SELF-ALIGNED GATED EMITTER TIP ARRAYS
    4.
    发明申请
    SELF-ALIGNED GATED EMITTER TIP ARRAYS 有权
    自对准浇口发射器提升阵列

    公开(公告)号:US20140285084A1

    公开(公告)日:2014-09-25

    申请号:US14067668

    申请日:2013-10-30

    IPC分类号: H01J9/02 H01J1/304

    摘要: Methods for fabrication of self-aligned gated tip arrays are described. The methods are performed on a multilayer structure that includes a substrate, an intermediate layer that includes a dielectric material disposed over at least a portion of the substrate, and at least one gate electrode layer disposed over at least a portion of the intermediate layer. The method includes forming a via through at least a portion of the at least one gate electrode layer. The via through the at least one gate electrode layer defines a gate aperture. The method also includes etching at least a portion of the intermediate layer proximate to the gate aperture such that an emitter structure at least partially surrounded by a trench is formed in the multilayer structure.

    摘要翻译: 描述了自对准浇口尖端阵列的制造方法。 该方法在包括衬底,包括设置在衬底的至少一部分上的电介质材料的中间层以及设置在中间层的至少一部分上的至少一个栅电极层的多层结构上进行。 该方法包括通过至少一个栅极电极层的至少一部分形成通孔。 通过至少一个栅极电极层的通孔限定栅极孔径。 该方法还包括蚀刻靠近栅极孔的中间层的至少一部分,使得在多层结构中形成至少部分被沟槽包围的发射极结构。

    Precise hand-assembly of microfabricated components
    5.
    发明申请
    Precise hand-assembly of microfabricated components 有权
    精密手工组装微型组件

    公开(公告)号:US20090113687A1

    公开(公告)日:2009-05-07

    申请号:US11404676

    申请日:2006-04-14

    IPC分类号: B23P19/04

    摘要: A hand assembled MEMS apparatus includes meso-scale microfabricated components adapted for being moved by hand relative to one another from a loose-fit preliminary alignment orientation to a relatively tight-fit assembled orientation. A microfabricated spring member is integrally disposed on one of the components to bias the other component towards the assembled orientation. A cam surface disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction. A microfabricated abutment is disposed to limit relative movement of the components in at least one direction other than the assembly direction. A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation.

    摘要翻译: 手工组装的MEMS装置包括中等尺寸的微加工部件,其适于相对于彼此从松动配合的初步对准方向移动到相对紧密组装的方向。 一个微小的弹簧构件一体地设置在其中一个部件上,以将另一部件朝向组装方向偏压。 设置在另一部件上的凸轮表面构造成在连续的手沿组装方向移动时可弹性地接合和移动弹簧件抵抗其偏压。 设置微加工支座以限制部件在除组装方向之外的至少一个方向上的相对运动。 一种微制造的触觉反馈构件被构造成一旦组件基本上达到组装取向就破坏在组装方向上的手部移动。

    Precise hand-assembly of microfabricated components
    6.
    发明授权
    Precise hand-assembly of microfabricated components 有权
    精密手工组装微型组件

    公开(公告)号:US07900336B2

    公开(公告)日:2011-03-08

    申请号:US11404676

    申请日:2006-04-14

    IPC分类号: B23Q7/00

    摘要: A hand assembled MEMS apparatus includes meso-scale microfabricated components adapted for being moved by hand relative to one another from a loose-fit preliminary alignment orientation to a relatively tight-fit assembled orientation. A microfabricated spring member is integrally disposed on one of the components to bias the other component towards the assembled orientation. A cam surface disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction. A microfabricated abutment is disposed to limit relative movement of the components in at least one direction other than the assembly direction. A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation.

    摘要翻译: 手工组装的MEMS装置包括中等尺寸的微加工部件,其适于相对于彼此从松动配合的初步对准方向移动到相对紧密组装的方向。 一个微小的弹簧构件一体地设置在其中一个部件上,以将另一部件朝向组装方向偏压。 设置在另一部件上的凸轮表面构造成在连续的手沿组装方向移动时可弹性地接合和移动弹簧件抵抗其偏压。 设置微加工支座以限制部件在除组装方向之外的至少一个方向上的相对运动。 一种微制造的触觉反馈构件被构造成一旦组件基本上达到组装取向就破坏在组装方向上的手部移动。