Film formation method and apparatus for semiconductor process for forming a silicon nitride film
    21.
    发明授权
    Film formation method and apparatus for semiconductor process for forming a silicon nitride film 有权
    用于形成氮化硅膜的半导体工艺的成膜方法和装置

    公开(公告)号:US07462571B2

    公开(公告)日:2008-12-09

    申请号:US11188736

    申请日:2005-07-26

    IPC分类号: H01L21/31

    摘要: An impurity-doped silicon nitride or oxynitride film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas containing a silane family gas, a second process gas containing a nitriding or oxynitriding gas, and a third process gas containing a doping gas. This method alternately includes first to fourth steps. The first step performs supply of the first and third process gases to the field. The second step stops supply of the first to third process gases to the field. The third step performs supply of the second process gas to the field while stopping supply of the first and third process gases to the field, and includes an excitation period of exciting the second process gas by an exciting mechanism. The fourth step stops supply of the first to third process gases to the field.

    摘要翻译: 在目标衬底上通过CVD形成杂质掺杂的氮化硅或氧氮化物膜,在选择性地供给含有硅烷族气体的第一工艺气体,含有氮化或氮氧化气体的第二工艺气体的工艺领域中, 含有掺杂气体的第三工艺气体。 该方法交替地包括第一至第四步骤。 第一步向现场供应第一和第三工艺气体。 第二步停止向现场供应第一至第三工艺气体。 第三步骤在停止向场施加第一和第三处理气体的同时停止向现场供应第二处理气体,并且包括通过激励机构激励第二处理气体的激发周期。 第四步停止向现场供应第一至第三处理气体。

    SEMICONDUCTOR INTEGRATED CIRCUIT AND INFORMATION PROCESSING SYSTEM
    22.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUIT AND INFORMATION PROCESSING SYSTEM 失效
    半导体集成电路和信息处理系统

    公开(公告)号:US20080297202A1

    公开(公告)日:2008-12-04

    申请号:US12129179

    申请日:2008-05-29

    IPC分类号: H03D13/00

    CPC分类号: H03L7/08 H03K5/19

    摘要: In a semiconductor integrated circuit, a counter counts the number of high-speed clock signals that have been generated in a predetermined number of clock cycles of a low-speed clock signal. In synchronization with the low-speed clock signal, the semiconductor integrated circuit compares the counter value and a predetermined value, and judges whether the frequency of the high-speed clock signal has reaches a predetermined frequency. Since variations in the frequency become smaller as the oscillation of a high-speed oscillator stabilizes, the semiconductor integrated circuit detects that the oscillation is stable when the semiconductor integrated circuit has judged affirmatively a plurality of times.

    摘要翻译: 在半导体集成电路中,计数器对在低速时钟信号的预定数量的时钟周期中产生的高速时钟信号的数量进行计数。 与低速时钟信号同步,半导体集成电路将计数器值和预定值进行比较,判断高速时钟信号的频率是否达到预定频率。 由于随着高速振荡器的振荡稳定,频率的变化变小,当半导体集成电路多次判断时,半导体集成电路检测到振荡稳定。

    FILE MANAGEMENT SYSTEM
    23.
    发明申请
    FILE MANAGEMENT SYSTEM 审中-公开
    文件管理系统

    公开(公告)号:US20080010299A1

    公开(公告)日:2008-01-10

    申请号:US11851516

    申请日:2007-09-07

    申请人: Jun Ogawa

    发明人: Jun Ogawa

    IPC分类号: G06F17/30

    CPC分类号: G06F16/1834

    摘要: A file management system characterized in that at least one of the nodes included in a peer-to-peer network is provided with a database storing updateable files and a distribution history list preparation unit for preparing a distribution history list storing distribution destination nodes of files stored in the database, a file management method, a file management program, and a file management program storage medium are provided.

