公开(公告)号：US4402572A

公开(公告)日：1983-09-06

申请号：US166964

申请日：1980-07-08

申请人： Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

发明人： Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

IPC分类号： G03B27/50 ,  G02B3/00 ,  G02B7/00 ,  G02B13/24 ,  G02B27/18 ,  G03B27/52 ,  G02B27/62 ,  G03G15/04

CPC分类号： G02B3/0056 ,  G02B13/24 ,  G03B27/525

摘要： This specification discloses a projection device in which bar lenses of plastic, each having a great length in the direction of its optical axis as compared with its effective diameter, of the lenses are arranged in the form of a predetermined array. The bar lenses are shielded from the outside atmosphere by a holding member capable of easily setting the lenses. Further, transparent plates, such as glass plates or the like, are provided at the incidence end and the emergence end to seal the holding member, so that there occurs no deterioration of the predetermined optical performance resulting from variations in the environmental humidity which would otherwise cause variations in the plastic material.

摘要翻译： 本说明书公开了一种投影装置，其中透镜的条形透镜在其光轴的方向上与其有效直径相比具有大的长度，以预定阵列的形式布置。 条形透镜通过能够容易地设置透镜的保持构件与外界气氛隔离。 此外，在入射端和出射端设置透明板，例如玻璃板等，以密封保持构件，从而不会由于环境湿度的变化而导致的预定光学性能的劣化，否则将导致环境湿度的变化。 造成塑料材料的变化。

公开(公告)号：US5153898A

公开(公告)日：1992-10-06

申请号：US841298

申请日：1992-02-28

申请人： Masayuki Suzuki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Shigetaro Ogura ,  Yasuaki Fukuda ,  Yutaka Watanabe ,  Yasuo Kawai ,  Takao Kariya

发明人： Masayuki Suzuki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Shigetaro Ogura ,  Yasuaki Fukuda ,  Yutaka Watanabe ,  Yasuo Kawai ,  Takao Kariya

IPC分类号： G02B17/06 ,  G03F7/20

CPC分类号： B82Y10/00 ,  G02B17/0636 ,  G03F7/2039 ,  G03F7/70033 ,  G03F7/70233 ,  G03F7/7025 ,  G03F7/70691 ,  G03F7/70866 ,  G03F7/70875 ,  G03F7/70883 ,  G03F7/70891

摘要： An X-ray exposure apparatus includes a stage for holding a mask having a pattern for circuit manufacturing, a stage for holding a wafer to be exposed to the pattern of the mask with X-rays, and a reflection reduction imaging system, disposed between the mask stage and the wafer stage, including a reflecting mirror arrangement, containing at least three, but not more than five, reflecting mirrors coated with multi-layer films for receiving X-rays from the mask and directing them to the wafer to expose the wafer to the pattern of the mask with the X-ray in a reduced scale.

摘要翻译： X射线曝光装置包括：用于保持具有用于电路制造的图案的掩模的台，用于将要暴露于掩模的图案的晶片用X射线保持的晶片的台，以及设置在该掩模之间的反射减少成像系统 掩模台和晶片台，包括反射镜装置，其包含涂覆有多层膜的至少三个但不多于五个的反射镜，用于从掩模接收X射线并将其引导到晶片以暴露晶片 以减小的X射线的掩模图案。

公开(公告)号：US4512641A

公开(公告)日：1985-04-23

申请号：US359482

申请日：1982-03-18

申请人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

发明人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

IPC分类号： G02B9/04 ,  G02B3/00 ,  G02B13/24 ,  G02B27/18 ,  G02B27/00 ,  G02B27/40

CPC分类号： G02B3/00 ,  G02B13/24 ,  G02B27/18

摘要： A compound eye projection device includes a first lens and a second lens equal in shape and power. These two lenses are disposed with their optical axis being coincident with each other and together constitute an element lens system. A plurality of such element lens systems are arranged in a line form in a predetermined direction to thereby form a projection device.

