Abstract:
A laser processing process which comprises laser annealing a silicon film 2 μm or less in thickness by irradiating a laser beam 400 nm or less in wavelength and being operated in pulsed mode with a pulse width of 50 nsec or more, and preferably, 100 nsec or more. A laser processing apparatus which comprises a laser generation device and a stage for mounting thereon a sample provided separately from said devices to thereby prevent transfer of vibration attributed to the movement of the stage to the laser generation device and the optical system. A stable laser beam can be obtained to thereby improve productivity.
Abstract:
A laser processing process which comprises laser annealing a silicon film 2 &mgr;m or less in thickness by irradiating at laser beam 400 nm or less in wavelength and being operated in pulsed mode with a pulse width of 50 nsec or more, and preferably, 100 nsec or more. A laser processing apparatus which comprises a laser generation device and a stage for mounting thereon a sample provided separately from said devices to thereby prevent transfer of vibration attributed to the movement of the stage to the laser generation device and the optical system. A stable laser beam can be obtained to thereby improve productivity.
Abstract:
In manufacturing a semiconductor device on a glass substrate, a conductive thin-film (for instance, a conductivity-imparted silicon film) is formed on the bottom surface side of the glass substrate at the initial stage of a manufacturing process. Since the conductive thin film serves as an electrostatic shield, the glass substrate is prevented from being electrified directly, whereby electrostatic breakdown of device elements as would otherwise be caused by electrification of the glass substrate can be avoided.
Abstract:
A laser processing process which comprises laser annealing a silicon film 2 .mu.m or less in thickness by irradiating a laser beam 400 nm or less in wavelength and being operated in pulsed mode with a pulse width of 50 nsec or more, and preferably, 100 nsec or more.A laser processing apparatus which comprises a laser generation device and a stage for mounting thereon a sample provided separately from said device, to thereby prevent transfer of vibration attributed to the movement of the stage to the laser generation device and the optical system. A stable laser beam can be obtained to thereby improve productivity.
Abstract:
A laser processing process which includes laser annealing a silicon film 2 .mu.m or less in thickness by irradiating a laser beam 400 nm or less in wavelength and being operated in pulsed mode with a pulse width of 50 nsec or more and preferably, 100 nsec or more. The invention further relates to a laser processing apparatus which includes a laser generation device and a stage for mounting thereon a sample provide separately from said device, to thereby prevent transfer of vibration attributed to the movement of the stage to the laser generation device and the optical system. A stable laser beam can be obtained to thereby improve productivity.
Abstract:
An improved electroluminescent indicator hand which is capable of emitting light from its entire surface area consists of an annular support member mounted on the hand shaft of a timepiece, an electroluminescent indicator hand secured on the support member, and a metal contact for supplying a drive signal to the electroluminescent indicator hand. The electroluminescent indicator hand is formed by sequentially laminating a transparent electrode layer, a luminescent layer, an insulating layer and a rear electrode layer on the rear surface of a light transmissive substrate, which has sufficient rigidity, and has at one end an annular section overlapping the support member. The metal contact has plural conductors resiliently contacting the transparent electrode layer and the rear electrode layer of the electroluminescent hand, and is welded to the support member so as to secure the electroluminescent member therebetween. Since a hand frame is not necessary, the cost of individual components and the assembly thereof is substantially reduced. In addition, it is possible to make the hand thinner than a conventional indicator hand. A desirable three-dimensional visual effect can be also achieved.
Abstract:
A goods accommodation method and apparatus in which a container is set such that its opening is directed horizontally, and box-shaped goods are stacked on a slide such that their surfaces facing the opening of the container are aligned with each other. The goods are transferred into the container while they are held in the stacked state by inserting the slide together with the goods stacked thereon into the container and then quickly pulling the slide out of the container at a speed higher than the speed of insertion such that the stacked goods remain in the container. The container is then turned up such that its opening is directed upward.
Abstract:
A method and apparatus for correcting the appearance of each of a plurality of vertically stacked load stages each stage having a load placed on a pallet. Each of the vertically stacked load stages is separated independently of the other, and each separated load stage is corrected.
Abstract:
In a method of transferring goods into a container 83, the container 83 is tilted toward a goods loader 18, and a goods transferring member 90 with goods accommodated therein is inserted into an upper empty space in the tilted container 83. Thereafter, the goods transferring member 90 is tilted downward, and in this tilted state, it is withdrawn to the outside of the container 83, thus effecting the transfer of the goods in it into the container 83.
Abstract:
A method for storing articles in an automatic storage facility 10 comprises steps of checking whether a scheduled warehousing amount of articles is greater than an available storage capacity of an intended storage facility on the basis of the scheduled warehousing amount and the available storage capacity, and assigning partial amount of the scheduled warehousing articles to warehouse in an overflow area 26 when the scheduled warehousing amount is greater than the available storage capacity, and subsequently initiating warehousing operation for all of articles to be warehoused to the automatic storage facility 10 and the overflow area 26.