公开(公告)号：US5611942A

公开(公告)日：1997-03-18

申请号：US397617

申请日：1995-03-02

Applicant: Tadashi Mitsui ,  Katsuya Okumura

Inventor： Tadashi Mitsui ,  Katsuya Okumura

IPC: G01B21/30 ,  B81B1/00 ,  G01N37/00 ,  G01Q60/24 ,  G01Q70/10 ,  G01Q70/16 ,  H01J37/28 ,  H01J37/00 ,  B44C1/22

CPC classification number: G01Q60/38 ,  B82Y35/00 ,  Y10S438/978 ,  Y10S977/878

Abstract: The present invention is a method for forming a three point atomic force microscope tip. The method includes forming a substantially longitudinally extending solid tip having a peripheral surface and a forward end surface. Three masks are formed by deposition of carbon upon the solid tip, with a first and second of the masks formed along the peripheral surface, and a third of the masks formed on the forward end surface. The mask covered tip is then etched for a predetermined period of time to remove material from both the tip and the mask. After the predetermined period of time has elapsed, the masks are completely removed, and the removal of material from the tip results in the formation of three spikes which are pointed to the location from which the masks were removed.

Abstract translation: 本发明是形成三点原子力显微镜尖端的方法。 该方法包括形成具有周边表面和前端表面的基本纵向延伸的固体尖端。 通过将碳沉积在固体末端上形成三个掩模，其中第一和第二掩模沿着外周表面形成，并且三分之一的掩模形成在前端表面上。 然后将掩模覆盖的尖端蚀刻预定时间段以从尖端和掩模两者中去除材料。 在经过预定时间之后，掩模被完全去除，并且从尖端去除材料导致三个尖峰的形成，这三个尖峰指向去除掩模的位置。

公开(公告)号：US08355560B2

公开(公告)日：2013-01-15

申请号：US12847716

申请日：2010-07-30

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/00 ,  C09K19/00

CPC classification number: G06K9/00993

Abstract: In accordance with an embodiment, a pattern evaluation system includes an image acquisition unit, a plurality of image processing units, and a control unit which controls the plurality of image processing units. The image acquisition unit loads a series of images of a pattern to be evaluated. The images are acquired at a first speed. The plurality of image processing units process the series of images at a second speed and then output a result of the evaluation of the pattern to be evaluated. The control unit acquires the first and second speeds, estimates the number of the image processing units which allow the time for acquiring the series of images to be substantially the same as the time for processing the series of images, and allocates the estimated image processing units to the processing of the series of images.

Abstract translation: 根据实施例，图案评估系统包括图像获取单元，多个图像处理单元和控制多个图像处理单元的控制单元。 图像获取单元加载要评估的图案的一系列图像。 以第一速度获取图像。 多个图像处理单元以第二速度处理一系列图像，然后输出要评估的图案的评估结果。 控制单元获取第一和第二速度，估计允许获取一系列图像的时间与处理该系列图像的时间基本相同的图像处理单元的数量，并且分配估计的图像处理单元 对系列图像的处理。

公开(公告)号：US08086041B2

公开(公告)日：2011-12-27

申请号：US12659294

申请日：2010-03-03

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/48

CPC classification number: G06T7/0004 ,  G03F7/7065 ,  G06K9/6202 ,  G06T2207/30148

Abstract: A pattern evaluation method includes: generating first array data from edge data on a pattern to be evaluated, the edge data on the pattern to be evaluated being shape data including edge points of the pattern to be evaluated; generating second array data from edge data on a reference pattern, the edge data on the reference pattern including edge points of the reference pattern which serves as an inspection standard of the pattern to be evaluated; subjecting each component of the second array data to array conversion processing, the array conversion processing being designed to convert a value of the component of the second array data into a function value of a value of a distance from that component to the edge point closest thereto, thereby generating third array data; executing arithmetic processing between the first array data and the third array data to generate fourth array data; and using a component of the fourth array data to calculate a numerical value representative of an relation between the pattern to be evaluated and the reference pattern.

