PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE MEDIUM FOR STORING PROGRAM FOR EXECUTING THE METHOD
    21.
    发明申请
    PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE MEDIUM FOR STORING PROGRAM FOR EXECUTING THE METHOD 有权
    等离子体处理装置,等离子体处理方法和存储程序存储程序用于执行方法

    公开(公告)号:US20120061351A1

    公开(公告)日:2012-03-15

    申请号:US13232207

    申请日:2011-09-14

    摘要: There is provided a plasma processing apparatus including a susceptor 114, having a substrate mounting portion for mounting thereon a substrate, to which a high frequency power is applied; a focus ring 210, disposed to surround the substrate mounted on the substrate mounting portion, including an outer ring 214 having a top surface higher than a top surface of the substrate and an inner ring 212 extending inwardly from the outer ring so as to allow at least a part of the inner ring to be positioned below a periphery of the substrate, the outer ring and the inner ring being formed as a single member; a dielectric ring 220 positioned between the focus ring and the susceptor; a dielectric constant varying device 250 for varying a dielectric constant of the dielectric ring.

    摘要翻译: 提供了一种等离子体处理装置,其包括:基座114,具有用于安装其上的基板的基板安装部,施加高频电力; 设置为围绕安装在基板安装部分上的基板的聚焦环210,包括具有高于基板的顶表面的顶表面的外环214和从外环向内延伸的内环212, 所述内圈的至少一部分被定位在所述基板的周边的下方,所述外圈和所述内圈形成为单个构件; 定位在聚焦环和基座之间的电介质环220; 用于改变介电环的介电常数的介电常数变化装置250。

    Hairiness suppressing device for automatic winder
    25.
    发明授权
    Hairiness suppressing device for automatic winder 失效
    自动络筒机毛羽抑制装置

    公开(公告)号:US06332311B1

    公开(公告)日:2001-12-25

    申请号:US09471378

    申请日:1999-12-23

    IPC分类号: D01H700

    摘要: The present invention provides a hairiness suppressing device for an automatic winder that can perfectly balloon a spun yarn using a whirling current in a yarn passage. In a hairiness suppressing device (1) comprising a yarn inserting opening (9) that extends and opens in an axial direction of a yarn passage (8) in which a whirling current acts on a spun yarn, a wedge-shaped cover member (29) is provided that can open and close the yarn inserting opening (9). When a swiveling body (26) is swivellably moved to open the cover member (29), the yarn can be introduced into the yarn passage (8) through the yarn inserting opening (9). When the swiveling body (26) is swivellably moved to close the cover member (29), the whirling current in the yarn passage (8) is prevented from leaking from a side of the yarn passage (8).

    摘要翻译: 本发明提供了一种用于自动络纱机的毛羽倒伏装置,其可以使用纱线通道中的旋转电流使纺纱完全气球。 一种毛羽抑制装置(1),其特征在于,包括:纱线插入口(9),其在旋转电流作用于细纱上的纱线通路(8)的轴向延伸并开口;楔形罩部件(29) ),其能够打开和关闭纱线插入口(9)。 当旋转体(26)可旋转地移动以打开盖构件(29)时,可以通过纱线插入口(9)将纱线引入纱线通道(8)。 当旋转体(26)可旋转地移动以关闭盖构件(29)时,防止纱线通道(8)中的旋转电流从纱线通道(8)的侧面泄漏。

    Dyed-yarn winding method
    26.
    发明授权
    Dyed-yarn winding method 失效
    染色纱线卷绕法

    公开(公告)号:US6029926A

    公开(公告)日:2000-02-29

    申请号:US66901

    申请日:1998-04-28

    摘要: The present invention relates to a dyed-yarn winding method wherein specified length control operates to wind a specified length of a dyed-yarn y without dyeing specks to a winding package Pw, and then cuts the dyed-yarn to remove a dyed-yarn having dyeing specks and remaining an a dyed-yarn supply package Ps. Since the specified length control prevents that part of a dyed-yarn that has dyeing specks from being wound to a winding package, an operation for removing such a part from the winding package can be omitted.

    摘要翻译: 本发明涉及一种染色纱线卷绕方法,其中规定的长度控制操作以将特定长度的染色纱线y没有染色斑点卷绕到卷绕包装件Pw上,然后切割染色纱线以除去具有 染色斑点,并保留染色纱线供应包。 由于规定的长度控制防止染色的染色纱线的一部分被缠绕在卷绕包装上,所以可以省略从卷绕包装件中除去这种部件的操作。

    Booklet storage and electronic apparatus
    28.
    发明授权
    Booklet storage and electronic apparatus 有权
    小册子存储和电子设备

    公开(公告)号:US09174481B2

    公开(公告)日:2015-11-03

    申请号:US13439567

    申请日:2012-04-04

    IPC分类号: B42D17/00 G03G21/16

    CPC分类号: B42D17/00 G03G21/16

    摘要: A booklet storage includes a first storage member that includes a first receiver portion and a second receiver portion connecting with the first receiver portion; and a second storage member that includes a third receiver portion and a fourth receiver portion connecting with the third receiver portion, wherein the first storage member and the second storage member together receive a booklet in combination, and wherein a first width between the first receiver portion or the second receiver portion and the third receiver portion and a second width between the first receiver portion or the second receiver portion and the fourth receiver portion are different from each other.

    摘要翻译: 小册子存储装置包括:第一存储部件,包括第一接收部分和与第一接收部分连接的第二接收部分; 以及第二存储部件,包括第三接收部分和与第三接收部分连接的第四接收部分,其中第一存储部件和第二存储部件一起组合接收小册子,并且其中第一接收部分 或第二接收机部分和第三接收机部分之间的第二宽度以及第一接收机部分或第二接收机部分与第四接收机部分之间的第二宽度彼此不同。

    Electrostatic chuck
    30.
    发明授权
    Electrostatic chuck 有权
    静电吸盘

    公开(公告)号:US07663860B2

    公开(公告)日:2010-02-16

    申请号:US11001298

    申请日:2004-12-02

    IPC分类号: H01T23/00

    CPC分类号: H01L21/67109 H01L21/6831

    摘要: An electrostatic chuck for attracting and holding a substrate by using an electrostatic force includes a plurality of protrusion portions to be brought into contact with the substrate. The protrusion portions are formed of a ceramic dielectric including grains each having a specified particle diameter, and contact surfaces of the protrusion portions with the substrate are formed to have a surface roughness depending on the particle diameter.

    摘要翻译: 用于通过使用静电力吸引和保持基板的静电卡盘包括与基板接触的多个突出部分。 突出部由陶瓷电介质形成,该陶瓷电介质包括各自具有特定粒径的晶粒,并且突出部与基板的接触表面形成为具有取决于粒径的表面粗糙度。