公开(公告)号：US07642115B2

公开(公告)日：2010-01-05

申请号：US12426310

申请日：2009-04-20

Applicant: Odd Harald Steen Eriksen ,  Kimiko J. Childress ,  Shuwen Guo

Inventor： Odd Harald Steen Eriksen ,  Kimiko J. Childress ,  Shuwen Guo

IPC: H01L21/58

CPC classification number: G01L9/0042 ,  C23C14/021 ,  C23C14/022 ,  C23C14/025 ,  C23C14/0682 ,  C23C14/5806 ,  C23C14/5846 ,  C23C14/5873 ,  G01L9/0054 ,  G01L9/008 ,  G01L19/0061 ,  G01L19/0069 ,  G01L19/0076 ,  G01L19/0084 ,  G01L19/0609 ,  G01L19/141 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/05553 ,  H01L2224/45169 ,  H01L2224/48472 ,  H01L2224/81805 ,  H01L2224/83805 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A method for forming a transducer including the step of providing a semiconductor-on-insulator wafer including first and second semiconductor layers separated by an electrically insulating layer. The method further includes depositing or growing a piezoelectric film or piezoresistive film on the wafer, depositing or growing an electrically conductive material on the piezoelectric or piezoresistive film to form at least one electrode, and depositing or growing a bonding layer including an electrical connection portion that is located on or is electrically coupled to the electrode. The method further includes the step of providing a ceramic substrate having a bonding layer located thereon, the bonding layer including an electrical connection portion and being patterned in a manner to generally match the bonding layer of the semiconductor-on-insulator wafer. The method also includes causing the bonding layer of the semiconductor-on-insulator wafer and the bonding layer of the substrate to bond together to thereby mechanically and electrically couple the semiconductor-on-insulator wafer and the substrate to form the transducer, wherein the electrical connection portions of the bonding layers of the semiconductor-on-insulator wafer and the substrate are fluidly isolated from the surrounding environment by the bonding layers.

Abstract translation: 一种用于形成换能器的方法，包括提供绝缘体上半导体晶片的步骤，该晶片包括由电绝缘层分隔的第一和第二半导体层。 该方法还包括在晶片上沉积或生长压电薄膜或压阻薄膜，在压电或压阻薄膜上沉积或生长导电材料以形成至少一个电极，以及沉积或生长包括电连接部分的粘合层， 位于电极上或与电极电耦合。 该方法还包括提供具有位于其上的结合层的陶瓷基板的步骤，所述接合层包括电连接部分并且以通常匹配绝缘体上半导体晶片的结合层的方式被图案化。 该方法还包括使绝缘体上半导体晶片的接合层和衬底的接合层接合在一起，从而机械地和电耦合绝缘体上半导体晶片和衬底以形成换能器，其中电气 绝缘体上半导体晶片和衬底的结合层的连接部分通过结合层与周围环境流体隔离。

公开(公告)号：US07404247B2

公开(公告)日：2008-07-29

申请号：US11139207

申请日：2005-05-27

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo

IPC: G01R3/00

CPC classification number: G01L9/008 ,  G01L9/0042 ,  G01L9/0055 ,  H01L41/1132 ,  Y10S439/936 ,  Y10T29/42 ,  Y10T29/49 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of, after the forming or locating step, etching a cavity in the substrate below the pressure sensing component to define a diaphragm above the cavity with the pressure sensing component located on the diaphragm. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the diaphragm.

Abstract translation: 一种用于制造压力传感器的方法，包括以下步骤：提供基底并在基底上形成或定位压力感测部件。 该方法还包括以下步骤：在成形或定位步骤之后，蚀刻位于压力感测部件下方的衬底中的空腔，以在压电感测部件位于隔膜上方限定腔上方的隔膜。 压力感测部件包括导电电子气体，其在隔膜移动时改变其电阻。

公开(公告)号：US20100018326A1

公开(公告)日：2010-01-28

申请号：US12148162

申请日：2008-04-17

Applicant: Chuang-Chia Lin ,  Alexander Spivak ,  Christopher Sanden ,  Odd Harald Steen Eriksen

Inventor： Chuang-Chia Lin ,  Alexander Spivak ,  Christopher Sanden ,  Odd Harald Steen Eriksen

IPC: G01F1/84

CPC classification number: G01F1/8454

Abstract: A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.

