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公开(公告)号：US5240557A
公开(公告)日：1993-08-31
申请号：US891536
申请日：1992-06-01
申请人： Lawrence D. Dyer , Dempsey McGregor , Robert M. Montgomery , Jerry B. Medders , Michael R. Head , Tom G. Gullett
发明人： Lawrence D. Dyer , Dempsey McGregor , Robert M. Montgomery , Jerry B. Medders , Michael R. Head , Tom G. Gullett
IPC分类号： H01L21/304 , H01L21/306 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67781 , Y10S414/137
摘要： An apparatus stacks semiconductor wafers and spacers and clamps them in an axial alignment for mounting in a semiconductor wafer edge polishing machine. After edge polishing, the apparatus separates the wafers and spacers and delivers them respectively into separate cassettes for further processing or recycling.
摘要翻译： 装置堆叠半导体晶片和间隔物并将其夹紧在轴向对准中以安装在半导体晶片边缘抛光机中。 在边缘抛光之后，设备分离晶片和间隔物并将它们分别输送到单独的盒中用于进一步处理或回收。
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公开(公告)号：US4182543A
公开(公告)日：1980-01-08
申请号：US825986
申请日：1977-08-19
摘要： A ruggedized acousto-optic waveguide comprising a pair of inner plastic plates, a sheet of optical glass sandwiched flush between the inner plates with side edges exposed to ambient light, a transducer acoustically coupled with one end of the sheet of glass, a resilient pad overlaying one of the inner plates, a pair of cover plates mounted about and in compressive engagement with the pair of inner plates and resilient pad, and a set of compression springs coupled with the other end of the sheet of glass applying in-plane compression thereto.
摘要翻译： 一种加固的声光波导，包括一对内部塑料板，夹在内板之间的平板玻璃板，侧面暴露于环境光下，与该玻璃板的一端声学耦合的换能器，弹性垫覆盖 一个内板，一对安装在一对内板和弹性垫周围并与之成压缩接合的盖板，以及一组压缩弹簧，与玻璃板的另一端连接，对其施加平面内的压缩。
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23.发明授权公开(公告)号：US08675203B2
公开(公告)日：2014-03-18
申请号：US13102732
申请日：2011-05-06
CPC分类号： G01N21/1702 , A61B1/00163 , G01N29/2418 , G01N2291/02475
摘要： A biological sensing apparatus includes an excitation source configured to induce waves in a biological target, and an optical waveguide interferometer configured to sense the induced waves in the biological target. The optical waveguide interferometer includes a plurality of optical couplers and interconnecting optical fibers arranged to define a reference arm, a measurement arm, and a probe segment coupled to the reference arm and the measurement arm and having a probe segment end to be positioned adjacent the biological target. An optical path length adjustor is coupled to the reference arm. A controller cooperates with the optical path length adjustor and a first optical detector. The controller is configured to adjust an optical path length of the reference arm to maintain a constant relationship with respect to an optical path length of the measurement arm, and to generate biological target data based upon the first optical detector.
摘要翻译： 生物感测装置包括被配置为在生物靶中感应波的激发源和被配置为感测生物靶中的感应波的光波导干涉仪。 光波导干涉仪包括多个光耦合器和互连光纤，其布置成限定参考臂，测量臂和耦合到参考臂和测量臂的探针段，并且具有位于生物体附近的探针段端 目标。 光路长度调节器耦合到参考臂。 控制器与光路长度调节器和第一光学检测器协作。 控制器被配置为调整参考臂的光路长度以保持与测量臂的光路长度恒定的关系，并且基于第一光学检测器生成生物学目标数据。
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24.发明申请INTERFEROMETRIC BIOMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE COUPLING AND ASSOCIATED METHODS 有权包含可调节耦合和相关方法的干涉生物量感测装置公开(公告)号：US20120281228A1
公开(公告)日：2012-11-08
申请号：US13102654
申请日：2011-05-06
CPC分类号： A61B5/0059 , G01B9/0205 , G01B9/02068 , G01B11/0666 , G01H9/004 , G01N29/2418 , G01N2291/02475
摘要： A biological sensing apparatus comprises an excitation source configured to induce waves in a biological target, and an optical waveguide interferometer configured to sense the induced waves in the biological target. The optical waveguide interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the biological target. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the biological target.
