公开(公告)号：US12074014B2

公开(公告)日：2024-08-27

申请号：US17897445

申请日：2022-08-29

Applicant: TOTO LTD.

Inventor： Yuki Sasaki ,  Jun Shiraishi ,  Yutaka Momiyama ,  Reo Kawano

IPC: H01L21/683 ,  H01J37/32

CPC classification number: H01J37/32715 ,  H01J2237/2007

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, and a ceramic porous part. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part, and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The second hole part is positioned at the base plate. The third hole part is positioned at the bonding part. The counterbore part is located in at least one of the first hole part or the second hole part. The ceramic porous part is located in the counterbore part. The ceramic porous part includes an exposed surface exposed in the third hole part.

公开(公告)号：US11557465B2

公开(公告)日：2023-01-17

申请号：US17009265

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683 ,  H01T23/00 ,  H01J37/32

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

公开(公告)号：US11410867B2

公开(公告)日：2022-08-09

申请号：US16523634

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Hitoshi Sasaki

IPC: H01L21/683 ,  B23Q3/15 ,  H02N13/00 ,  H01L21/687

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric, a base plate, a first electrode layer, and a second electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided between the first major surface and the second major surface. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface and a second surface. A distance between the first surface and the first major surface is constant. A distance between the second surface and the first surface at an end portion of the first electrode layer is shorter than a distance between the second surface and the first surface at a central portion of the first electrode layer.

公开(公告)号：US11328907B2

公开(公告)日：2022-05-10

申请号：US16523745

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Hitoshi Sasaki

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided inside the ceramic dielectric substrate and connected to a high frequency power supply. The first electrode layer is provided between the first major surface and the second major surface. The first electrode layer has a first surface and a second surface. A surface roughness of the second surface is larger than a surface roughness of the first surface.

公开(公告)号：US09871265B2

公开(公告)日：2018-01-16

申请号：US14640990

申请日：2015-03-06

Applicant: TOTO LTD.

Inventor： Shuhei Tanaka ,  Naoki Watanabe ,  Nobuo Isaka ,  Masaki Sato ,  Takuya Hoshiko ,  Yutaka Momiyama ,  Shigeru Ando ,  Osamu Okamoto ,  Kiyoshi Hayama ,  Seiki Furuya ,  Yasuo Kakinuma

IPC: H01M8/24 ,  H01M8/12 ,  H01M8/243 ,  H01M8/0297 ,  H01M8/124

CPC classification number: H01M8/24 ,  H01M8/0297 ,  H01M8/12 ,  H01M8/243 ,  H01M2008/1293 ,  H01M2300/0071 ,  Y02P70/56

Abstract: To provide a method for manufacturing SOFC, capable of preventing breakage of fuel cell electrodes, and of securing an electrical connection between fuel cells and a current collector. Step for forming electrode protective layers 152 on electrodes formed on fuel cells 16, modularization step for forming a cell array, and attaching step for attaching a current collector 82 to the cell array, wherein current collector 82 is a metal plate on which attaching holes 84 are formed for the insertion of fuel cells 16, elastic pieces 84a are formed at each attaching hole 84, fuel cells 16 are inserted into attaching holes 84, and current collector 82 is attached to the cell array by the elastic force; and protective layer 152 is constituted to prevent damage to electrodes caused by contact with elastic pieces.

公开(公告)号：US09755249B2

公开(公告)日：2017-09-05

申请号：US14869104

申请日：2015-09-29

Applicant: TOTO LTD.

Inventor： Yasuo Kakinuma ,  Osamu Okamoto ,  Shigeru Ando ,  Hironobu Murakami ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Naoki Watanabe ,  Shuhei Tanaka ,  Nobuo Isaka ,  Takuya Hoshiko ,  Masaki Sato

IPC: H01M8/0202 ,  H01M8/24 ,  H01M8/1246 ,  H01M8/12 ,  H01M8/1213 ,  H01M8/124

CPC classification number: H01M8/0202 ,  H01M8/12 ,  H01M8/1213 ,  H01M8/1246 ,  H01M8/24 ,  H01M2008/1293 ,  H01M2300/0071

Abstract: A solid oxide fuel cell stack includes a support, a plurality of power generation elements connected in series, each including a fuel electrode, a solid electrolyte, and an air electrode stacked in that order on the support, and an interconnector electrically connecting an air electrode in one of the two adjacent power generation elements to a fuel electrode in the other power generation element. A solid electrolyte for one of the power generation elements is provided on the downside of the interconnector provided on the downside of the air electrode in the one power generation element so that the solid electrolyte is joined to the interconnector, and a solid electrolyte for the other power generation element is provided on the upper side of the interconnector provided on the upper side of the fuel electrode for the other power generation element so that the solid electrolyte is joined to the interconnector.