摘要翻译： 复合眼睛投影装置包括第一透镜和形状和功率相等的第二透镜。 这两个透镜被设置成它们的光轴彼此重合并且一起构成元件透镜系统。 多个这样的元件透镜系统以预定方向以直线形式布置，从而形成投影装置。

公开(公告)号：US4350431A

公开(公告)日：1982-09-21

申请号：US166849

申请日：1980-07-08

申请人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki

发明人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki

IPC分类号： G02B3/00 ,  G02B27/00 ,  G02B27/18 ,  G03B27/52 ,  G03B27/00 ,  G03B27/44

CPC分类号： G02B3/0062 ,  G02B27/18 ,  G02B3/0075 ,  G03B27/522 ,  G02B27/0018 ,  G02B3/0056 ,  G02B3/0087

摘要： A projecting device having an array, in a plane perpendicular to the optical axis, of plural element lens systems each axially provided with two bar lenses of an axial length larger than the effective diameter thereof, characterized by the presence of an intermediate ring positioned between two bar lenses for extracting the effective beam emerging from the first bar lens and entering the second bar lens and providing a determined light intensity distribution on the projection plane.

摘要翻译： 一种投影装置，具有在与光轴垂直的平面中的多个元件透镜系统的阵列，每个元件透镜系统各自轴向设置有两个长度大于其有效直径的杆状透镜，其特征在于，存在位于两个 用于提取从第一条形透镜出射并进入第二条形透镜的有效光束并在投影平面上提供确定的光强度分布。

公开(公告)号：US4289377A

公开(公告)日：1981-09-15

申请号：US23268

申请日：1979-03-23

申请人： Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

发明人： Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

IPC分类号： G03B27/50 ,  G02B9/08 ,  G02B17/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/28 ,  G03B27/52 ,  G03G15/04 ,  H04N9/31 ,  G03B27/48 ,  G02B27/10 ,  G02B27/28

CPC分类号： H04N9/31 ,  G03B21/00 ,  G03B27/527 ,  G03B27/528

摘要： In a projecting apparatus which focuses the image of an object on an intermediate mirror through a lens array and finally projects the reflected image onto a projection plane again through said lens array, a polarizing beam splitter is provided between the object plane and the lens array to reduce the light loss and to compactize the apparatus.

摘要翻译： 在将物体的图像通过透镜阵列聚焦在中间镜上的投影装置中，最后通过所述透镜阵列将反射的图像再次投影到投影平面上，在物平面和透镜阵列之间设置偏振分束器， 降低光损耗并使设备压实。

公开(公告)号：US4176907A

公开(公告)日：1979-12-04

申请号：US830340

申请日：1977-09-02

申请人： Kazuya Matsumoto ,  Naoto Kawamura ,  Setsuo Minami

发明人： Kazuya Matsumoto ,  Naoto Kawamura ,  Setsuo Minami

IPC分类号： H04N3/02 ,  B41J2/44 ,  G02B26/10 ,  G02B26/12 ,  G02B27/00 ,  H04N1/113 ,  G02B27/17

CPC分类号： G02B27/0031 ,  G02B26/12

摘要： When a stationary beam is caused to impinge upon a deflecting mirror surface disposed parallel to the rotation axis of a deflecting mirror, from a finite angle with respect to a plane crossing both the rotation axis and the deflecting mirror at right angles therewith, the path of the scanning beam reflected from the deflecting mirror surface becomes conically shaped. This specification discloses a scanning device including a correcting optical element for changing the conical path of the scanning beam to a linear path.

摘要翻译： 当使固定光束相对于与旋转轴和偏转镜成直角交叉的平面的有限角度撞击在平行于偏转镜的旋转轴线的偏转镜面上时， 从偏转镜面反射的扫描光束变成圆锥形。 本说明书公开了一种扫描装置，其包括用于将扫描光束的锥形路径改变为线性路径的校正光学元件。

公开(公告)号：US4630902A

公开(公告)日：1986-12-23

申请号：US731341

申请日：1985-05-06

申请人： Noritaka Mochizuki ,  Setsuo Minami

发明人： Noritaka Mochizuki ,  Setsuo Minami

IPC分类号： G02B15/00 ,  G02B3/00 ,  G02B27/18 ,  G02B15/04 ,  G02B15/14 ,  G02B27/00

CPC分类号： G02B3/0081

摘要： A compound eye optical system having a variable magnification function includes a first imaging element array having a plurality of imaging elements of the same focal length at an equal pitch, a second imaging element array having a plurality of imaging elements of the same focal length arranged at a pitch different from that of the first imaging element array, the second imaging element array disposed more adjacent to the image side than the first imaging element array, and means for varying the imaging magnification of a composite optical system comprising the first and second imaging element arrays.

