System of devices and components of said system
    29.
    发明申请
    System of devices and components of said system 审中-公开
    所述系统的装置和部件的系统

    公开(公告)号:US20160196963A1

    公开(公告)日:2016-07-07

    申请号:US14906634

    申请日:2014-06-05

    CPC classification number: H01J41/12 H01F7/02 H01F10/18

    Abstract: This invention relates to vacuum complex system of devices (VCSD), including, requiring vacuum the main unit (objects and processes, requiring a vacuum environment), a vacuum generating system. According to the invention, vacuum housing is designed in system form and constitutes an in-system vacuum chamber, comprising as follows: a unit of main device wherein a main device is arranged; at least, one unit of connected evacuating system wherein a connected evacuating system (CES) of vacuum generating system is arranged. CES is performed inside vacuum chamber of the main unit with taking into account the structural and functional characteristics of the main unit, and together they form a system VCSD. For initial rapid achievement of high vacuum inside the system chamber, it is used, together with CES, the system of external pumps, which is subsequently separated from VCSD via interface flange, and the vacuum condition in VCSD is supported by CES.

    Abstract translation: 本发明涉及装置(VCSD)的真空复合系统,包括要求真空主体(物体和工艺,需要真空环境),真空发生系统。 根据本发明,真空壳体设计为系统形式,并构成系统内真空室,其包括如下:主装置单元,其中布置有主装置; 至少设置一个连接的排气系统的单元,其中布置了真空发生系统的连接的抽空系统(CES)。 考虑到主机的结构和功能特性,在主机的真空室内执行CES,并且它们一起构成系统VCSD。 为了初始快速实现系统室内的高真空,它与CES一起被用于外部泵的系统,该系统随后通过接口法兰与VCSD分离,VCSD中的真空条件由CES支持。

Patent Agency Ranking