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    Control method of terminal crimping device
    21.
    发明授权
    Control method of terminal crimping device 失效
    端子压接装置的控制方法

    公开(公告)号：US5921125A

    公开(公告)日：1999-07-13

    申请号：US871950

    申请日：1997-06-10

    Applicant: Toshihiro Inoue ,  Tatsuya Maeda ,  Mitsuru Yoshikawa ,  Chiaki Hatano ,  Yukinori Takano

    Inventor： Toshihiro Inoue ,  Tatsuya Maeda ,  Mitsuru Yoshikawa ,  Chiaki Hatano ,  Yukinori Takano

    IPC: B30B1/26 ,  B30B15/14 ,  H01R43/048 ,  B21B37/00

    CPC classification number: H01R43/0488 ,  B30B1/266 ,  B30B15/14 ,  Y10T29/53022 ,  Y10T29/53235

    Abstract: A method of controlling a terminal press attaching device by providing a elevating crimper for crimping terminals onto exposed conductors of the cables, setting an anvil opposite to the crimper, and elevating the drive means including a servo motor. More specifically, the crimp height for press attached terminals is monitored, a detected height and the predetermined set value are compared to control said drive means such that the detected height is made equal to the set value. Thus, the crimp height of the terminal to be attached (or the crimper height) is automatically and easily adjusted.

    Abstract translation: 一种通过提供用于将端子压接在电缆的裸露导体上的升降压接器来设置端子压接装置的方法，设置与压接器相对的砧座，以及升高包括伺服电动机的驱动装置。 更具体地，监视压接附接端子的压接高度，将检测到的高度和预定设定值进行比较以控制所述驱动装置，使得检测到的高度等于设定值。 因此，可以自动且容易地调节要安装的端子的压接高度（或压接器高度）。

    Scanning electron microscope alignment method and scanning electron microscope
    24.
    发明授权
    Scanning electron microscope alignment method and scanning electron microscope 有权
    扫描电子显微镜对准方法和扫描电子显微镜

    公开(公告)号：US08188427B2

    公开(公告)日：2012-05-29

    申请号：US12182704

    申请日：2008-07-30

    Applicant: Junichi Kakuta ,  Kazuhiro Ueda ,  Tatsuya Maeda ,  Hiroyuki Saito ,  Katsuhiro Sasada

    Inventor： Junichi Kakuta ,  Kazuhiro Ueda ,  Tatsuya Maeda ,  Hiroyuki Saito ,  Katsuhiro Sasada

    IPC: G01N23/00 ,  G21K7/00

    CPC classification number: G01N23/225 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532

    Abstract: A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular specimen. First, a difference is determined between optimal values acquired from an automatic axis alignment result on a standard sample, and those obtained from each of a plurality automatic axis alignment results on a observation target sample. An optimal value is then adjusted using the standard sample, by use of the difference thus obtained. Correspondingly, an optimal stigmator value (astigmatism correction signal) is acquired by using the standard sample, and storing the optimal stigmator value as a default value. The optimal stigmator value and the default value depending on the height of an observation target sample pattern are added, and an astigmatism correction is performed on the basis of the resultant stigmator value.

    Abstract translation: 用于扫描电子显微镜的对准和像散校正的方法和装置可以防止由特定样品的条件引起的对准或校正误差。 首先，在从标准样品的自动轴对准结果获得的最佳值与从观察对象样本的多个自动轴对准结果中得到的最佳值之间确定差异。 然后使用标准样品通过使用由此获得的差异来调整最佳值。 相应地，通过使用标准样品获取最佳标称值（像散校正信号），并将最佳标定值存储为默认值。 添加根据观察目标样本图案的高度的最佳标称值和默认值，并根据得到的标示符值进行像散校正。

    Inspection method of electric part
    26.
    发明授权
    Inspection method of electric part 有权
    电气部件检验方法

    公开(公告)号：US07409080B2

    公开(公告)日：2008-08-05

    申请号：US11227189

    申请日：2005-09-16

    Applicant: Tatsuya Maeda ,  Shigenori Miyawaki

    Inventor： Tatsuya Maeda ,  Shigenori Miyawaki

    IPC: G06K9/00 ,  H04N7/18 ,  G01N21/00

    CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G06T2207/30148

    Abstract: An inspection apparatus of an electric junction box is provided, by which improper mounting of electric parts can be detected. The inspection apparatus 1 has a CCD camera 5, an image-processing device 7 and a control device 8. The CCD camera picks up images of fuse 14 in the electric junction box 12 as a subject of the inspection. The image-processing device 7 stores an image consulting data 60. The image consulting data 60 includes a plurality of images of each fuse 14 having the same item symbol with regard to every item symbol, the fuses 14 being used in the electric junction box 12. The control device 8 stores normal data indicating the proper item symbol of the fuse 14 to be mounted on a corresponding mount 13. The image-processing device 7 extracts the image most analogous to the image picked up by the CCD camera 5 from the images in the image consulting data. The control device 8 judges the quality of the item symbol of the fuse 14 having the most analogous image on the basis of the normal data.