    摘要翻译: 一种文件管理系统,其特征在于,包括在对等网络中的节点中的至少一个被提供有存储可更新文件的数据库和分发历史列表准备单元,用于准备存储存储的文件的分发目的地节点的分发历史列表 在数据库中,提供文件管理方法,文件管理程序和文件管理程序存储介质。

    Radio demodulation circuit
    24.
    发明申请
    Radio demodulation circuit 审中-公开
    无线电解调电路

    公开(公告)号:US20070189422A1

    公开(公告)日:2007-08-16

    申请号:US11707098

    申请日:2007-02-16

    IPC分类号: H04L27/14

    摘要: The radio demodulation circuit of the present invention demodulates a multi-valued FSK signal with a digital demodulator, performs threshold value judgment on the demodulated output of the digital demodulator with a data judging device, and keeps the threshold value obtained by the data judging device in a threshold value holding device.

    摘要翻译: 本发明的无线电解调电路用数字解调器解调多值FSK信号,利用数据判断装置对数字解调器的解调输出执行阈值判断,并将数据判断装置获得的阈值保持在 阈值保持装置。

    Method for cleaning thin-film forming apparatus
    26.
    发明申请
    Method for cleaning thin-film forming apparatus 审中-公开
    薄膜形成装置的清洗方法

    公开(公告)号:US20060213539A1

    公开(公告)日:2006-09-28

    申请号:US10549851

    申请日:2004-03-25

    IPC分类号: B08B9/00 H05H1/00

    CPC分类号: C23C16/4408 C23C16/4404

    摘要: This invention is a cleaning method of a film-forming unit that forms a thin film on an object to be processed by supplying a process gas into a reaction chamber containing the object to be processed, the method comprising a purging step of purging an inside of the reaction chamber by supplying into the reaction chamber a nitrogen-including gas that includes nitrogen and that is capable of being activated. The purging step has a step of nitriding a surface of a member in the reaction chamber by activating the nitrogen-including gas.

    摘要翻译: 本发明是一种成膜单元的清洗方法,其通过在含有待处理物体的反应室中供给处理气体而在被处理物上形成薄膜,该方法包括:清洗步骤, 反应室通过向反应室供应包含氮气并且能够活化的含氮气体。 清洗步骤具有通过活化含氮气体来使反应室中的构件的表面氮化的步骤。

    Lens-fitted photo film unit, flash device, and lens-fitted photo film system
    27.
    发明授权
    Lens-fitted photo film unit, flash device, and lens-fitted photo film system 失效
    带镜头的摄影胶片单元,闪光灯装置和带镜头的摄影胶片系统

    公开(公告)号:US06839510B2

    公开(公告)日:2005-01-04

    申请号:US10396457

    申请日:2003-03-26

    摘要: A flash device for a lens-fitted photo film unit pre-loaded with unexposed photo film is provided. A main capacitor stores charge. A flash emitter emits flash light. A flash circuit board charges the main capacitor, and drives the flash emitter by discharging the main capacitor in response to an exposing operation. A tightly closed flash case is secured to the lens-fitted photo film unit, for containing the main capacitor, the flash emitter and the flash circuit board. Also, the lens-fitted photo film unit includes a sync switch for generating a trigger signal in response to the exposing operation. Two switch contact points are disposed outside the flash case, for receiving the trigger signal from the sync switch. The two switch contact points disable discharge of the main capacitor while the flash case is away from the lens-fitted photo film unit, and are short-circuited for discharge of the main capacitor upon supply of the trigger signal while the flash case is secured to the lens-fitted photo film unit.

    Apparatus and a method for transferring a packet flow in a communication network
    28.
    发明授权
    Apparatus and a method for transferring a packet flow in a communication network 失效
    用于在通信网络中传送分组流的装置和方法

    公开(公告)号:US06421321B1

    公开(公告)日:2002-07-16

    申请号:US09019403

    申请日:1998-02-05

    IPC分类号: H04L1226

    摘要: An apparatus and a method for transferring a packet flow having a plurality of packets in a communication network which includes plural subnetworks, first and second end systems connected to the respective subnetworks and a transit system for relaying the packet and a message between the first and second end systems through a default route, where the packet flow is forwarded from the first end system to the second end system or to a terminal connected to the second end system, in the first end system, determines it by collating the packet with a predetermined criterion whether to forward the packet flow through a shortcut path bypassing the default route and in dependence upon the determining, sends to the second end system through the default route, a request message requesting to set the shortcut path, along with an address of the first end system; in the second end system, requests the communication network to set the shortcut path between the first and second end systems in accordance with the request message; and in the first and second end systems, forwards the packet flow through the shortcut path.

