公开(公告)号：US20230400759A1

公开(公告)日：2023-12-14

申请号：US17836992

申请日：2022-06-09

Applicant: United Microelectronics Corp.

Inventor： Min Cheng Yang ,  Wei Cyuan Lo ,  Yung-Feng Cheng

IPC: G03F1/36 ,  G03F1/70 ,  G03F1/72

CPC classification number: G03F1/36 ,  G03F1/72 ,  G03F1/70

Abstract: A photomask design correction method is provided. The photomask design correction method includes the following steps. A layer information data is provided. An OPC process is performed on the layer information data to obtain a first photomask data. A photomask is fabricated based on the first photomask data. A pattern information data of the photomask is obtained after the photomask is fabricated. The difference between the pattern information data and a database of the OPC process is analyzed. An OPC model of the OPC process is corrected based on the difference to obtain a corrected OPC model. The OPC process is performed using the corrected OPC model on the layer information data to obtain a second photomask data.

公开(公告)号：US20230317778A1

公开(公告)日：2023-10-05

申请号：US18206617

申请日：2023-06-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chien-Heng Liu ,  Chia-Wei Huang ,  Hsin-Jen Yu ,  Yung-Feng Cheng ,  Ming-Jui Chen

IPC: H01L29/06 ,  H01L29/66 ,  H01L21/762 ,  H01L29/78

CPC classification number: H01L29/0649 ,  H01L29/66795 ,  H01L21/76224 ,  H01L29/7851

Abstract: A method for fabricating minimal fin length includes the steps of first forming a fin-shaped structure extending along a first direction on a substrate, forming a first single-diffusion break (SDB) trench and a second SDB trench extending along a second direction to divide the fin-shaped structure into a first portion, a second portion, and a third portion, and then performing a fin-cut process to remove the first portion and the third portion.

公开(公告)号：US10797059B2

公开(公告)日：2020-10-06

申请号：US16234441

申请日：2018-12-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yu-Chang Lin ,  Wei-Cyuan Lo ,  Yung-Feng Cheng

IPC: H01L27/11 ,  G06F30/39

Abstract: The present invention provides a method of designing a layout of a static random access memory (SRAM) pattern, the method includes the following steps: firstly, a target pattern is provided, and according to the target pattern, a plurality of first patterns and a first dummy pattern are formed in a substrate, the first pattern that disposed at the outermost boundary of the first patterns is defined as a first edge pattern, and the first dummy pattern is disposed adjacent to the first edge pattern, next, the first dummy pattern is removed, and afterwards, according to the target pattern, a plurality of second patterns are formed in the substrate, the second patterns comprises a second edge pattern that is disposed between the first edge pattern and an original position of the first dummy pattern.

公开(公告)号：US10387602B2

公开(公告)日：2019-08-20

申请号：US15879788

申请日：2018-01-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Tsung-Yeh Wu ,  Chia-Wei Huang ,  Yung-Feng Cheng

IPC: G06F17/50 ,  H01L21/02 ,  H01L21/033

Abstract: A method for generating masks for manufacturing of a semiconductor structure comprises the following steps. A design pattern for features to be formed on a substrate is divided into a first set of patterns and a second set of patterns. The first set of patterns comprises a first pattern corresponding to a first feature, the second set of patterns comprises two second patterns corresponding to two second features, and the first feature will be arranged between the two second features when the features are formed on a substrate. Two assist feature patterns are added into the first set of patterns. The two assist feature patterns are arranged in locations corresponding to the two second features, respectively. A first mask is generated based on the first set of patterns with the assist feature patterns. A second mask is generated based on the second set of patterns.

