Insulating film forming method for semiconductor device interconnection
    21.
    发明授权
    Insulating film forming method for semiconductor device interconnection 失效
    半导体器件互连绝缘膜形成方法

    公开(公告)号:US5275977A

    公开(公告)日:1994-01-04

    申请号:US669526

    申请日:1991-03-14

    摘要: Disclosed herein are an insulating film forming method for semiconductor device interconnection and a plasma treatment system for use in the method. The method comprises (i) a step of forming an insulating film free of void, on a substrate having an interconnection pattern, in which a mixed gas of a film forming source gas and an etching gas comprising a fluorine compound is used to perform both deposition of an insulating film by plasma CVD and reactive etching of the insulating film, simultaneously, and (ii) a step of planarizing the surface of the insulating film formed by the step (i) and comprised of, for example, silicon oxide, in which a gas of a material decomposable by a reactive gas capable of decomposing the insulating film is supplied onto the substrate so as to deposit a solid film of the material, e.g. Si(OCH.sub.3).sub.4, on the insulating film on the substrate, the temperature of the substrate is then raised to liquefy the deposited material film, thereby planarizing the surface of the material film, the substrate temperature is again lowered to solidify the planarized liquid material film, and thereafter the insulating film together with the Si(OCH.sub.3).sub. 4 solid film is subjected to plasma etching with, for instance, CF.sub.4 gas as an etching gas. According to the invention, an insulating film which is planar and free of voids can be formed on an interconnection pattern of a substrate, without affecting the characteristics of devices provided on the substrate.

    摘要翻译: 这里公开了用于半导体器件互连的绝缘膜形成方法和用于该方法的等离子体处理系统。 该方法包括(i)在具有互连图案的基板上形成无空隙的绝缘膜的步骤,其中使用成膜源气体和包含氟化合物的蚀刻气体的混合气体进行沉积 通过等离子体CVD和绝缘膜的反应性蚀刻同时进行绝缘膜的平坦化,以及(ii)使由步骤(i)形成的由例如氧化硅构成的绝缘膜的表面平坦化的步骤,其中, 可以通过能够分解绝缘膜的反应性气体分解的材料的气体被供给到基板上,以沉积材料的固体膜,例如 Si(OCH 3)4在衬底上的绝缘膜上,然后升高衬底的温度以使沉积的材料膜液化,从而使材料膜的表面平坦化,再次降低衬底温度以固化平坦化液体材料 膜,然后将绝缘膜与Si(OCH 3)4固体膜一起用例如作为蚀刻气体的CF 4气体进行等离子体蚀刻。 根据本发明,可以在衬底的互连图案上形成平坦且无空隙的绝缘膜,而不影响设置在衬底上的器件的特性。

    Electrophotographic apparatus
    23.
    发明授权
    Electrophotographic apparatus 失效
    电子照相设备

    公开(公告)号:US4205912A

    公开(公告)日:1980-06-03

    申请号:US739949

    申请日:1976-11-08

    IPC分类号: G03G15/30 G03G21/00 G03G21/10

    摘要: An electrophotographic apparatus includes a photoconductive drum capable of rotating at least two rotations during a series of copying processes, a first charging device for charging the surface of the drum in a negative polarity, a first exposing device, a development device having a magnetic brush unit, and a second charging device for transferring image. A second exposing device is provided to expose the entire surface of the photoconductive drum together with the residual toner after the image transfer process during the second rotation of the photoconductive drum. A third charging device is provided to supply positive charges to the surface of the drum and the residual toner after the second exposure. The residual toner is removed from the photoconductive drum by the above described magnetic brush unit charged in the same negative polarity with that of the first charging device and the image transfer device.

    摘要翻译: 一种电子照相设备包括一个能够在一系列复印过程中转动至少两次旋转的感光鼓,用于以负极性对鼓的表面充电的第一充电装置,第一曝光装置,具有磁刷单元的显影装置 以及用于传送图像的第二充电装置。 提供第二曝光装置以在感光鼓的第二次旋转期间在图像转印处理之后将感光鼓的整个表面与残留调色剂一起曝光。 提供第三充电装置以在第二次曝光之后向滚筒表面和残留调色剂提供正电荷。 通过上述与第一充电装置和图像转印装置相同的负极性充电的磁刷单元,从感光鼓中除去残留调色剂。

    Steering angle control system for aircraft
    25.
    发明授权
    Steering angle control system for aircraft 有权
    飞机转向角控制系统

