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21.发明申请Method of fabricating a semiconductor device with a trench isolation structure and resulting semiconductor device 有权制造具有沟槽隔离结构和所得半导体器件的半导体器件的方法公开(公告)号：US20070269949A1
公开(公告)日：2007-11-22
申请号：US11822467
申请日：2007-07-06
申请人： Jun Sumino , Satoshi Shimizu , Tsuyoshi Sugihara
发明人： Jun Sumino , Satoshi Shimizu , Tsuyoshi Sugihara
IPC分类号： H01L21/336
CPC分类号： H01L27/10873 , H01L21/76229 , H01L21/76232 , H01L21/76235 , H01L27/10855 , H01L27/10888 , H01L27/10894
摘要： The present fabrication method includes the steps of: providing a nitride film in a main surface of a semiconductor substrate; providing an upper trench, with the nitride film used as a mask; filling the upper trench with an oxide film introduced therein; removing the oxide film to expose at least a portion of a bottom of the upper trench and allowing a remainder of the oxide film to serve as a sidewall; providing a lower trench in a bottom of the upper trench, with the sidewall used as a mask; and with the upper trench having the sidewall remaining therein, providing an oxide film in the upper trench and the lower trench. This can provide a semiconductor device fabrication method and a semiconductor device preventing a contact from penetrating the device in an interconnection process.
摘要翻译： 本发明的制造方法包括以下步骤：在半导体衬底的主表面上设置氮化物膜; 提供上部沟槽，其中所述氮化物膜用作掩模; 用引入其中的氧化膜填充上沟槽; 去除所述氧化物膜以暴露所述上部沟槽的底部的至少一部分并且允许所述氧化膜的其余部分用作侧壁; 在所述上沟槽的底部提供下沟槽，所述侧壁用作掩模; 并且具有保留其侧壁的上沟槽，在上沟槽和下沟槽中提供氧化膜。 这可以提供半导体器件制造方法和半导体器件，以防止接触在互连过程中穿透器件。
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公开(公告)号：US07289146B2
公开(公告)日：2007-10-30
申请号：US10766461
申请日：2004-01-27
申请人： Akio Saigusa , Satoshi Shimizu
发明人： Akio Saigusa , Satoshi Shimizu
IPC分类号： H04N9/64
CPC分类号： H04N5/359 , H04N1/1008 , H04N1/193 , H04N2201/0079 , H04N2201/0412
摘要： In an image reading apparatus using a solid state image pickup element, a smear amount and the total received light amount at whole image taking region of the CCD linear sensor when a light source is turned on without film, are measured and calculated.Using a ratio of the total received light amount when a light source is turned on without film to the one at the time of image reading, a smear correction data of each line is calculated for correction processing.
摘要翻译： 在使用固体摄像元件的图像读取装置中，测定并计算光源未被膜接通时CCD线性传感器的整个摄像区域的总体接收光量。 当光源在没有胶片的情况下打开时，使用总的接收光量的比例与图像读取时的总接收光量的比率，计算每行的涂片校正数据，以进行校正处理。
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公开(公告)号：US20070209177A1
公开(公告)日：2007-09-13
申请号：US11796443
申请日：2007-04-27
申请人： Satoshi Shimizu , Masaru Matsuyama
发明人： Satoshi Shimizu , Masaru Matsuyama
CPC分类号： H03H9/1035 , H03H9/1021 , Y10T29/42 , Y10T29/49005
摘要： A small piezoelectric vibrator having low equivalent series resistance is realized. In the piezoelectric vibrator of the invention, a gettering substance for gettering inner gas is provided in a sealed space formed by a hermetic container where a piezoelectric vibrator piece is arranged. The gettering substance is formed on a surface of the piezoelectric vibrator piece or an inside wall of the hermetic container. A manufacturing process for the piezoelectric vibrator includes a process in which the gettering substance is provided inside the hermetic container which contains the piezoelectric vibrator piece inside the hermetic container, a process in which the hermetic container is hermetic-sealed so that the piezoelectric vibrator piece is sealed in the hermetic container, and a process in which the gettering substance is heated by a laser beam from outside to perform gettering of the inner gas of the hermetic container.
