimination of disease from the population as a whole.
摘要翻译: 口服或口服给药,包括胃内杀死的全肺炎球菌,肺炎球菌的裂解物和分离和纯化的PspA,以及其免疫原性片段,特别是当与佐剂如霍乱毒素一起施用时,在宿主,动物或人中提供保护, 肺炎球菌感染,包括定植和全身感染,如败血症。 在宿主中引发针对肺炎球菌定居的保护的能力防止免疫个体携带,这可导致整体上消除人群的疾病。
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公开(公告)号:USD408242S
公开(公告)日:1999-04-20
申请号:US081573
申请日:1998-01-06
申请人: Masafumi Yamamoto
设计人: Masafumi Yamamoto
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公开(公告)号:US4958893A
公开(公告)日:1990-09-25
申请号:US837224
申请日:1986-03-07
申请人: Masaru Noguchi , Masafumi Yamamoto
发明人: Masaru Noguchi , Masafumi Yamamoto
CPC分类号: B23K26/0613 , B23K26/06 , B23K26/0604 , B23K26/0643 , B23K26/0648 , B23K26/0665 , G02B19/0014 , G02B19/0057 , G02B27/0031 , G02B27/1073 , G02B27/143 , H04N3/08
摘要: In a semiconductor laser beam source apparatus, laser beams emitted by a plurality of semiconductor lasers, collimated and made parallel to each other are coalesced by a converging lens. The laser beams are respectively reflected by a plurality of reflecting mirrors having reflecting surfaces parallel to each other and guided to the converging lens. The reflecting mirrors respectively have a mounting surface at a predetermined angle with respect to the reflecting surface and are secured to a common plane.
摘要翻译: 在半导体激光束源装置中,通过会聚透镜聚焦由准直并且彼此平行的多个半导体激光器发射的激光束。 激光束分别被具有彼此平行的反射表面的多个反射镜反射并被引导到会聚透镜。 反射镜分别具有相对于反射表面预定角度的安装表面并且固定到公共平面。
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公开(公告)号:US4668590A
公开(公告)日:1987-05-26
申请号:US915927
申请日:1986-10-06
申请人: Masafumi Yamamoto , Tatsuo Fukuzaki
发明人: Masafumi Yamamoto , Tatsuo Fukuzaki
CPC分类号: C04B30/02 , C04B2111/34
摘要: A process for producing an improved ceramic fiber molding by submersing the molding into a suspension containing colloidal silica and/or colloidal alumina and chromium oxide powder. The chromium oxide is deposited onto the ceramic fibers thereby increasing the molding's resistance to linear shrinkage and corrosion when subjected to high temperatures.
摘要翻译: 通过将成型体浸入含有胶体二氧化硅和/或胶体氧化铝和氧化铬粉末的悬浮液中来制备改进的陶瓷纤维成型体的方法。 氧化铬沉积在陶瓷纤维上,从而在经受高温时提高成型体的线性收缩和腐蚀性。
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28.
公开(公告)号:US09075399B2
公开(公告)日:2015-07-07
申请号:US14240752
申请日:2011-10-24
CPC分类号: G05B5/00 , F16H49/001 , G05B2219/49292 , H02P23/00
摘要: A positioning control system for an actuator provided with a strain wave gearing is provided with: a semi-closed feedback controller FB(s) that controls a load shaft position θ1 on the basis of a feedback motor shaft position θm; and a feedforward linearization compensator configured by incorporating a nonlinear plant model for an object to be controlled into a feedback linearization compensator using an exact linearization technique. The feedforward linearization compensator uses a forward-calculated state quantity estimated value x* to calculate a feedforward current instruction i*ref and a feedforward motor position instruction θ*m to be input into the feedback controller FB(s). A positioning error caused by a non-linear element (non-linear spring property, relative rotational synchronization component, and non-linear friction) of the strain wave gearing is compensated for by the feedforward linearization compensator.
