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    Modular Confined Organic Print Head and System
    21.
    发明申请
    Modular Confined Organic Print Head and System 审中-公开

    公开(公告)号：US20190256968A1

    公开(公告)日：2019-08-22

    申请号：US16255040

    申请日：2019-01-23

    Applicant: Universal Display Corporation

    Inventor： William E. QUINN ,  Gregory MCGRAW ,  Matthew KING ,  Gregg KOTTAS

    IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24

    Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

    ORAGANIC VAPOR JET PRINT HEAD WITH ORTHOGONAL DELIVERY AND EXHAUST CHANNELS
    27.
    发明申请
    ORAGANIC VAPOR JET PRINT HEAD WITH ORTHOGONAL DELIVERY AND EXHAUST CHANNELS 有权

    公开(公告)号：US20210268536A1

    公开(公告)日：2021-09-02

    申请号：US17322949

    申请日：2021-05-18

    Applicant: Universal Display Corporation

    Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING

    IPC: B05C5/02 ,  G03F7/00 ,  H01L51/00 ,  B05B7/00

    Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

    SPATIAL CONTROL OF VAPOR CONDENSATION USING CONVECTION
    30.
    发明申请
    SPATIAL CONTROL OF VAPOR CONDENSATION USING CONVECTION 审中-公开
    使用对流的蒸气冷凝的空间控制

    公开(公告)号：US20150376787A1

    公开(公告)日：2015-12-31

    申请号：US14643887

    申请日：2015-03-10

    Applicant: Universal Display Corporation

    Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth HARIKRISHNA MOHAN

    IPC: C23C16/455 ,  B05B15/04 ,  B05B1/14 ,  B05B1/00 ,  B05B1/28

    Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.

    Abstract translation: 所公开的主题的实施例提供了一种装置，其包括喷嘴，待沉积在与喷嘴流体连通的基板上的材料源，与要与喷嘴沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道和与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源。

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