公开(公告)号：US6009667A

公开(公告)日：2000-01-04

申请号：US161986

申请日：1998-09-29

Applicant: Masami Mizukami

Inventor： Masami Mizukami

IPC: F16J13/18 ,  B01J3/03 ,  C23C14/00 ,  E05D3/06 ,  H01L21/3065 ,  E05D15/48

CPC classification number: E05D3/122 ,  E05Y2201/652 ,  Y10T16/541

Abstract: A hinge mechanism for use with a cover for opening and closing a hole. The mechanism is designed to support the cover and enable the cover to rotate through an angle greater than 90.degree. between an opened position and a closed position. The mechanism comprises an axle to be secured to the chamber, a support member having a first part rotatably supported by the axle and a second part spaced from the first part, a rotary member to be secured to the cover, the rotary member rotatably supported by the second part of the support member and capable of rotating around the support member when the cover is rotated, and a rotation-transmitting mechanism supported by the support member, connecting the rotary member to the axle to allow the support member to rotate in a first direction around the axle when the rotary member is rotated in a second direction opposite to the first direction. Once the hinge mechanism is incorporated in the vacuum-process apparatus, with the axle and the rotary member secured to the chamber and the cover, respectively, the support member can rotate in the direction opposite to the direction the cover is rotated around the rotary member between the closed position and the open position.

Abstract translation: 一种用于打开和关闭孔的盖的铰链机构。 该机构设计用于支撑盖子，并使盖子在打开位置和关闭位置之间旋转大于90°的角度。 所述机构包括要固定到所述室的轴，具有由所述轴可旋转地支撑的第一部分和与所述第一部分间隔开的第二部分的支撑构件，被固定到所述盖的旋转构件，所述旋转构件由所述旋转构件可旋转地支撑 所述支撑构件的第二部分并且当所述盖旋转时能够围绕所述支撑构件旋转;以及旋转传递机构，所述旋转传递机构由所述支撑构件支撑，将所述旋转构件连接到所述轴，以允许所述支撑构件以第一 当旋转构件沿与第一方向相反的第二方向旋转时绕轴的方向。 一旦铰链机构结合在真空处理装置中，分别将轴和旋转构件固定到腔室和盖子上，则支撑构件可以沿与盖子围绕旋转构件旋转的方向相反的方向旋转 在关闭位置和打开位置之间。

公开(公告)号：US5753795A

公开(公告)日：1998-05-19

申请号：US644387

申请日：1996-05-10

Applicant: Ned R. Kuypers

Inventor： Ned R. Kuypers

IPC: B01J3/00 ,  B01J3/03 ,  F16K51/02 ,  H01J49/04 ,  G01N31/08 ,  G01N3/08

CPC classification number: F16K51/02 ,  B01J3/006 ,  B01J3/03 ,  H01J49/00

Abstract: A detachable, vacuum-sealing plate assembly is provided for vacuum chamber access. The assembly has a demountable hinge, thereby permitting the plate to be swung open or closed, or completely removed from the chamber. The swung-closed plate is automatically pressure-sealed to the chamber during vacuum pump-down by the pressure differential between the interior of the chamber and the outside atmosphere. The plate is released upon vacuum venting, thereby providing swing-open access to the chamber. Functional components may be mounted to the plate. The plate may also have associated high-vacuum electrical fluid flowpath transfer or physical component feed-throughs.

Abstract translation: 提供可拆卸的真空密封板组件用于真空室进入。 组件具有可拆卸铰链，从而允许板被打开或关闭，或者完全从腔室移除。 通过室内和室外气氛之间的压力差，在真空泵送期间，摆动封闭的板被自动压力密封到室。 在真空排气时释放板，从而提供对室的摆动开放通路。 功能部件可以安装在板上。 该板还可以具有相关联的高真空电流体流路传输或物理部件馈通。

公开(公告)号：US5683523A

公开(公告)日：1997-11-04

申请号：US513283

申请日：1995-08-10

Applicant: Megumi Nakanose ,  Seiji Ishimoto ,  Katsuichi Kikuchi ,  Kiyotaka Fujita

Inventor： Megumi Nakanose ,  Seiji Ishimoto ,  Katsuichi Kikuchi ,  Kiyotaka Fujita

IPC: B01J3/00 ,  B01J3/03 ,  C22C14/00 ,  B65B31/04

CPC classification number: C22C14/00 ,  B01J3/002 ,  B01J3/006 ,  B01J3/03

Abstract: A light-weight super high vacuum vessel is disclosed in which a super high vacuum pressure over 10.sup.-10 Torr or over 10.sup.-11 Torr can be achieved using a simple evacuation system and/or with a sealing structure. The super high vacuum vessel contains a member comprising: from 0.02 wt. % to 1.00 wt. % of at least one platinum-group metal selected from the group consisting of Pd, Pt, Rh, Ru, Re, and Os; from 0.1 wt. % to 3.0 wt. % of at least one transition metal selected from the group consisting of Co, Fe, Cr, Ni, Mn, and Cu; from 0.1 wt. % to 3.0 wt. % of at least one rare earth series element selected from the group consisting of La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, and Y; impurity elements of C, N, and O, C being equal to or less than 0.05 wt. %, N being equal to or less than 0.05 wt. %, O being equal to or less than 0.08 wt. %; and Ti and inevitable impurities.

