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121 条记录 (耗时 0.024 秒)

    Mirror, method of manufacturing the same, exposure apparatus, and device manufacturing method
    6.
    发明授权
    Mirror, method of manufacturing the same, exposure apparatus, and device manufacturing method 有权
    镜子，制造方法，曝光装置和装置制造方法

    公开(公告)号：US09063277B2

    公开(公告)日：2015-06-23

    申请号：US13332582

    申请日：2011-12-21

    申请人： Fumitaro Masaki ,  Akira Miyake

    发明人： Fumitaro Masaki ,  Akira Miyake

    IPC分类号： B05D5/06 ,  F21V9/04 ,  G03B27/32 ,  G03B27/54 ,  G02B5/08 ,  G03F7/20 ,  G21K1/06 ,  B82Y10/00

    CPC分类号： G02B5/0816 ,  B82Y10/00 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70316 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

    摘要： A method of manufacturing a mirror includes a first step of arranging, on a substrate, a shape adjusting layer having a layer thickness which changes by heat, a second step of arranging, on the shape adjusting layer, a reflection layer including a first layer, a second layer, and a barrier layer which is arranged between the first layer and the second layer, and prevents a diffusion of a material of the first layer and a material of the second layer, and a third step of bringing a shape of the reflection layer close to a target shape by changing a layer thickness profile of the shape adjusting layer after the second step, the third step including a process of partially annealing the shape adjusting layer.

    摘要翻译： 一种制造反射镜的方法包括：在基板上布置具有由热变化的层厚度的形状调整层的第一步骤，在形状调整层上布置包括第一层的反射层的第二步骤， 第二层和布置在第一层和第二层之间的阻挡层，并且防止第一层的材料和第二层的材料的扩散，以及使反射形状的第三步骤 通过在第二步骤之后改变形状调整层的层厚度轮廓，接近目标形状的层，第三步骤包括部分退火形状调节层的过程。

    In situ cleaning device for lithographic apparatus
    7.
    发明授权
    In situ cleaning device for lithographic apparatus 有权
    光刻设备原位清洁装置

    公开(公告)号：US08921807B2

    公开(公告)日：2014-12-30

    申请号：US13462013

    申请日：2012-05-02

    申请人： Hiromitsu Takase ,  Ichiro Tanaka ,  Akira Miyake

    发明人： Hiromitsu Takase ,  Ichiro Tanaka ,  Akira Miyake

    IPC分类号： H01J37/30 ,  B08B5/00 ,  H01J37/317

    CPC分类号： H01J37/3177 ,  B08B5/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70925 ,  H01J2237/022 ,  H01J2237/03 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/1205

    摘要： A lithographic apparatus which performs drawing on a substrate with a charged-particle beam, includes an optical system having an aperture plate in which a first number of apertures are formed to pass a first number of charged-particle beams to perform the drawing, a substrate holder, a cleaning unit configured to clean the aperture plate, and a chamber containing the optical system and the substrate holder. The cleaning unit includes a case having an emitting hole plate in which a second number of emitting holes are formed, the second number being smaller than the first number, an active species source configured to generate active species in the case, and a driving mechanism configured to move the case.

    摘要翻译： 在带有带电粒子束的基板上进行拉伸的光刻设备包括具有孔板的光学系统，其中形成有第一数量的孔以通过第一数量的带电粒子束以进行绘图;基板 配置为清洁孔板的清洁单元和容纳光学系统和基板保持器的室。 清洁单元包括具有发射孔板的壳体，其中形成有第二数量的发射孔，第二数量小于第一数量，被配置为在壳体中产生活性物种的活性物质源和被配置为 移动案件。

    Light emitting device and illumination apparatus
    8.
    发明授权
    Light emitting device and illumination apparatus 有权
    发光装置和照明装置

    公开(公告)号：US08106584B2

    公开(公告)日：2012-01-31

    申请号：US11721807

    申请日：2005-07-27

    申请人： Tomoya Tabuchi ,  Akira Miyake ,  Daisuke Sakumoto

    发明人： Tomoya Tabuchi ,  Akira Miyake ,  Daisuke Sakumoto

    IPC分类号： H01J1/62 ,  H01L21/00

    CPC分类号： H01L33/56 ,  H01L33/507 ,  H01L2224/13

    摘要： A light emitting device includes a base on which a wiring conductor is formed from the top surface to the bottom surface or the side face; a light emitting chip mounted on the top surface of the base and electrically connected with the wiring conductor; a first light transmitting member which covers the light emitting chip; a second light transmitting member provided above the first light transmitting member to cover the first light transmitting member, the second light transmitting member being formed of a light transmitting material containing fluorescent materials for converting in wavelength the light emitted from the light emitting chip; and a third light transmitting member provided between the first and second light transmitting members, wherein the refractive index n1 of the first light transmitting member, the refractive index n2 of the second light transmitting member and the refractive index n3 of the third light transmitting member satisfy the relation: n3

    摘要翻译： 发光器件包括从顶表面到底表面或侧面形成布线导体的基底; 发光芯片安装在基座的顶表面上并与布线导体电连接; 覆盖发光芯片的第一透光构件; 第二透光构件，设置在第一透光构件上方以覆盖第一透光构件，第二透光构件由包含荧光材料的透光材料形成，用于使波长从发光芯片发射的光转换; 以及第三透光构件，设置在第一透光构件和第二透光构件之间，其中第一透光构件的折射率n1，第二透光构件的折射率n2和第三透光构件的折射率n3满足 关系：n3

    Light Emitting Device and Illumination Device
    9.
    发明申请
    Light Emitting Device and Illumination Device 有权
    发光装置和照明装置

    公开(公告)号：US20110096526A1

    公开(公告)日：2011-04-28

    申请号：US12810769

    申请日：2008-12-26

    申请人： Kousuke Katabe ,  Yuki Mori ,  Akira Miyake ,  Shingo Matsuura

    发明人： Kousuke Katabe ,  Yuki Mori ,  Akira Miyake ,  Shingo Matsuura

    IPC分类号： F21V9/16

    CPC分类号： H01L33/60 ,  F21K9/64 ,  F21Y2115/10 ,  H01L33/507 ,  H01L33/64 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A light emitting device includes a base, a sub-mount substrate, and a frame member. The light emitting device further includes a light emitting element and a wavelength converting member. The sub-mount substrate is disposed on the base, and has an upper surface made of a ceramic sintered body. The frame member has a light reflecting portion made of porous ceramics, is disposed on the base, and surrounds the sub-mount substrate. The light emitting element is mounted on the sub-mount substrate. The wavelength converting member covers the light emitting element and the light reflecting portion of the frame member.

    摘要翻译： 发光装置包括基座，副安装基板和框架构件。 发光装置还包括发光元件和波长转换构件。 副安装基板设置在基座上，具有由陶瓷烧结体构成的上表面。 框架构件具有由多孔陶瓷制成的光反射部分，设置在基座上并且包围副安装基板。 发光元件安装在副安装基板上。 波长转换部件覆盖框架部件的发光元件和光反射部。