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公开(公告)号：US10469957B2
公开(公告)日：2019-11-05
申请号：US15901830
申请日：2018-02-21
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Yuki Uchida
Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.
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公开(公告)号：US10412501B2
公开(公告)日：2019-09-10
申请号：US15808736
申请日：2017-11-09
Applicant: OMRON Corporation
Inventor： Yuki Uchida
Abstract: A capacitive transducer system has a capacitive transducer, and a controller. The capacitive transducer includes a first fixed electrode, a second fixed electrode, and a vibration electrode disposed between the first fixed electrode and the second fixed electrode so as to face the first and second fixed electrodes through gaps. A first capacitor is formed by the first fixed electrode and the vibration electrode. A second capacitor is formed by the second fixed electrode and the vibration electrode. The capacitive transducer is configured to convert transformation of the vibration electrode into changes in capacitance in the first capacitor and the second capacitor. The controller is configured to process voltages supplied to the first capacitor and the second capacitor and/or signals based on the changes in capacitance of the first capacitor and the second capacitor.
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公开(公告)号：US20180295454A1
公开(公告)日：2018-10-11
申请号：US15904209
申请日：2018-02-23
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Sebastiano Conti , Igino Padovani , Filippo David
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US09521491B2
公开(公告)日：2016-12-13
申请号：US14773451
申请日：2013-09-09
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai , Yuki Uchida
CPC classification number: H04R7/18 , B81B7/0006 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81B2207/07 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R19/04 , H04R2410/03 , H01L2924/00014
Abstract: A diaphragm is arranged on the upper surface of a silicon substrate so as to cover a chamber in the silicon substrate. Multiple anchors are provided on the upper surface of the silicon substrate, and the lower surfaces of corner portions of the diaphragm are supported by the anchors. Also, a fixed electrode plate is provided above the diaphragm with an air gap therebetween. In a view from a direction perpendicular to the upper surface of the silicon substrate, the entire length of the outer edge of the diaphragm located between adjacent anchors is located outward of a line segment that circumscribes the edges of the adjacent anchors on the side distant from the center of the diaphragm. Also, one or two or more through-holes are formed in the diaphragm in the vicinity of the anchors.
Abstract translation: 在硅衬底的上表面上设置隔膜以覆盖硅衬底中的室。 在硅基板的上表面上设置有多个锚，并且隔膜的角部的下表面被锚固件支撑。 此外，固定电极板设置在隔膜的上方，其间具有气隙。 在从垂直于硅衬底的上表面的方向看来，位于相邻锚固件之间的隔膜的外边缘的整个长度位于一个线段的外侧，该线段在相邻的锚的边缘远离 隔膜的中心。 此外，在隔膜附近形成有一个或两个以上的通孔。
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公开(公告)号：US09363608B2
公开(公告)日：2016-06-07
申请号：US13936104
申请日：2013-07-05
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。
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Patent Agency Ranking
公开(公告)号：US20150245123A1
公开(公告)日：2015-08-27
申请号：US14426536
申请日：2013-08-12
Applicant: OMRON CORPORATION
Inventor： Yuki Uchida , Takashi Kasai
IPC: H04R1/08
Abstract: A capacitance type sensor has a substrate, a vibration electrode plate formed over the substrate, a back plate formed over the substrate so as to cover the vibration electrode plate, and a fixed electrode plate provided on the back plate so as to be opposite to the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is separated into a plurality of regions, each of the plurality of regions being formed with a sensing section including the vibration electrode plate and the fixed electrode plate. A barrier electrode is provided between respective sensing sections of at least one adjacent pair of regions of the plurality of regions to prevent signal interference between the respective sensing sections.
