Thin-film resistor, wiring substrate, and method for manufacturing the same
    22.
    发明授权
    Thin-film resistor, wiring substrate, and method for manufacturing the same 有权
    薄膜电阻器,布线基板及其制造方法

    公开(公告)号:US06331811B2

    公开(公告)日:2001-12-18

    申请号:US09326878

    申请日:1999-06-07

    IPC分类号: H01K1012

    摘要: A thin-film resistor that enables a pattern to be simply formed by means of wet etching, that has an excellent resistance temperature characteristic, and that can be easily manufactured, and a method for manufacturing this thin-film resistor, as well as a wiring substrate with this thin-film resistor formed therein. A thin resistor film according to this invention has a structure in which crystal grains deposit in the matrix of amorphous titanium nitride. The thin resistor film is formed on a substrate. The crystal grains includes at least one of crystal titanium nitride and crystal titanium. The thin resistor film can be manufactured using a simple process and can provide a wide range of resistance values with a small tolerance and a temperature coefficient of resistance close to zero.

    摘要翻译: 一种薄膜电阻器,其能够通过湿法蚀刻简单地形成图案,具有优异的电阻温度特性,并且可以容易地制造,以及制造该薄膜电阻器的方法以及布线 基板上形成有该薄膜电阻。 根据本发明的薄电阻膜具有其中晶粒沉积在非晶氮化钛基体中的结构。 薄电阻膜形成在基板上。 晶粒包括晶体氮化钛和晶体钛中的至少一种。 可以使用简单的工艺制造薄电阻膜,并且可以提供具有小公差和电阻温度系数接近于零的宽范围的电阻值。