公开(公告)号：US20020086456A1

公开(公告)日：2002-07-04

申请号：US10025181

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Svetlana Tacic-Lucic ,  Dana R. DeReus

IPC: H01L021/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device is fabricated by forming and aperture through the thickness of a first substrate to enable an optical signal to be transmitted through the aperture. A movable, actuatable microstructure is formed on a second substrate. The second substrate is bonded to the first substrate. The first and second substrates are aligned to enable the microstructure to interact with the optical signal upon actuation of the microstructure. A conductive element is formed on the first substrate to serve as a contact or an interconnect. A channel is formed in the second substrate. An insulating layer can be deposited on the inside surfaces of this channel. When the first and second substrates are bonded together, the conductive element formed on the first substrate is disposed within the channel and is isolated from conductive regions of the resulting optical MEMS device. In another method, an optical MEMS device is fabricated from a substrate that comprises an etch-stop layer interposed between first and second bulk layers. The movable, actuatable microstructure is formed into the first bulk layer, and the aperture is formed through the second bulk layer.

Abstract translation: 通过在第一衬底的厚度上形成和开孔来制造光学MEMS器件，以使光信号能够透过该孔。 在第二基板上形成可移动的致动微结构。 第二基板结合到第一基板。 对准第一和第二基板以使微结构在微结构的致动时与光信号相互作用。 导电元件形成在第一基板上以用作接触件或互连件。 在第二基板中形成通道。 绝缘层可以沉积在该通道的内表面上。 当第一和第二基板接合在一起时，形成在第一基板上的导电元件设置在通道内并与所得到的光学MEMS器件的导电区域隔离。 在另一种方法中，光学MEMS器件由衬底制造，该衬底包括介于第一和第二体层之间的蚀刻停止层。 可移动可致动的微结构形成第一体层，并且孔通过第二体层形成。

公开(公告)号：US20020064337A1

公开(公告)日：2002-05-30

申请号：US09834744

申请日：2001-04-12

Inventor： Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

IPC: G02B006/35 ,  G02B007/182

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

Abstract: A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract translation: 微机电（MEMS）装置具有底座和翼片，其中一部分联接到基座，使得翼片可在第一和第二位置之间移动离开基座的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当瓣片处于第二位置时，电极可以被放置在垂直侧壁上并与底座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。

公开(公告)号：US06392220B1

公开(公告)日：2002-05-21

申请号：US09388772

申请日：1999-09-02

Applicant: Timothy G. Slater ,  Armand P. Neukermans

Inventor： Timothy G. Slater ,  Armand P. Neukermans

IPC: G01P904

CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A monolithically fabricated micromachined structure (52) couples a reference frame (56) to a dynamic plate (58) or second frame for rotation of the plate (58) or second frame with respect to the reference frame (56). Performance of torsional oscillators or scanners (52) benefits greatly by coupling the frame (56) to the plate (58) or second frame with torsional flexure hinges (56) rather than torsion bars (54). Appendages (122), tethers (142) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators (52). Wide and thin torsional flexure hinges (96) and isotopically pure silicon enhance thermal conductivity between the plate (58) and the frame (56). Dampening material bridging slots (232) adjacent to torsional flexure hinges (96) drastically reduce the dynamic member's Q. A widened section (252) of narrow torsional flexure hinges (96) permit inclusion of a torsion sensor (108). A dynamic member (58) that includes an actuator portion (302) performs light beam switching. Reflective coatings (76), wire grid polarizers (362), photo-detectors (372) and Fresnel lenses (376) enhance optical performance of the torsional scanners (58).