摘要翻译： 生物感测装置包括被配置为在生物靶中感应波的激发源和被配置为感测生物靶中的感应波的光波导干涉仪。 光波导干涉仪包括具有探针段末端的探针段和被配置为允许设置探针段末端和生物靶之间的间隙的可调耦合器。 控制器耦合到可调节耦合器并且被配置为设置探针段端部和生物靶标之间的间隙。
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25.发明授权公开(公告)号：US07079260B2
公开(公告)日：2006-07-18
申请号：US10631271
申请日：2003-07-31
申请人： Robert M. Montgomery
发明人： Robert M. Montgomery
CPC分类号： G01B11/2441 , G01M11/005 , H01Q1/22 , H01Q1/288 , H01Q15/14 , H01Q19/12
摘要： An optical profile determining apparatus includes an optical detector and an optical source. The optical source generates a transmit beam including a plurality of wavelengths, and generates a reference beam including the plurality of wavelengths. Optical elements direct the transmit beam to a target, direct a resulting reflected transmit beam back from the target to the optical detector, and combine the reference beam with the reflected transmit beam so that a profile of the target is based upon fringe contrast produced by the plurality of wavelengths in the reference beam and the plurality of wavelengths in the reflected transmit beam.
摘要翻译： 光学轮廓确定装置包括光学检测器和光学源。 光源产生包括多个波长的发射波束，并且产生包括多个波长的参考波束。 光学元件将发射光束定向到目标，将所得反射的发射光束从目标反射回到光学检测器，并将参考光束与反射的发射光束组合，使得目标的轮廓基于由 参考光束中的多个波长和反射的发射光束中的多个波长。
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26.发明授权Timing control in acousto-optic scanner based on acoustic velocity of traveling wave lens 失效基于行波透镜声速的声光扫描仪的时序控制公开(公告)号：US06538690B1
公开(公告)日：2003-03-25
申请号：US09520572
申请日：2000-03-08
IPC分类号： H04N302
CPC分类号： G02F1/33
摘要： Pixel clock and beam scan timing of an acousto-optic scanner are controlled by an acoustic velocity-driven, phase locked loop containing an adjustable voltage controlled pixel clock generator, which is controlled by a detector that produces delayed and attenuated replica of the excitation waveform applied to an ATWL scanner used to scan a light beam across a workpiece. In a first embodiment of the invention, an end-of-cell transducer converts the pressure induced traveling lens into an electrical signal replica of the excitation input. In a second embodiment, an end-of-scan optical pick-off monitor is employed to detect the scanned optical spot as it crosses its field of view. Each pixel is spatially invariant to propagation velocity changes in the ATWL medium, so that as variations in temperature change the speed of the pressure-induced lens traveling from the excitation transducer to the end of the ATWL cell on each scan, the pixel clock is correspondingly slowed down or speeded up by the same proportional amount, to maintain registration in time and space.
摘要翻译： 声光扫描仪的像素时钟和光束扫描时序由声速驱动的锁相环控制，该声速驱动的锁相环包含可调压电像素时钟发生器，其由检测器控制，该检测器产生施加的激励波形的延迟和衰减副本 到用于在工件上扫描光束的ATWL扫描仪。 在本发明的第一实施例中，电池终端换能器将压力感应行进透镜转换成激励输入的电信号副本。 在第二实施例中，采用扫描结束的光学拾取监视器来检测被扫描的光点穿过其视野时。 每个像素对于ATWL介质中的传播速度变化在空间上是不变的，因此随着温度变化，在每次扫描时，从激发换能器传播到ATWL单元末端的压力感应透镜的速度相应地变化 以相同比例的速度减速或加速，以便在时间和空间上保持注册。
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27.发明授权Stepped acoustic impedance-matching transformer for very narrow channel acoustic traveling wave lens waveguide 有权用于非常窄通道声波行波透镜波导的阶跃声阻抗匹配变压器公开(公告)号：US06320989B1
公开(公告)日：2001-11-20
申请号：US09235695
申请日：1999-01-22
IPC分类号： G02F1335
摘要： An acoustic impedance-matching transformer includes a tapered acoustic energy transmission (metal) block, having an acoustic impedance less than that of a piezo-electric transducer in a metric direction toward that of the acoustic propagation medium of the waveguide, and by an amount that allows tailoring of the relative spatial dimensions of mating surfaces of the transducer and the block, so as to provide efficient broadband coupling of acoustic energy. The surface area of the end face of the block engaging the transducer is a corresponding fraction of the area of the transducer. The tapered block focuses acoustic energy toward the input aperture of the waveguide channel. The taper is determined in accordance with difference between the acoustic impedance of the aluminum block and that of a second acoustic wave propagation element, such as a quarter-wave section of plexiglass, interposed between the waveguide channel and the tapered block.