Abstract translation: 公开了一种轻质超高真空容器，其中使用简单的排气系统和/或具有密封结构可以实现超过10-10托或超过10-11托的超高真空压力。 超高真空容器含有一种成分，其含有：0.02重量％ ％〜1.00重量％ ％的至少一种选自Pd，Pt，Rh，Ru，Re和Os的铂族金属; 0.1重量％ ％〜3.0重量％ ％的至少一种选自Co，Fe，Cr，Ni，Mn和Cu的过渡金属; 0.1重量％ ％〜3.0重量％ ％的至少一种选自La，Ce，Pr，Nd，Sm，Gd，Tb，Dy，Ho，Er和Y的稀土系列元素; C，N和O的杂质元素C等于或小于0.05重量％。 ％，N等于或小于0.05wt。 ％，O等于或小于0.08wt。 ％; 和Ti和不可避免的杂质。

公开(公告)号：US5660418A

公开(公告)日：1997-08-26

申请号：US714753

申请日：1996-09-16

Applicant: Charles K. Crawford

Inventor： Charles K. Crawford

IPC: B01J3/03 ,  B23P13/02 ,  B23P15/00 ,  F16L41/03 ,  F16L41/00

CPC classification number: B23P15/00 ,  B01J3/03 ,  B23P13/02 ,  F16L41/03 ,  Y10S285/917 ,  Y10T29/49428 ,  Y10T29/4943

Abstract: A vacuum port manifold having a plurality of ports each having a planar sealing surface comprises a unitary construction derived from an intermediate unitary structure having a compound curved surface at least in part. The planar sealing surfaces are formed by machining selected planes across the compound curved surface.

Abstract translation: 具有多个具有平面密封表面的端口的真空端口歧管包括从至少部分具有复合曲面的中间单一结构衍生的单一结构。 平面密封表面通过在复合曲面上加工所选择的平面而形成。

公开(公告)号：US5625947A

公开(公告)日：1997-05-06

申请号：US400357

申请日：1995-03-08

Applicant: Charles K. Crawford

Inventor： Charles K. Crawford

IPC: B01J3/03 ,  B23P13/02 ,  B23P15/00 ,  F16L41/03

CPC classification number: B23P15/00 ,  B01J3/03 ,  B23P13/02 ,  F16L41/03 ,  Y10S285/917 ,  Y10T29/49428 ,  Y10T29/4943

Abstract: An improved method for manufacturing a vacuum port manifold having a plurality of ports each having a planar sealing surface derived from an intermediate unitary structure having a compound curved surface at least in part. The planar sealing surfaces are formed by machining selected planes across the corresponding compound curved surface.

Abstract translation: 一种用于制造具有多个端口的真空端口歧管的改进方法，每个端口至少部分地具有源自具有复合曲面的中间单一结构的平面密封表面。 平面密封表面通过在相应的复合曲面上加工所选择的平面而形成。

公开(公告)号：US5575856A

公开(公告)日：1996-11-19

申请号：US241192

申请日：1994-05-11

Applicant: Robert F. Foster ,  Brian Shekerjian ,  Joseph T. Hillman

Inventor： Robert F. Foster ,  Brian Shekerjian ,  Joseph T. Hillman

IPC: B01J3/03 ,  C23C16/458 ,  C23C16/54 ,  F16J15/08 ,  B21F41/00 ,  C23C16/00

CPC classification number: B01J3/03 ,  C23C16/4584 ,  C23C16/54 ,  F16J15/0881 ,  Y10T29/41

Abstract: A semi conductor wafer processing apparatus has a wafer supporting susceptor having a sealing surface, a susceptor drive shaft for connection to the susceptor also having a sealing surface, a seal disposed between the susceptor and drive shaft sealing surfaces having a rigid metallic core and a ductile metallic coating on the core, and fasteners connecting the susceptor to the drive shaft and compressing the seal between the susceptor and drive shaft sealing surfaces. The seal retains sealing capability upon being subjected to changes in temperature.

Abstract translation: 半导体晶片处理装置具有具有密封面的晶片支撑基座，用于连接到基座的基座驱动轴也具有密封面，密封件设置在基座和驱动轴密封面之间，密封面具有刚性金属芯和延性 将芯片上的金属涂层以及将基座连接到驱动轴并且压缩基座和驱动轴密封表面之间的密封件的紧固件。 密封件经受温度变化时保持密封性能。

公开(公告)号：US5294157A

公开(公告)日：1994-03-15

申请号：US855903

申请日：1992-03-23

Applicant: John D. Smith ,  Joseph Fruchtbaum

Inventor： John D. Smith ,  Joseph Fruchtbaum

IPC: C10B57/04 ,  B01J3/03 ,  C10B25/10 ,  F16J13/06 ,  F16J13/14 ,  E05C7/00

CPC classification number: F16J13/06 ,  B01J3/03 ,  C10B25/10 ,  Y10S292/72 ,  Y10T292/0826 ,  Y10T292/1082 ,  Y10T292/202