公开(公告)号：US10026726B2

公开(公告)日：2018-07-17

申请号：US15604685

申请日：2017-05-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Chih-Sen Huang ,  Shih-Fang Tzou ,  Yi-Wei Chen ,  Yung-Feng Cheng ,  Li-Ping Huang ,  Chun-Hsien Huang ,  Chia-Wei Huang ,  Yu-Tse Kuo

IPC: H01L21/8238 ,  H01L21/768 ,  H01L27/11 ,  H01L29/78 ,  H01L29/66 ,  H01L27/092 ,  H01L27/02

Abstract: Semiconductor devices and method of manufacturing such semiconductor devices are provided for improved FinFET memory cells to avoid electric short often happened between metal contacts of a bit cell, where the meal contacts are positioned next to a dummy gate of a neighboring dummy edge cell. In one embodiment, during the patterning of a gate layer on a substrate surface, an improved gate slot pattern is used to extend the lengths of one or more gate slots adjacent bit lines so as to pattern and sectionalize a dummy gate line disposed next to metal contacts of an active memory cell. In another embodiment, during the patterning of gate lines, the distances between one or more dummy gates lines disposed adjacent an active memory cell are adjusted such that their locations within dummy edge cells are shifted in position to be away from metal contacts of the active memory cell.

公开(公告)号：US20170263597A1

公开(公告)日：2017-09-14

申请号：US15604685

申请日：2017-05-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Chih-Sen Huang ,  Shih-Fang Tzou ,  Yi-Wei Chen ,  Yung-Feng Cheng ,  Li-Ping Huang ,  Chun-Hsien Huang ,  Chia-Wei Huang ,  Yu-Tse Kuo

IPC: H01L27/02 ,  H01L21/8238 ,  H01L29/66 ,  H01L21/768 ,  H01L27/11 ,  H01L27/092

CPC classification number: H01L27/0207 ,  H01L21/768 ,  H01L21/76816 ,  H01L21/76829 ,  H01L21/823821 ,  H01L21/823871 ,  H01L27/0924 ,  H01L27/1104 ,  H01L29/66545 ,  H01L29/6681 ,  H01L29/7851

Abstract: Semiconductor devices and method of manufacturing such semiconductor devices are provided for improved FinFET memory cells to avoid electric short often happened between metal contacts of a bit cell, where the meal contacts are positioned next to a dummy gate of a neighboring dummy edge cell. In one embodiment, during the patterning of a gate layer on a substrate surface, an improved gate slot pattern is used to extend the lengths of one or more gate slots adjacent bit lines so as to pattern and sectionalize a dummy gate line disposed next to metal contacts of an active memory cell. In another embodiment, during the patterning of gate lines, the distances between one or more dummy gates lines disposed adjacent an active memory cell are adjusted such that their locations within dummy edge cells are shifted in position to be away from metal contacts of the active memory cell.

公开(公告)号：US20170162449A1

公开(公告)日：2017-06-08

申请号：US15434067

申请日：2017-02-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Wei-Cyuan Lo ,  Ming-Jui Chen ,  Chia-Lin Lu ,  Jia-Rong Wu ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-Kuan Wu ,  Chih-Sen Huang ,  Yi-Wei Chen ,  Tan-Ya Yin ,  Chia-Wei Huang ,  Shu-Ru Wang ,  Yung-Feng Cheng

IPC: H01L21/8238 ,  H01L27/11 ,  H01L23/535 ,  H01L21/768 ,  H01L27/092

CPC classification number: H01L21/823871 ,  H01L21/31144 ,  H01L21/76802 ,  H01L21/76805 ,  H01L21/76877 ,  H01L21/76895 ,  H01L21/76897 ,  H01L21/823431 ,  H01L21/823475 ,  H01L21/823821 ,  H01L23/485 ,  H01L23/535 ,  H01L27/0922 ,  H01L27/1104 ,  H01L27/1108 ,  H01L29/7851 ,  H01L29/7853

Abstract: A method of forming a semiconductor structure is provided. A substrate having a memory region is provided. A plurality of fin structures are provided and each fin structure stretching along a first direction. A plurality of gate structures are formed, and each gate structure stretches along a second direction. Next, a dielectric layer is formed on the gate structures. A first patterned mask layer is formed, wherein the first patterned mask layer has a plurality of first trenches stretching along the second direction. A second patterned mask layer on the first patterned mask layer, wherein the second patterned mask layer comprises a plurality of first patterns stretching along the first direction. Subsequently, the dielectric layer is patterned by using the first patterned mask layer and the second patterned mask layer as a mask to form a plurality of contact vias. The contact holes are filled with a conductive layer.