公开(公告)号：US09478811B2

公开(公告)日：2016-10-25

申请号：US14229185

申请日：2014-03-28

Applicant: TOTO LTD.

Inventor： Shigeru Ando ,  Osamu Okamoto ,  Kiyoshi Hayama ,  Seiki Furuya ,  Yutaka Momiyama ,  Nobuo Isaka ,  Masaki Sato ,  Shuhei Tanaka ,  Takuya Hoshiko ,  Naoki Watanabe ,  Yasuo Kakinuma

IPC: H01M8/02 ,  H01M8/12 ,  H01M8/10 ,  C04B35/20 ,  C04B38/06 ,  H01M4/86 ,  H01M4/90 ,  H01M8/00 ,  H01M4/88 ,  H01M8/06 ,  C04B111/00

CPC classification number: H01M8/0236 ,  C04B35/20 ,  C04B38/067 ,  C04B2111/00853 ,  C04B2111/00913 ,  C04B2235/3208 ,  C04B2235/72 ,  H01M4/8621 ,  H01M4/8885 ,  H01M4/9025 ,  H01M4/905 ,  H01M4/9066 ,  H01M8/004 ,  H01M8/0243 ,  H01M8/0245 ,  H01M8/0252 ,  H01M8/0637 ,  H01M8/1097 ,  H01M8/1226 ,  H01M8/124 ,  H01M8/1246 ,  H01M2008/1293 ,  Y02E60/521 ,  Y02E60/525 ,  Y02E60/566 ,  Y02P70/56

Abstract: Provided is a solid oxide fuel cell which includes a fuel electrode, a solid electrolyte, and an air electrode, each being sequentially laminated on the surface of a porous support. The porous support comprises forsterite and a nickel element. Ni and/or NiO fine particles are exposed on a surface of a sintered compact of the forsterite constituting the porous support.

Abstract translation: 提供了一种固体氧化物燃料电池，其包括燃料电极，固体电解质和空气电极，各自依次层压在多孔载体的表面上。 多孔载体包括镁橄榄石和镍元素。 Ni和/或NiO微粒暴露在构成多孔载体的镁橄榄石的烧结体的表面上。

公开(公告)号：US09070920B2

公开(公告)日：2015-06-30

申请号：US14039833

申请日：2013-09-27

Applicant: TOTO LTD.

Inventor： Masaki Sato ,  Naoki Watanabe ,  Nobuo Isaka ,  Shigeru Ando ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Seiki Furuya ,  Osamu Okamoto

IPC: H01M8/06 ,  H01M8/24 ,  H01M8/04 ,  C01B3/38 ,  H01M8/12

CPC classification number: H01M8/0618 ,  C01B3/384 ,  C01B2203/0233 ,  C01B2203/066 ,  C01B2203/0811 ,  H01M8/04022 ,  H01M8/04201 ,  H01M8/0625 ,  H01M8/0662 ,  H01M8/243 ,  H01M8/2457 ,  H01M8/2465 ,  H01M8/2475 ,  H01M2008/1293 ,  Y02E60/50 ,  Y02E60/525

Abstract: The present invention is a solid oxide fuel cell 1 including a reforming section 94, disposed inside a fuel gas supply flow path 20 above a vaporizing section 86 to surround the upper portion of a fuel cell stack 14, for steam reforming raw fuel gas F introduced from a fuel gas introducing portion 90a using steam S produced in a vaporizing section; and a circulating flow path portion 156 disposed in a fuel gas supply flow path between the vaporizing section and the reforming section for circulating rising raw fuel gas introduced from a fuel gas introducing section into a fuel gas supply flow path and rising steam produced in the vaporizing section along the circumferential direction of the fuel gas supply flow path so as to form a flow supplying mixed raw fuel gas and steam uniformly over the entire circumference of the reforming section.

Abstract translation: 本发明是一种固体氧化物燃料电池1，其包括重整部分94，其设置在蒸发部分86上方的燃料气体供应流路20内，以围绕燃料电池堆14的上部，用于引入蒸汽重整原燃料气体F 使用在蒸发部中产生的蒸汽S从燃料气体导入部90a进行喷射; 以及设置在蒸发部和重整部之间的燃料气体供给流路中的循环流路部156，用于将从燃料气体导入部导入的燃料气体导入部的升高的原料燃料气体循环到燃料气体供给流路中， 沿着燃料气体供给流路的圆周方向截面，以便在整个重整部分的整个圆周上形成均匀地供应混合的原料燃料气体和蒸汽的流量。