摘要翻译： 实现了具有低等效串联电阻的小型压电振动器。 在本发明的压电振动器中，用于吸入内部气体的吸气物质设置在由设置有压电振动片的密封容器形成的密封空间中。 吸气物质形成在压电振动片的表面或密封容器的内壁上。 压电振动器的制造方法包括在气密容器内含有压电振动片的密封容器内部设置吸气物质的方法，将密封容器密封地密封，使得压电振动片为 密封在密封容器中，并且其中通过来自外部的激光束加热吸气物质以进行密封容器的内部气体的吸气的过程。
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24.发明申请公开(公告)号：US20070205457A1
公开(公告)日：2007-09-06
申请号：US11797406
申请日：2007-05-03
申请人： Satoshi Shimizu
发明人： Satoshi Shimizu
IPC分类号： H01L29/76
CPC分类号： H01L27/11568 , H01L27/115
摘要： A reduction of a resistance of a bit line of a memory cell array and a reduction of a forming area of the memory cell array are planed. Respective bit lines running at right angles to a word line are composed of a diffusion bit line formed in a semiconductor substrate and a linear metal bit line on an upper side of the diffusion bit line. The diffusion bit line is formed in a linear pattern on a lower side of the metal bit line in the same manner, and the metal bit line is connected with the diffusion bit line between the word lines. An interlayer insulating film is formed on the memory cell array, and the metal bit line is formed with being buried in it.
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公开(公告)号：US07212047B2
公开(公告)日：2007-05-01
申请号：US11241995
申请日：2005-10-04
IPC分类号： H03L7/06
CPC分类号： H03L7/0893 , H03L7/087 , H03L7/0898 , H03L7/107 , H03L7/1072 , H03L7/1075
摘要： A semiconductor integrated circuit having a built-in PLL circuit which has two charge pump circuits for charging and discharging capacitive elements of a loop filter in response to signals generated by a phase comparator circuit. One of the two charge pump circuits has current sources which generate current values smaller than those generated by current sources of the other charge pump circuit. The loop filter has a first capacitive element connected to a charge/discharge node, and a second capacitive element connected to the charge/discharge node through a resistive element. The first capacitive element is charged and discharged by the one charge pump circuit, while the second capacitive element is charged and discharged by the other charge pump circuit. A charging current source of the one charge pump circuit operates simultaneously with a discharging current source of the other charge pump circuit, i.e., the charge pump circuits operate in opposite phase.
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公开(公告)号：US07154132B2
公开(公告)日：2006-12-26
申请号：US10716614
申请日：2003-11-20
申请人： Satoshi Shimizu
发明人： Satoshi Shimizu
IPC分类号： H01L29/76
CPC分类号： H01L27/11521 , H01L21/76897 , H01L27/115 , H01L29/7881 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device includes a gate electrode having a straight portion, a dummy electrode located at a point on the extension of the straight portion, a stopper insulating film, a sidewall insulating film, an interlayer insulating film, and a linear contact portion extending, when viewed from above, parallel to the straight portion. The longer side of the rectangle defined by the linear contact portion is, when viewed from above, located beyond the sidewall insulating film and within the top region of the gate electrode and the dummy electrode. A gap G between the gate electrode and the dummy electrode appearing, when viewed from above, in the linear contact portion is filled with the sidewall insulating film such that the semiconductor substrate is not exposed.
摘要翻译： 一种半导体器件包括：具有直线部分的栅极电极，位于直线部分延伸点上的虚拟电极，阻挡绝缘膜，侧壁绝缘膜，层间绝缘膜和延伸的线性接触部分 从上方观察，平行于直线部分。 当从上方观察时，由线性接触部分限定的矩形的长边位于侧壁绝缘膜之外并且位于栅电极和虚拟电极的顶部区域内。 当从上方观察时，在直线接触部分中出现的栅电极和虚拟电极之间的间隙G被填充有侧壁绝缘膜，使得半导体衬底不暴露。
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公开(公告)号：US20060028255A1
公开(公告)日：2006-02-09
申请号：US11241995
申请日：2005-10-04
IPC分类号： H03L7/06
CPC分类号： H03L7/0893 , H03L7/087 , H03L7/0898 , H03L7/107 , H03L7/1072 , H03L7/1075
摘要： A semiconductor integrated circuit having a built-in PLL circuit which has two charge pump circuits for charging and discharging capacitive elements of a loop filter in response to signals generated by a phase comparator circuit. One of the two charge pump circuits has current sources which generate current values smaller than those generated by current sources of the other charge pump circuit. The loop filter has a first capacitive element connected to a charge/discharge node, and a second capacitive element connected to the charge/discharge node through a resistive element. The first capacitive element is charged and discharged by the one charge pump circuit, while the second capacitive element is charged and discharged by the other charge pump circuit. A charging current source of the one charge pump circuit operates simultaneously with a discharging current source of the other charge pump circuit, i.e., the charge pump circuits operate in opposite phase.
