-
21.发明授权Piezoelectric/electrostrictive film-type element and method for producing the same 失效压电/电致伸缩薄膜型元件及其制造方法
公开(公告)号：US5814920A
公开(公告)日：1998-09-29
申请号：US777953
申请日：1996-12-23
CPC分类号： H01L41/0973 , H01L41/314 , H01L41/1875 , H04R17/08 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween. Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics.
摘要翻译： 压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底，其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分，其由 根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极，压电和/或电致伸缩层和上电极，其中至少一部分周缘 压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分，以构成相对于隔膜部分设置的伸出部分，并且伸出部分处于与部分区域不完全连接的状态 通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分 允许尖晶石颗粒介入其间。 因此，可以有效地改善例如位移量和谐振频率特性等压电和/或电致伸缩特性。
-
公开(公告)号：US5643379A
公开(公告)日：1997-07-01
申请号：US408387
申请日：1995-03-22
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/081 , H01L41/0973 , B41J2002/14387
摘要： A method of producing a piezoelectric/electrostrictive actuator including preparing first, second and third ceramic green sheets, and laminating the green sheets to form an unfired ceramic body which is then fired. The first, second and third green sheets form spacer, closure, and connecting plates, respectively, the spacer plate having a plurality of windows. An outer surface of the connecting plate that is remote from the spacer plate is machined so as to have a maximum waviness of not larger than 50 .mu.m. Additionally, piezoelectric/electrostrictive elements are formed on an outer surface of the closure plate over respective pressure chambers defined by the windows in the spacer plate.
摘要翻译： 一种制造压电/电致伸缩致动器的方法，包括制备第一，第二和第三陶瓷生片，并且将生片层压以形成未煅烧的陶瓷体，然后烧制。 第一，第二和第三生片分别形成间隔件，闭合件和连接板，间隔板具有多个窗口。 远离间隔板的连接板的外表面被加工成具有不大于50μm的最大波纹度。 此外，压电/电致伸缩元件形成在封闭板的外表面上，在由间隔板中的窗口限定的相应的压力室上。
-
公开(公告)号：US06988301B2
公开(公告)日：2006-01-24
申请号：US11007485
申请日：2004-12-08
CPC分类号： H01L27/20 , B41J2/14209 , H01L41/338 , H01L41/339 , H02N2/021 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49078 , Y10T29/49126 , Y10T29/4913 , Y10T29/49833
摘要： A matrix type piezoelectric/electrostrictive (P/E) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by the displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
摘要翻译： 矩阵型压电/电致伸缩（P / E）致动器包括多个压电/电致伸缩元件，每个压电/电致伸缩元件包括压电/电致伸缩体和在陶瓷衬底上形成的至少一对电极。 矩阵型P / E致动器由压电/电致伸缩体的位移激活。 压电/电致伸缩元件作为各自的统一体接合到陶瓷基板，并且彼此独立地二维地排列。 压电/电致伸缩致动器提供具有较低电压，高响应速度和更大发电力的更大位移，以及增强安装能力和集成度。 还公开了一种用于制造这种矩阵型P / E致动器的方法。
-
公开(公告)号：US06533197B1
公开(公告)日：2003-03-18
申请号：US09720351
申请日：2000-12-21
IPC分类号： B05B100
CPC分类号： F23D11/34 , B05B1/00 , B05B17/0607
摘要： A device for discharging raw material-fuel includes a pressurizing means for discharging a liquid, a pressure application room (1) in fluid communication with a discharge nozzle, and a liquid discharge nozzle (2) positioned under the pressure application room to discharge the liquid. The nozzle portion has an aspect ratio (L/d) of 5 or more, with L being the length of the nozzle in the thickness direction of the nozzle portion and d being the diameter of the nozzle portion.
摘要翻译： 用于排出原料燃料的装置包括用于排出液体的加压装置，与排出喷嘴流体连通的压力施加室（1）和位于压力施加室下方的液体排出喷嘴（2），以排出液体 。 喷嘴部的纵横比（L / d）为5以上，L是喷嘴的喷嘴部的厚度方向的长度，d是喷嘴部的直径。
-
公开(公告)号：US06422262B1
公开(公告)日：2002-07-23
申请号：US09336927
申请日：1999-06-21
申请人： Yukihisa Takeuchi , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Nobuo Takahashi
IPC分类号： F04F100
CPC分类号： B01J4/02 , B01J19/26 , B01J2219/00121 , B01J2219/00162 , B01J2219/00164 , Y10T137/3118 , Y10T137/86187 , Y10T137/86324
摘要： A device for discharging liquid such as raw materials and fuels capable of discharging liquid stably even under such conditions that the environment of a discharge space varies drastically and suddenly by adjusting discharge conditions to optimum ones according to fluctuation of surrounding environment is provided by controlling fluctuation in pressure in the buffer vessel 2 according to fluctuation in pressure in the mixing/reaction vessel 3 with installation of buffer vessel 2 and control means 10 between liquid discharge means 4 for mixing/reaction vessel 3 for discharged liquid, and the storage tank 1 for liquid to be discharged, and also by installing release means capable of releasing pressure in vessel 2 to surrounding atmosphere.