摘要翻译： 具有可变放大倍率功能的复眼系统包括具有相同焦距的多个成像元件的第一成像元件阵列，第二成像元件阵列具有相同焦距的多个成像元件， 与第一成像元件阵列不同的节距，与第一成像元件阵列相比更靠近图像侧设置的第二成像元件阵列，以及用于改变包括第一和第二成像元件的复合光学系统的成像倍率的装置 阵列

公开(公告)号：US4316665A

公开(公告)日：1982-02-23

申请号：US100858

申请日：1979-12-06

申请人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Koyo Midorikawa ,  Atsuo Tsunoda ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki

发明人： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Koyo Midorikawa ,  Atsuo Tsunoda ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki

IPC分类号： G02B3/00 ,  G03B27/52 ,  G03B27/00

CPC分类号： G02B3/0056 ,  G02B3/0062 ,  G03B27/525

摘要： In a slit exposure type copying machine, a projection device basically includes transmission type element lens systems each including a lens having a great length in the direction of the optic axis thereof as compared with the effective diameter thereof. A part area of an original is projected upon a predetermined part area on an image plane and the light intensity distribution of the projected part area has a predetermined central area controlled by lens aperture eclipse and extending diametrically from at least the optic axis and a marginal area lying outwardly of the central area and weak in light intensity. A plurality of such element lens systems are substantially equidistantly arranged in the lengthwise direction of the slit in a plane perpendicular to the optic axis so that the marginal areas in at least the element lens systems are superposed upon one another. Further, the element lens systems are arranged in a plurality of rows so that each row is positioned just intermediate the adjacent row, whereby even if there is an error in the arrangement interval of the element lens systems, the uniformity, in the slit area, of the exposure amount time-integrated in the original scanning direction is maintained.

摘要翻译： 在狭缝曝光型复印机中，投影装置基本上包括透射型元件透镜系统，每个透镜式元件透镜系统都包​​括与其有效直径相比在其光轴方向上具有大长度的透镜。 原稿的部分区域投影在图像平面上的预定部分区域上，并且投影部分区域的光强度分布具有由透镜孔径限制控制的预定中心区域，并且至少从光轴和边缘区域直径延伸 位于中心区域外面，光线强弱。 多个这样的元件透镜系统在垂直于光轴的平面中在狭缝的纵向方向上基本上等距地布置，使得至少元件透镜系统中的边缘区域彼此重叠。 此外，元件透镜系统布置成多行，使得每行位于相邻行的正中间，由此即使元件透镜系统的布置间隔中存在误差，在狭缝区域中的均匀性， 维持在原始扫描方向上积分的曝光量。

公开(公告)号：US4275962A

公开(公告)日：1981-06-30

申请号：US105789

申请日：1979-12-20

申请人： Koyo Midorikawa ,  Atsuo Tsunoda ,  Hidetoshi Murase ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Masazumi Moriwaki ,  Mikio Suzuta

发明人： Koyo Midorikawa ,  Atsuo Tsunoda ,  Hidetoshi Murase ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Masazumi Moriwaki ,  Mikio Suzuta

