公开(公告)号：US20050277029A1

公开(公告)日：2005-12-15

申请号：US11197584

申请日：2005-08-05

申请人： Fumihiro Sasajima ,  Osamu Komuro ,  Fumio Mizuno

发明人： Fumihiro Sasajima ,  Osamu Komuro ,  Fumio Mizuno

IPC分类号： H01L21/027 ,  B32B3/00 ,  G01B11/00 ,  G01N23/225 ,  G01Q30/02 ,  G01Q30/04 ,  G03F7/20 ,  H01L21/66

CPC分类号： G03F7/70608 ,  G01N23/225 ,  G06T7/0004 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/2487

摘要： The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by calculating, and displaying on the screen, the dislocation vector that represents the relationship in position between the detected patterns on the surface and at the bottom of the photoresist. Furthermore, dislocation vectors between the microstructured patterns at multiple positions in a single-chip or single-shot area or on one wafer are likewise calculated, then the sizes and distribution status of the dislocation vectors at each such position are categorized as characteristic quantities, and the corresponding tendencies are analyzed. Thus, stepper or wafer abnormality is detected.

摘要翻译： 相对于由步进器暴露的微结构化图案检测掩模版的边缘，并且检测光致抗蚀剂表面和底部处的微结构图案的形状。 通过在屏幕上计算和显示代表光刻胶表面和底部上检测到的图案之间的位置关系的位错矢量来评估微结构化图案。 此外，同样计算单芯片或单次照射区域或一个晶片上的多个位置处的微结构化图案之间的位错矢量，则将每个这样的位置处的位错矢量的尺寸和分布状态分类为特征量，并且 分析相应的趋势。 因此，检测到步进器或晶片异常。

公开(公告)号：US09702695B2

公开(公告)日：2017-07-11

申请号：US13700096

申请日：2011-05-25

申请人： Hiroki Kawada ,  Osamu Inoue ,  Miyako Matsui ,  Takahiro Kawasaki ,  Naoshi Itabashi ,  Takashi Takahama ,  Katsumi Setoguchi ,  Osamu Komuro

发明人： Hiroki Kawada ,  Osamu Inoue ,  Miyako Matsui ,  Takahiro Kawasaki ,  Naoshi Itabashi ,  Takashi Takahama ,  Katsumi Setoguchi ,  Osamu Komuro

IPC分类号： G01N23/00 ,  G01B15/00 ,  H01J37/22 ,  H01J37/28 ,  G06K9/62

CPC分类号： G01B15/00 ,  G06K9/6201 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2817 ,  H01J2237/2826 ,  Y10T428/24355

摘要： An object of the present invention is to provide an image processing apparatus that quickly and precisely measures or evaluates a distortion in a field of view and a charged particle beam apparatus. To attain the object, an image processing apparatus or the like is proposed which acquires a first image of a first area of an imaging target and a second image of a second area that is located at a different position than the first area and partially overlaps with the first area and determines the distance between a measurement point in the second image and a second part of the second image that corresponds to a particular area for a plurality of sites in the overlapping area of the first image and the second image.

公开(公告)号：US09275829B2

公开(公告)日：2016-03-01

申请号：US13818094

申请日：2011-08-31

申请人： Katsumi Setoguchi ,  Osamu Komuro

发明人： Katsumi Setoguchi ,  Osamu Komuro

IPC分类号： H01J3/14 ,  G06K9/36 ,  H01J37/28 ,  H01J37/26

CPC分类号： H04N7/18 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2826

摘要： In an image forming apparatus and a computer program, extraction of information about distortion in a charged particle beam scan area can be implemented. An image forming apparatus integrates image data obtained by a charged particle beam apparatus and calculates, from a plurality of images with different scan directions of the charged particle beam apparatus, first information about the amount of change in a feature quantity in accordance with the time of irradiation of the charged particle beam, second information about the amount of change in the feature quantity before and after a change in beam scan direction, and/or third information about a position error of a pattern on the image before and after the change in beam scan direction.

摘要翻译： 在图像形成装置和计算机程序中，可以实现关于带电粒子束扫描区域中的失真的信息的提取。 图像形成装置对由带电粒子束装置得到的图像数据进行了积分，并根据带电粒子束装置的不同扫描方向的多个图像，根据时间 带电粒子束的照射，关于光束扫描方向改变前后的特征量的变化量的第二信息，和/或关于光束变化前后的图像上的图案的位置误差的第三信息 扫描方向。

公开(公告)号：US08704175B2

公开(公告)日：2014-04-22

申请号：US13812451

申请日：2011-08-26

申请人： Yasunari Sohda ,  Muneyuki Fukuda ,  Takeyoshi Ohashi ,  Osamu Komuro ,  Toru Yamanashi

发明人： Yasunari Sohda ,  Hiromasa Yamanashi ,  Muneyuki Fukuda ,  Takeyoshi Ohashi ,  Osamu Komuro

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1506 ,  H01J2237/1532 ,  H01J2237/2826

摘要： Provided is a scanning electron microscope equipped with a high-speed and high-precision astigmatism measuring means to be used when both astigmatism generated by an electron-beam column and astigmatism generated from the surroundings of a measuring sample exist. This scanning electron microscope is characterized in controlling an astigmatism corrector (201) with high-speed and high-precision, to correct the astigmatism, by using both a method of obtaining the astigmatism from the qualities of two-dimensional images to be acquired upon changing the intensity of the astigmatism corrector (201), and a method of measuring the astigmatism from the change in the position displacement of an electron beam that occurs when the electron beam is tilted using a tilt deflector (202).

