公开(公告)号：US20050282300A1

公开(公告)日：2005-12-22

申请号：US11177227

申请日：2005-07-08

Applicant: Wenbing Yun ,  Yuxin Wang ,  Michael Feser ,  Kenneth Nill

Inventor： Wenbing Yun ,  Yuxin Wang ,  Michael Feser ,  Kenneth Nill

IPC: G01N23/225 ,  G01R31/26 ,  G06F19/00 ,  H01L21/44 ,  H01L21/66

CPC classification number: G01N23/2252

Abstract: Systems and methods for performing inspection and metrology operations on metallization processes such as on back-end-of-line (BEOL) metallization thickness and step coverage are disclosed. Specific examples include measurements of thickness and uniformity of barrier layers, including tantalum for example, and seed layers, including copper for example, in Damascene, including dual-Damascene, trenches during the interconnect fabrication steps of integrated circuit production. The invention also relates to the detection and measurement of void formation during and after copper electroplating. The invention utilizes x-ray fluorescence to measure the absolute thicknesses and the thickness uniformity of the barrier layers in the trenches, the copper seed layers for electroplating, and the final copper interconnects.

Abstract translation: 公开了用于对金属化过程进行检查和计量操作的系统和方法，例如在后端（BEOL）金属化厚度和台阶覆盖。 具体实例包括例如包括钽的阻挡层的厚度和均匀性的测量，以及例如在镶嵌中的包括铜的种子层（包括双镶嵌），在集成电路生产的互连制造步骤期间的沟槽。 本发明还涉及在铜电镀期间和之后的空隙形成的检测和测量。 本发明利用x射线荧光来测量沟槽中的势垒层的绝对厚度和厚度均匀性，用于电镀的铜籽晶层和最终的铜互连。

公开(公告)号：US20050168820A1

公开(公告)日：2005-08-04

申请号：US10134026

申请日：2002-04-25

Applicant: Wenbing Yun ,  Yuxin Wang

Inventor： Wenbing Yun ,  Yuxin Wang

IPC: G02B3/08 ,  G02B27/44 ,  G03F7/20

CPC classification number: G03F7/70308 ,  G02B3/08 ,  G02B27/4211 ,  G02B27/4216 ,  G02B27/4222 ,  G03F7/70316

Abstract: An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.

Abstract translation: 一种消色差菲涅耳光学器件，其结合了菲涅尔波带板和折射菲涅尔透镜。 区域板提供用于成像和聚焦的高分辨率，而折射透镜利用靠近吸收边缘的适当元件的折射率变化特性来重新组合由区域板分散的不同能量的电磁辐射。 该复合透镜有效地解决了区域板的高色差问题。 AFO在光刻，各种对比度机制和测量技术的微成像中具有广泛的潜在应用。

公开(公告)号：US06914723B2

公开(公告)日：2005-07-05

申请号：US10427723

申请日：2003-04-29

Applicant: Wenbing Yun ,  Yuxin Wang

Inventor： Wenbing Yun ,  Yuxin Wang

IPC: G02B3/08 ,  G02B27/44 ,  G03F7/20

CPC classification number: G02B27/4272 ,  G01N21/956 ,  G01N2021/8822 ,  G01N2021/95676 ,  G02B3/08 ,  G02B27/4211 ,  G03F1/84

Abstract: A mask blank inspection tool includes an AFO having a diffractive lens and a refractive lens formed on a common substrate. The diffractive lens is a Fresnel zone plate and the refractive lens is a refractive Fresnel lens. The AFO is used to image light from a defect particle on a multilayer mask blank or the surface of the multilayer mask blank to a detector.

Abstract translation: 掩模检查工具包括具有衍射透镜和形成在公共基板上的折射透镜的AFO。 衍射透镜是菲涅耳带片，折射透镜是折射菲涅耳透镜。 AFO用于将来自多层掩模坯料上的缺陷颗粒或多层掩模坯料的表面的光成像到检测器。

公开(公告)号：US20050023976A1

公开(公告)日：2005-02-03

申请号：US10885257

申请日：2004-07-06

Applicant: Yuxin Wang

Inventor： Yuxin Wang

IPC: H01J1/62 ,  H01L51/52 ,  H05B33/04

CPC classification number: H05B33/04 ,  H01L51/5246 ,  H01L51/5259

Abstract: The present invention is a sealed electroluminescent display that incorporates a perimeter seal that inhibits exposure of display components to atmospheric contaminants and to a sealing process for fabrication of the same. The sealed electroluminescent display comprises a substrate, a cover plate and an electroluminescent display structure between the substrate and the cover plate. A perimeter seal is provided that extends from the substrate to the cover plate to inhibit exposure of the electroluminescent display structure to an atmospheric contaminant. The perimeter seal comprises one or more layers of a sealing material wherein at least one of the layers further comprises a getter material.

