公开(公告)号：US20120272735A1

公开(公告)日：2012-11-01

申请号：US13453425

申请日：2012-04-23

Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: G01P15/00

CPC classification number: G01P15/097

Abstract: The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Abstract translation: 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚固装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F3/00

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20120031183A1

公开(公告)日：2012-02-09

申请号：US13197100

申请日：2011-08-03

Applicant: Reinhard NEUL ,  Daniel Christoph Meisel

Inventor： Reinhard NEUL ,  Daniel Christoph Meisel

IPC: G01P15/14

CPC classification number: G01C19/5755

Abstract: A yaw-rate sensor for determining a Coriolis force includes a semiconductor substrate, a mass body mounted so it is movable over the semiconductor substrate, a drive unit for setting the mass body into an oscillating movement, and a detection unit for determining a deflection of the mass body which is caused by the Coriolis force. The detection unit includes a piezoresistive element, whose electrical resistance is a function of the deformation of the piezoresistive element.

Abstract translation: 用于确定科里奥利力的偏转速率传感器包括半导体衬底，安装成可在半导体衬底上移动的质量体，用于将质量体设置为振荡运动的驱动单元，以及用于确定 由科里奥利力造成的质量体。 检测单元包括压阻元件，其电阻是压阻元件的变形的函数。

公开(公告)号：US20110126621A1

公开(公告)日：2011-06-02

申请号：US12308533

申请日：2007-08-24

Applicant: Reinhard Neul

Inventor： Reinhard Neul

IPC: G01C19/56

CPC classification number: G01C19/5762

Abstract: A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension.

Abstract translation: 具有至少一个正交补偿图案的旋转速率传感器，其包括至少一个第一电极和一个第二电极。 第二电极具有彼此相对定位的第一电极表面和第二电极表面。 第一电极位于第一电极表面和第二电极表面之间的中间空间中。 第一电极表面以及第二电极表面在其延伸部分上与第一电极的距离不同。 第二电极的第一电极表面和第二电极表面在它们的延伸部上彼此大致相同的距离。

公开(公告)号：US20100251819A1

公开(公告)日：2010-10-07

申请号：US12724064

申请日：2010-03-15

Applicant: Reinhard NEUL

Inventor： Reinhard NEUL

IPC: G01C19/56

CPC classification number: G01P1/006 ,  G01C19/5726 ,  G01C19/5755 ,  G01D11/10 ,  G01D11/14 ,  G01P15/08 ,  G01P15/13

Abstract: A device for damping a movement of a seismic mass of a micromechanical inertial sensor, the device being designed to apply a force to the seismic mass damping the movement of the seismic mass as a function of the values of at least one movement parameter of the seismic mass, the damping being produced electrically.

Abstract translation: 一种用于阻尼微机械惯性传感器的地震质量块的运动的装置，该装置被设计成施加一个力来阻挡地震质量的运动，作为地震的至少一个运动参数的值的函数 质量，阻尼是电气产生的。

公开(公告)号：US06691571B2

公开(公告)日：2004-02-17

申请号：US10258218

申请日：2003-05-29

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract translation: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。

公开(公告)号：US06205838B1

公开(公告)日：2001-03-27

申请号：US09091913

申请日：1999-08-19

Applicant: Eberhard Schmid ,  Siegbert Steinlechner ,  Johannes Artznei ,  Reinhard Neul

Inventor： Eberhard Schmid ,  Siegbert Steinlechner ,  Johannes Artznei ,  Reinhard Neul

IPC: G01P2100

CPC classification number: G01C19/56

Abstract: A device for determining a rotation rate is described, in which by means of digital evaluation circuits the output signals of a rotation rate sensor are evaluated. By identification of the transfer function from the electronically generated oscillation voltage that excites the oscillating body carrying the acceleration elements, to the output of the acceleration elements, or by identification of the transfer function from the electrically generated test voltage at the input of the acceleration elements to their output, the systematic errors of the rotation rate sensor are determined and taken into account in the digital sensor signal processing, with the aid of which the rotation rate is unequivocally determined.

Abstract translation: 描述用于确定转速的装置，其中通过数字评估电路评估转速传感器的输出信号。 通过从电子产生的振荡电压识别传递函数，该振荡电压激励承载加速元件的振动体到加速元件的输出，或通过从加速元件的输入处的电产生的测试电压识别传递函数 在其输出中，在数字传感器信号处理中确定和考虑旋转速率传感器的系统误差，借助于此，旋转速率被明确地确定。