摘要:
An impurity-doped silicon nitride or oxynitride film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas containing a silane family gas, a second process gas containing a nitriding or oxynitriding gas, and a third process gas containing a doping gas. This method alternately includes first to fourth steps. The first step performs supply of the first and third process gases to the field. The second step stops supply of the first to third process gases to the field. The third step performs supply of the second process gas to the field while stopping supply of the first and third process gases to the field, and includes an excitation period of exciting the second process gas by an exciting mechanism. The fourth step stops supply of the first to third process gases to the field.
摘要:
In a semiconductor integrated circuit, a counter counts the number of high-speed clock signals that have been generated in a predetermined number of clock cycles of a low-speed clock signal. In synchronization with the low-speed clock signal, the semiconductor integrated circuit compares the counter value and a predetermined value, and judges whether the frequency of the high-speed clock signal has reaches a predetermined frequency. Since variations in the frequency become smaller as the oscillation of a high-speed oscillator stabilizes, the semiconductor integrated circuit detects that the oscillation is stable when the semiconductor integrated circuit has judged affirmatively a plurality of times.
摘要:
A file management system characterized in that at least one of the nodes included in a peer-to-peer network is provided with a database storing updateable files and a distribution history list preparation unit for preparing a distribution history list storing distribution destination nodes of files stored in the database, a file management method, a file management program, and a file management program storage medium are provided.
摘要:
The radio demodulation circuit of the present invention demodulates a multi-valued FSK signal with a digital demodulator, performs threshold value judgment on the demodulated output of the digital demodulator with a data judging device, and keeps the threshold value obtained by the data judging device in a threshold value holding device.
摘要:
A silicon-containing insulating film is formed on a target substrate by CVD, in a process field to be selectively supplied with a purge gas, a first process gas containing a silane family gas, and a second process gas containing a gas selected from the group consisting of nitriding, oxynitriding, and oxidizing gases. This method alternately includes first to fourth steps. The first, second, third, and fourth steps perform supply of the first process gas, purge gas, second process gas, and purge gas, respectively, while stopping supply of the other two gases. The process field is continuously vacuum-exhausted over the first to fourth steps through an exhaust passage provided with an opening degree adjustment valve. An opening degree of the valve in the first step is set to be 5 to 95% of that used in the second and fourth steps.
摘要:
This invention is a cleaning method of a film-forming unit that forms a thin film on an object to be processed by supplying a process gas into a reaction chamber containing the object to be processed, the method comprising a purging step of purging an inside of the reaction chamber by supplying into the reaction chamber a nitrogen-including gas that includes nitrogen and that is capable of being activated. The purging step has a step of nitriding a surface of a member in the reaction chamber by activating the nitrogen-including gas.
摘要:
A flash device for a lens-fitted photo film unit pre-loaded with unexposed photo film is provided. A main capacitor stores charge. A flash emitter emits flash light. A flash circuit board charges the main capacitor, and drives the flash emitter by discharging the main capacitor in response to an exposing operation. A tightly closed flash case is secured to the lens-fitted photo film unit, for containing the main capacitor, the flash emitter and the flash circuit board. Also, the lens-fitted photo film unit includes a sync switch for generating a trigger signal in response to the exposing operation. Two switch contact points are disposed outside the flash case, for receiving the trigger signal from the sync switch. The two switch contact points disable discharge of the main capacitor while the flash case is away from the lens-fitted photo film unit, and are short-circuited for discharge of the main capacitor upon supply of the trigger signal while the flash case is secured to the lens-fitted photo film unit.
摘要:
An apparatus and a method for transferring a packet flow having a plurality of packets in a communication network which includes plural subnetworks, first and second end systems connected to the respective subnetworks and a transit system for relaying the packet and a message between the first and second end systems through a default route, where the packet flow is forwarded from the first end system to the second end system or to a terminal connected to the second end system, in the first end system, determines it by collating the packet with a predetermined criterion whether to forward the packet flow through a shortcut path bypassing the default route and in dependence upon the determining, sends to the second end system through the default route, a request message requesting to set the shortcut path, along with an address of the first end system; in the second end system, requests the communication network to set the shortcut path between the first and second end systems in accordance with the request message; and in the first and second end systems, forwards the packet flow through the shortcut path.
摘要:
A process for preparing a condensed polyalkoxyphosphazene by reacting a halophosphazene oligomer with an alcohol in the presence of an alkali metal carbonate to produce a condensed partially alkoxy-substituted phosphazene, removing water produced in the reaction from the reaction mixture, and reacting the condensed partially alkoxy-substituted phosphazene with an alkali metal alkoxide. The condensed polyalkoxyphosphazene having desired average molecular weight and viscosity and an excellent stability can be easily prepared in a high yield in a low cost.
摘要:
A heat-exchanger protection structure includes a vehicle-body-side member, a heat exchanger unit, and a plurality of attachment pins. The vehicle-body-side member includes an upper member and a lower member, which have a plurality of attachment holes, respectively. The heat exchanger unit includes a heat exchanger. The attachment pins are attachable on and detachable from the heat exchanger, having a fragile portion capable of being broken when external force larger than a predetermined value acts on the attachment pin. The heat exchanger unit is supported on the vehicle-body-side member by the attachment pins being inserted into the attachment holes. At least one of the fragile portions is broken in case of a vehicle crash to protect the heat exchanger against damage.