Abstract translation: 本发明是一种密封的电致发光显示器，其包含一个周边密封件，该周边密封件抑制显示部件暴露于大气中的污染物以及用于其制造的密封过程。 密封电致发光显示器包括基板，盖板和位于基板和盖板之间的电致发光显示结构。 提供了从基板延伸到盖板以防止电致发光显示结构暴露于大气污染物的周边密封件。 周边密封件包括一层或多层密封材料，其中至少一层还包括吸气材料。

公开(公告)号：US11380125B2

公开(公告)日：2022-07-05

申请号：US16905208

申请日：2020-06-18

Applicant: Waleed Sami Haddad ,  Yuxin Wang

Inventor： Waleed Sami Haddad ,  Yuxin Wang

IPC: G06K9/00 ,  G06V40/13 ,  G06V10/141 ,  G06V40/12

Abstract: An optical reader apparatus is configured to detect epidermal ridges of a body part using specular reflection contrast detection. The optical reader apparatus comprises a display comprising a transparent cover and a substrate comprising an array of active pixels. The active pixels serve as an illuminator of the optical reader apparatus. The apparatus also comprises a pinhole array and an optical sensor optically coupled to the display via the pinhole array. The optical sensor comprises an array of photosensors arranged on a substrate. The array of photosensors is configured to detect light reflected via specular reflection by the transparent cover. A processor, coupled to the display and the optical sensor, is configured to control reading of signals from the photosensors and to control illumination of selected active pixels in accordance with a predefined scanning pattern that covers a sensing region of the transparent cover during a body part reading operation.

公开(公告)号：US10519562B2

公开(公告)日：2019-12-31

申请号：US15678256

申请日：2017-08-16

Applicant: Fengyan Hou ,  Yuxin Wang ,  Bo Hu ,  Christopher William Goode ,  Junzhe Dong

Inventor： Fengyan Hou ,  Yuxin Wang ,  Bo Hu ,  Christopher William Goode ,  Junzhe Dong

IPC: C25D11/20 ,  C25D11/22 ,  C25D5/44 ,  C25D5/18 ,  C25D11/04 ,  C25D13/20 ,  C25D21/08 ,  C25D5/38 ,  C25D5/42 ,  C25D11/08 ,  C25D11/16 ,  C25D11/26 ,  C25D11/30 ,  C25D5/14 ,  C25D11/10

Abstract: In example implementations, a method for producing a thin film coating is provided. The method includes pre-treating a substrate, placing the substrate in a bath comprising at least phosphoric acid and sulphuric acid to produce a thin anodized layer, rinsing the thin anodized layer in a solution, plating a surface of the thin anodized layer in an electro deposition bath following a plating current profile for a predetermined period, and increasing the plating current to the recommended bath plating current to produce the thin film coating having a desired initial coating thickness.

公开(公告)号：US20140140430A1

公开(公告)日：2014-05-22

申请号：US14131321

申请日：2011-12-28

Applicant: Chunli Liang ,  Shuqiang Xia ,  Weiwei Yang ,  Yuxin Wang ,  Peng Hao

Inventor： Chunli Liang ,  Shuqiang Xia ,  Weiwei Yang ,  Yuxin Wang ,  Peng Hao

IPC: H04B7/04

CPC classification number: H04B7/0456 ,  H04B7/0413 ,  H04B7/0619 ,  H04B7/068 ,  H04L1/06

Abstract: The disclosure discloses a multi-antenna signal processing method in an uplink system. The method includes that: after scrambling, modulation, layer mapping, pre-coding, transmission pre-coding, resource mapping and Single Carrier Frequency Division Multiple Access (SC-FDMA) signal generation are performed successively on a coded bit sequence corresponding to each codeword, a resulted signal is transmitted from each transmitting antenna port. The disclosure also provides a multi-antenna signal processing device in an uplink system. With the method and the device according to the disclosure, a lower Peak-to-Average Power Ratio (PAPR) or Cubic Metric (CM) of a signal to be sent can be ensured without imposing any constraint on a pre-coding matrix, thus reducing the cost and power consumption of a terminal whiling increasing transmission performance of the system.

Abstract translation: 本公开公开了一种上行链路系统中的多天线信号处理方法。 该方法包括：在对每个码字对应的编码比特序列上连续执行加扰后的调制，层映射，预编码，传输预编码，资源映射和单载波频分多址（SC-FDMA）信号生成 从每个发送天线端口发送得到的信号。 本公开还提供了一种在上行链路系统中的多天线信号处理设备。 利用根据本公开的方法和装置，可以确保要发送的信号的较低的峰值平均功率比（PAPR）或立方度量（CM），而不对预编码矩阵施加任何约束，因此 降低终端的成本和功耗，提高系统的传输性能。

公开(公告)号：US08717938B2

公开(公告)日：2014-05-06

申请号：US13505759

申请日：2010-09-20

Applicant: Yuxin Wang ,  Bo Dai ,  Peng Hao ,  Chunli Liang ,  Bin Yu ,  Peng Zhu ,  Weiwei Yang