公开(公告)号：US20090308157A1

公开(公告)日：2009-12-17

申请号：US12138109

申请日：2008-06-12

Applicant: Odd Harald Steen Eriksen ,  Robert William Stuelke

Inventor： Odd Harald Steen Eriksen ,  Robert William Stuelke

IPC: G01C19/04 ,  B23K1/20 ,  B23K31/02

CPC classification number: G01C21/16

Abstract: An inertial measurement system having a triangular cupola shaped base structure with three mutually orthogonal sides and a bottom surface surrounding a hollow core. The bottom surface includes an aperture providing access to the hollow core. An inertial module is mounted on each of the sides and includes a gyroscopic rotational rate sensor and a linear accelerometer connected to a circuit board. The inertial measurement system also includes a motherboard and a plurality of metallization elements. The metallization elements extend from the bottom surface to the sides of the base structure and conductively connect the inertial module to the motherboard. The inertial measurement system may also include a non-conductive adhesive underfill positioned between the inertial module and the base structure.

Abstract translation: 惯性测量系统具有三个圆顶状的基座结构，三个相互正交的侧面和围绕中空的芯的底面。 底表面包括提供通向中空芯的孔。 惯性模块安装在每个侧面上，包括陀螺转速传感器和连接到电路板的线性加速度计。 惯性测量系统还包括母板和多个金属化元件。 金属化元件从基底结构的底表面延伸到侧面，并将惯性模块导电连接到母板。 惯性测量系统还可以包括位于惯性模块和基础结构之间的非导电粘合剂底部填充物。

公开(公告)号：US20120043417A1

公开(公告)日：2012-02-23

申请号：US13272317

申请日：2011-10-13

Applicant: Odd Harald Steen Eriksen ,  Christopher Sanden

Inventor： Odd Harald Steen Eriksen ,  Christopher Sanden

IPC: B64C25/02 ,  G01B7/16

CPC classification number: B64C25/001 ,  B64C2025/006 ,  B64D2045/008 ,  G01L1/142 ,  G01L5/0014

Abstract: A sensor for monitoring loads in a landing gear torque linkage includes a main pin having an axial interior bore defined therein. The main pin is configured and adapted to engage a torque link to a strut lug of a landing gear strut. A core pin is mounted axially within an interior bore of the main pin and is spaced radially inwardly from the interior bore for relative displacement with respect to the main pin. A capacitor is included having an inner capacitor plate mounted to the core pin. An outer capacitor plate is mounted to the main pin. Relative displacement of the core pin and the main pin due to loads acting on the torque link and strut lug results in relative displacement of the inner and outer capacitor plates. Signals can thereby be produced indicative of the loads acting on the torque link.

Abstract translation: 用于监测起落架扭矩联动装置中的载荷的传感器包括具有限定在其中的轴向内孔的主销。 主销被构造和适于接合到起落架支柱的支柱的扭矩连杆。 芯销轴向地安装在主销的内孔内并且与内孔径向向内间隔开，以相对于主销的相对位移。 包括一个电容器，其中内部电容器板安装在芯针上。 外部电容器板安装在主销上。 由于负载作用在扭矩连杆和支柱上的芯销和主销的相对位移导致内外电容板的相对位移。 因此可以产生指示作用在扭矩连杆上的载荷的信号。

公开(公告)号：US20120012699A1

公开(公告)日：2012-01-19

申请号：US12839061

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen

Inventor： Odd Harald Steen Eriksen

IPC: B64C25/28 ,  G01B7/16

CPC classification number: G01L1/142 ,  B64D2045/008 ,  G01B7/22 ,  G01L5/0052

Abstract: A capacitive strain sensor for sensing strain of a structure. The sensor includes a first section attached to the structure at a first location and a second section attached to the structure at a second location. The first section includes a capacitor plate electrically isolated from the structure and the second section includes two electrically isolated capacitive plates, both of the plates being electrically isolated from the structure. A flexible connector connects the first section to the second section. The capacitor plate of the first section is separated from the two capacitive plates of the second section by at least one capacitive gap. When strain is experienced by the structure, a change occurs in the capacitive gap due to relative motion between the first and second sections. The first section includes a core and the second section includes a ring that receives the core.