Abstract translation: 电容式传感器具有基板，形成在基板上的振动电极板，形成在基板上的覆盖振动电极板的背板和设置在背板上的固定电极板，以与 振动电极板。 振动电极板和固定电极板中的至少一个被分离成多个区域，所述多个区域中的每个区域形成有包括振动电极板和固定电极板的感测部分。 阻挡电极设置在多个区域中的至少一个相邻的一对区域的相应感测部分之间，以防止各个感测部分之间的信号干扰。
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公开(公告)号：US20150078593A1
公开(公告)日：2015-03-19
申请号：US14482693
申请日：2014-09-10
Applicant: OMRON CORPORATION
Inventor： Yuki Uchida
IPC: H04R19/04
CPC classification number: H04R19/005 , H01L2224/48137 , H01L2924/15151
Abstract: An acoustic transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate and having a void portion that allows pressure to escape, a fixed electrode plate disposed above the substrate opposite the vibrating electrode plate, a plurality of sensing portions configured by the vibrating electrode plate and the fixed electrode plate, at least one of the vibrating electrode plate and the fixed electrode plate being divided into a plurality of regions, and a sensing portion being configured by the vibrating electrode plate and the fixed electrode plate in each of the divided regions, and a leak pressure regulation portion that hinders leakage of air pressure passing through the void portion when the vibrating electrode plate is not undergoing deformation.
Abstract translation: 声学换能器具有：具有空腔的基板，设置在基板上方的振动电极板，具有允许压力逸出的空隙部分;设置在与振动电极板相对的基板上方的固定电极板;多个感测部分， 振动电极板和固定电极板，振动电极板和固定电极板中的至少一个分为多个区域，感测部分由振动电极板和固定电极板构成， 分隔区域和泄漏压力调节部分，当振动电极板不发生变形时，阻止通过空隙部分的空气压力的泄漏。
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公开(公告)号：US20150078589A1
公开(公告)日：2015-03-19
申请号：US14482302
申请日：2014-09-10
Applicant: OMRON Corporation
Inventor： Yuki Uchida
IPC: H04R23/00
CPC classification number: H04R19/005 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R1/086 , H04R19/04 , H04R31/00 , H01L2924/00014
Abstract: A capacitance-type transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate, a back plate disposed on the substrate, a fixed electrode plate disposed on the back plate opposite the vibrating electrode plate, a plurality of holes formed in the back plate and the fixed electrode plate, and a protrusion disposed on the back plate at a location opposing the vibrating electrode plate. In a view from a direction perpendicular to an upper surface of the substrate, a shortest distance from a cross-sectional center of the protrusion to an edge of a hole adjacent to the protrusion is larger than a shortest distance from a center of a region that is surrounded by the holes but not provided with the protrusion to an edge of a hole in the periphery.
Abstract translation: 电容型换能器具有：具有空腔的基板，设置在基板的上方的振动电极板;设置在基板上的背板;配置在与振动电极板相对的背板上的固定电极板，形成在多个孔中的多个孔 背板和固定电极板，以及在与振动电极板相对的位置处设置在背板上的突起。 从垂直于基板的上表面的方向看，从突起的横截面中心到与突起相邻的孔的边缘的最短距离大于距离突起的中心的最短距离， 被孔围绕，但没有在周边的孔的边缘上设置突起。
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公开(公告)号：US20180184212A1
公开(公告)日：2018-06-28
申请号：US15901830
申请日：2018-02-21
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Yuki Uchida
CPC classification number: H04R19/04 , B81B3/00 , B81B2201/0257 , B81B2201/0264 , H01L29/84 , H04R1/222 , H04R19/005 , H04R2201/003
Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.
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公开(公告)号：US09549263B2
公开(公告)日：2017-01-17
申请号：US14482693
申请日：2014-09-10
Applicant: OMRON Corporation
Inventor： Yuki Uchida
CPC classification number: H04R19/005 , H01L2224/48137 , H01L2924/15151
Abstract: An acoustic transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate and having a void portion that allows pressure to escape, a fixed electrode plate disposed above the substrate opposite the vibrating electrode plate, a plurality of sensing portions configured by the vibrating electrode plate and the fixed electrode plate, at least one of the vibrating electrode plate and the fixed electrode plate being divided into a plurality of regions, and a sensing portion being configured by the vibrating electrode plate and the fixed electrode plate in each of the divided regions, and a leak pressure regulation portion that hinders leakage of air pressure passing through the void portion when the vibrating electrode plate is not undergoing deformation.
Abstract translation: 声学换能器具有：具有空腔的基板，设置在基板上方的振动电极板，具有允许压力逸出的空隙部分;设置在与振动电极板相对的基板上方的固定电极板;多个感测部分， 振动电极板和固定电极板，振动电极板和固定电极板中的至少一个分为多个区域，感测部分由振动电极板和固定电极板构成， 分隔区域和泄漏压力调节部分，当振动电极板不发生变形时，阻止通过空隙部分的空气压力的泄漏。
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