公开(公告)号：US5107210A

公开(公告)日：1992-04-21

申请号：US633842

申请日：1990-12-26

申请人： Yuji Shirao ,  Hiroyuki Chino ,  Toshiharu Nakazawa

发明人： Yuji Shirao ,  Hiroyuki Chino ,  Toshiharu Nakazawa

IPC分类号： G01B7/14 ,  G01B7/00 ,  G01D5/20 ,  G01D5/22

CPC分类号： G01D5/2208

摘要： A displacement sensing circuit for sensing a displacement of a measured object without any contact with the measured object. A detecting coil is disposed relative to the measured object to be capable of changing its inductance in response to a displacement of the measured object from a predetermined position. An output signal from the detecting coil is passed through a band-pass filter. The filter has a frequency band width which is equal to at least twice the upper limit of a response frequency of the sensing circuit, thereby outputting a signal less influenced by a noise. An output from the band-pass filter is detected to provide a signal corresponding to the displacement of the measured object.

公开(公告)号：US09625168B2

公开(公告)日：2017-04-18

申请号：US13813850

申请日：2011-07-25

申请人： Toyoji Shinohara ,  Kohtaro Kawamura ,  Toshiharu Nakazawa

发明人： Toyoji Shinohara ,  Kohtaro Kawamura ,  Toshiharu Nakazawa

IPC分类号： F24F7/00 ,  F04B37/16 ,  B01D53/46 ,  F04B49/10 ,  H01L21/205 ,  F04B51/00 ,  G01M13/00 ,  B01D53/00 ,  F04B37/14 ,  F04B49/06 ,  B01D53/78

CPC分类号： F24F7/00 ,  B01D53/005 ,  B01D53/78 ,  B01D2258/0216 ,  F04B37/14 ,  F04B49/06 ,  F04B2201/1201

摘要： An exhaust system (2) is used for evacuating a chamber of a manufacturing apparatus (1) for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells. The exhaust system (2) includes a vacuum pump apparatus (3) for evacuating the chamber, an exhaust gas treatment apparatus (5) for treating an exhaust gas discharged from the chamber, and a controller (6) for controlling the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5). Information of operation process of the manufacturing apparatus (1), and the kind of gas and the flow rate of the gas supplied to the manufacturing apparatus (1) is inputted into the controller (6) to control the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5).

公开(公告)号：US20060254368A1

公开(公告)日：2006-11-16

申请号：US11418142

申请日：2006-05-05

申请人： Hiroyasu Kawashima ,  Hiroaki Ogamino ,  Katsuaki Usui ,  Toshiharu Nakazawa

发明人： Hiroyasu Kawashima ,  Hiroaki Ogamino ,  Katsuaki Usui ,  Toshiharu Nakazawa

IPC分类号： G01F1/22

CPC分类号： G01F1/28 ,  G01F1/22

摘要： A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter including: a casing having an enlarged portion and disposed vertically; a float, enclosed in the enlarged portion of the casing and at least partly having a detection surface, which is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing; and at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

摘要翻译： 流量计可以测量流量小的流量，测量精度高，可制成小型化，可以处理各种类型的化学药品，并能以低成本轻松生产。 该流量计包括：具有放大部分并垂直设置的壳体; 浮子，封闭在壳体的扩大部分中并且至少部分地具有检测表面，该检测表面将被从下方流入壳体并在壳体中向上流动的流体向上推动; 以及设置在壳体的扩大部分外侧的至少一个位移传感器，用于通过磁化浮子的检测表面来检测浮子的轴向位移。

公开(公告)号：US06603787B1

公开(公告)日：2003-08-05

申请号：US09576208

申请日：2000-05-23

申请人： Shinichi Sekiguchi ,  Hiroyuki Shinozaki ,  Toshimitsu Barada ,  Toshiharu Nakazawa

发明人： Shinichi Sekiguchi ,  Hiroyuki Shinozaki ,  Toshimitsu Barada ,  Toshiharu Nakazawa

IPC分类号： H01S3225

CPC分类号： F16C32/047 ,  H01S3/03 ,  H01S3/036 ,  H01S3/225

摘要： A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable shaft being rotatably supported by the bearings, protective bearings for supporting the rotatable shaft when the magnetic bearings are not in operation, and a motor for actuating the cross-flow fan. The magnetic bearings include radial magnetic bearings disposed on the opposite ends of the rotatable shaft. One of the radial magnetic bearings which is disposed closely to the motor has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.