摘要翻译： 一种用于排出诸如原料和燃料的液体的装置，即使在放电空间的环境根据周围环境的波动将放电条件调节到最佳状态的情况下，放电空间的环境急剧变化的条件下，也能够稳定地排出液体。 缓冲容器2中的压力随着缓冲容器2的安装而产生的压力的波动，以及用于混合的排液装置4和排出液的反应容器3之间的控制装置10以及用于液体的储存罐1 并且还通过安装能够将容器2中的压力释放到周围环境的释放装置。
-
26.发明授权Ceramic element, method for producing ceramic element, display device, relay device and capacitor 有权陶瓷元件，陶瓷元件的制造方法，显示装置，继电器装置及电容器公开(公告)号：US06265811B1
公开(公告)日：2001-07-24
申请号：US09117243
申请日：1998-11-10
IPC分类号： H01L4108
CPC分类号： H01L41/1875 , H01H1/0036 , H01H57/00 , H01H2001/0042 , H01H2057/006 , H01L41/0973 , H01L41/098 , H01L41/314 , Y10T29/42
摘要： A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t≦2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.
摘要翻译： 陶瓷元件包括具有抗铁电体膜22的主致动器元件26和形成在反铁电体膜22的第一主表面（前表面）上的一对电极24a，24b，用于支撑主铁芯的振动部分18 致动器元件26和用于以振动方式支撑振动部分18的固定部分20。 偏振后的反铁电体膜22具有根据施加到一对电极24a，24b的电压V的模拟方式增加平均介电常数的区域Zt。 具体地，如果反铁电体膜22的平均膜厚为t，并且一对电极24a，24b之间的间距为p，则p / t <= 2.5的表达式被满足。 因此，机械位移量根据所施加的电压以模拟方式改变，使得可以在完成施加之后的无电压负载状态下保持与施加驱动电压期间获得的位移量相当的位移量 的驱动电压。
-
公开(公告)号：US06217979B1
公开(公告)日：2001-04-17
申请号：US09085853
申请日：1998-05-27
IPC分类号： C04B3700
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , C04B2235/3225 , C04B2235/6025 , H01L41/0973 , H01L41/314 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。
-
公开(公告)号：US5853514A
公开(公告)日：1998-12-29
申请号：US716876
申请日：1996-09-20
IPC分类号： G01L1/16 , C04B35/49 , C04B35/493 , H01L41/09 , H01L41/22 , H04R17/00 , H04R17/08 , C04B37/00 , H01L41/08
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , H01L41/0973 , H01L41/314 , C04B2235/3225 , C04B2235/6025 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。
-
公开(公告)号：US06933663B2
公开(公告)日：2005-08-23
申请号：US10117353
申请日：2002-04-05
CPC分类号： B41J2/1609 , B41J2/1632 , G02B26/0858 , H01L27/20 , H01L41/257 , H01L41/29 , H01L41/338 , H01L41/339 , H02N2/002 , Y10T29/42
摘要： A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive elements arranged in comb teeth-like alignment on a base plate. The actuator is driven by means of dislocation of the piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of the cells is formed independently from adjacent cells by positioning cover plates between two adjacent piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive actuator wherein a heating process at a high temperature can be applied and mass production at low cost is possible. The actuator includes cells with slit portions having a width of 60 μm or less and a high aspect ratio and can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.
摘要翻译： 压电/电致伸缩致动器包括在基板上以梳齿状对准布置的多个压电/电致伸缩元件。 致动器通过压电/电致伸缩元件的位错来驱动。 电池驱动型致动器的特征在于，通过将盖板定位在两个相邻的压电/电致伸缩元件之间，每个电池单元独立于相邻电池单元形成。 因此，提供了一种压电/电致伸缩致动器，其中可以应用高温下的加热过程，并且可以以低成本进行批量生产。 致动器包括具有宽度为60μm或更小并且具有高纵横比的狭缝部分的电池，并且可以以高电场强度被激活，并且可以以小的电场强度获得大的位移。
-
30.发明授权Piezoelectric/electrostrictive film type actuator and method for manufacturing the same 有权压电/电致伸缩薄膜式致动器及其制造方法公开(公告)号：US06796637B2
公开(公告)日：2004-09-28
申请号：US10156729
申请日：2002-05-28
IPC分类号： B41J2045
CPC分类号： B41J2/1632 , B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1643 , H04R17/00 , Y10T29/42 , Y10T29/49004 , Y10T29/49128 , Y10T29/49155 , Y10T29/49401
摘要： A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer. This piezoelectric/electrostrictive film-type actuator solves the problem in that a withstand voltage of the piezoelectric/electrostrictive films is likely to decrease, and effectively achieves a bending dislocation.
摘要翻译： 压电/电致伸缩膜型致动器具有陶瓷基体和压电/电致伸缩元件，其具有压电/电致伸缩膜和电极膜，并且其设置在陶瓷基底上，并且根据压电/电致伸缩体的位错来驱动 元件。 压电/电致伸缩元件被形成为使得压电/电致伸缩膜和电极膜交替层压，以便用电极膜构建最上层和最下层。 此外，压电/电致伸缩膜在夹在其中的边界中具有两层且不含有由其分解材料形成的不同相的孔。 此外，双层压电/电致伸缩膜的上层比下层厚。 这种压电/电致伸缩薄膜型致动器解决了压电/电致伸缩薄膜的耐电压可能降低的问题，并且有效地实现了弯曲位错。
-
-
-
-
-
-
-
-
-
搜索结果
121 条记录 (耗时 0.03 秒)
