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    Multi-ampere duopigatron ion source
    21.
    发明授权
    Multi-ampere duopigatron ion source 失效
    多功能多普勒离子源

    公开(公告)号：US3740554A

    公开(公告)日：1973-06-19

    申请号：US3740554D

    申请日：1972-04-13

    Applicant: ATOMIC ENERGY COMMISSION

    Inventor： MORGAN O

    IPC: H01J27/10 ,  H01J37/08

    CPC classification number: H01J27/10

    Abstract: A duoplasmatron ion source is modified to provide a large plasma surface with a uniform density at a target cathode. The target cathode and the acceleration and deceleration electrodes are gridded or multi-apertured and are spaced in close proximity each to the others with the apertures being in alignment. With such an arrangement, it is possible to extract multi-ampere bright ion beams at energies of tens of KeV. Conversion of the ion beam to a neutral particle beam can be readily accomplished by addition of a gas cell.

    Abstract translation: 二重质量离子源被修改以在目标阴极处提供具有均匀密度的大的等离子体表面。 目标阴极和加速和减速电极被网格化或多孔化，并且每个孔彼此对准地彼此紧密地间隔开。 通过这样的布置，可以以几十KeV的能量提取多安培的明亮离子束。 通过添加气体池可以容易地将离子束转化成中性粒子束。

    Vertical field emission devices and methods of fabrication with applications to flat panel displays
    24.
    发明授权
    Vertical field emission devices and methods of fabrication with applications to flat panel displays 失效
    垂直场发射装置及制造方法应用于平板显示器

    公开(公告)号：US5714837A

    公开(公告)日：1998-02-03

    申请号：US353402

    申请日：1994-12-09

    Applicant: Shayne Matthew Zurn ,  Peter Joseph Schiller ,  Dennis Lee Polla

    Inventor： Shayne Matthew Zurn ,  Peter Joseph Schiller ,  Dennis Lee Polla

    IPC: H01J1/304 ,  H01J27/10 ,  H01J21/36

    CPC classification number: H01J1/3042 ,  H01J2329/00

    Abstract: Vertical field emission devices are described with very small cathode to anode separations. Preferred cathodes have sharp edge emitters extending, outward perpendicular to the surface of the underlying substrate. These sharp edge emitters are produced within planar photolithography by coating sacrificial conformal walls and anisotropic etching. Microencapsulation is used to produce a sealed cavity at low pressure which includes the space between the anode and cathode. The field emission components can be adapted for the production of light emitting, field emission diodes. The individual cathode emitters can be integrated with solid state components on the substrate with each cathode being independently addressable. Arrays of closely packed light emitting, field emission diodes of the present invention are particularly suitable for use in displays. These displays would be useful for flat-panel computer displays and high definition television.

    Abstract translation: 用非常小的阴极与阳极分离来描述垂直场致发射器件。 优选的阴极具有尖锐的边缘发射体，其垂直于下面的衬底的表面向外延伸。 这些锋利的边缘发射器是通过涂覆牺牲保形壁和各向异性蚀刻在平面光刻中产生的。 微囊化用于在低压下产生包括阳极和阴极之间的空间的密封空腔。 场致发射元件可以适用于制造发光场发射二极管。 各个阴极发射器可以与衬底上的固态组件集成，每个阴极可独立寻址。 本发明的紧密堆积的发光场发射二极管阵列特别适用于显示器。 这些显示器对于平板电脑显示器和高分辨率电视将是有用的。

    Vacuum-compatible air-cooled plasma device
    25.
    发明授权
    Vacuum-compatible air-cooled plasma device 失效
    真空兼容风冷等离子体设备

    公开(公告)号：US4659899A

    公开(公告)日：1987-04-21

    申请号：US833575

    申请日：1986-02-26

    Applicant: David G. Welkie ,  Robert L. Gerlach

    Inventor： David G. Welkie ,  Robert L. Gerlach

    IPC: H01J27/02 ,  H01J27/10 ,  B23K15/00

    CPC classification number: H01J27/022 ,  H01J27/10

    Abstract: A plasma generating device, and in particular a duoplasmatron ion gun, is disclosed that is air cooled, high vacuum compatible and hence very clean with a stable ion current output. The device is mounted to a standard type flange held at ground potential without the necessity of subsequent high voltage isolation. Cooling is achieved with cooling fins and a fan inside a housing in which the duoplasmatron is mounted. A mounting structure includes a vacuum tight ceramic ring brazed between the mounting flange and the gun body. The ceramic ring is located with respect to high permeability magnetic components and a magnetic coil to facilitate a magnetic field for focusing the plasma, allowing the coil to be referenced to ground potential while the gun is maintained at high voltage. A ceramic chamber containing ceramic pellets is located in the plasma-forming gas inlet duct to prevent high voltage electrical discharge in the gas duct. A piezoelectric valve operated by a pressure sensor maintains accurate gas flow and ion output.

    Abstract translation: 公开了一种等离子体产生装置，特别是双质子离子枪，其是空气冷却，高真空兼容的，因此非常干净，具有稳定的离子电流输出。 该器件安装在保持接地电位的标准型法兰上，无需进行高压隔离。 冷却通过散热片和风扇安装在其中安装有双质子的壳体内部实现。 安装结构包括钎焊在安装法兰和枪体之间的真空密封陶瓷环。 陶瓷环相对于高磁导率磁性部件和磁性线圈定位，以便于用于聚焦等离子体的磁场，从而允许线圈参考地电位，同时将枪维持在高电压。 包含陶瓷颗粒的陶​​瓷室位于等离子体形成气体入口管道中，以防止气体管道中的高压放电。 由压力传感器操作的压电阀保持精确的气流和离子输出。

    Ion sources
    26.
    发明授权
    Ion sources 失效
    离子源

    公开(公告)号：US3890535A

    公开(公告)日：1975-06-17

    申请号：US29659472

    申请日：1972-10-11

    Applicant: ANVAR

    Inventor： GAUTHERIN GUY ,  AUBERT JEAN

    IPC: H01J27/10 ,  H01J37/08 ,  H05H1/00

    CPC classification number: H01J27/10

    Abstract: The ion source comprises a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, and by an intermediate electrode enclosing the arc in proximity to an extraction orifice pierced in the anode. Magnetic field creating means are provided between the intermediate electrode and the extraction orifice, which has a relative small crosssection so that the pressure of the gases occurring inside the primary plasma generator is independent of the pressure existing downstream of the extraction orifice. This pressure downstream of extraction orifice is less than the pressure inside the primary plasma generator. On the downstream side there is an extraction electrode. A fifth electrode is arranged downstream of the extraction orifice of the anode and upstream of the extraction electrode and means are provided for applying to this fifth electrode a positive potential with respect to that of the anode and of adjustable value, which is small in absolute value with respect to the potential of the extraction electrode.

    Abstract translation: 离子源包括由热阴极和阳极构成的初级等离子体发生器，在其间产生电弧，以及通过在阳极中刺穿的抽吸孔附近包围弧的中间电极。 磁场产生装置设置在中间电极和抽出孔之间，其具有相对小的横截面，使得在一次等离子体发生器内部发生的气体的压力与提取孔下游的压力无关。 提取孔下游的压力小于初级等离子体发生器内部的压力。 在下游侧有一个提取电极。 第五电极布置在阳极的提取孔的下游和提取电极的上游，并且提供装置用于向该第五电极施加相对于阳极的正电位和绝对值小的可调整值 相对于提取电极的电位。

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