摘要:
There is provided a plasma processing apparatus including a susceptor 114, having a substrate mounting portion for mounting thereon a substrate, to which a high frequency power is applied; a focus ring 210, disposed to surround the substrate mounted on the substrate mounting portion, including an outer ring 214 having a top surface higher than a top surface of the substrate and an inner ring 212 extending inwardly from the outer ring so as to allow at least a part of the inner ring to be positioned below a periphery of the substrate, the outer ring and the inner ring being formed as a single member; a dielectric ring 220 positioned between the focus ring and the susceptor; a dielectric constant varying device 250 for varying a dielectric constant of the dielectric ring.
摘要:
The present invention provides a hairiness suppressing device for an automatic winder that can perfectly balloon a spun yarn using a whirling current in a yarn passage. In a hairiness suppressing device (1) comprising a yarn inserting opening (9) that extends and opens in an axial direction of a yarn passage (8) in which a whirling current acts on a spun yarn, a wedge-shaped cover member (29) is provided that can open and close the yarn inserting opening (9). When a swiveling body (26) is swivellably moved to open the cover member (29), the yarn can be introduced into the yarn passage (8) through the yarn inserting opening (9). When the swiveling body (26) is swivellably moved to close the cover member (29), the whirling current in the yarn passage (8) is prevented from leaking from a side of the yarn passage (8).
摘要:
The present invention relates to a dyed-yarn winding method wherein specified length control operates to wind a specified length of a dyed-yarn y without dyeing specks to a winding package Pw, and then cuts the dyed-yarn to remove a dyed-yarn having dyeing specks and remaining an a dyed-yarn supply package Ps. Since the specified length control prevents that part of a dyed-yarn that has dyeing specks from being wound to a winding package, an operation for removing such a part from the winding package can be omitted.
摘要:
A bobbin carrying tray having an air passage extending through a peg adapted for insertion in a bobbin, and through a base underlying it. Some linear members are provided at the midway portion of the air passage to prevent the passing of yarn which is suspended in a bobbin by the air drawn through the air passage.
摘要:
A booklet storage includes a first storage member that includes a first receiver portion and a second receiver portion connecting with the first receiver portion; and a second storage member that includes a third receiver portion and a fourth receiver portion connecting with the third receiver portion, wherein the first storage member and the second storage member together receive a booklet in combination, and wherein a first width between the first receiver portion or the second receiver portion and the third receiver portion and a second width between the first receiver portion or the second receiver portion and the fourth receiver portion are different from each other.
摘要:
An electrostatic chuck for attracting and holding a substrate by using an electrostatic force includes a plurality of protrusion portions to be brought into contact with the substrate. The protrusion portions are formed of a ceramic dielectric including grains each having a specified particle diameter, and contact surfaces of the protrusion portions with the substrate are formed to have a surface roughness depending on the particle diameter.