    Abstract translation: 提供电接线盒的检查装置，由此可以检测到电气部件的不正确的安装。 检查装置1具有CCD照相机5，图像处理装置7和控制装置8。 作为检查对象，CCD摄像机拾取电接线盒12中的保险丝14的图像。 图像处理装置7存储图像咨询数据60。 图像咨询数据60包括关于每个物品符号具有相同物品符号的每个保险丝14的多个图像，在电接线盒12中使用保险丝14。 控制装置8存储指示要安装在相应的安装件13上的保险丝14的适当物品符号的正常数据。 图像处理装置7从图像咨询数据中的图像提取与CCD照相机5拾取的图像最相似的图像。 控制装置8基于正常数据判断具有最相似图像的熔丝14的物品符号的质量。

    Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes
    27.
    发明授权
    Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes 有权
    扫描电子显微镜，用于测量使用其的图案的尺寸的方法，以及用于校正扫描电子显微镜之间的差异的装置

    公开(公告)号：US07408154B2

    公开(公告)日：2008-08-05

    申请号：US11260187

    申请日：2005-10-28

    Applicant: Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

    Inventor： Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

    IPC: G01N23/00 ,  G21K7/00

    CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/2826

    Abstract: As measurement accuracy required for the scanning electron microscope (SEM) for measuring a pattern width becomes stringent, a technique of reducing the difference in a measured dimension between the SEM's is desired. However, the conventional technique of evaluating the difference in a measured dimension between the SEM's cannot separate the difference in a measured dimension between the SEM's themselves and a dimensional change resulting from deformation of the pattern itself. Moreover, the technique of reducing the difference in a measured dimension between the SEM's needs an operator for reducing the difference in a measured dimension between the SEM's for each measurement pattern shape. In this invention, a pattern at the same position is measured for a plurality of times with each SEM, and a different between extrapolated values of measured values obtained by the respective SEM's is calculated, whereby separation between the difference in a measured dimension between the SEM's and a dimensional change resulting from deformation of the pattern itself is made possible. Moreover, matching electron beam image profiles between the SEM's using an operator that simulates a difference in beam diameter between the SEM's makes it possible to reduce the difference in a measured dimension between the SEM's, not depending on a dimensional measurement pattern shape.

    Abstract translation: 由于用于测量图形宽度的扫描电子显微镜（SEM）所需的测量精度变得严格，所以希望减少SEM之间的测量尺寸差异的技术。 然而，评估SEM之间的测量尺寸差异的常规技术不能分离SEM本身之间的测量尺寸与由图案本身的变形引起的尺寸变化之间的差异。 此外，减少SEM之间的测量尺寸的差异的技术需要一个操作者，用于减小每个测量图案形状的SEM之间的测量尺寸的差异。 在本发明中，通过各SEM测量同一位置的图案多次，并且计算通过各SEM得到的测量值的外推值之间的差异，由此SEM之间的测量尺寸差异之间的差异 并且由于图案本身的变形引起的尺寸变化成为可能。 此外，使用模拟SEM之间的光束直径差的SEM的SEM之间的匹配电子束图像轮廓可以减小SEM之间的测量尺寸的差异，而不依赖于尺寸测量图案形状。

    Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
    29.
    发明申请
    Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication 有权
    精细图案特征，其设备和半导体器件制造方法的评估方法

    公开(公告)号：US20060036409A1

    公开(公告)日：2006-02-16

    申请号：US11185852

    申请日：2005-07-21

    Applicant: Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

    Inventor： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

    IPC: G06F17/00

    CPC classification number: G01B15/08 ,  G01N23/2251 ,  G03F7/70625 ,  H01J2237/223 ,  H01J2237/2817

    Abstract: Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates a components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.

    Abstract translation: 设备提取在制造设备时需要评估的空间频率的组件，或者在细线图案上分析材料或工艺的边缘粗糙度并将其显示为索引。 设备在足够长的区域上获取边缘粗糙度的数据，对与操作者在功率谱上设置的空间频率区域相对应的分量进行积分，并将其显示在长度测量SEM上。 或者，设备对足够长的区域的边缘粗糙度数据进行分割，通过进行基于理论计算的统计处理和拟合来计算与任意检查区域相对应的长周期粗糙度和短周期粗糙度，并将其显示在长度测量 SEM。

    Combined terminal fitting
    30.
    发明授权
    Combined terminal fitting 有权

    公开(公告)号：US06786751B2

    公开(公告)日：2004-09-07

    申请号：US10628215

    申请日：2003-07-28

    Applicant: Tatsuya Maeda ,  Masahide Hio ,  Atsushi Nishida ,  Masato Minakata

    Inventor： Tatsuya Maeda ,  Masahide Hio ,  Atsushi Nishida ,  Masato Minakata

    IPC: H01R1112

    CPC classification number: H01R11/12 ,  H01R13/28

    Abstract: A combined terminal fitting assembly is provided to fix ends of three or more wires to one fixing place. Engaging portions (25, 26, 34, 35) for holding a right terminal fitting (TR) and a left terminal fitting (TL) assembled are provided on both upper and lower surfaces of terminal main bodies. Thus, the right terminal fittings (TR) and the left terminal fittings (TL) can be placed alternately one over another. As a result three or more wires (W) can be fixed to one fixing place. Upon assembling, the wire (W) of the right terminal fitting (TR) and the wire (W) of the left terminal fitting (TL) are brought gradually closer to each other from most distant positions. Thus, the left and right wires (W) neither overlap nor interfere with each other.

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