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31.
公开(公告)号:US20190281393A1
公开(公告)日:2019-09-12
申请号:US16353934
申请日:2019-03-14
发明人: Karl Grosh , Robert J. Littrell
IPC分类号: H04R17/02 , H04R31/00 , H01L41/27 , H01L41/314 , H01L41/332 , H04R7/06
摘要: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.
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32.
公开(公告)号:US10284960B2
公开(公告)日:2019-05-07
申请号:US14702319
申请日:2015-05-01
发明人: Karl Grosh , Robert J. Littrell
IPC分类号: H01L41/09 , H04R25/00 , H04R17/00 , H04R17/02 , H04R7/06 , H01L41/27 , H01L41/314 , H01L41/332 , H04R31/00
摘要: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.
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公开(公告)号:US10001391B1
公开(公告)日:2018-06-19
申请号:US14826188
申请日:2015-08-13
发明人: Robert J. Littrell , Karl Grosh
摘要: An electronic device comprises a sensor comprising first and second electrodes, with the sensor being configured for a first acoustic displacement due to input acoustic pressure; circuitry configured to measure a charge between the first and second electrodes due to the input acoustic pressure and to apply a voltage to cause a second acoustic displacement of the sensor that is out of phase with the first acoustic displacement, with the applied voltage further causing a charge to develop across the sensor, and with the first and second acoustic displacements causing an increase in damping in a resonance frequency of the sensor, relative to damping of the resonance frequency of the sensor prior to applying the voltage; and a passive electronic component configured to cancel out the charge developed across the sensor due to the applied voltage.
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公开(公告)号:US20180159021A1
公开(公告)日:2018-06-07
申请号:US15568553
申请日:2016-04-22
发明人: Robert Littrell
IPC分类号: H01L41/083 , H01L41/113 , H01L41/27 , H01L41/316 , B81B3/00 , B81C1/00 , C23C14/34 , C23C14/06 , C23C14/54 , C23C14/14 , H04R17/02 , H04R31/00 , H04R7/06
CPC分类号: H01L41/0838 , B81B3/0072 , B81B2201/0257 , B81B2203/0118 , B81C1/00666 , B81C2201/017 , C23C14/0641 , C23C14/14 , C23C14/34 , C23C14/542 , H01L41/04 , H01L41/083 , H01L41/1136 , H01L41/27 , H01L41/316 , H04R7/06 , H04R17/02 , H04R31/003
摘要: A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.
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公开(公告)号:US20220344571A1
公开(公告)日:2022-10-27
申请号:US17725070
申请日:2022-04-20
发明人: Robert J. Littrell
IPC分类号: H01L41/113 , H01L41/053 , B81B3/00
摘要: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first cantilever beam element.
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公开(公告)号:US20220279286A1
公开(公告)日:2022-09-01
申请号:US17747454
申请日:2022-05-18
发明人: Robert Littrell , Ronald Gagnon
摘要: A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.
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公开(公告)号:US20220199893A1
公开(公告)日:2022-06-23
申请号:US17567719
申请日:2022-01-03
发明人: Robert J. Littrell
IPC分类号: H01L41/083 , H01L41/27 , H01L41/04 , B81B3/00 , B81C1/00 , C23C14/06 , C23C14/14 , C23C14/34 , C23C14/54 , H01L41/113 , H01L41/316 , H04R7/06 , H04R17/02 , H04R31/00
摘要: A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.
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公开(公告)号:US11217741B2
公开(公告)日:2022-01-04
申请号:US15568553
申请日:2016-04-22
发明人: Robert Littrell
IPC分类号: H01L41/083 , H01L41/27 , H01L41/04 , B81B3/00 , B81C1/00 , C23C14/06 , C23C14/14 , C23C14/34 , C23C14/54 , H01L41/113 , H01L41/316 , H04R7/06 , H04R17/02 , H04R31/00
摘要: A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.
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公开(公告)号:US20210383824A1
公开(公告)日:2021-12-09
申请号:US17339709
申请日:2021-06-04
摘要: Techniques for automatically muting or unmuting an acoustic transducer include receiving a signal representing an output by a voice accelerometer of a device, determining whether the signal is indicative of a presence or absence of voice activity by a user of the device, and generating a control signal that causes an acoustic transducer to be muted responsive to determining that the signal is indicative of an absence of voice activity by the user, or that causes the acoustic transducer to be unmuted response to determining that the signal is indicative of a presence of voice activity by the user.
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公开(公告)号:US20210211809A1
公开(公告)日:2021-07-08
申请号:US17143934
申请日:2021-01-07
发明人: Craig Core , Hamid Basaeri , Robert Littrell
摘要: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
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