摘要翻译： 声阻抗匹配变压器包括锥形声能传输（金属）块，其声学阻抗小于在波导的声传播介质的方向上的压电换能器的声阻抗， 允许调整换能器和块的配合表面的相对空间尺寸，以便提供声能的有效的宽带耦合。 接合换能器的块的端面的表面积是换能器面积的相应部分。 锥形块将声能聚焦到波导通道的输入孔径。 根据介于波导通道和锥形块之间的铝块的声阻抗与诸如有机玻璃的四分之一波长部分的第二声波传播元件的声阻抗之差来确定锥度。
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公开(公告)号：US6043924A
公开(公告)日：2000-03-28
申请号：US235696
申请日：1999-01-22
IPC分类号： G02F1/33
CPC分类号： G02F1/33
摘要： An acoustic traveling wave lens structure for an acousto-optic scanner comprises a confined height fluid-containing channel, upon which a scanned optical beam to be modulated by a acoustic traveling wave is incident. The channel is bounded by spaced-apart walls that extend between a first end of the scanner channel, to which an acoustic transducer is coupled, and a second end of the channel that terminates an acoustic traveling wave launched from the acoustic transducer. The thickness of the channel is linearly tapered from the first end to the second end, so as to maintain a constant acoustic power density. To compensate for the attenuation in acoustic power through the water medium, the waveguide may be heated, to maintain the temperature of the liquid medium (water) within the waveguide channel within a prescribed temperature range over which the acoustic velocity remains substantially constant or undergoes a relatively small variation.
摘要翻译： 用于声光扫描器的声波行波透镜结构包括限定高度的流体流通道，由声波行波调制的扫描光束入射。 通道由间隔开的壁限制，所述壁在扫描仪通道的第一端与声学换能器耦接到的第一端和通道的第二端之间延伸，该第二端终止从声换能器发射的声波。 通道的厚度从第一端到第二端呈线性渐缩，以保持恒定的声功率密度。 为了补偿通过水介质的声功率的衰减，可以加热波导，以将波导通道内的液体介质（水）的温度保持在规定的温度范围内，在该温度范围内声速保持基本上恒定或经历 相对较小的变化。
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公开(公告)号：US5801874A
公开(公告)日：1998-09-01
申请号：US668665
申请日：1996-06-25
IPC分类号： G02F1/33
CPC分类号： G02F1/33
摘要： A folded acoustic traveling wave lens arrangement imparts multiple passes of an incident optical beam through the traveling wave lens, and thereby effectively maximize utilization of acoustic power. A lens of optically transmissive bulk material, such as quartz, is disposed in the path of an incident light beam which is spatially scanned by a light beam deflector. The bulk material of the lens element has a reflective layer disposed upon at least one of its surfaces, and is configured such that an incident light beam undergoes multiple passes through the acoustic wavefront propagating through the lens, prior to emerging from the lens. Aberration in the emerging beam due to multiple passes through the bulk material is corrected by a pupil plane correction plate.
摘要翻译： 折叠的声波行波透镜装置通过行波透镜施加入射光束的多次通过，从而有效地最大化声功率的利用。 光学透射体材料（例如石英）的透镜设置在由光束偏转器空间扫描的入射光束的路径中。 透镜元件的体材料具有设置在其至少一个表面上的反射层，并且被构造为使得入射光束在从透镜出射之前经过传播通过透镜的声波波面经过多次通过。 通过瞳孔平面校正板校正由多次通过大块材料引起的出射光束中的偏振。
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公开(公告)号：US4947685A
公开(公告)日：1990-08-14
申请号：US418047
申请日：1989-10-06
CPC分类号： B65H16/103 , B42C3/00 , B65H16/00 , B65H26/066 , G01B11/043 , G01B21/065 , B65H2301/4148
摘要： A method and apparatus for measuring the repeat length (L) of a moving web includes forming a plurality of detectable marks along the length of the web at a repeated length interval. First and second detectors positioned along the web path are separated by a known distance (S). The repeat length of the web is obtained by detecting a mark moving past the first detector and then detecting a mark moving past the second detector, determining the time (t) separating the detections, and measuring the speed of the moving web (V), wherein the repeat length is calculated using the formula L=S+Vt.
摘要翻译： 用于测量移动幅材的重复长度（L）的方法和设备包括以重复的长度间隔沿纸幅的长度形成多个可检测标记。 沿着幅材路径定位的第一和第二检测器被隔开已知距离（S）。 通过检测移动通过第一检测器的标记，然后检测移动通过第二检测器的标记，确定分离检测的时间（t）和测量移动幅材（V）的速度，获得纸幅的重复长度， 其中使用公式L = S + Vt来计算重复长度。
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