Magnetic recording medium
    22.
    发明授权
    Magnetic recording medium 失效
    磁记录介质

    公开(公告)号:US4797321A

    公开(公告)日:1989-01-10

    申请号:US918973

    申请日:1986-10-15

    摘要: A magnetic recording disc having a high durability and good electromagnetic conversion characteristics which comprises a non-magnetic support and a magnetic layer provided on at least one surface of the support, wherein the magnetic layer comprises magnetic powder, a resinous binder, polishing particles and a lubricating agent, characterized in that the polishing particles have a Mohs' scale of hardness of not less than 7 and an average particle size of 0.25 r to 0.75 r (r being the thickness (.mu.m) of the magnetic layer) and the lubricating agent is a fatty acid ester having a melting point of not higher than 10.degree. C.

    摘要翻译: 一种具有高耐久性和良好的电磁转换特性的磁记录盘,包括设置在载体的至少一个表面上的非磁性载体和磁性层,其中磁性层包括磁性粉末,树脂粘合剂,抛光颗粒和 润滑剂,其特征在于,研磨粒子的莫氏硬度为7以上,平均粒径为0.25〜0.75r(r为磁性层的厚度),润滑剂 是熔点不高于10℃的脂肪酸酯。

    Charged particle beam drawing apparatus and article manufacturing method
    24.
    发明授权
    Charged particle beam drawing apparatus and article manufacturing method 失效
    带电粒子束拉制装置及制品的制造方法

    公开(公告)号:US08698095B2

    公开(公告)日:2014-04-15

    申请号:US13343752

    申请日:2012-01-05

    IPC分类号: G21K5/04

    摘要: The charged particle beam drawing apparatus of the present invention performs drawing to a substrate with a plurality of charged particle beams. The drawing apparatus includes an electron lens positioned at a location facing opposite to the substrate and including a plurality of holes through which the charged particle beams pass; and a cleaning unit configured to release active species to a decomposition product that has adhered to the electron lens and reduce the decomposition product by the reaction of the active species and the decomposition product to thereby change the decomposition product to a volatile gas. Here, the cleaning unit has a plurality of openings formed such that the active species are released toward the plurality of holes of the electron lens.

    摘要翻译: 本发明的带电粒子束描绘装置利用多个带电粒子束对基片进行拉伸。 拉伸装置包括位于与基板相对的位置的电子透镜,并且包括多个孔,带电粒子束穿过该孔; 以及清洁单元,其被配置为将活性物质释放到已经附着到电子透镜上的分解产物,并且通过活性种类和分解产物的反应来减少分解产物,从而将分解产物改变为挥发性气体。 这里,清洁单元具有形成为使得活性物质朝向电子透镜的多个孔释放的多个开口。

    Light-emitting device with reflection layers
    25.
    发明授权
    Light-emitting device with reflection layers 失效
    具有反射层的发光装置

    公开(公告)号:US08581487B2

    公开(公告)日:2013-11-12

    申请号:US13503604

    申请日:2010-11-25

    IPC分类号: H05B33/22

    摘要: A light-emitting device includes a substrate, a pair of electrode layers disposed on the substrate, a light-emitting element disposed between the pair of electrode layers to keep a first space with each of the pair of electrode layers while electrically connecting with each of the pair of electrode layers, and a pair of reflection layers, each extending in overlapping relation from one to the other one of the pair of electrode layers as seen in a transparent plan view. The light-emitting element is disposed between the pair of reflection layers to keep a second space with each of the pair of reflection layers.

    摘要翻译: 发光装置包括基板,设置在基板上的一对电极层,设置在该对电极层之间的发光元件,以与第一对电极层中的每一个电极层保持第一空间,同时与 一对电极层和一对反射层,每个反射层以透明平面图的方式从该对电极层中的一个至另一个的重叠关系延伸。 所述发光元件设置在所述一对反射层之间,以与所述一对反射层中的每一个保持第二空间。

    WORK DIRECTION DETERMINING METHOD AND DEVICE, AND WORK PROVIDED WITH DIRECTION DETERMINING FUNCTION
    26.
    发明申请
    WORK DIRECTION DETERMINING METHOD AND DEVICE, AND WORK PROVIDED WITH DIRECTION DETERMINING FUNCTION 有权
    工作方向确定方法和设备,并提供方向确定功能的工作

    公开(公告)号:US20120025986A1

    公开(公告)日:2012-02-02

    申请号:US13148675

    申请日:2010-03-24

    IPC分类号: G08B13/14

    摘要: A work direction determining device includes a passive tag type IC tag secured at a predetermined position on the front surface thereof. The IC tag includes a substrate, an IC module and an antenna coil disposed on the substrate in an offset manner. The device includes an antenna communicating with the IC tag, and a determination circuit. Where the work and the direction determining device are located at respective predetermined communication positions, communication is done between the antenna of the direction determining device and the antenna coil of the IC tag, and the magnitude of communication intensity during the communication is determined by the determination circuit to thereby determine a direction of the work.