    公开(公告)号:US08874285B2

    公开(公告)日:2014-10-28

    申请号:US13378473

    申请日:2010-06-22

    IPC分类号: B64C25/50 G05D1/00

    CPC分类号: B64C25/50 G05D1/0083

    摘要: An aircraft steering angle control system is provided that minimizes the amount of skidding of an airframe that is turning on a low-μ taxiway surface, such as an icy taxiway surface, and allows for directional control of the airframe by a steering command. The aircraft steering angle control system outputs an operation signal related to a steering angle as a control command signal for a nose steering wheel, and includes: a nose steering wheel envelope protection function including a reference steering angle setting unit that calculates a reference steering angle on the assumption that the airframe is not skidding; a skid detection unit that detects a skidding state of the airframe based on the reference steering angle; and a switch unit that selects a control command signal for the nose steering wheel in conjunction with the skid detection unit.

    摘要翻译: 提供一种飞行器转向角度控制系统,其最小化打开低μ滑行道表面(例如冰冷的滑行道表面)的机身的打滑量,并且允许通过转向命令来对机身进行方向控制。 飞行器转向角控制系统输出与转向角相关的操作信号作为用于鼻子方向盘的控制命令信号,并且包括:鼻子方向盘包络保护功能,包括参考转向角设置单元,其计算参考转向角 机身不打滑的假设; 滑行检测单元,其基于所述基准转向角度来检测所述机身的打滑状态; 以及开关单元,其与滑动检测单元一起选择用于鼻子方向盘的控制命令信号。

    Terminal
    26.
    发明授权
    Terminal 有权
    终奌站

    公开(公告)号:US08668531B2

    公开(公告)日:2014-03-11

    申请号:US13378005

    申请日:2010-06-15

    IPC分类号: H01R13/187

    摘要: A terminal 1 which maintains electrical connectivity between a mating terminal and contact spring pieces, reduce size and firmly fixes the contact spring pieces at a terminal main body, includes the conductive, rectangular tube-shaped terminal main body 3 into which the mating terminal 2 is inserted, the plurality of one conductive contact spring pieces 18 extending from one wall 5 to the other wall 6 of the terminal main body and tilted relative to a mating terminal insertion direction, and a plurality of the other conductive contact spring pieces 19 extending from the other wall to the one wall and tilted relative to the insertion direction. The one and the other contact spring pieces 78, 79 are arranged alternatively along the insertion direction. The terminal main body includes a spring member 4 having one and the other basal plate portions 15, 16, a connecting plate portion 17 connecting the respective basal plate portions, and an engagement portion 20 at the connecting plate portion which engages with a locking portion 11 of the terminal main body 3.

    摘要翻译: 保持配合端子和接触弹簧片之间的电气连通性的端子1,减小尺寸并将接触弹簧片牢固地固定在端子主体上,包括导电矩形管状端子主体3,配合端子2 多个一个导电接触弹簧片18从一个壁5延伸到端子主体的另一壁6并相对于配合端子插入方向倾斜,并且多个另一个导电接触弹簧片19从 其他墙壁相对于插入方向倾斜到一个墙壁上。 一个和另一个接触弹簧片78,79沿插入方向交替布置。 端子主体包括具有一个和另一个基板部分15,16的弹簧构件4,连接各个基板部分的连接板部分17和连接板部分处的与锁定部分11接合的接合部分20 的终端主体3。

    CONNECTOR
    27.
    发明申请
    CONNECTOR 有权
    连接器

    公开(公告)号:US20120178300A1

    公开(公告)日:2012-07-12

    申请号:US13395908

    申请日:2011-01-24

    IPC分类号: H01R24/28

    摘要: A connector includes a plurality of terminal metal fittings that are arranged in parallel to one another and respectively have electric wire connection sections to which electric wires are electrically connected, and a connector housing that accommodates the plurality of terminal metal fittings therein. The plurality of terminal metal fittings are configured that the lengths of the electric wire connection sections are made longer in accordance with the arrangement thereof from one side toward the other side in an arrangement direction of the plurality of terminal metal fittings. The electric wires are connected to the electric wire connection sections respectively so that the electric wires extend from one end portions of the electric wire connection sections toward the one side and intersect with a longitudinal direction of the electric wire connection section.