IPC分类号： G02B3/00 ,  G02B13/24 ,  G03B27/52 ,  G03G15/04 ,  G03B27/00

CPC分类号： G02B3/0062 ,  G02B13/24 ,  G02B3/0075 ,  G03B27/525 ,  G03G15/0409 ,  G02B3/0087

摘要： This specification discloses a compact projection device in which lens systems extending in the direction of the optic axis for projecting a part area of an object upon a predetermined part area on an image plane (hereinafter referred to as element lens systems) are initially set by a lens holding member having groove portions or hole portions extending in the direction of the optic axis, the distributions of intensity of light of the element lens systems on the image plane are controlled by an aperture eclipse such that the intensity of light is weaker in the marginal area than at least in the central area, a plurality of such element lens systems are arranged in a predetermined direction in a plane perpendicular to the optic axis and the distributions of intensity of light of the element lens systems are suitably superposed upon one another at least in the marginal area to provide uniformity of the distribution of the exposure amount integrated in the scanning direction with respect to the lengthwise direction of the slit of a copying machine of the slit exposure type. The element lens system each comprises two bar lenses each having a great length in the direction of the optic axis thereof as compared with the effective diameter thereof, and an intermediate image is once formed between the bar lenses and finally, a one-to-one magnification image is provided. The element lens systems are arranged in more than two rows in a honeycomb-like fashion such that the element lens systems of each row are positioned intermediate the element lens systems of the other row as viewed in the direction of the optic axis, whereby the uniformity of the distribution of the exposure amount integrated in the scanning direction with respect to the lengthwise direction of the slit is improved.

摘要翻译： 本说明书公开了一种紧凑的投影装置，其中在光轴方向上延伸的透镜系统用于将物体的一部分区域投影在图像平面上的预定部分区域（以下称为元件透镜系统）上，最初由 透镜保持构件具有沿光轴方向延伸的凹槽部分或孔部分，像面上的元件透镜系统的光强度分布由孔径日食控制，使得光的强度在边缘较弱 区域至少在中心区域中，多个这样的元件透镜系统在垂直于光轴的平面中沿预定方向布置，并且元件透镜系统的光强度的分布至少适当地叠加在彼此上 在边缘区域中以提供在扫描方向上集成的曝光量的分布的均匀性 沿狭缝曝光型的复印机的狭缝的长度方向。 元件透镜系统各自包括两个条形透镜，每个透镜在其光轴的方向上与其有效直径相比具有大的长度，并且在条形透镜之间一度形成中间图像，最后是一对一 提供放大图像。 元件透镜系统以蜂窝状方式布置成两行以上，使得每行的元件透镜系统位于沿着光轴方向观察的另一排的元件透镜系统的中间，由此均匀性 提高了相对于狭缝的长度方向在扫描方向上积分的曝光量的分布。

公开(公告)号：US4213690A

公开(公告)日：1980-07-22

申请号：US32642

申请日：1979-04-23

申请人： Muneharu Sugiura ,  Setsuo Minami ,  Koichi Miyamoto

发明人： Muneharu Sugiura ,  Setsuo Minami ,  Koichi Miyamoto

IPC分类号： G03B27/50 ,  G03B27/52 ,  G03B27/68 ,  G03G15/04 ,  G03B27/48 ,  G03B27/70

CPC分类号： G03B27/68 ,  G03B27/526

摘要： A copying apparatus having an optical system comprising a fixed original carriage, a rotatable mirror for scanning the original carriage and an image forming optical system for imaging a light flux from the rotatable mirror on a photosensitive medium, said image forming optical system being provided with a swing and tilting lens system having a swing and tilting function and a light path length correcting lens system including at least two movable lens groups movable along the direction of the optic axis and having the function of correcting the length of the light path while maintaining a predetermined image forming magnification, said swing and tilting lens system and said movable lens groups being moved in synchronism with said rotatable mirror to thereby form the image of the original on the photosensitive medium without swing and tilting.

摘要翻译： 一种具有光学系统的复印设备，包括固定的原稿托架，用于扫描原稿托架的可旋转镜和用于对来自可旋转镜的光束成像在光敏介质上的成像光学系统，所述成像光学系统设置有 具有摆动和倾斜功能的摆动和倾斜透镜系统以及光路长度校正透镜系统，其包括沿着光轴方向可移动的至少两个可移动透镜组，并具有校正光路长度的功能，同时保持预定的 图像形成倍率，所述摆动和倾斜透镜系统和所述可移动透镜组与所述可旋转镜同步移动，从而在感光介质上形成原稿的图像，而不会摆动和倾斜。