FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIUM RECORDED WITH DIAGNOSTIC PROGRAM USED FOR FLOW RATE CONTROL DEVICE
    21.
    发明申请
    FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIUM RECORDED WITH DIAGNOSTIC PROGRAM USED FOR FLOW RATE CONTROL DEVICE 审中-公开
    流量控制装置,诊断装置和记录用于流量控制装置的诊断程序的记录介质

    公开(公告)号:US20130092258A1

    公开(公告)日:2013-04-18

    申请号:US13651099

    申请日:2012-10-12

    IPC分类号: G05D7/06 G01F1/34

    摘要: In order to be able to diagnose an abnormality occurring in a flow rate control valve with high reliability, and for example, if an abnormality occurs in the flow rate control valve, quickly perform appropriate maintenance or the like, a first measured flow rate diagnostic part that, on the basis of a second measured flow rate value or a measured pressure value, diagnoses an abnormality of a first measured flow rate value, and a valve diagnostic part that, when the first measured flow rate diagnostic part diagnoses that the first measured flow rate value has no abnormality, diagnoses an abnormality of the flow rate control valve are provided.

    摘要翻译: 为了能够高可靠性地诊断在流量控制阀中发生的异常,例如,如果流量控制阀发生异常,则快速进行适当的维护等,第一测定流量诊断部 基于第二测量流量值或测量压力值,诊断第一测量流量值的异常,以及当第一测量流量诊断部分诊断第一测量流量时的阀诊断部分 速率值没有异常,提供了流量控制阀的异常诊断。

    Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device
    23.
    发明申请
    Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device 有权
    压电驱动阀和压电驱动流量控制装置

    公开(公告)号:US20120273061A1

    公开(公告)日:2012-11-01

    申请号:US13505620

    申请日:2010-11-04

    IPC分类号: F16K49/00 F16K31/02

    摘要: A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.

    摘要翻译: 提供了一种压电驱动阀和压电驱动的流体控制装置,其可以控制流体,即使流体的温度高于压电致动器的工作温度范围。 压电驱动阀包括用于打开和关闭流体通道的阀元件,通过利用压电元件的延伸来驱动阀元件的压电致动器,以及将压电致动器提升和支撑远离流体通道的辐射间隔件,以及 辐射从在流体通道中流动的流体转移到压电致动器的热量,并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒,其中支撑筒由具有相同材料的材料制成 至少在用于容纳辐射间隔物的部分处,与辐射间隔物的热膨胀系数相同。

    METHOD AND DEVICE FOR DETECTING THE FLOW OF A LIQUID
    24.
    发明申请
    METHOD AND DEVICE FOR DETECTING THE FLOW OF A LIQUID 有权
    用于检测液体流动的方法和装置

    公开(公告)号:US20120024393A1

    公开(公告)日:2012-02-02

    申请号:US13130025

    申请日:2009-11-23

    申请人: Georges Menet

    发明人: Georges Menet

    IPC分类号: F16K31/02

    摘要: Method and device for detecting the flow of liquid, in particular water, in a consuming installation, comprising at least one opening/closing means (3) for supplying liquid, this installation being supplied via an inlet pipe (2) fitted with a solenoid valve (5), a pressure sensor (6) upstream of the solenoid valve and a pressure sensor (7) downstream of the solenoid valve. Management means (8) are able to effect the following operations: calculation of the difference (ΔP) between the value of the upstream pressure signal (Pam) and the value of the downstream pressure signal (Pav); comparison of this difference (ΔP) with at least one triggering threshold (SΔPo, SΔPf); when the pressure difference (ΔP) reaches or exceeds a triggering threshold (SΔPo), a command signal (Co) to open the solenoid valve (5) is generated; when the pressure difference (ΔP) reaches or falls below a triggering threshold (SΔPf), a command signal (Cf) to close the solenoid valve (5) is generated; and a flow signal (D) is generated as a function of said pressure difference (ΔP).

    摘要翻译: 用于检测消耗装置中的液体流动,特别是水的方法和装置,包括用于供应液体的至少一个打开/关闭装置(3),该装置经由装配有电磁阀的入口管(2)供应, (5),电磁阀上游的压力传感器(6)和电磁阀下游的压力传感器(7)。 管理装置(8)能够实现以下操作:计算上游压力信号(Pam)的值和下游压力信号(Pav)的值之间的差(&Dgr; P); 该差异(&Dgr; P)与至少一个触发阈值(S&Dgr; Po,S&Dgr; Pf)的比较; 当压力差(&Dgr; P)达到或超过触发阈值(S&Dgr; Po)时,产生打开电磁阀(5)的指令信号(Co) 当压差(&Dgr; P)达到或低于触发阈值(S&Dgr; Pf)时,产生关闭电磁阀(5)的指令信号(Cf) 并且作为所述压力差(&Dgr; P)的函数产生流量信号(D)。

    Liquid flow controller and precision dispense apparatus and system
    25.
    发明授权
    Liquid flow controller and precision dispense apparatus and system 有权
    液体流量控制器和精密分配装置及系统

    公开(公告)号:US08082946B2

    公开(公告)日:2011-12-27

    申请号:US12454611

    申请日:2009-05-20

    IPC分类号: G05D7/06

    摘要: Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.

