DENSE ARRAY OF FIELD EMITTERS USING VERTICAL BALLASTING STRUCTURES
    2.
    发明申请
    DENSE ARRAY OF FIELD EMITTERS USING VERTICAL BALLASTING STRUCTURES 有权
    使用垂直焊接结构的场发射体的DENSE阵列

    公开(公告)号:US20090072750A1

    公开(公告)日:2009-03-19

    申请号:US12233859

    申请日:2008-09-19

    CPC classification number: H01J1/3042 H01J2201/319

    Abstract: A field emitter array structure is provided. The field emitter array structure includes a plurality of vertical un-gated transistor structures formed on a semiconductor substrate. The semiconductor substrate includes a plurality of vertical pillar structures to define said un-gated transistor structures. A plurality of emitter structures are formed on said vertical un-gated transistor structures. Each of said emitter structures is positioned in a ballasting fashion on one of said vertical un-gated transistor structures so as to allow said vertical ungated transistor structure to effectively provide high dynamic resistance with large saturation currents.

    Abstract translation: 提供场发射器阵列结构。 场发射极阵列结构包括形成在半导体衬底上的多个垂直未门控晶体管结构。 半导体衬底包括多个垂直柱结构,以限定所述未门控晶体管结构。 在所述垂直非门控晶体管结构上形成多个发射极结构。 所述发射极结构中的每一个以压载方式定位在所述垂直非门控晶体管结构中的一个上,以便允许所述垂直非门控晶体管结构有效地提供具有较大饱和电流的高动态电阻。

    SELF-ALIGNED GATED EMITTER TIP ARRAYS
    5.
    发明申请
    SELF-ALIGNED GATED EMITTER TIP ARRAYS 有权
    自对准浇口发射器提升阵列

    公开(公告)号:US20140285084A1

    公开(公告)日:2014-09-25

    申请号:US14067668

    申请日:2013-10-30

    Abstract: Methods for fabrication of self-aligned gated tip arrays are described. The methods are performed on a multilayer structure that includes a substrate, an intermediate layer that includes a dielectric material disposed over at least a portion of the substrate, and at least one gate electrode layer disposed over at least a portion of the intermediate layer. The method includes forming a via through at least a portion of the at least one gate electrode layer. The via through the at least one gate electrode layer defines a gate aperture. The method also includes etching at least a portion of the intermediate layer proximate to the gate aperture such that an emitter structure at least partially surrounded by a trench is formed in the multilayer structure.

    Abstract translation: 描述了自对准浇口尖端阵列的制造方法。 该方法在包括衬底,包括设置在衬底的至少一部分上的电介质材料的中间层以及设置在中间层的至少一部分上的至少一个栅电极层的多层结构上进行。 该方法包括通过至少一个栅极电极层的至少一部分形成通孔。 通过至少一个栅极电极层的通孔限定栅极孔径。 该方法还包括蚀刻靠近栅极孔的中间层的至少一部分,使得在多层结构中形成至少部分被沟槽包围的发射极结构。

    Precise hand-assembly of microfabricated components
    6.
    发明申请
    Precise hand-assembly of microfabricated components 有权
    精密手工组装微型组件

    公开(公告)号:US20090113687A1

    公开(公告)日:2009-05-07

    申请号:US11404676

    申请日:2006-04-14

    Abstract: A hand assembled MEMS apparatus includes meso-scale microfabricated components adapted for being moved by hand relative to one another from a loose-fit preliminary alignment orientation to a relatively tight-fit assembled orientation. A microfabricated spring member is integrally disposed on one of the components to bias the other component towards the assembled orientation. A cam surface disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction. A microfabricated abutment is disposed to limit relative movement of the components in at least one direction other than the assembly direction. A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation.

    Abstract translation: 手工组装的MEMS装置包括中等尺寸的微加工部件,其适于相对于彼此从松动配合的初步对准方向移动到相对紧密组装的方向。 一个微小的弹簧构件一体地设置在其中一个部件上,以将另一部件朝向组装方向偏压。 设置在另一部件上的凸轮表面构造成在连续的手沿组装方向移动时可弹性地接合和移动弹簧件抵抗其偏压。 设置微加工支座以限制部件在除组装方向之外的至少一个方向上的相对运动。 一种微制造的触觉反馈构件被构造成一旦组件基本上达到组装取向就破坏在组装方向上的手部移动。

    Precise hand-assembly of microfabricated components
    8.
    发明授权
    Precise hand-assembly of microfabricated components 有权
    精密手工组装微型组件

    公开(公告)号:US07900336B2

    公开(公告)日:2011-03-08

    申请号:US11404676

    申请日:2006-04-14

    Abstract: A hand assembled MEMS apparatus includes meso-scale microfabricated components adapted for being moved by hand relative to one another from a loose-fit preliminary alignment orientation to a relatively tight-fit assembled orientation. A microfabricated spring member is integrally disposed on one of the components to bias the other component towards the assembled orientation. A cam surface disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction. A microfabricated abutment is disposed to limit relative movement of the components in at least one direction other than the assembly direction. A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation.

    Abstract translation: 手工组装的MEMS装置包括中等尺寸的微加工部件,其适于相对于彼此从松动配合的初步对准方向移动到相对紧密组装的方向。 一个微小的弹簧构件一体地设置在其中一个部件上,以将另一部件朝向组装方向偏压。 设置在另一部件上的凸轮表面构造成在连续的手沿组装方向移动时可弹性地接合和移动弹簧件抵抗其偏压。 设置微加工支座以限制部件在除组装方向之外的至少一个方向上的相对运动。 一种微制造的触觉反馈构件被构造成一旦组件基本上达到组装取向就破坏在组装方向上的手部移动。

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