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    MULTI-PORT ILLUMINATING AND VIEWING UNIT
    1.
    发明申请
    MULTI-PORT ILLUMINATING AND VIEWING UNIT 失效
    多端口照明和查看单元

    公开(公告)号：US20020067622A1

    公开(公告)日：2002-06-06

    申请号：US09727649

    申请日：2000-12-01

    Applicant: J M CANTY, INC

    Inventor： Gary K. Walck ,  Richard L. Marinelli

    IPC: G02B006/04

    CPC classification number: F21V33/0052 ,  B01J3/004 ,  F21W2131/411 ,  G02B23/2469 ,  G02B23/2476 ,  G02B23/26

    Abstract: An illuminating and viewing unit for illuminating the interior of a vessel with source radiation and observing the vessel interior comprises a housing including a front wall facing the vessel interior. The front wall is of a material that does not transmit the source radiation, and includes one or more illumination ports individually fused into the front wall that transmit the source radiation to the vessel interior. A detection port is also individually fused into the front wall for transmitting detectable radiation along a detection path from the vessel interior to a radiation detector mounted in the housing. The optical isolation of the illumination and detection ports in the front wall prevents unwanted internal reflection of source radiation into the detection path, and allows for independent selection of port materials and configurations, while maintaining a hermetic seal between the housing and the internal contents of the vessel.

    Abstract translation: 用于用源辐射照射容器内部并观察容器内部的照明和观察单元包括壳体，其包括面向容器内部的前壁。 前壁是不透射源辐射的材料，并且包括单独融合到前壁中的一个或多个照明端口，其将源辐射传输到容器内部。 检测端口也单独地融合到前壁中，用于沿着从容器内部到安装在壳体中的辐射探测器的检测路径传输可检测的辐射。 前壁中的照明和检测端口的光学隔离防止源辐射不期望地内部反射到检测路径中，并且允许独立选择端口材料和构造，同时保持壳体与内部内容物之间的气密封 船只。

    View port of a chemical vapor deposition device for manufacturing semiconductor devices
    2.
    发明申请
    View port of a chemical vapor deposition device for manufacturing semiconductor devices 有权

    公开(公告)号：US20020014203A1

    公开(公告)日：2002-02-07

    申请号：US09800894

    申请日：2001-03-08

    Inventor： Tae-Hoon Kim ,  Byung-Chul Kim ,  Kwon Son ,  Bong-Soon Lim

    IPC: C23C016/00

    CPC classification number: B01J3/004 ,  C23C16/488 ,  G02B7/007

    Abstract: A view port of chemical vapor deposition apparatus for manufacturing semiconductor devices prevents heat loss in a chamber during a plasma deposition process. The view port includes a bracket protruding at the circumference of an opening in an electrode serving as a wall of a chamber of the apparatus, a transparent window pressed by the bracket against the wall via an O-ring, a pivoting cap for capping an opening in the bracket aligned with the window, and heat-insulative material and/or a heating element integral with the cap so as to be positioned close to the window when the cap is closed. The heating element can be a resistive heating wire or a warm air duct formed by a hose or the like. During the deposition process, the temperature of the window is maintained, thereby minimizing the tendency of polymer to adhere to the window.

    Apparatus for the observation of processes
    3.
    发明授权
    Apparatus for the observation of processes 失效
    用于观察过程的装置

    公开(公告)号：US5270856A

    公开(公告)日：1993-12-14

    申请号：US864514

    申请日：1992-04-07

    Applicant: Karl-Heinrich Wenk

    Inventor： Karl-Heinrich Wenk

    IPC: C23C14/52 ,  B01J3/00 ,  G02B7/00 ,  G01P3/40

    CPC classification number: G02B7/007 ,  B01J3/004 ,  C23C14/52

    Abstract: A tubular stroboscope is interposed in the line of sight between a viewing glass and a process to be viewed in a chamber. The stroboscope is rotated about a central axis transverse to the line of sight and has a pair of diametrically opposed slots parallel to said axis, one slot being substantially wider than the opposite slot. The stroboscope is preferably driven by a jet of inert gas acting on a drive wheel inside the chamber, aspiration means being provided for dust removal.