    摘要翻译: 一种用于在包括多个子网络的通信网络中传送具有多个分组的分组的装置和方法,连接到各个子网络的第一和第二端系统以及用于中继分组的传输系统和在第一和第二 通过默认路由,其中​​分组流从第一端系统转发到第二端系统或连接到第二端系统的终端,在第一端系统中,通过将分组与预定标准进行核对来确定 是否通过绕过默认路由的快捷路径转发数据包流,并且根据确定,通过默认路由向第二终端系统发送请求设置快捷路径的请求消息以及第一端的地址 系统; 在第二端系统中,请求通信网络根据请求消息设置第一和第二终端系统之间的快捷路径; 并且在第一和第二端系统中,通过快捷路径转发分组流。

    Process for preparing condensed polyalkoxyphosphazene
    29.
    发明授权
    Process for preparing condensed polyalkoxyphosphazene 失效
    缩合聚烷氧基磷腈的制备方法

    公开(公告)号:US4451410A

    公开(公告)日:1984-05-29

    申请号:US413686

    申请日:1982-09-01

    CPC分类号: C08G79/025

    摘要: A process for preparing a condensed polyalkoxyphosphazene by reacting a halophosphazene oligomer with an alcohol in the presence of an alkali metal carbonate to produce a condensed partially alkoxy-substituted phosphazene, removing water produced in the reaction from the reaction mixture, and reacting the condensed partially alkoxy-substituted phosphazene with an alkali metal alkoxide. The condensed polyalkoxyphosphazene having desired average molecular weight and viscosity and an excellent stability can be easily prepared in a high yield in a low cost.

    摘要翻译: 一种通过在碱金属碳酸盐存在下使卤代膦腈低聚物与醇反应来制备缩合的聚烷氧基磷腈的方法,以产生缩合的部分烷氧基取代的磷腈,除去反应混合物中产生的水,并使缩合的部分烷氧基 - 取代的磷腈与碱金属醇盐。 具有期望的平均分子量和粘度以及优异的稳定性的缩合的聚烷氧基磷腈可以容易地以低成本高产率制备。

    Heat-exchanger protection structure
    30.
    发明授权
    Heat-exchanger protection structure 有权
    热交换器保护结构

    公开(公告)号:US08869925B2

    公开(公告)日:2014-10-28

    申请号:US13438284

    申请日:2012-04-03

    申请人: Jun Ogawa

    发明人: Jun Ogawa

    IPC分类号: B60K11/04 B60R19/52

    CPC分类号: B60K11/04

    摘要: A heat-exchanger protection structure includes a vehicle-body-side member, a heat exchanger unit, and a plurality of attachment pins. The vehicle-body-side member includes an upper member and a lower member, which have a plurality of attachment holes, respectively. The heat exchanger unit includes a heat exchanger. The attachment pins are attachable on and detachable from the heat exchanger, having a fragile portion capable of being broken when external force larger than a predetermined value acts on the attachment pin. The heat exchanger unit is supported on the vehicle-body-side member by the attachment pins being inserted into the attachment holes. At least one of the fragile portions is broken in case of a vehicle crash to protect the heat exchanger against damage.

    摘要翻译: 一种热交换器保护结构,包括车身侧部件,热交换器单元和多个安装销。 车体侧构件包括分别具有多个安装孔的上部构件和下部构件。 热交换器单元包括热交换器。 附接销可附接在热交换器上并可从该热交换器拆卸,具有在大于预定值的外力作用在附接销上时能够断裂的脆弱部分。 热交换器单元通过插入到安装孔中的安装销支撑在车身侧部件上。 在车辆碰撞的情况下,脆弱部分中的至少一个被破坏以保护热交换器免受损坏。