摘要翻译： 排出泵浦准分子激光装置具有壳体，一对主放电电极，用于在主放电电极之间产生高速激光气流的横流风扇，所述横流风扇具有从相对端突出的可旋转轴 磁轴承，可旋转轴由轴承可旋转地支撑，当磁轴承不运行时用于支撑可旋转轴的保护轴承，以及用于致动横流风扇的电动机。 磁性轴承包括设置在可旋转轴的相对端上的径向磁轴承。 靠近电机设置的径向磁轴承之一具有大于远离电动机的磁性轴承的轴承刚性的轴承刚度。

公开(公告)号：US06455966B1

公开(公告)日：2002-09-24

申请号：US09660292

申请日：2000-09-12

申请人： Toshimitsu Barada ,  Atsushi Ooyama ,  Toshiharu Nakazawa ,  Shinichi Sekiguchi ,  Masakazu Komai

发明人： Toshimitsu Barada ,  Atsushi Ooyama ,  Toshiharu Nakazawa ,  Shinichi Sekiguchi ,  Masakazu Komai

IPC分类号： H02K709

CPC分类号： F16C32/0444 ,  F16C32/0457

摘要： A magnetic bearing device for use with a motor-combined structure having magnetic bearings supporting a rotatable shaft out of contact therewith and a motor for rotating the rotatable shaft. A common power supply supplies electric power to the magnetic bearings and the motor, and a motor drive power supply limits variations of the electric power supplied to the motor to at most a predetermined level with respect to variations of electric power supplied to the common power supply.

摘要翻译： 一种用于具有支撑与其不接触的可旋转轴的磁性轴承的电动机组合结构的磁性轴承装置和用于旋转可旋转轴的电动机。 公共电源向磁性轴承和电动机供给电力，并且电动机驱动电源相对于向公共电源供给的电力的变化而将提供给电动机的电力的变化限制在至多预定水平 。

公开(公告)号：US06326712B1

公开(公告)日：2001-12-04

申请号：US09643950

申请日：2000-08-23

申请人： Toshiharu Nakazawa ,  Toshimitsu Barada ,  Atsushi Ooyama ,  Masafumi Inoue ,  Shinichi Sekiguchi ,  Hiroyuki Shinozaki

发明人： Toshiharu Nakazawa ,  Toshimitsu Barada ,  Atsushi Ooyama ,  Masafumi Inoue ,  Shinichi Sekiguchi ,  Hiroyuki Shinozaki

IPC分类号： F16C3204

CPC分类号： F16C32/0451 ,  F16C32/047 ,  F16C2300/42 ,  F16C2360/45

摘要： A magnetic bearing device has an electromagnet for levitating an object under electromagnetic forces, a displacement sensor for detecting the displacement of the levitated object, a controller for supplying a signal to the displacement sensor through a cable and a current to the electromagnet through a cable, and a protective plate of nonmagnetic metal material disposed between the displacement sensor and the levitated object. The controller includes a levitation control system having a noise removing filter for preventing an abnormal signal caused by the protective plate from being applied to the displacement sensor.

摘要翻译： 磁性轴承装置具有用于在电磁力下悬浮物体的电磁体，用于检测悬浮物体的位移的位移传感器，用于通过电缆将信号通过电缆和电流提供给电磁体的控制器， 以及设置在位移传感器和悬浮物体之间的非磁性金属材料的保护板。 该控制器包括具有用于防止由保护板引起的异常信号施加到位移传感器的噪声去除滤波器的悬浮控制系统。

