摘要:
Disclosed herein are an insulating film forming method for semiconductor device interconnection and a plasma treatment system for use in the method. The method comprises (i) a step of forming an insulating film free of void, on a substrate having an interconnection pattern, in which a mixed gas of a film forming source gas and an etching gas comprising a fluorine compound is used to perform both deposition of an insulating film by plasma CVD and reactive etching of the insulating film, simultaneously, and (ii) a step of planarizing the surface of the insulating film formed by the step (i) and comprised of, for example, silicon oxide, in which a gas of a material decomposable by a reactive gas capable of decomposing the insulating film is supplied onto the substrate so as to deposit a solid film of the material, e.g. Si(OCH.sub.3).sub.4, on the insulating film on the substrate, the temperature of the substrate is then raised to liquefy the deposited material film, thereby planarizing the surface of the material film, the substrate temperature is again lowered to solidify the planarized liquid material film, and thereafter the insulating film together with the Si(OCH.sub.3).sub. 4 solid film is subjected to plasma etching with, for instance, CF.sub.4 gas as an etching gas. According to the invention, an insulating film which is planar and free of voids can be formed on an interconnection pattern of a substrate, without affecting the characteristics of devices provided on the substrate.
摘要:
An improved layout of the hearth rolls in an annealing furnace comprises a plurality of ceramic coated rolls and a plated rolls. The ceramic coated rolls are arranged in a region in the annealing furnace, where the temperature is higher than 450.degree. C. On the other hand, the plated rolls are arranged in a region where the temperature is lower than or equal to 450.degree. C. The hearth roll is provided a wear resistant coating of chrome plate or sprayed on ceramic of a thickness greater than or equal to 1 .mu.m and less than or equal to 100 .mu.m. In addition, according to the invention, the hearth roll is provided a surface roughness Ra in the range of 4.5 .mu.m to 20 .mu.m.
摘要:
An electrophotographic apparatus includes a photoconductive drum capable of rotating at least two rotations during a series of copying processes, a first charging device for charging the surface of the drum in a negative polarity, a first exposing device, a development device having a magnetic brush unit, and a second charging device for transferring image. A second exposing device is provided to expose the entire surface of the photoconductive drum together with the residual toner after the image transfer process during the second rotation of the photoconductive drum. A third charging device is provided to supply positive charges to the surface of the drum and the residual toner after the second exposure. The residual toner is removed from the photoconductive drum by the above described magnetic brush unit charged in the same negative polarity with that of the first charging device and the image transfer device.
摘要:
Provided are a solar cell substrate made of stainless steel foil which contains 7% to 40% by mass Cr and has a coefficient of linear expansion of 12.0×10−6/° C. or less at 0° C. to 100° C. and a thickness of 20 μm to 200 μm is subjected to the preparatory heat treatment for stress relief in an atmosphere consisting of one or more selected from an N2 gas, an H2 gas, an Ar gas, an AX gas, and an HN gas within the range of 250° C. to 1,050° C.; a back-contact made of a Mo layer is formed on a surface of the stainless steel foil subjected to the preparatory heat treatment or an insulating coating is formed on a surface of the stainless steel foil followed by forming the back-contact including the Mo layer thereon; and an absorber layer made of Cu(In1-xGax)Se2 is formed on the back-contact by performing coating formation heat treatment.
摘要:
An aircraft steering angle control system is provided that minimizes the amount of skidding of an airframe that is turning on a low-μ taxiway surface, such as an icy taxiway surface, and allows for directional control of the airframe by a steering command. The aircraft steering angle control system outputs an operation signal related to a steering angle as a control command signal for a nose steering wheel, and includes: a nose steering wheel envelope protection function including a reference steering angle setting unit that calculates a reference steering angle on the assumption that the airframe is not skidding; a skid detection unit that detects a skidding state of the airframe based on the reference steering angle; and a switch unit that selects a control command signal for the nose steering wheel in conjunction with the skid detection unit.
摘要:
A terminal 1 which maintains electrical connectivity between a mating terminal and contact spring pieces, reduce size and firmly fixes the contact spring pieces at a terminal main body, includes the conductive, rectangular tube-shaped terminal main body 3 into which the mating terminal 2 is inserted, the plurality of one conductive contact spring pieces 18 extending from one wall 5 to the other wall 6 of the terminal main body and tilted relative to a mating terminal insertion direction, and a plurality of the other conductive contact spring pieces 19 extending from the other wall to the one wall and tilted relative to the insertion direction. The one and the other contact spring pieces 78, 79 are arranged alternatively along the insertion direction. The terminal main body includes a spring member 4 having one and the other basal plate portions 15, 16, a connecting plate portion 17 connecting the respective basal plate portions, and an engagement portion 20 at the connecting plate portion which engages with a locking portion 11 of the terminal main body 3.
摘要:
A connector includes a plurality of terminal metal fittings that are arranged in parallel to one another and respectively have electric wire connection sections to which electric wires are electrically connected, and a connector housing that accommodates the plurality of terminal metal fittings therein. The plurality of terminal metal fittings are configured that the lengths of the electric wire connection sections are made longer in accordance with the arrangement thereof from one side toward the other side in an arrangement direction of the plurality of terminal metal fittings. The electric wires are connected to the electric wire connection sections respectively so that the electric wires extend from one end portions of the electric wire connection sections toward the one side and intersect with a longitudinal direction of the electric wire connection section.
摘要:
When an anomaly occurs in a monitor area, careless entry of the user into the monitor area is blocked reliably and simply. In a monitoring system for monitoring a house as a monitor area, sensors are placed at appropriate points in the house, and a door open hindrance unit for hindering opening of a front door placed at the entrance of the house is placed. Upon detection of an anomaly in the house based on a detection signal from each sensor, a management unit instructs the door open hindrance unit to hinder opening of the front door.
摘要:
Disclosed is a product market quality analyzing back up apparatus which can contribute to improve and realize a betterment of market quality of a product in the market, quick close of the quality trouble, a prevention of recurrence, and prevention of occurrence in advance. The product market quality analyzing back up apparatus accesses to a maintenance record information storing device 1 in which the maintenance record information on the product delivered to customers is stored; extracts a market quality information which relates to the market quality of the product in the predetermined period of term from the maintenance record information based on a product item of the product; processes the extracted result of market quality information to analyze; and displays a market quality transition situation on a display screen 3a.
摘要:
A multilayer structure including a laminate of a surface layer of an olefin thermoplastic elastomer (A) and an inner layer of an olefin thermoplastic elastomer (B), wherein: the olefin thermoplastic elastomer (A) contains polyolefin, and soft components (A) made of rubber and process oil (A); the olefin thermoplastic elastomer (B) contains polyolefin, and soft components (B) made of rubber and process oil (B); Ma and Mb satisfy the relation Ma≦Mb in which Ma is the molecular weight of the process oil (A), and Mb is the molecular weight of the process oil (B); and Ca and Cb satisfy the relation Ca