Abstract translation: 一种用于感测结构应变的电容式应变传感器。 传感器包括在第一位置处附接到结构的第一部分和在第二位置附接到结构的第二部分。 第一部分包括与该结构电隔离的电容器板，并且第二部分包括两个电隔离的电容板，两个板与结构电隔离。 柔性连接器将第一部分连接到第二部分。 第一部分的电容器板通过至少一个电容间隙与第二部分的两个电容板分开。 当结构经受应变时，由于第一和第二部分之间的相对运动，在电容间隙中发生变化。 第一部分包括核心，第二部分包括接收核心的环。

公开(公告)号：US06776261B2

公开(公告)日：2004-08-17

申请号：US10157566

申请日：2002-05-29

Applicant: Odd Harald Steen Eriksen ,  Charles Robin Hood ,  Jon A. Cox ,  Mark Jefferson Kranz

Inventor： Odd Harald Steen Eriksen ,  Charles Robin Hood ,  Jon A. Cox ,  Mark Jefferson Kranz

IPC: F01M118

CPC classification number: F16C19/52 ,  F16C19/548 ,  F16C33/6625 ,  F16C33/667 ,  F16C33/6674 ,  F16C41/008 ,  F16C2326/02 ,  F16N7/363 ,  F16N2270/52 ,  F16N2270/54

Abstract: An apparatus is disclosed for monitoring characteristics of a fluid lubricant contained within a lubricant chamber formed in a wheel hub mounted for rotation about a stationary wheel axle. The apparatus includes an annular bearing spacer configured for mounting on the wheel axle between axially opposed inboard and outboard bearings, the annular bearing spacer forming an interior lubricant reservoir between an inner surface of the spacer and the wheel axle, a guide vane for directing lubricant from the lubricant chamber to the interior lubricant reservoir during rotation of the wheel hub assembly about the wheel axle, and a sensor operatively associated with the interior lubricant reservoir for determining a condition of the lubricant.

Abstract translation: 公开了一种用于监测容纳在形成在安装成围绕固定轮轴旋转的轮毂中的润滑剂室内的流体润滑剂的特性的装置。 该装置包括环形轴承间隔件，其构造成用于在轴向相对的内侧和外侧轴承之间安装在轮轴上，环形轴承隔离件在隔离件的内表面和轮轴之间形成内部润滑剂储存器，用于将润滑剂从 所述润滑剂室在所述轮毂组件围绕所述轮轴旋转期间到达所述内部润滑剂储存器;以及传感器，其与所述内部润滑剂储存器操作地相关联，用于确定所述润滑剂的状态。

公开(公告)号：US08933713B2

公开(公告)日：2015-01-13

申请号：US13272317

申请日：2011-10-13

Applicant: Odd Harald Steen Eriksen ,  Christopher Sanden

Inventor： Odd Harald Steen Eriksen ,  Christopher Sanden

IPC: G01R27/26 ,  G01L5/00 ,  B64C25/00 ,  G01L1/14 ,  B64D45/00

CPC classification number: B64C25/001 ,  B64C2025/006 ,  B64D2045/008 ,  G01L1/142 ,  G01L5/0014

Abstract: A sensor for monitoring loads in a landing gear torque linkage includes a main pin having an axial interior bore defined therein. The main pin is configured and adapted to engage a torque link to a strut lug of a landing gear strut. A core pin is mounted axially within an interior bore of the main pin and is spaced radially inwardly from the interior bore for relative displacement with respect to the main pin. A capacitor is included having an inner capacitor plate mounted to the core pin. An outer capacitor plate is mounted to the main pin. Relative displacement of the core pin and the main pin due to loads acting on the torque link and strut lug results in relative displacement of the inner and outer capacitor plates. Signals can thereby be produced indicative of the loads acting on the torque link.