公开(公告)号：US06307294B1

公开(公告)日：2001-10-23

申请号：US09522471

申请日：2000-03-09

申请人： Atsusi Ooyama ,  Hiroyuki Chino ,  Toshiharu Nakazawa ,  Atsushi Shiokawa

发明人： Atsusi Ooyama ,  Hiroyuki Chino ,  Toshiharu Nakazawa ,  Atsushi Shiokawa

IPC分类号： H02K709

CPC分类号： F16C32/0451 ,  F16C32/0446

摘要： A magnetic suspending device which can detect the temperature of a controlled object and assure a safe operation thereof without any need for any special construction or work to the device and any special maintenance is disclosed. In the magnetic suspending device comprising a pair of electromagnets (11, 13) disposed opposite to each other, a magnetizable controlled object (15) disposed between the pair of electromagnets (11, 13) and position displacement detection sensors (12, 14) disposed opposite to each other for detecting a position displacement of the controlled object (15), wherein detection signals from the position displacement detection sensors (12, 14) are inputted to a control circuit unit (20) for performing phase compensation and gain adjustment, wherein control outputs from the control circuit unit (20) control magnetic attractive or repulsive forces of the pair of electromagnets (11, 13), and wherein the controlled object is magnetically suspended by the pair of electromagnets without contact at an arbitrary position, a temperature operational circuit unit (30) is provided for detecting the size and temperature of the controlled object (15) using the detection signals from the position displacement detection sensors (12, 14).

摘要翻译： 公开了一种能够检测受控对象的温度并确保其安全操作而不需要对设备进行任何特殊构造或工作以及任何特殊维护的磁悬浮装置。 在包括彼此相对设置的一对电磁体（11,13）的磁悬浮装置中，设置在所述一对电磁体（11,13）之间的可磁化受控对象（15）和位置偏移检测传感器（12,14） 彼此相对地检测受控物体的位置偏移，其中来自位置检测传感器（12,14）的检测信号被输入到用于执行相位补偿和增益调整的控制电路单元（20），其中 来自控制电路单元（20）的控制输出控制该对电磁体（11,13）的吸引力或排斥力，并且其中受控对象由一对电磁铁磁性地悬挂在任意位置处没有接触， 提供电路单元（30），用于使用来自位置位移的检测信号来检测受控对象（15）的尺寸和温度 nt检测传感器（12,14）。

公开(公告)号：US06220831B1

公开(公告)日：2001-04-24

申请号：US09133331

申请日：1998-08-13

申请人： Atsushi Shiokawa ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa

发明人： Atsushi Shiokawa ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa

IPC分类号： F04B1704

CPC分类号： F04D17/168 ,  F04D19/04

摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.

摘要翻译： 一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。

公开(公告)号：US6062810A

公开(公告)日：2000-05-16

申请号：US133332

申请日：1998-08-13

申请人： Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa ,  Atsushi Shiokawa ,  Junichi Arami

发明人： Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa ,  Atsushi Shiokawa ,  Junichi Arami

IPC分类号： F04D29/10 ,  F04D17/16 ,  F04D19/04 ,  F04D15/00 ,  F04B17/00 ,  F04B49/22

CPC分类号： F04D19/04 ,  F04D17/168

摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.

摘要翻译： 涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。 涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。 支撑构件延伸穿过转子和定子中的至少一个。 涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。

公开(公告)号：US5618167A

公开(公告)日：1997-04-08

申请号：US468740

申请日：1995-06-06

申请人： Yutaka Hirakawa ,  Shun-ichi Aiyoshizawa ,  Toshiharu Nakazawa

发明人： Yutaka Hirakawa ,  Shun-ichi Aiyoshizawa ,  Toshiharu Nakazawa

IPC分类号： F04D19/04 ,  F04D29/58 ,  F04B17/00

CPC分类号： F04D19/04 ,  F04D29/584 ,  F16C32/044 ,  F16C37/005

摘要： A vacuum pumping apparatus is presented having a Peltier element based device to provide a dual role of cooling for bearings/drive-motor and heating for sections prone to depositing reaction products. A housing (7) having the bearing and motor sections is provided with a Peltier element based device (20) to absorb the waste heat generated in the bearings and the drive motor, and transfer the waste heat to another section (17) of the apparatus to be released. The released heat may be used to heat that section of the device to facilitate vacuum processing, wherein reaction products are prone to sublime and deposit.

摘要翻译： 提出了一种具有基于珀耳帖元件的装置的真空泵装置，以提供用于轴承/驱动电动机的冷却的双重作用和易于沉积反应产物的部分的加热。 具有轴承和马达部分的壳体（7）设置有基于珀耳帖元件的装置（20），以吸收在轴承和驱动马达中产生的废热，并将废热转移到装置的另一部分（17） 即将面世。 释放的热可用于加热装置的该部分以促进真空处理，其中反应产物易于升华和沉积。