NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
    23.
    发明申请
    NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    非易失性存储器件及其制造方法

    公开(公告)号:US20150035042A1

    公开(公告)日:2015-02-05

    申请号:US14486547

    申请日:2014-09-15

    Abstract: A nonvolatile memory device includes gate electrodes three dimensionally arranged on a semiconductor substrate, a semiconductor pattern extending from the semiconductor substrate and crossing sidewalls of the gate electrodes, a metal liner pattern formed between the semiconductor pattern and formed on a top surface and a bottom surface of each of the gate electrodes, and a charge storage layer formed between the semiconductor pattern and the metal liner pattern.

    Abstract translation: 非易失性存储器件包括三维地布置在半导体衬底上的栅电极,从半导体衬底延伸并与栅电极的侧壁交叉的半导体图案,形成在半导体图案之间并形成在顶表面和底表面上的金属衬垫图案 以及形成在半导体图案和金属衬垫图案之间的电荷存储层。

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