Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film
    31.
    发明授权
    Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film 有权
    用于批量生产硅基薄膜的装置和用于批量生产硅基薄膜的方法

    公开(公告)号:US07927982B2

    公开(公告)日:2011-04-19

    申请号:US12411528

    申请日:2009-03-26

    摘要: A silicon-based thin film mass-producing apparatus, including transparent electrodes placed to face in parallel to corresponding counter electrodes with a space therebetween, and silicon-based thin films are deposited on the transparent electrodes by feeding a raw material gas for depositing the silicon-based thin films into the chamber and by applying a DC pulse voltage to the counter electrodes to generate plasma. Unlike methods in which a radio frequency voltage is intermittently applied to perform discharge, a high plasma density distribution does not occur, and in-plane film thickness distribution does not occur. Furthermore, since the DC pulse voltage rises sharply, the ON period can be shortened. As a result, generation of a sheath ceases in the transient state before reaching the steady state, and the thickness of the sheath is small, which allows the space between the counter and transparent electrodes to decrease.

    摘要翻译: 通过供给用于沉积硅的原料气体,在透明电极上沉积硅基薄膜质量产生装置,其包括与其间具有空间的相应对置电极平行放置的透明电极和硅基薄膜 的薄膜进入室,并通过向对电极施加DC脉冲电压以产生等离子体。 不同于间歇地施加射频电压以进行放电的方法,不会发生高等离子体密度分布,并且不会发生面内膜厚分布。 此外,由于直流脉冲电压急剧上升,因此能够缩短接通时间。 结果,在达到稳定状态之前,鞘的产生在瞬态停止,并且护套的厚度小,这允许计数器和透明电极之间的空间减小。

    METHOD FOR FORMING AMORPHOUS CARBON FILM
    32.
    发明申请
    METHOD FOR FORMING AMORPHOUS CARBON FILM 失效
    形成不规则碳膜的方法

    公开(公告)号:US20090246407A1

    公开(公告)日:2009-10-01

    申请号:US12396621

    申请日:2009-03-03

    IPC分类号: B01J19/08

    摘要: An amorphous carbon film forming apparatus includes a supporting electrode that is connected to ground and supports a substrate, a counter electrode that is disposed so as to face the supporting electrode and has a mixed-gas injection orifice, a chamber containing the supporting electrode and the counter electrode, and a DC pulse generator having a pulse source that applies a DC pulse voltage between the supporting electrode and the counter electrode. An amorphous carbon film is formed by supplying a mixed gas between the supporting electrode and the counter electrode such that the percentage of the acetylene gas relative to the carrier gas is 0.05% by volume or more and 10% by volume or less, and by generating plasma while a DC pulse voltage having a pulse width of 0.1 μsec or more and 5.0 μsec or less is applied to the counter electrode.

    摘要翻译: 无定形碳膜形成装置包括连接到地并支撑基板的支撑电极,配置成与支撑电极相对并具有混合气体注入孔的对电极,包含支撑电极的室和 对电极和具有在支持电极和对电极之间施加DC脉冲电压的脉冲源的DC脉冲发生器。 通过在支撑电极和对电极之间提供混合气体使得乙炔气体相对于载气的百分比为0.05体积%以上且10体积%以下,并且通过产生 等离子体,同时将脉冲宽度为0.1个字节以上至5.0个音圈以下的直流脉冲电压施加到对置电极。

    High voltage pulse power circuit
    33.
    发明授权
    High voltage pulse power circuit 有权
    高压脉冲电源电路

    公开(公告)号:US07499293B2

    公开(公告)日:2009-03-03

    申请号:US11683552

    申请日:2007-03-08

    IPC分类号: H02M3/335 H02M7/515 H02H7/122

    摘要: A pulse power source comprises a first circuit, a second circuit, a transformer for coupling the first circuit and the second circuit, and a switching controller. The second circuit comprises a third semiconductor switch connected in series with a secondary winding of the transformer. The third semiconductor switch is connected in such a direction that a voltage generated in the second circuit is reverse-biased during a period in which the second semiconductor switch is turned on. A gate amplifier for forming a control signal from the switching controller into a pulse and outputting the pulse as a pulse signal is connected between a gate terminal and a cathode terminal of the third semiconductor switch.