    Abstract translation: 在观察玻璃和在室中观察的过程之间的视线中插入管状频闪仪。 频闪仪围绕横向于视线的中心轴线旋转并且具有平行于所述轴线的一对直径相对的狭槽，一个狭槽基本上比相对的狭槽更宽。 频闪仪优选由作用在腔室内的驱动轮上的惰性气体射流驱动，抽吸装置用于除尘。

    Light pipe for illuminating the interior of a pressure vessel
    4.
    发明授权
    Light pipe for illuminating the interior of a pressure vessel 失效
    用于照亮压力容器内部的光管

    公开(公告)号：US4746178A

    公开(公告)日：1988-05-24

    申请号：US31254

    申请日：1987-03-26

    Applicant: Thomas M. Canty

    Inventor： Thomas M. Canty

    IPC: B01J3/00 ,  F21S8/00 ,  F21V8/00 ,  G02B6/00 ,  F21V7/04

    CPC classification number: B01J3/004 ,  G02B6/0008 ,  F21W2131/411 ,  Y10S385/901 ,  Y10S385/902

    Abstract: A light pipe unit for supplying illumination to the interior of a vessel that has an attachment means for connection to the vessel. The light pipe unit is constructed of a metallic housing having an elongated fiber optic rod contained therein. At the bottom portions of the rod and housing, that is the portions extending into the vessel, is a glass laminate. The glass laminate covering forms a substantially corrosion-proof seal across the entire distal or lower portion of the unit.

    Abstract translation: 一种用于向容器内部提供照明的光管单元，其具有用于连接到容器的附接装置。 光管单元由金属壳体构成，其中容纳有细长的光纤棒。 在杆和壳体的底部，即延伸进入容器的部分，是玻璃层压板。 玻璃层压板在整个单元的远端或下部形成基本上防腐蚀的密封。

    Arrangement for viewing the interior of a pressure vessel
    7.
    发明授权
    Arrangement for viewing the interior of a pressure vessel 失效
    查看压力容器内部的安排

    公开(公告)号：US3899243A

    公开(公告)日：1975-08-12

    申请号：US42636173

    申请日：1973-12-19

    Applicant: KOPPERS GMBH HEINRICH

    Inventor： HAVERKAMP WILHELM

    IPC: B01J3/00 ,  C10J3/72 ,  G02B27/00

    CPC classification number: B01J3/004 ,  C10J3/22 ,  C10J3/72 ,  C10J3/76 ,  C10J3/78 ,  C10J2200/09 ,  C10J2300/093

    Abstract: A housing has an interior provided with two axially spaced and aligned openings, and is connectable in sealing relationship with a wall of the pressure vessel, so that one of the openings is in registry with a viewing port provided in this wall. A spherical, cylindrical or conical body having a bore is sealingly accommodated in the interior of the housing and can be turned to and from a position in which its bore registers with the openings and, hence, with the port. Sight glasses, lenses or the like are sealingly mounted in the bore and permit viewing of the interior of the pressure vessel when the body is in the position in which the bore registers with the openings.

    CLOSURE ELEMENT COMPRISING A LIGHT SOURCE
    9.
    发明申请
    CLOSURE ELEMENT COMPRISING A LIGHT SOURCE 有权
    封闭元件包含光源

    公开(公告)号：US20130148952A1

    公开(公告)日：2013-06-13

    申请号：US13806471

    申请日：2010-06-23

    Applicant: Claus Blak ,  Anders Yde Dahl ,  Sten Krog Duerlund

    Inventor： Claus Blak ,  Anders Yde Dahl ,  Sten Krog Duerlund

    IPC: F21V33/00 ,  G03B29/00

    CPC classification number: F21V33/00 ,  B01J3/004 ,  F21W2131/411 ,  F21Y2115/10 ,  G03B29/00

    Abstract: The closure element (1) is adapted to be installed in a vessel wall provided with an aperture and has a peripheral flange (2) and a central cover unit (3). The closure element (1) is provided with at least one light source within a predefined zone (35) located in the central cover unit (3) and the light source is confined within the central cover unit.

    Abstract translation: 闭合元件（1）适于安装在设置有孔的容器壁中并具有周边凸缘（2）和中央盖单元（3）。 闭合元件（1）在位于中央盖单元（3）中的预定区域（35）内设置有至少一个光源，并且光源被限制在中央盖单元内。

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