Abstract:
A chemical mechanical polishing apparatus includes a platen configured to support and rotate a wafer, and a polishing pad facing the platen. The polishing pad includes a body having a groove with a rotational symmetric pattern.
Abstract:
A chemical mechanical polishing apparatus includes a platen having a first region configured to support a wafer, and a second region disposed outside the first region. The chemical mechanical polishing apparatus further includes a polishing pad disposed on the platen, a pad head to which the polishing pad is attached, a slurry supply configured to supply a slurry onto the wafer, and an injection port disposing on the second region of the platen. The injection port is configured to inject a predetermined gas to an edge of a bottom surface of the wafer and toward the outside of the wafer.
Abstract:
A package structure includes a first semiconductor package with at least one mount portion recessed from a first surface of the first semiconductor package toward a second surface of the first semiconductor package, the first and second surfaces facing each other. The first semiconductor package at least partially surrounds a second semiconductor package and is spaced apart therefrom via a material layer.
Abstract:
Disclosed is a rotary knob assembly for a home appliance. The assembly includes a rotary switch having an encoder and a shaft rotatably installed at the encoder, a knob coupled to the shaft of the rotary switch, and a support member provided around the rotary switch to support the rotary switch.
Abstract:
The present invention relates to a printing through a plurality of printer robot systems. Specifically, the invention provides a mobile printer system which prints letters or pictures inputted by a user without being constrained by the printing region through a plurality of mobile printer robots. The present invention comprises a plurality of mobile printer robot systems which have in-built printer functions and a main body which controls the printer operations through a wireless communication with the printer robot system.
Abstract:
A method for transmitting data in a data communication system having a mobile terminal and a transmitting/receiving terminal is enclosed. The method includes the steps of establishing a voice communication channel between the mobile terminal and a receiving data terminal in the data communication system set to a Voice mode, setting the data communication system to a Data mode without disconnecting the voice communication channel by transmitting a first connection request and a telephone number of the receiving data terminal by the transmitting data terminal to the mobile terminal, establishing a data communication channel between the transmitting and receiving data terminals, and transmitting data to the receiving data terminal through the data communication channel. By sending a receiving side telephone number to the mobile terminal together with a connection request signal (ATD command) as shown in the data communication method according to the present invention, a user can transmit or receive data more conveniently during the wireless conversation. The mode of the communication system can simply be converted from a Voice mode to a Data (Fax) mode by transmitting a ATD command together with a receiving side telephone number so that it can provide a substantial convenience to a user when transmitting or receiving data during the wireless phone conversation.
Abstract:
The apparatus for capturing energy from a source of linear motion includes a reciprocating gear rail assembly secured to an input shaft that engages an output gear and shaft for driving an electric generator.
Abstract:
A chemical mechanical polishing apparatus includes a platen configured to support and rotate a wafer, and a polishing pad facing the platen. The polishing pad includes a body having a groove with a rotational symmetric pattern.
Abstract:
A chemical-mechanical polishing (CMP) apparatus for manufacturing a semiconductor device. The apparatus includes: a spin chuck for supporting and rotating a semiconductor wafer; a polisher comprising a polishing pad for planarizing a surface of the semiconductor wafer, the polisher moving along the surface of the semiconductor wafer by a polishing arm; and a polisher supporting device for supporting the polisher and maintaining the polisher in a horizontal state, while polishing an edge part of the surface of the semiconductor wafer, in order to improve polishing uniformity of a center part and the edge part of the semiconductor wafer. Accordingly, polishing uniformity of the center part and edge part of the semiconductor wafer may be improved, and a height of the polisher supporting device may be optimized according to a polishing degree. Also, the polisher may be easily supported, wear and tear of the support head may be minimized, and the support head may function as a conditioner.
Abstract:
Disclosed is a light emitting device including a light emitting structure comprising a first conductive type semiconductor layer, an active layer and a second conductive type semiconductor layer, a first electrode disposed on the first conductive type semiconductor layer, a second electrode disposed on the second conductivity type semiconductor layer, and a low temperature oxide film disposed on the light emitting structure, with an irregular thickness.