    摘要翻译: 工作方向确定装置包括固定在其前表面上的预定位置处的无源标签型IC标签。 IC标签包括以偏移方式设置在基板上的基板,IC模块和天线线圈。 该装置包括与IC标签通信的天线和确定电路。 在工作和方向确定装置位于相应的预定通信位置的情况下,在方向确定装置的天线和IC标签的天线线圈之间进行通信,并且通信确定通信强度的大小 电路,从而确定工作的方向。

    Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method
    28.
    发明授权
    Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method 有权
    多层镜面制造方法,光学系统制造方法,曝光装置和装置制造方法

    公开(公告)号:US07543948B2

    公开(公告)日:2009-06-09

    申请号:US11548107

    申请日:2006-10-10

    申请人: Akira Miyake

    发明人: Akira Miyake

    IPC分类号: G02B5/08

    摘要: A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface shape variation amount as a difference between a surface shape of the substrate before the multilayer film is formed on the substrate and a surface shape of the multilayer mirror after the multilayer film is formed on the substrate, processing the surface shape of the substrate into a shape generated by subtracting the surface shape variation amount from the reflection surface shape, and forming the multilayer film on the substrate processed by the processing step.

    摘要翻译: 一种制造多层反射镜的方法,其包括形成在基板上的基板和多层膜,并且具有反射面形状的步骤包括以下步骤:将表面形状变化量估计为多层膜之前的基板的表面形状之间的差异 形成在基板上,并且在基板上形成多层膜之后的多层反射镜的表面形状,将基板的表面形状加工成从反射表面形状减去表面形状变化量所产生的形状,并形成 通过处理步骤处理的基板上的多层膜。

    Method of evaluating optical element
    29.
    发明授权
    Method of evaluating optical element 有权
    光学元件评估方法

    公开(公告)号:US07453560B2

    公开(公告)日:2008-11-18

    申请号:US10933570

    申请日:2004-09-03

    申请人: Akira Miyake

    发明人: Akira Miyake

    IPC分类号: G01N21/00 G01B9/02

    CPC分类号: G03F7/706

    摘要: There is provided an evaluation method of a reflective optical element on which a multilayer film is formed, including the step of calculating a phase difference between light incident upon the multilayer film and light reflected from the multilayer film using a standing wave produced when introducing light with a wavelength of 2 to 40 into the optical element.

    摘要翻译: 提供了一种其上形成多层膜的反射型光学元件的评价方法,包括以下步骤:使用在将光引入时产生的驻波计算入射到多层膜上的光与多层膜反射的光之间的相位差 波长为2〜40的光学元件。

    Assembly and adjusting method of optical system, exposure apparatus having the optical system
    30.
    发明授权
    Assembly and adjusting method of optical system, exposure apparatus having the optical system 失效
    光学系统的装配和调整方法,具有光学系统的曝光装置

    公开(公告)号:US07280184B2

    公开(公告)日:2007-10-09

    申请号:US11123975

    申请日:2005-05-06

    IPC分类号: G03B27/42 G03B27/32

    CPC分类号: G03F7/706 G03F7/70258

    摘要: An adjusting method of an optical system composed plural optical elements each having a multilayer film, said adjusting method that includes a first measuring step that obtains, for each optical element, a difference between a phase distribution of which an EUV light (Extreme Ultraviolet light) is reflected from the optical element and a phase distribution of which a light with a wavelength that is longer than the EUV light is reflected from the optical element, a second measuring step that measures a phase distribution of which the light passes the optical system, a deciding step that decides a phase distribution of which the EUV light passes through the optical system based on the phase distribution difference obtained by the first measuring step and the phase distribution measured by the second measuring step, and an adjusting step that adjusts at least one of a position and a posture of the optical element based on the phase distribution decided by the deciding step.

    摘要翻译: 一种由多个光学元件组成的光学系统的调整方法,所述多个光学元件具有多层膜,所述调整方法包括对于每个光学元件获得EUV光(极紫外光)的相位分布之间的差异的第一测量步骤, 从所述光学元件反射并且从所述光学元件反射具有比所述EUV光更长的波长的光的相位分布,测量所述光通过所述光学系统的相位分布的第二测量步骤, 决定步骤,其基于由所述第一测量步骤获得的相位分布差和由所述第二测量步骤测量的相位分布,决定所述EUV光通过所述光学系统的相位分布;以及调整步骤, 基于由判定步骤决定的相位分布的光学元件的位置和姿势。