Abstract translation: 图案评估方法包括：从要评估的图案上的边缘数据生成第一阵列数据，待评估的图案上的边缘数据是包括要评估的图案的边缘点的形状数据; 在参考图案上从边缘数据生成第二阵列数据，参考图案上的边缘数据包括用作待评估图案的检查标准的参考图案的边缘点; 对所述第二阵列数据的每个分量进行阵列转换处理，所述阵列转换处理被设计为将所述第二阵列数据的分量的值转换为距离所述分量至所述边缘点的距离的值的函数值 从而产生第三阵列数据; 执行第一阵列数据和第三阵列数据之间的算术处理以产生第四阵列数据; 以及使用第四阵列数据的分量来计算表示要评估的图案与参考图案之间的关系的数值。

公开(公告)号：US20110280471A1

公开(公告)日：2011-11-17

申请号：US13137196

申请日：2011-07-27

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/48 ,  G06K9/00

CPC classification number: H04N19/105 ,  H04N19/14 ,  H04N19/176 ,  H04N19/94

Abstract: An image processing apparatus which compresses an image, the apparatus includes: a storage unit which stores a code book, the code book being prepared by allocating identification codes to code blocks, the code blocks being formed by executing quantization processing regarding a plurality of first image blocks as multidimensional vectors, the plurality of first image blocks being generated by cutting, in preset sizes, first regions out of a code book preparation image containing a first edge, each of the first regions surrounding and including an edge point of the first edge, the first edge being detected from the code book preparation image; an edge detection unit which detects a second edge from a compression target image containing the second edge; an image block generation unit which cuts, in preset sizes, second regions out of the compression target image to generate a plurality of second image blocks, each of the second regions surrounding and including an edge point of the detected second edge; a search unit which searches the code book stored in the storage unit for code blocks similar to the second image blocks; and an output unit which outputs information on the identification codes of the similar code blocks which have been searched for and information on coordinates of the edge points of the second image blocks.

公开(公告)号：US08019165B2

公开(公告)日：2011-09-13

申请号：US11785693

申请日：2007-04-19

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/36 ,  G06K9/00

CPC classification number: H04N19/105 ,  H04N19/14 ,  H04N19/176 ,  H04N19/94

Abstract: An image processing apparatus which compresses an image, the apparatus includes: a storage unit which stores a code book, the code book being prepared by allocating identification codes to code blocks, the code blocks being formed by executing quantization processing regarding a plurality of first image blocks as multidimensional vectors, the plurality of first image blocks being generated by cutting, in preset sizes, first regions out of a code book preparation image containing a first edge, each of the first regions surrounding and including an edge point of the first edge, the first edge being detected from the code book preparation image; an edge detection unit which detects a second edge from a compression target image containing the second edge; an image block generation unit which cuts, in preset sizes, second regions out of the compression target image to generate a plurality of second image blocks, each of the second regions surrounding and including an edge point of the detected second edge; a search unit which searches the code book stored in the storage unit for code blocks similar to the second image blocks; and an output unit which outputs information on the identification codes of the similar code blocks which have been searched for and information on coordinates of the edge points of the second image blocks.

Abstract translation: 一种压缩图像的图像处理装置，所述装置包括：存储单元，存储代码簿，所述代码本通过将识别码分配给代码块而准备，所述代码块是通过执行关于多个第一图像的量化处理而形成的 块作为多维向量，所述多个第一图像块通过以包含第一边缘的码本准备图像中的预定大小切割第一区域而产生，所述第一区域中的每一个围绕并包括所述第一边缘的边缘点， 从码本准备图像中检测第一边缘; 边缘检测单元，其从包含第二边缘的压缩目标图像检测第二边缘; 图像块生成单元，其以预设尺寸切割出压缩目标图像之外的第二区域，以生成多个第二图像块，每个第二区域围绕并包括检测到的第二边缘的边缘点; 搜索单元，其搜索与所述第二图像块相似的代码块存储在所述存储单元中的代码簿; 以及输出单元，其输出关于已经搜索的类似代码块的识别代码的信息和关于第二图像块的边缘点的坐标的信息。