Abstract translation: 用于监测起落架扭矩联动装置中的载荷的传感器包括具有限定在其中的轴向内孔的主销。 主销被构造和适于接合到起落架支柱的支柱的扭矩连杆。 芯销轴向地安装在主销的内孔内并且与内孔径向向内间隔开，以相对于主销的相对位移。 包括一个电容器，其中内部电容器板安装在芯针上。 外部电容器板安装在主引脚上。 由于负载作用在扭矩连杆和支柱上的芯销和主销的相对位移导致内外电容板的相对位移。 因此可以产生指示作用在扭矩连杆上的载荷的信号。

公开(公告)号：US20120043978A1

公开(公告)日：2012-02-23

申请号：US12857793

申请日：2010-08-17

Applicant: Odd Harald Steen Eriksen ,  Alexander Spivak ,  Christopher Sanden

Inventor： Odd Harald Steen Eriksen ,  Alexander Spivak ,  Christopher Sanden

IPC: G01R27/26 ,  E05C19/10

CPC classification number: B64D29/06 ,  E05B41/00 ,  E05B2047/0069 ,  E05C19/14 ,  G01L1/142 ,  G01L5/0004 ,  Y10T292/0949

Abstract: A sensor for monitoring external loads acting on a pin assembly includes a pin having an axial interior bore defined therein and having a length defined from a first end to an opposed second end thereof. A core pin is mounted axially within the interior bore of the pin spaced radially inwardly from the interior bore for relative displacement with respect to the pin. A capacitor is provided having an inner capacitor plate mounted to the core pin, and an outer capacitor plate mounted to the pin, such that relative displacement of the core and the pin due to external loading on the pin results in relative displacement of the inner and outer capacitor plates. The capacitor is configured and adapted to be connected to an electrical circuit to produce signals indicative of external loading on the pin based on relative displacement of the inner and outer capacitor plates.

Abstract translation: 用于监测作用在销组件上的外部负载的传感器包括具有限定在其中的轴向内孔并具有从第一端限定到其相对的第二端的长度的销。 芯销轴向地安装在销的内孔内，与内孔径向向内间隔开，以相对于销的相对位移。 提供一种电容器，其具有安装到芯销的内部电容器板和安装到销的外部电容器板，使得由于外部负载引起的芯和销的相对位移导致内部和/ 外部电容器板。 电容器被配置并适于连接到电路，以基于内部和外部电容器板的相对位移产生指示引脚上的外部负载的信号。

公开(公告)号：US07603915B2

公开(公告)日：2009-10-20

申请号：US11895196

申请日：2007-08-23

Applicant: Alexander Spivak ,  Odd Harald Steen Eriksen ,  Felix Goldenberg ,  Alexander Grichener ,  Christopher Sanden ,  Joe Mctighe ,  Chuang-Chia Lin

Inventor： Alexander Spivak ,  Odd Harald Steen Eriksen ,  Felix Goldenberg ,  Alexander Grichener ,  Christopher Sanden ,  Joe Mctighe ,  Chuang-Chia Lin

IPC: G01F1/80

CPC classification number: G01F1/28 ,  G01F1/78

Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

Abstract translation: 公开了一种力平衡质量流量计，其包括具有内孔的圆柱形传感器壳体，被支撑用于在传感器壳体的内孔内轴向旋转的叶轮体，并且包括当流体相对流动时将流体惯性转换为流动感应扭矩的结构 到叶轮本体，用于测量叶轮本体相对于传感器壳体的旋转角度的接近传感器，用于在传感器壳体周围产生磁场以防止叶轮本体旋转的电磁体，用于确定来自接近 当流体相对于叶轮本体流动时传感器;以及控制器，用于响应于从接近传感器确定的电值控制提供给电磁体的电流，以产生足以防止叶轮旋转的磁场。