Abstract translation: 单片制造的微加工结构（52）将参考框架（56）耦合到动态板（58）或第二框架，用于相对于参考框架（56）转动板（58）或第二框架。 扭转振荡器或扫描仪（52）的性能通过将框架（56）与扭转挠性铰链（56）而不是扭杆（54）联接到板（58）或第二框架而受益匪浅。 附件（122），系绳（142）或改进的驱动电路增强了扭转振荡器（52）的静电驱动稳定性。 宽和薄的扭转弯曲铰链（96）和同位素纯硅增强了板（58）和框架（56）之间的热导率。 与扭转弯曲铰链（96）相邻的阻尼材料桥接槽（232）大大减小了动态构件的Q.窄扭转挠曲铰链（96）的加宽部分（252）允许包括扭转传感器（108）。 包括致动器部分（302）的动态构件（58）执行光束切换。 反射涂层（76），线栅偏振器（362），光电检测器（372）和菲涅尔透镜（376）增强了扭转扫描器（58）的光学性能。

公开(公告)号：US06379510B1

公开(公告)日：2002-04-30

申请号：US09714505

申请日：2000-11-16

Applicant: Jonathan S. Kane ,  Gareth A. Hughes

Inventor： Jonathan S. Kane ,  Gareth A. Hughes

IPC: B81C100

CPC classification number: G02B6/3578 ,  B81B2201/045 ,  B81B2203/0118 ,  B81C1/00142 ,  B81C2201/0132 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/3584 ,  G02B26/0858 ,  G02B2006/12104 ,  H01L27/20 ,  H01L41/0946

Abstract: A method of making a micro-mirror light beam switch having a thin flexible movable support member for supporting a thin central reflective mirror surface thereon and for supporting a plurality of thin unimorph piezoelectric cantilevered mirror actuators mechanically coupled between a fixed substrate and movable hinging portions of the thin movable support member. The method employs thin film deposition techniques and photolithography for readily forming the extremely thin switch, whereby the components thereof are substantially co-planar for precisely controlled, multi-axial micro-mirror motion and low voltage operation necessary for the rapid switching of optical traffic from fiber to fiber in the next-generation optical networks.

Abstract translation: 一种制造微反射镜光束开关的方法，所述微反射镜光束开关具有薄的柔性可移动支撑构件，用于在其上支撑薄的中心反射镜表面，并且用于支撑机械耦合在固定基板和可移动铰链部分的可移动铰链部分之间的多个薄的单压电压电悬臂反射镜致动器 薄的可移动支撑构件。 该方法采用薄膜沉积技术和光刻技术，用于容易地形成极薄的开关，由此其部件基本上是共面的，用于精确控制的多轴微镜运动和低速运行，以便快速切换来自 光纤到光纤在下一代光网络。

公开(公告)号：US06351580B1

公开(公告)日：2002-02-26

申请号：US09536877

申请日：2000-03-27

Applicant: Vijayakumar Rudrappa Dhuler ,  Edward A. Hill

Inventor： Vijayakumar Rudrappa Dhuler ,  Edward A. Hill

IPC: G02B642

CPC classification number: G02B6/3564 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/0118 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357

Abstract: Microelectromechanical devices may include a substrate having first and second optical fibers thereon. An optical shutter may also be provided. This optical shutter is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arched beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that is coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the ±y-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arched beams move in the −x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second side of the optical shutter. A second brake member, which is coupled to the third plurality of arched beams, also contacts and restricts the shutter member from moving in the ±y direction when the third plurality of arched beams are relaxed, but releases the optical shutter when the third plurality of arched beams move in the +x direction.

Abstract translation: 微机电装置可以包括其上具有第一和第二光纤的基板。 还可以提供光学快门。 该光学快门机械地联接到第一多个拱形梁，其通过可安装在基板上的支撑结构在相对端被支撑。 第二组多个拱形梁也设置在光学快门的第一侧上。 这些拱形梁也通过支撑结构支撑在相对端。 提供第一制动构件，其联接到第二多个拱形梁。 当第二多个拱形梁松弛时，该第一制动构件接触并限制光学快门在±y方向上移动，而当第二组多个拱形梁沿-x方向移动时释放光学快门。 当第二多个拱形梁松弛时，限制光学快门的运动的这种能力提供一定程度的非挥发性位置保持。 第三组多个拱形梁也优选设置在光学快门的第二侧上。 当第三组多个弓形梁松弛时，联接到第三组多个拱形梁的第二制动构件也接触并限制活门构件在±y方向上的移动，而当第三组多个 拱形梁在+ x方向移动。