公开(公告)号：US07754114B2

公开(公告)日：2010-07-13

申请号：US12007789

申请日：2008-01-15

Applicant: Tadashi Mitsui ,  Hidetoshi Oikawa

Inventor： Tadashi Mitsui ,  Hidetoshi Oikawa

IPC: B29D11/00 ,  B29B9/14 ,  B29B9/00

CPC classification number: B82B3/00 ,  G01Q60/22 ,  G01Q80/00 ,  Y10T428/2913 ,  Y10T428/2933

Abstract: In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the optical fiber is a polarization maintaining optical fiber including the core region, a stress-applying region, and a clad region. The optical fiber probe is formed by mechanical-grinding of the edge of the optical fiber into a sharpened shape so that the core region is located at the tip of a sharpened portion, and by dipping the formed edge of the optical fiber in an etchant for further sharpening the core region. Accordingly, a new optical fiber probe both with high transmission efficiency and with a large polarization degree is obtained.

Abstract translation: 在通过蚀刻尖端部分并且锐化光纤的芯部区域来形成光纤作为光纤探针的光纤探针的制造方法中，光纤是包括芯部区域的保偏光纤， 应力施加区域和包层区域。 光纤探针通过将光纤的边缘机械研磨成锐化的形状形成，使得芯部区域位于锐化部分的尖端处，并且通过将光纤的形成的边缘浸入蚀刻剂 进一步锐化核心区域。 因此，获得具有高透射效率和大偏振度的新型光纤探头。

公开(公告)号：US07526408B2

公开(公告)日：2009-04-28

申请号：US11117387

申请日：2005-04-29

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06F11/30

CPC classification number: H01J37/222 ,  H01J2237/2813

Abstract: A measurement system includes a measurement apparatus, a client computer, and a server computer. The server computer includes a setting edition unit configured to prepare/edit set contents of a recipe of the measurement apparatus from the client computer, a notification unit configured to notify the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer, a data processing unit configured to process data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer, and a result display unit configured to display a processing result of the data processing unit in the client computer.

Abstract translation: 测量系统包括测量装置，客户端计算机和服务器计算机。 服务器计算机包括：设置编辑单元，被配置为从客户端计算机准备/编辑测量装置的配方的内容;通知单元，被配置为向测量装置通知包含在由 客户端计算机，数据处理单元，被配置为基于从客户端计算机输入的设置信息，处理由测量装置通知了其执行请求的食谱获取的数据;以及结果显示单元，被配置为显示数据的处理结果 客户端计算机中的处理单元。

公开(公告)号：US20080121614A1

公开(公告)日：2008-05-29

申请号：US12007789

申请日：2008-01-15

Applicant: Tadashi Mitsui ,  Hidetoshi Oikawa

Inventor： Tadashi Mitsui ,  Hidetoshi Oikawa

IPC: B29D11/00

CPC classification number: B82B3/00 ,  G01Q60/22 ,  G01Q80/00 ,  Y10T428/2913 ,  Y10T428/2933

Abstract: In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the optical fiber is a polarization maintaining optical fiber including the core region, a stress-applying region, and a clad region. The optical fiber probe is formed by mechanical-grinding of the edge of the optical fiber into a sharpened shape so that the core region is located at the tip of a sharpened portion, and by dipping the formed edge of the optical fiber in an etchant for further sharpening the core region. Accordingly, a new optical fiber probe both with high transmission efficiency and with a large polarization degree is obtained.