Abstract: A closure device for a lower opening of a coke drum pressure vessel is quick acting. The opening has an annular flange. An annular movable support encircles the pressure vessel above the flange. A stationary support secures to the flange below the movable support. A number of coil springs are evenly spaced around the stationary support between the stationary support and the movable support. Hydraulic cylinders between the movable and stationary support move the movable support axially relative to the stationary support. A head will abut the flange. Hooks mounted to the movable support will engage the head and pull the head tightly upward into engagement with the flange when the retracting cylinders are released. Pivotal cylinders will pivot the hooks between engaged and disengaged positions. The bias of the springs is independently adjustable.

Abstract translation: 用于焦炭筒压力容器的下部开口的封闭装置是快速作用的。 开口具有环形凸缘。 环形可动支架围绕凸缘上方的压力容器。 固定支架固定在可动支架下面的凸缘上。 多个螺旋弹簧围绕固定支撑件和可移动支撑件之间的固定支撑件均匀间隔开。 可移动和固定支撑之间的液压缸相对于固定支撑件轴向地移动可移动支撑件。 头部将与凸缘相接。 安装到可移动支撑件上的钩子将接合头部并且当收回气缸被释放时，将头部紧紧地向上拉动以与凸缘接合。 枢轴缸将在接合位置和脱离位置之间枢转钩。 弹簧的偏压可独立调节。

公开(公告)号：US5264008A

公开(公告)日：1993-11-23

申请号：US772758

申请日：1991-10-07

Applicant: Thomas J. Corrigan

Inventor： Thomas J. Corrigan

IPC: B01J8/02 ,  B01J3/03 ,  B01J8/06 ,  C01B3/38 ,  H01M8/06 ,  B01J7/00

CPC classification number: H01M8/0631 ,  B01J3/03 ,  B01J8/062 ,  C01B3/384 ,  C01B2203/0227 ,  C01B2203/0811 ,  C01B2203/0816 ,  C01B2203/0866

Abstract: A seal plate within a gas fixed reformer divides an upper plenum and a lower plenum to force combustion products along the heat exchange surface of the reactors. The seal plate has a sealed horizontal central portion and a vertical perpendicular portion extending to the bottom of the shell. The entire seal plate is exposed to gas in the discharge plenum, whereby differential expansion of various seal plate portions is avoided.

Abstract translation: 气体固定重整器内的密封板将上部气室和下部气室分开，以迫使沿着反应器的热交换表面的燃烧产物。 密封板具有密封的水平中心部分和延伸到壳体的底部的垂直垂直部分。 整个密封板暴露于排放气室中的气体，从而避免了各种密封板部分的不同膨胀。

公开(公告)号：US5236669A

公开(公告)日：1993-08-17

申请号：US880588

申请日：1992-05-08

Applicant: Walter J. Simmons ,  Edward G. Howard, Jr.

Inventor： Walter J. Simmons ,  Edward G. Howard, Jr.

IPC: B01J3/03 ,  F16J15/48

CPC classification number: F16J15/48 ,  B01J3/03

Abstract: This invention relates to vessel for high pressure and optionally high temperature processes. More specifically it relates to a pressure vessel having a non-threaded plug, the vessel being useful as a chemical reactor and for polymer processing at high pressures and optionally elevated temperatures.

Abstract translation: 本发明涉及用于高压和任选的高温过程的容器。 更具体地说，本发明涉及具有非螺纹塞的压力容器，所述容器可用作化学反应器，并且用于在高压和任选升高的温度下的聚合物加工。

公开(公告)号：US5141125A

公开(公告)日：1992-08-25

申请号：US743899

申请日：1991-08-12

Applicant: Thomas M. Canty ,  Paul J. O'Brien

Inventor： Thomas M. Canty ,  Paul J. O'Brien

IPC: B01J3/00 ,  B01J3/03

CPC classification number: B01J3/004 ,  B01J3/03

Abstract: In using various vessels such as reaction vessels there must be provisions for adding materials to the vessels and for observing the vessel contents. The structure of this invention provides a vessel closure device that provides both of these conveniences. This closure device has an annular seal ring containing spring plungers each located outside areas of exposure to the contamination of the vessel. The seal ring also has two O-ring seals to ensure against leakage. There is also provided a sliding door with a viewing window that is aligned with all openings in the other closure device components in order to provide a clear viewing and addition path to the interior of the vessel.

Abstract translation: 在使用诸如反应容器的各种容器时，必须有向容器添加材料和观察容器内容物的规定。 本发明的结构提供一种提供这两种便利性的容器封闭装置。 该闭合装置具有环形密封环，其包含弹簧柱塞，每个位于暴露于容器污染的外部区域。 密封圈还具有两个O形密封圈，以防止泄漏。 还提供了一种具有观察窗的滑动门，其与另一闭合装置部件中的所有开口对准，以便提供到容器内部的清晰的观察和添加路径。