    摘要翻译: 脉冲电源包括第一电路,第二电路,用于耦合第一电路和第二电路的变压器以及开关控制器。 第二电路包括与变压器的次级绕组串联连接的第三半导体开关。 第三半导体开关沿着使第二电路中产生的电压在第二半导体开关导通的时段内被反向偏置的方向连接。 用于将来自开关控制器的控制信号形成脉冲并输出脉冲作为脉冲信号的门放大器连接在第三半导体开关的栅极端子和阴极端子之间。

    Method of generating discharge plasma
    34.
    发明申请
    Method of generating discharge plasma 失效
    产生放电等离子体的方法

    公开(公告)号:US20070175587A1

    公开(公告)日:2007-08-02

    申请号:US11653833

    申请日:2007-01-17

    IPC分类号: H01L21/306

    CPC分类号: H01J37/32146 H01J37/32091

    摘要: A pulse voltage is applied on a process gas to generate discharge plasma. The pulse voltage has a duty ratio controlled in a range of 0.001 percent or more and 8.0 percent or less. Preferably, the discharge plasma has an electron density of 1×1010 cm−3 or larger and an electron temperature of 1.5 eV or lower at a supplied power of 1.0 W/cm2 or more per a unit area of a discharge electrode.

    摘要翻译: 对工艺气体施加脉冲电压以产生放电等离子体。 脉冲电压的占空比控制在0.001%以上且8.0%以下的范围内。 优选地,放电等离子体的供电功率为1.0W / cm 2,电子密度为1×10 9 cm -3以上,电子温度为1.5eV以下, 每放电电极的单位面积的SUP> 2以上。

    Asymmetric reductive amination of keto acid derivatives for producing amino acid derivatives
    35.
    发明申请
    Asymmetric reductive amination of keto acid derivatives for producing amino acid derivatives 有权
    用于生产氨基酸衍生物的酮酸衍生物的不对称还原胺化

    公开(公告)号:US20070142443A1

    公开(公告)日:2007-06-21

    申请号:US10571855

    申请日:2004-09-17

    摘要: The present invention relates to a process for producing amino acid derivatives such as optically active β-amino acid in short steps with good yield and high optical purity, which comprises reacting a keto acid of the formula (1): wherein R1 is hydrogen, an optionally substituted hydrocarbon, etc.; R2 is a spacer; and R3 is an optionally substituted alkoxy, etc., or a salt thereof, with ammonia or an amine or a salt thereof in the presence of a chiral catalyst and in the presence or absence of an acid and/or a fluorine-containing alcohol, to give an amino acid derivative of the formula (2): wherein Q is a group formed by removing one hydrogen atom from ammonia or an amine; X′ is an acid and/or a fluorine-containing alcohol; and b is 0 or 1.

    摘要翻译: 本发明涉及以简单的步骤生产氨基酸衍生物如光学活性β-氨基酸的方法,该方法具有良好的产率和高的光学纯度,其包括使式(1)的酮酸:其中R 1 氢,任选取代的烃等; R 2是间隔物; R 3是任选取代的烷氧基等,或其盐与氨或胺或其盐在手性催化剂的存在下和存在或不存在酸和 /或含氟醇,得到式(2)的氨基酸衍生物:其中Q是通过从氨或胺除去一个氢原子而形成的基团; X'是酸和/或含氟醇; b为0或1。

    Method of coating a square wire and an insulated wire of a square wire
    36.
    发明申请
    Method of coating a square wire and an insulated wire of a square wire 审中-公开
    涂敷方丝的绝缘线方法

    公开(公告)号:US20060219569A1

    公开(公告)日:2006-10-05

    申请号:US10550376

    申请日:2004-05-12

    IPC分类号: C25D11/00 C25D5/00

    摘要: An insulated square wire that has a high dielectric breakdown voltage is prepared by coating a square wire by cationic electrodeposition on a square wire to form an insulating film thereon, by application of a cationic electrocoating from an electrocoating bath, wherein the shifting speed of the square wire in the electrocoating bath is set in a range from 1 to 80 m/min; the shortest distance from a liquid-contact portion of the square wire onto the cationic electrocoating to an electrode is et longer than 1/2 of the total shift distance of the square wire from the liquid-contact portion of the square wire to a liquid-separation portion in the electrocoating bath, the cationic electrocoating contains a resin composition of which a hydratable functional group is reduced directly by electrons and passivated, resulting in deposition of a film, and the cationic electrocoating contains crosslinked resin particles.