摘要翻译: 具有应变波齿轮传动装置的致动器的定位控制系统具有:控制负载轴位置的半闭合反馈控制器FB; 1,基于反馈电机轴位置; m; 以及前馈线性化补偿器,其通过使用精确线性化技术将用于要控制的对象的非线性工厂模型结合到反馈线性化补偿器中来配置。 前馈线性化补偿器使用前向计算的状态量估计值x *来计算要输入到反馈控制器FB的前馈电流指令i * ref和前馈电机位置指令& * m。 由前馈线性化补偿器补偿由应变波传动装置的非线性元件(非线性弹簧特性,相对旋转同步分量和非线性摩擦)引起的定位误差。
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公开(公告)号:US20150183423A1
公开(公告)日:2015-07-02
申请号:US14415239
申请日:2012-07-17
申请人: Masafumi Yamamoto , Atsushi Tabata , Koichi Okuda , Keita Imai
发明人: Masafumi Yamamoto , Atsushi Tabata , Koichi Okuda , Keita Imai
CPC分类号: B60W20/40 , B60K6/365 , B60K6/387 , B60K6/445 , B60K2006/381 , B60W10/06 , B60W10/08 , B60W10/12 , B60W20/00 , F16H2037/0873 , F16H2200/2007 , F16H2200/2035 , Y02T10/6239 , Y02T10/6286 , Y10S903/93 , Y10T477/23
摘要: A hybrid vehicle drive apparatus includes an engine, a transmission unit, and a differential unit. A dual-motor travel is possible by stopping the engine and driving a first rotating machine and a second rotating machine as a result of engaging a first engaging element and a second engaging element of the transmission unit. At a time of switching to a dual-motor travel, the hybrid vehicle drive apparatus executes a first control for carrying out a negative RPM control by the first rotating machine; a second control for engaging either one of a first engaging element and a second engaging element of the transmission unit; and a third control for engaging both of the first engaging element and the second engaging element of the transmission unit after the first control and the second control.
摘要翻译: 混合动力车辆驱动装置包括发动机,变速器单元和差动单元。 通过停止发动机和驱动第一旋转机器和第二旋转机器,由于接合传动单元的第一接合元件和第二接合元件,可以实现双电机行程。 在切换到双电机行程时,混合动力车辆驱动装置执行用于通过第一旋转机进行负转速控制的第一控制; 用于接合传动单元的第一接合元件和第二接合元件中的任一个的第二控制器; 以及用于在第一控制和第二控制之后接合传动单元的第一接合元件和第二接合元件的第三控制。
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公开(公告)号:US08786201B2
公开(公告)日:2014-07-22
申请号:US13326386
申请日:2011-12-15
IPC分类号: H05B37/02
CPC分类号: H05B33/0887
摘要: An LED lighting device includes a power converter for outputting a variable output voltage, two LED lamps being connected in series between output terminals of the power converter; a current detector for detecting an output current from the power converter; a first detector for detecting the output voltage of the power converter and generating a first detection voltage corresponding to the output voltage; a second detector for detecting an applied voltage to one of the two LED lamps and generating a second detection voltage corresponding to the applied voltage; and a controller for controlling the power converter to adjust the output voltage to thereby make the output current coincide with a target value. The controller controls the power converter to decrease the output voltage if at least one of the second detection voltage and the deference between the first and the second detection voltage does not fall within a range.
摘要翻译: LED照明装置包括用于输出可变输出电压的功率转换器,串联连接在功率转换器的输出端之间的两个LED灯; 电流检测器,用于检测来自功率转换器的输出电流; 第一检测器,用于检测功率转换器的输出电压并产生对应于输出电压的第一检测电压; 第二检测器,用于检测施加的电压到两个LED灯中的一个,并产生对应于所施加的电压的第二检测电压; 以及控制器,用于控制功率转换器来调节输出电压,从而使输出电流与目标值一致。 如果第二检测电压和第一和第二检测电压之间的差异中的至少一个不在一个范围内,则控制器控制功率转换器来降低输出电压。
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