摘要翻译： 本发明提供一种扫描电子显微镜，其配备有当由电子束柱产生的散光和从测量样品的周围产生的散光存在时使用的高速和高精度散光测量装置。 该扫描电子显微镜的特征在于以高速和高精度控制像散校正器（201），以通过使用从改变后获得的二维图像的质量获得散光的方法来校正像散 散光校正器（201）的强度，以及根据使用倾斜偏转器（202）使电子束倾斜时发生的电子束的位置偏移的变化来测量像散的方法。

公开(公告)号：US20130141563A1

公开(公告)日：2013-06-06

申请号：US13818094

申请日：2011-08-31

申请人： Katsumi Setoguchi ,  Osamu Komuro

发明人： Katsumi Setoguchi ,  Osamu Komuro

IPC分类号： H04N7/18

CPC分类号： H04N7/18 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2826

摘要： The purpose of the present invention is to provide an image forming apparatus and a computer program such that extraction of information about distortion in a charged particle beam scan area can be implemented. An embodiment for achieving the purpose proposes: an image forming apparatus that integrates image data obtained by a charged particle beam apparatus and that calculates, from a plurality of images with different scan directions of the charged particle beam apparatus, first information about the amount of change in a feature quantity in accordance with the time of irradiation of the charged particle beam, second information about the amount of change in the feature quantity before and after a change in beam scan direction, and/or third information about a position error of a pattern on the image before and after the change in beam scan direction; and a computer program for causing a computing apparatus to perform the above process.

摘要翻译： 本发明的目的是提供一种图像形成装置和计算机程序，从而可以实现关于带电粒子束扫描区域中的失真的信息的提取。 实现该目的的实施例提出：一种图像形成装置，其对由带电粒子束装置获得的图像数据进行积分，并且从具有带电粒子束装置的不同扫描方向的多个图像计算关于变化量的第一信息 在根据照射带电粒子束的时间的特征量中，关于波束扫描方向的变化前后的特征量的变化量的第二信息和/或关于图案的位置误差的第三信息 在光束扫描方向变化前后的图像上; 以及用于使计算装置执行上述处理的计算机程序。

公开(公告)号：US20080226177A1

公开(公告)日：2008-09-18

申请号：US12125444

申请日：2008-05-22

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

IPC分类号： G06K9/48

CPC分类号： G01N23/2251

摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.

摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。

公开(公告)号：US07405835B2

公开(公告)日：2008-07-29

申请号：US11808627

申请日：2007-06-12

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

IPC分类号： G01B11/24 ,  G01N23/00 ,  G06K9/46

CPC分类号： G01N23/2251

摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.

摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。

公开(公告)号：US20070114399A1

公开(公告)日：2007-05-24

申请号：US11651498

申请日：2007-01-10

申请人： Fumihiro Sasajima ,  Yoshihiro Kimura ,  Osamu Komuro

发明人： Fumihiro Sasajima ,  Yoshihiro Kimura ,  Osamu Komuro

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/222 ,  G01N23/225 ,  G03F7/70625 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2814

摘要： A pattern measuring method calculates an average pattern shape from a plurality of the same patterns appearing within an image captured using an electron microscope, and compares pattern information at each measuring position with average pattern information to determine roughness.

公开(公告)号：US06872943B2

公开(公告)日：2005-03-29

申请号：US10192692

申请日：2002-07-11

申请人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

发明人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

IPC分类号： G01B15/04 ,  G01B15/08 ,  H01J37/28 ,  H01L21/66 ,  G01K1/08 ,  G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2815

摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.

公开(公告)号：US09202665B2

公开(公告)日：2015-12-01

申请号：US13981952

申请日：2011-11-30

申请人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

发明人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

IPC分类号： H01J37/28 ,  H01J37/02

CPC分类号： H01J37/026 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/047

摘要： Provided is a charged particle beam apparatus adapted so that even when an additional device is not mounted in the charged particle beam apparatus, the apparatus rapidly removes, by neutralizing, a local charge developed on a region of a sample that has been irradiated with a charged particle beam.After charged particle beam irradiation for measurement of the sample, the apparatus controls a retarding voltage or/and an accelerating voltage at a stage previous to a next measurement, and then neutralizes an electric charge by reducing a difference between a value of the retarding voltage and that of the accelerating voltage to a value smaller than during the currently ongoing measurement.The charged particle beam achieves neutralizing without reducing throughput, since the local charge developed on the region of the sample that has been irradiated with the charged particle beam is removed, even without an additional device mounted in the apparatus.

摘要翻译： 提供一种带电粒子束装置，其适于使得即使附加装置未安装在带电粒子束装置中，该装置通过中和在已经被充电的照射的样品的区域上产生的局部电荷， 粒子束。 在用于测量样品的带电粒子束照射之后，该装置在下一次测量之前的阶段控制延迟电压和/或加速电压，然后通过减小延迟电压的值和 加速电压的值小于当前正在进行的测量中的值。 带电粒子束实现中和而不降低生产量，因为即使没有安装在装置中的附加装置，在被带电粒子束照射的样品区域上产生的局部电荷被去除。