    摘要翻译: 具有高绝缘击穿电压的绝缘方形线通过在方形线上通过阳离子电沉积涂覆方形丝以在其上形成绝缘膜,通过从电泳浴施加阳离子电泳涂层来制备,其中正方形的移动速度 电镀浴中的丝线设定在1〜80m / min的范围内; 从方形线的液体接触部分到阳离子电泳涂层到电极的最短距离等于或大于方形线从方形线的液体接触部分到液晶接触部分的总移动距离的1/2, 电解浴中的分离部分,阳离子电泳包含其中可水合的官能团被电子直接还原并钝化的树脂组合物,导致膜的沉积,阳离子电泳包含交联树脂颗粒。

    Method of coating electric wire having edges and insulated wire
    37.
    发明申请
    Method of coating electric wire having edges and insulated wire 审中-公开
    涂覆边缘电线的方法和绝缘电线

    公开(公告)号:US20060124461A1

    公开(公告)日:2006-06-15

    申请号:US10555567

    申请日:2004-05-12

    IPC分类号: C25B7/00 C09D5/44

    摘要: It is an object of the present invention to provide a method of coating an electric wire having edges, by which insulated wires having a high dielectric breakdown voltage can be attained. A method of coating an electric wire having edges, comprising a step of: forming an insul at ing film by cationic electrodeposition using a cationic electrocoating, the cationic electrocoating containing a resin composition of which a hydratable functional group is reduced directly by electrons and passivated, resulting in deposition of a film, and the cationic electrocoating containing crosslinked resin particles.

    摘要翻译: 本发明的目的是提供一种涂覆具有边缘的电线的方法,由此可以获得具有高绝缘击穿电压的绝缘电线。 一种涂布具有边缘的电线的方法,包括以下步骤:使用阳离子电泳法通过阳离子电沉积形成绝缘膜,所述阳离子电泳涂层含有可水合的官能团直接由电子还原而钝化的树脂组合物, 导致膜的沉积,以及含有交联树脂颗粒的阳离子电涂层。

    Process for production of optically active amino alcohols

    公开(公告)号:US06984738B2

    公开(公告)日:2006-01-10

    申请号:US10686598

    申请日:2003-10-17

    摘要: The present invention is to provide a process for producing an optically active amino alcohol which is useful for the synthesis of natural substances and as an intermediate for drugs and agricultural chemicals in a high yield, a high selectivity and an economical manner with a good working efficiency and the present invention relates to a process for producing an optically active amino alcohol represented by the following formula (2) (in the formula, R1 is a hydrocarbon group, a substituted hydrocarbon group, an aromatic heterocyclic group, a substituted aromatic heterocyclic group, an aliphatic heterocyclic group or a substituted aliphatic heterocyclic group; R2 and R3 each independently is hydrogen atom, a hydrocarbon group, a substituted hydrocarbon group, an acyl group, an acyloxy group, an alkyloxycarbonyl group, an aralkyloxycarbonyl group, an aryloxycarbonyl group, an aromatic heterocyclic group, a substituted aromatic heterocyclic group, an aliphatic heterocyclic group or a substituted aliphatic heterocyclic group; R4 is hydrogen atom or a protective group; two or more of R1, R2, R3 and R4 may be bonded each other to form a ring; and * is asymmetric carbon) or a salt thereof which comprises subjecting a compound represented by the following formula (1) or a salt thereof to an asymmetric hydrogenation. (in the formula, R1 is a hydrocarbon group, a substituted hydrocarbon group, an aromatic heterocyclic group, a substituted aromatic heterocyclic group, an aliphatic heterocyclic group or a substituted aliphatic heterocyclic group; R2 and R3 each independently is hydrogen atom, a hydrocarbon group, a substituted hydrocarbon group, an acyl group, an acyloxy group, an alkyloxycarbonyl group, an aralkyloxycarbonyl group, an aryloxycarbonyl group, an aromatic heterocyclic group, a substituted aromatic heterocyclic group, an aliphatic heterocyclic group or a substituted aliphatic heterocyclic group; R4 is hydrogen atom or a protective group; two or more of R1, R2, R3 and R4 may be bonded each other to form a ring; and a double bond is either cis or trans).