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公开(公告)号：US20050275063A1
公开(公告)日：2005-12-15
申请号：US10617667
申请日：2003-07-14
申请人： Jun Sumino , Satoshi Shimizu
发明人： Jun Sumino , Satoshi Shimizu
IPC分类号： H01L21/76 , H01L21/762 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , H01L29/00 , H01L21/336
CPC分类号： H01L27/11521 , H01L21/76232 , H01L21/76235 , H01L27/115
摘要： A semiconductor device includes: a silicon substrate, having a main surface, in which trenches are formed; element isolation oxide films filling in trenches; a tunnel oxide film, formed on main surface located between element isolation oxide film and element isolation oxide film, having birds beak portions in birds beak forms that bring into contact with element isolation oxide film and element isolation oxide film, respectively; and a polysilicon film, formed on tunnel oxide film, having a thickness exceeding 0 and being less than 50 nm in an intermediate portion between element isolation oxide film and element isolation oxide film, and being thinner than the above thickness on birds beak portions. Thereby, it is possible to provide a semiconductor device wherein birds beaks are formed in the gate insulating film so as to have the desired dimensions and wherein the gate insulating film has excellent electrical characteristics.
摘要翻译： 半导体器件包括：具有主表面的硅衬底，其中形成沟槽; 填充在沟槽中的元件隔离氧化膜; 形成在元件隔离氧化膜和元件隔离氧化膜之间的主表面上的隧道氧化膜，分别具有与元件隔离氧化膜和元件隔离氧化膜接触的鸟喙部分的鸟嘴部分; 以及在元件隔离氧化膜和元件隔离氧化膜之间的中间部分中，在隧道氧化膜上形成的厚度超过0且小于50nm的多晶硅膜，并且在鸟嘴部分上比上述厚度薄。 由此，可以提供一种半导体器件，其中在栅极绝缘膜中形成鸟喙以具有期望的尺寸，并且其中栅极绝缘膜具有优异的电气特性。
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公开(公告)号：US20050184045A1
公开(公告)日：2005-08-25
申请号：US10510501
申请日：2003-04-17
申请人： Satoshi Shimizu , Takao Kanba , Haruo Ishikawa , Kiyonori Itou
发明人： Satoshi Shimizu , Takao Kanba , Haruo Ishikawa , Kiyonori Itou
CPC分类号： A61L9/03 , A61L2209/12
摘要： The present invention is intended to provide an aroma device that can eliminate the need for the replacement of the light source, can prevent the light source from becoming high in temperature and can allow light and aroma to be enjoyed comfortably with a sense of security for a long time. The aroma device uses, as a light source, LEDs 1 covered with first and second covers 3 and 4, and also uses a heater 5 to heat a material 10 to be heated which emits aroma; hence, the need for the replacement of the light source is eliminated, the light source is prevented from becoming high in temperature, and light and aroma can be enjoyed comfortably with a sense of security for a long time.
摘要翻译： 本发明旨在提供一种能够消除对光源的更换的需要的香味装置，可以防止光源变得高温，并且可以使安全感更舒适地享受光和香气， 长时间。 芳香装置使用被第一和第二盖3和4覆盖的LED 1作为光源，并且还使用加热器5来加热发出香味的待加热材料10; 因此，消除了对光源的更换的需要，防止了光源变得高温，并且能够以长时间的安全感舒适地享受光和香气。
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公开(公告)号：US20050134391A1
公开(公告)日：2005-06-23
申请号：US10739117
申请日：2003-12-19
CPC分类号： H03L7/0893 , H03L7/087 , H03L7/0898 , H03L7/107 , H03L7/1072 , H03L7/1075
摘要： A semiconductor integrated circuit having a built-in PLL circuit which has two charge pump circuits for charging and discharging capacitive elements of a loop filter in response to signals generated by a phase comparator circuit. One of the two charge pump circuits has current sources which generate current values smaller than those generated by current sources of the other charge pump circuit. The loop filter has a first capacitive element connected to a charge/discharge node, and a second capacitive element connected to the charge/discharge node through a resistive element. The first capacitive element is charged and discharged by the one charge pump circuit, while the second capacitive element is charged and discharged by the other charge pump circuit. A charging current source of the one charge pump circuit operates simultaneously with a discharging current source of the other charge pump circuit, i.e., the charge pump circuits operate in opposite phase.
摘要翻译： 一种具有内置PLL电路的半导体集成电路，其具有响应于由相位比较器电路产生的信号而具有用于对环路滤波器的电容元件进行充电和放电的两个电荷泵电路。 两个电荷泵电路中的一个具有产生比另一个电荷泵电路的电流源产生的电流值小的电流源的电流源。 环路滤波器具有连接到充电/放电节点的第一电容元件和通过电阻元件连接到充电/放电节点的第二电容元件。 第一电容元件由一个电荷泵电路充电和放电，而第二电容元件被另一个电荷泵电路充电和放电。 一个电荷泵电路的充电电流源与另一个电荷泵电路的放电电流源同时操作，即电荷泵电路以相反的相位工作。
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