公开(公告)号：US07120228B2

公开(公告)日：2006-10-10

申请号：US10946426

申请日：2004-09-21

Applicant: Boris Yokhin ,  Isaac Mazor ,  Tzachi Rafaeli

Inventor： Boris Yokhin ,  Isaac Mazor ,  Tzachi Rafaeli

IPC: G01B15/02

CPC classification number: G01N23/20008

Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.

公开(公告)号：US20060182220A1

公开(公告)日：2006-08-17

申请号：US11396719

申请日：2006-04-04

Applicant: David Berman ,  Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

Inventor： David Berman ,  Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

IPC: G01N23/20

CPC classification number: G01N23/203 ,  G01B15/02

Abstract: A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.

Abstract translation: 一种用于检查具有表面层的样品的方法。 该方法包括在准直的X射线束照射样品时获取样品的第一反射光谱，并且处理第一反射光谱以测量样品的漫反射特性。 在用X射线的会聚束照射样品的同时获取样品的第二反射光谱。 使用漫反射特性分析第二反射光谱，以确定样品的表面层的特性。

公开(公告)号：US07023954B2

公开(公告)日：2006-04-04

申请号：US10673996

申请日：2003-09-29

Applicant: Tzachi Rafaeli ,  Isaac Mazor

Inventor： Tzachi Rafaeli ,  Isaac Mazor

IPC: G01N23/223

CPC classification number: G01N23/22

Abstract: A method for X-ray analysis of a sample includes aligning an optical radiation source with an X-ray excitation source, so that a spot on the sample that is irradiated by an X-ray beam generated by the X-ray excitation source is illuminated with optical radiation generated by the optical radiation source. Optical radiation that is reflected from the sample is used to generate a first signal, which is indicative of an alignment of the spot on the sample. The X-ray beam is aligned, responsively to the first signal, so that the spot coincides with a target area of the sample. X-ray photons received from the spot on the sample, after aligning the X-ray beam, are used in generating a second signal that is indicative of a characteristic of the target area.

Abstract translation: 用于样品的X射线分析的方法包括使光辐射源与X射线激发源对准，使得由X射线激发源产生的X射线束照射的样品上的斑点被照亮 具有由光辐射源产生的光辐射。 从样品反射的光辐射用于产生第一信号，其表示样品上的斑点的对准。 响应于第一信号将X射线束对准，使得斑点与样品的目标区域重合。 在对准X射线束之后从样品上的点接收的X射线光子用于产生指示目标区域的特征的第二信号。

公开(公告)号：US06907108B2

公开(公告)日：2005-06-14

申请号：US10761023

申请日：2004-01-20

Applicant: Boris Yokhin ,  Isaac Mazor ,  Amos Gvirtzman

Inventor： Boris Yokhin ,  Isaac Mazor ,  Amos Gvirtzman

IPC: G01N23/20 ,  G21K1/06

CPC classification number: G01N23/20

Abstract: A method for testing a surface includes finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths. The first and second critical angles are compared to determine an orientation of a tangent to the surface in the area.

Abstract translation: 用于测试表面的方法包括：在第一和第二波长处，从表面的区域发现用于辐射的全部外部反射的相应的第一和第二临界角。 比较第一和第二临界角以确定该区域中与表面相切的取向。

公开(公告)号：US06639968B2

公开(公告)日：2003-10-28

申请号：US10300504

申请日：2002-11-20

Applicant: Boris Yokhin ,  Alexander Dikopoltsev ,  Isaac Mazor ,  David Berman

Inventor： Boris Yokhin ,  Alexander Dikopoltsev ,  Isaac Mazor ,  David Berman

IPC: G01N2320

CPC classification number: G01T1/36

Abstract: Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

公开(公告)号：US06453002B1

公开(公告)日：2002-09-17

申请号：US09551715

申请日：2000-04-18

Applicant: Isaac Mazor ,  Boris Yokhin ,  David Bar-On

Inventor： Isaac Mazor ,  Boris Yokhin ,  David Bar-On

IPC: G01T136

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: A method of X-ray analysis includes irradiating a spot on a sample with X-rays along an X-ray beam axis. X-rays emitted from the sample, responsive to irradiating the spot, are simultaneously detected at a plurality of different azimuthal angles relative to the beam axis. X-ray intensities detected at the different angles in a common energy range are compared in order to determine a property of the sample.