    摘要翻译: 连接器包括多个端子金属配件,它们彼此平行地布置并且分别具有电线连接的电线连接部分和容纳多个端子金属配件的连接器壳体。 多个端子金属配件被构造成使得电线连接部分的长度根据其在多个端子金属配件的排列方向上的一侧朝向另一侧的布置而更长。 电线分别连接到电线连接部分,使得电线从电线连接部分的一个端部朝向一侧延伸,并与电线连接部分的纵向方向相交。

    Monitoring method, monitoring system, monitoring program, and record medium recording the monitoring program
    28.
    发明授权
    Monitoring method, monitoring system, monitoring program, and record medium recording the monitoring program 失效
    监控方法,监控系统,监控程序和记录介质监控程序

    公开(公告)号:US07071822B2

    公开(公告)日:2006-07-04

    申请号:US10434353

    申请日:2003-05-09

    IPC分类号: G08B13/08

    摘要: When an anomaly occurs in a monitor area, careless entry of the user into the monitor area is blocked reliably and simply. In a monitoring system for monitoring a house as a monitor area, sensors are placed at appropriate points in the house, and a door open hindrance unit for hindering opening of a front door placed at the entrance of the house is placed. Upon detection of an anomaly in the house based on a detection signal from each sensor, a management unit instructs the door open hindrance unit to hinder opening of the front door.

    摘要翻译: 当监视区域发生异常时,可以可靠且简单地阻止用户进入监视区域。 在用于监视房屋作为监视区域的监视系统中,将传感器放置在房屋的适当位置,并且放置用于阻止放置在房屋入口处的前门的打开的门打开阻碍单元。 基于来自每个传感器的检测信号检测到房屋中的异常,管理单元指示门打开阻碍单元妨碍前门的打开。

    Product market quality information analyzing back up apparatus, product market quality information analyzing back up system and program for product market quality information analyzing back up
    29.
    发明授权
    Product market quality information analyzing back up apparatus, product market quality information analyzing back up system and program for product market quality information analyzing back up 失效
    产品市场质量信息分析备份设备,产品市场质量信息分析备份系统和程序,用于产品市场质量信息分析备份

    公开(公告)号:US06963812B2

    公开(公告)日:2005-11-08

    申请号:US10187960

    申请日:2002-07-03

    CPC分类号: G06Q10/06

    摘要: Disclosed is a product market quality analyzing back up apparatus which can contribute to improve and realize a betterment of market quality of a product in the market, quick close of the quality trouble, a prevention of recurrence, and prevention of occurrence in advance. The product market quality analyzing back up apparatus accesses to a maintenance record information storing device 1 in which the maintenance record information on the product delivered to customers is stored; extracts a market quality information which relates to the market quality of the product in the predetermined period of term from the maintenance record information based on a product item of the product; processes the extracted result of market quality information to analyze; and displays a market quality transition situation on a display screen 3a.

    摘要翻译: 披露了产品市场质量分析备份设备,有助于提高和实现市场上产品市场质量的提高,质量问题的快速关闭,预防复发和预防事故发生。 产品市场质量分析备份设备访问维护记录信息存储设备1,其中存储了传递给客户的产品的维护记录信息; 基于产品的商品,从维护记录信息中提取与预定期间内的产品的市场质量相关的市场质量信息; 处理提取的市场质量信息结果进行分析; 并在显示屏幕3a上显示市场质量转换情况。

    Multilayer structure
    30.
    发明申请
    Multilayer structure 审中-公开
    多层结构

    公开(公告)号:US20050031839A1

    公开(公告)日:2005-02-10

    申请号:US10889357

    申请日:2004-07-13

    IPC分类号: B32B25/04 B32B25/14 B32B27/32

    摘要: A multilayer structure including a laminate of a surface layer of an olefin thermoplastic elastomer (A) and an inner layer of an olefin thermoplastic elastomer (B), wherein: the olefin thermoplastic elastomer (A) contains polyolefin, and soft components (A) made of rubber and process oil (A); the olefin thermoplastic elastomer (B) contains polyolefin, and soft components (B) made of rubber and process oil (B); Ma and Mb satisfy the relation Ma≦Mb in which Ma is the molecular weight of the process oil (A), and Mb is the molecular weight of the process oil (B); and Ca and Cb satisfy the relation Ca

    摘要翻译: 一种多层结构,其包括烯烃热塑性弹性体(A)的表面层和烯烃热塑性弹性体(B)的内层的层压体,其中:所述烯烃热塑性弹性体(A)含有聚烯烃,制得的软组分(A) 橡胶和加工油(A); 烯烃热塑性弹性体(B)含有聚烯烃和由橡胶和加工油(B)制成的软组分(B); Ma和Mb满足Ma <= Mb,其中Ma是加工油(A)的分子量,Mb是加工油(B)的分子量; Ca和Cb满足下述关系式Ca(Cb),其中Ca是软组分(A)的量(wt%),Cb是软组分(B)的量(wt%),