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公开(公告)号：US20080266632A1
公开(公告)日：2008-10-30
申请号：US12146561
申请日：2008-06-26
IPC分类号： G02B26/10
CPC分类号： G02B26/105 , G02B26/085
摘要： An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
摘要翻译： 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统，所述振荡系统包括第一振荡器，第一扭转弹簧，第二振荡器，第二扭转弹簧和支撑部件，所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件，其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑， 围绕振荡轴的扭转振荡，其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑，用于围绕振荡轴线的扭转振荡，并且其中振荡系统具有至少两个具有不同频率的固有振荡模式，约为 振荡轴。
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公开(公告)号：US08653613B2
公开(公告)日：2014-02-18
申请号：US13248440
申请日：2011-09-29
CPC分类号： B81C1/00158 , B06B1/0292
摘要： An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate.
摘要翻译： 机电换能器包括多个元件，每个元件包括至少一个蜂窝结构，所述蜂窝结构包括：半导体衬底，半导体膜片和用于支撑隔膜的支撑部分，使得在衬底的一个表面和膜片之间形成间隙 。 元件在包括隔膜的半导体膜的分离位置彼此分离。 每个元件包括穿过包括支撑部分和半导体衬底的第一绝缘层的通孔中：连接到包括隔膜的半导体膜的导体; 以及用于使导体与半导体衬底绝缘的第二绝缘层。
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公开(公告)号：US20130126993A1
公开(公告)日：2013-05-23
申请号：US13813396
申请日：2011-07-26
CPC分类号： H01L21/185 , B06B1/0292 , B81B3/0021
摘要： The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film.The electromechanical transducer includes a plurality of elements each having at least one cell. An insulating layer is formed on a first substrate, and gaps are formed in the insulating layer. A second substrate is bonded to the insulating layer provided with the gaps. Then, dividing grooves are formed in the first substrate and are at least partially filled with an insulating member. Then, the thickness of the second substrate bonded to the insulating layer is reduced to form a film.
摘要翻译： 本发明涉及一种机电换能器及其制造方法，其中保持基板的刚度以防止在分隔槽或薄膜形成期间基板被破坏。 机电换能器包括多个元件，每个元件具有至少一个单元。 在第一基板上形成绝缘层，并且在绝缘层中形成间隙。 第二基板与设置有间隙的绝缘层接合。 然后，分隔槽形成在第一基板中，并且至少部分地填充有绝缘构件。 然后，将与绝缘层接合的第二基板的厚度减小以形成膜。
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24.发明申请ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE ELECTROMECHANICAL TRANSDUCER 审中-公开机电传感器及制造机电传感器的方法公开(公告)号：US20130069480A1
公开(公告)日：2013-03-21
申请号：US13592416
申请日：2012-08-23
CPC分类号： H02N11/00 , H04R19/005 , H04R31/00 , H04R2201/401 , Y10T29/4902
摘要： An electromechanical transducer with less characteristic variation and a method of manufacturing the electromechanical transducer is provided. The electromechanical transducer has a plurality of cells constituted of a first electrode, a vibration film provided with a second electrode provided so as to face the first electrode through a gap, and a supporting portion supporting the vibration film. A structure configured to reduce an uneven flatness between the vibration film and the supporting portion is provided at an outer peripheral portion of a gap while a portion of the supporting portion is interposed between the structure and the gap.
摘要翻译： 提供具有较小特性变化的机电换能器和制造机电换能器的方法。 机电换能器具有多个单元，其由第一电极，设置有通过间隙与第一电极相对设置的第二电极的振动膜和支撑振动膜的支撑部构成。 在间隙的外周部设置有用于减小振动膜与支撑部之间的不均匀平坦度的结构，同时支撑部的一部分插入在结构和间隙之间。
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公开(公告)号：US20100150612A1
公开(公告)日：2010-06-17
申请号：US12600836
申请日：2008-06-30
申请人： Kazutoshi Torashima , Takahisa Kato
发明人： Kazutoshi Torashima , Takahisa Kato
CPC分类号： G02B26/085 , B81B3/007 , B81B2201/042 , Y10T29/49609 , Y10T29/49826 , Y10T74/18856
摘要： An oscillator device includes a supporting member, a movable member, an elastic supporting member configured to elastically support the supporting member and the movable member around an oscillation axis, and a driving member configured to drive the movable member, wherein the elastic supporting member includes a plurality of springs and at least one spring constant adjusting member configured to couple the plurality of springs with each other.
摘要翻译： 一种振荡器装置，包括支撑构件，可动构件，弹性支撑构件，其构造成围绕摆动轴线弹性地支撑支撑构件和可动构件;以及驱动构件，其构造成驱动可动构件，其中弹性支撑构件包括 多个弹簧和至少一个弹簧恒定调节构件，其构造成将多个弹簧彼此连接。
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公开(公告)号：US07656570B2
公开(公告)日：2010-02-02
申请号：US11753057
申请日：2007-05-24
IPC分类号： G02B26/08
CPC分类号： G02B26/105
摘要： An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.
摘要翻译： 光学偏转器包括支撑件，具有光偏转元件的第一可移动元件，至少一个第二可移动元件，至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧，用于围绕振荡轴线的扭转振动， 至少一个第二扭转弹簧，其构造成支撑所述第二可移动元件和所述支撑构件，用于围绕所述振荡轴线的扭转振动;以及驱动系统，构造成将驱动力施加到所述第一和第二可移动元件中的至少一个， 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩，并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。
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公开(公告)号：US20070279725A1
公开(公告)日：2007-12-06
申请号：US11753062
申请日：2007-05-24
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , G02B26/085
摘要： An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
摘要翻译： 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统，所述振荡系统包括第一振荡器，第一扭转弹簧，第二振荡器，第二扭转弹簧和支撑部件，所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件，其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑， 围绕振荡轴的扭转振荡，其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑，用于围绕振荡轴线的扭转振荡，并且其中振荡系统具有至少两个具有不同频率的固有振荡模式，约为 振荡轴。
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公开(公告)号：US09525121B2
公开(公告)日：2016-12-20
申请号：US13436400
申请日：2012-03-30
IPC分类号： H01L41/00 , H01L41/08 , H01L41/09 , H01L41/316 , H01L41/332 , H02N1/08
CPC分类号： B06B1/0292 , H01L41/0815 , H01L41/0973 , H01L41/316 , H01L41/332 , H02N1/006 , H02N1/08 , Y10T29/42
摘要： An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
摘要翻译： 机电换能器包括第一电极; 设置在所述第一电极上的氧化硅膜; 以及振动膜，其包括设置在氧化硅膜上的氮化硅膜，其间具有空间，并且设置在氮化硅膜上以与第一电极相对的第二电极。
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公开(公告)号：US08760035B2
公开(公告)日：2014-06-24
申请号：US13436336
申请日：2012-03-30
IPC分类号： H01L41/047
CPC分类号： H04R1/00 , B06B1/0292 , B81B2201/0271 , B81B2203/04 , B81C1/00626 , H04R2201/003
摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。
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公开(公告)号：US20120256520A1
公开(公告)日：2012-10-11
申请号：US13436400
申请日：2012-03-30
CPC分类号： B06B1/0292 , H01L41/0815 , H01L41/0973 , H01L41/316 , H01L41/332 , H02N1/006 , H02N1/08 , Y10T29/42
摘要： An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
摘要翻译： 机电换能器包括第一电极; 设置在所述第一电极上的氧化硅膜; 以及振动膜，其包括设置在氧化硅膜上的氮化硅膜，其间具有空间，并且设置在氮化硅膜上以与第一电极相对的第二电极。
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