Abstract translation: 在通过蚀刻尖端部分并且锐化光纤的芯部区域来形成光纤作为光纤探针的光纤探针的制造方法中，光纤是包括芯部区域的保偏光纤， 应力施加区域和包层区域。 光纤探针通过将光纤的边缘机械研磨成锐化的形状形成，使得芯部区域位于锐化部分的尖端处，并且通过将光纤的形成的边缘浸入蚀刻剂 进一步锐化核心区域。 因此，获得具有高透射效率和大偏振度的新型光纤探头。

公开(公告)号：US20060261268A1

公开(公告)日：2006-11-23

申请号：US11403998

申请日：2006-04-14

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G21K7/00

CPC classification number: G03F7/70625 ,  G03F7/70508 ,  G03F7/70525

Abstract: A pattern measuring system comprises an image database provided independently of an image obtaining apparatus, which obtains an image of pattern to be evaluated, and storing the image data, which is obtained by the image obtaining apparatus, and the additional information of the image data; and an image measuring computer provided independently of the image obtaining apparatus and measuring the image data stored in the image database, wherein the image data stored in the image database is measured by the image measuring computer using a measurement recipe selected based on the additional information of the image data, and the result of measurement is sent to a host computer.

Abstract translation: 图案测量系统包括独立于图像获取装置提供的图像数据库，其获得要评估的图案的图像，并且存储由图像获取装置获得的图像数据和图像数据的附加信息; 以及独立于图像获取装置设置的图像测量计算机，并且测量存储在图像数据库中的图像数据，其中存储在图像数据库中的图像数据由图像测量计算机使用基于附加信息选择的测量配方来测量 图像数据和测量结果被发送到主计算机。

公开(公告)号：US20060110042A1

公开(公告)日：2006-05-25

申请号：US11255024

申请日：2005-10-21

Applicant: Atsushi Onishi ,  Tadashi Mitsui ,  Yuichiro Yamazaki

Inventor： Atsushi Onishi ,  Tadashi Mitsui ,  Yuichiro Yamazaki

IPC: G06K9/48 ,  G06K9/00

CPC classification number: G06T7/0006 ,  G06K9/6211 ,  G06T7/12 ,  G06T7/33 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: A pattern matching method includes: detecting an edge of a pattern in a pattern image obtained by imaging the pattern; segmenting the detected pattern edge to generate a first segment set consisting of first segments; segmenting a pattern edge on reference data which serves as a reference for evaluating the pattern to generate a second segment set consisting of second segments; combining any of the segments in the first segment set with any of the segments in the second segment set to define a segment pair consisting of first and second segments; calculating the compatibility coefficient between every two segment pairs in the defined segment pairs; defining new segment pairs by narrowing down the defined segment pairs by calculating local consistencies of the defined segment pairs on the basis of the calculated compatibility coefficients and by excluding segment pairs having lower local consistencies; determining an optimum segment pair by repeating the calculating the compatibility coefficient and the defining new segment pairs by narrowing down the segment pairs; calculating a feature quantity of a shift vector that links the first and second segments making up the optimum segment pair; and performing position matching between the pattern image and the reference data on the basis of the calculated feature quantity of the shift vector.

Abstract translation: 模式匹配方法包括：通过对图案进行成像而获得的图案图像中的图案的边缘进行检测; 分割检测到的图案边缘以产生由第一段组成的第一段组; 在作为用于评估图案的基准的参考数据上分割图形边缘以生成由第二段组成的第二段集合; 将第一段组中的任何段与第二段集合中的任何段组合以限定由第一和第二段组成的段对; 计算定义的段对中每两个段对之间的兼容性系数; 通过基于所计算的兼容性系数计算定义的段对的局部一致性并排除具有较低本地一致性的段对来缩小定义的段对，来定义新的段对; 通过重复计算所述兼容性系数和通过缩小所述片段对来限定新的片段对来确定最佳片段对; 计算链接构成最佳段对的第一和第二段的移位向量的特征量; 并且基于所计算的移位矢量的特征量，在图案图像和参考数据之间执行位置匹配。