    摘要翻译: 流体控制装置包括具有流体入口和流体出口的比例流量阀; 与比例流量阀连通的气动比例控制阀,用于调节比例流量阀; 摩擦流动元件,其具有与比例流量阀的流体出口流体连通的摩擦流体元件流体入口,并具有与摩擦流体元件流体入口间隔开的摩擦流体元件流体出口,上游压力传感器; 下游压力传感器; 以及与上游压力传感器,下游压力传感器和气动比例控制阀连通的控制器。

    Liquid flow controller and precision dispense apparatus and system
    26.
    发明申请
    Liquid flow controller and precision dispense apparatus and system 有权
    液体流量控制器和精密分配装置及系统

    公开(公告)号:US20090230336A1

    公开(公告)日:2009-09-17

    申请号:US12454611

    申请日:2009-05-20

    IPC分类号: F16K31/00

    摘要: Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

    摘要翻译: 装置和控制系统,用于监控(优选数字化)和/或控制诸如比例流体控制阀的气动负载的压力,并使用来自响应于流量的流体测量装置的测量输入,所使用的液体测量输入 以控制气动负载的压力,使得可以增加或减少气动负载(以比例地打开或关闭气动阀),以将流体的流速改变到期望的速率。 也可以调节气动负载(按比例打开或关闭气动阀),以适应流体温度和粘度的变化。

    Regulator unit and method for regulating a flap opening of a flap situated in a mass flow line
    27.
    发明申请
    Regulator unit and method for regulating a flap opening of a flap situated in a mass flow line 有权
    调节器单元和用于调节位于质量流动管线中的翼片的翼片开口的方法

    公开(公告)号:US20090183788A1

    公开(公告)日:2009-07-23

    申请号:US12315344

    申请日:2008-12-01

    IPC分类号: F16K21/04

    摘要: A regulator unit for regulating a flap opening of a flap arranged in a mass flow line includes: an analyzer unit which is designed for providing an analysis signal on the basis of a predefined desired pressure difference and a difference between pressures upstream and downstream from the flap; a regulator which is designed for determining a trigger signal from the analysis signal according to a regulating characteristic; and a control element-regulating unit which is designed for regulating the flap opening of the flap in the mass flow line in response to the trigger signal.

    摘要翻译: 用于调节设置在质量流动管路中的翼片的翼片开口的调节器单元包括:分析器单元,其被设计用于基于预定的期望压力差和从翼片的上游和下游的压力之间的差异提供分析信号 ; 调节器,其被设计用于根据调节特性从分析信号确定触发信号; 以及控制元件调节单元,其被设计成响应于所述触发信号来调节所述质量流动线中的所述翼片的翼片开口。

    Controlling The Flow Of Vapors Sublimated From Solids
    30.
    发明申请
    Controlling The Flow Of Vapors Sublimated From Solids 有权
    控制从固体升华的蒸气流

    公开(公告)号:US20080047607A1

    公开(公告)日:2008-02-28

    申请号:US10582524

    申请日:2004-12-09

    IPC分类号: G05D7/00

    摘要: A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber. The temperature of the vaporizer is determined by closed-loop control to a set-point temperature. The mechanical throttle valve is electrically controlled, e.g. the valve position is under closed-loop control to the output of the pressure gauge. In this way the vapor flow rate can be generally proportional to the pressure gauge output. All surfaces exposed to the vapor from the vaporizer to the vacuum chamber are heated to prevent condensation. A gate valve and a rotary butterfly valve are shown acting as the upstream throttling valve. Employing a fixed charge of solid material, the temperature of the vaporizer may be held steady for a prolonged period, during which the throttle valve is gradually opened from a lower conductance of its operating range as the charge sublimes. When a greater valve displacement is reached, the temperature is raised, to enable the valve to readjust to its lower conductance setting from which it can again gradually open as more of the charge is consumed.

    摘要翻译: 用于将稳定的升华蒸气输送到真空室的蒸气输送系统包括固体材料的蒸发器,机械节流阀和压力计,随后是到真空室的蒸汽导管。 蒸汽流量由蒸发器的温度和位于蒸发器和真空室之间的机械节流阀的电导率的设定决定。 蒸发器的温度通过闭环控制确定为设定点温度。 机械节流阀是电控制的,例如, 阀门位置在压力计的输出端处于闭环控制下。 以这种方式,蒸汽流速可以与压力表输出大致成比例。 暴露于蒸发器到真空室的蒸汽的所有表面都被加热以防止冷凝。 闸阀和旋转蝶阀显示为上游节流阀。 采用固定材料的固定电荷,蒸发器的温度可以长时间保持稳定,在此期间,随着充电升华,节流阀从其工作范围的较低电导逐渐打开。 当达到更大的阀位移时,温度升高,使得阀能够重新调整到其较低的电导设置,随着更多的电荷消耗,它可以再次逐渐打开。