Abstract translation: X射线分析的方法包括沿着X射线轴的X射线照射样品上的斑点。 响应于照射点而从样品发射的X射线相对于光束轴以多个不同的方位角同时检测。 比较在共同能量范围内以不同角度检测的X射线强度，以确定样品的性质。

公开(公告)号：US06389102B2

公开(公告)日：2002-05-14

申请号：US09409046

申请日：1999-09-29

Applicant: Isaac Mazor ,  Amos Gvirtzman ,  Boris Yokhin ,  Ami Dovrat

Inventor： Isaac Mazor ,  Amos Gvirtzman ,  Boris Yokhin ,  Ami Dovrat

IPC: G21K106

CPC classification number: G01N23/20 ,  G01T1/247

Abstract: Apparatus for X-ray analysis of a sample includes an X-ray source, which irradiates the sample, and an X-ray detector device, which receives X-rays from the sample responsive to the irradiation. The device includes an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon. Processing circuitry of the device includes a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.

Abstract translation: 用于样品的X射线分析的装置包括照射样品的X射线源和响应于照射而从样品接收X射线的X射线检测器装置。 该装置包括辐射敏感检测器阵列，其产生响应于入射在其上的辐射光子的电信号。 该设备的处理电路包括多个信号处理通道，每个信号处理通道被耦合以处理来自相应检测器之一的信号，以产生取决于相应检测器上的光子的入射速率的输出， 事件光子的能量。

公开(公告)号：US06184686B2

公开(公告)日：2001-02-06

申请号：US09114462

申请日：1998-07-13

Applicant: Isaac Mazor ,  Amos Gvirtzman ,  Reuven Duer

Inventor： Isaac Mazor ,  Amos Gvirtzman ,  Reuven Duer

IPC: G01N2762

CPC classification number: G01N27/66 ,  G01N27/628 ,  H01L22/12

Abstract: A method and apparatus for detecting a contaminant in a substrate. An array of anode elements is positioned in proximity to the substrate and is biased at a positive voltage relative to the substrate. The substrate is irradiated with photons having energies below an atomic ionization energy of the substrate, so as to ionize the contaminant to emit electrons. The emitted electrons are collected at one or more of the anode elements, thereby generating a current indicative of the presence of the contaminant in the semiconductor in proximity to the one or more of the anode elements.

Abstract translation: 一种用于检测衬底中的污染物的方法和装置。 阳极元件阵列位于衬底附近并相对于衬底被偏置在正电压。 用能量低于衬底的原子离子化能的光子照射衬底，以便使污染物电离以发射电子。 发射的电子被收集在一个或多个阳极元件处，从而产生指示半导体中的污染物在一个或多个阳极元件附近的存在的电流。

公开(公告)号：US6108398A

公开(公告)日：2000-08-22

申请号：US114789

申请日：1998-07-13

Applicant: Isaac Mazor ,  Amos Gvirtzman ,  Boris Yokhin

Inventor： Isaac Mazor ,  Amos Gvirtzman ,  Boris Yokhin

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An x-ray fluorescent analyzer and method for analyzing a sample, including an x-ray beam generator, which generates an x-ray beam incident at a spot on the sample, and creates a plurality of fluorescent x-ray photons. There are a plurality of semiconducting detectors arrayed around the spot so as to capture the fluorescent x-ray photons and in response produce a plurality of electrical pulses suitable for analysis of the sample.

Abstract translation: 一种用于分析样品的X射线荧光分析仪和方法，该样品包括x射线束发生器，其产生入射在样品上的点处的X射线束，并且产生多个荧光X射线光子。 阵列周围存在多个半导体检测器，以捕获荧光X射线光子，并且响应产生适于分析样品的多个电脉冲。

公开(公告)号：US20120275568A1

公开(公告)日：2012-11-01

申请号：US13419497

申请日：2012-03-14

Applicant: Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

Inventor： Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

IPC: G01N23/201

CPC classification number: G01N23/201 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8438 ,  G01N2223/1006 ,  G01N2223/61

Abstract: Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.

Abstract translation: 用于检查样品的装置包括X射线源，其被配置为用X射线照射样品上的位置。 X射线检测器被配置为接收从样本散射的X射线并输出指示所接收的X射线的第一信号。 VUV源配置为用VUV辐射束照射样品上的位置。 VUV检测器被配置为接收从样本反射的VUV辐射并输出指示所接收的VUV辐射的第二信号。 处理器被配置为处理第一和第二信号以便测量样品的性质。