Inventor： Yuxin Wang ,  Bo Dai ,  Peng Hao ,  Chunli Liang ,  Bin Yu ,  Peng Zhu ,  Weiwei Yang

IPC: H04L12/28

CPC classification number: H04L5/0048 ,  H04L5/0007 ,  H04W24/00 ,  H04W72/1289

Abstract: The present invention discloses a method for a signaling configuration of a sounding reference signal. The method includes: a base station notifying a user equipment to aperiodically send the sounding reference signal, and sending configuration information of aperiodically sending the sounding reference signal (SRS) down to the user equipment. The present invention also discloses a base station for a signaling configuration of a sounding reference signal and a user equipment for a signaling configuration of a sounding reference signal. The present invention can realize that the user equipment aperiodically sends the SRS, which improves the utilization ratio of SRS resources and increases the flexibility of resource scheduling.

Abstract translation: 本发明公开了一种用于探测参考信号的信令配置的方法。 该方法包括：基站通知用户设备非周期地发送探测参考信号，以及发送不定期发送探测参考信号（SRS）的配置信息到用户设备。 本发明还公开了一种用于探测参考信号的信令配置的基站和用于探测参考信号的信令配置的用户设备。 本发明可以实现用户设备不定期地发送SRS，提高SRS资源的利用率，增加资源调度的灵活性。

公开(公告)号：US20130328620A1

公开(公告)日：2013-12-12

申请号：US13993117

申请日：2011-08-24

Applicant: Ting Li ,  Zhengfan Zhang ,  Mingyuan Xu ,  Yuxin Wang ,  Tao Liu

Inventor： Ting Li ,  Zhengfan Zhang ,  Mingyuan Xu ,  Yuxin Wang ,  Tao Liu

IPC: G05F3/02

CPC classification number: G05F3/02 ,  G05F3/30

Abstract: The present invention pertains to a voltage reference circuit based on temperature compensation, comprising positive and negative temperature coefficient generating units, temperature compensation circuit, image circuit and voltage divider. In this circuit, Item T is compensated with Item T, and Item T ln(T) is compensated by Item T in (T), which features a well-targeted compensation performance. The circuit outputs a reference voltage with zero temperature coefficient, which is independent to T and T ln (T). The output voltage value could be defined by adjusting the ratio of resistance in voltage divider. The invention provides a voltage reference circuit featuring good compensation, zero temperature coefficient and adjustable output voltage. The invention has a better compensation than the conventional one and a fixed output voltage, and it totally eliminates the temperature coefficient. The invention has wide application in analog IC and digital/analog mixed IC.

Abstract translation: 本发明涉及一种基于温度补偿的电压参考电路，包括正和负温度系数发生单元，温度补偿电路，图像电路和分压器。 在该电路中，项目T用项目T补偿，项目T ln（T）由（T）中的项目T补偿，其特征是目标良好的补偿性能。 该电路输出零温度系数的参考电压，其独立于T和T ln（T）。 输出电压值可以通过调节分压器电阻的比例来定义。 本发明提供了具有良好补偿，零温度系数和可调输出电压的电压参考电路。 本发明具有比常规的更好的补偿和固定的输出电压，并且完全消除了温度系数。 本发明在模拟IC和数字/模拟混合IC方面有广泛的应用。

公开(公告)号：US20110018617A1

公开(公告)日：2011-01-27

申请号：US12509367

申请日：2009-07-24

Applicant: Khin Htoo ,  Feng Pan ,  Byungki Woo ,  Trung Pham ,  Yuxin Wang

Inventor： Khin Htoo ,  Feng Pan ,  Byungki Woo ,  Trung Pham ,  Yuxin Wang

IPC: G05F1/10

CPC classification number: H02M3/073

Abstract: A charge pump circuit for generating an output voltage is described. Charge pump circuits typically have two branches. As the clocks supplying the branches of a charge pump circuit alternate, the output of each branch will alternately provide an output voltage, which are then combined to form the pump output. The techniques described here allow charge to be transferred between the two branches, so that as the capacitor of one branch discharges, it is used to charge up the capacitor in the other branch. An exemplary embodiment using a voltage doubler-type of circuit, with the charge transfer between the branches accomplished using a switch controller by a boosted version of the clock signal, which is provided by a one-sided voltage doubler

Abstract translation: 描述用于产生输出电压的电荷泵电路。 电荷泵电路通常具有两个分支。 当提供电荷泵电路的分支的时钟交替时，每个分支的输出将交替地提供输出电压，然后将其组合以形成泵输出。 这里描述的技术允许在两个分支之间传输电荷，使得当一个分支的电容器放电时，它用于对另一个分支中的电容器充电。 使用倍压型电路的示例性实施例，其中分支之间的电荷转移由使用开关控制器的升压版本的时钟信号完成，其由单侧电压倍增器