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31.发明授权公开(公告)号：US08882433B2
公开(公告)日：2014-11-11
申请号：US12780846
申请日：2010-05-14
IPC分类号： B65G1/133 , H01L21/677
CPC分类号： H01L21/67766 , B65G2201/0297 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以使得能够进行水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。 存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。 具有延伸水平轨道的起重机因此可与手动装载站接口。
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32.发明申请公开(公告)号：US20100290873A1
公开(公告)日：2010-11-18
申请号：US12780846
申请日：2010-05-14
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67766 , B65G2201/0297 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。 存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。 具有延伸水平轨道的起重机因此可与手动装载站接口。
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33.发明申请METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION 审中-公开用于提供平板显示器的方法和装置环境隔离公开(公告)号：US20090016862A1
公开(公告)日：2009-01-15
申请号：US12172084
申请日：2008-07-11
IPC分类号： H01L21/02
CPC分类号： H01L21/67363 , H01L21/67369 , H01L21/67383 , H01L21/67766 , H01L21/67778
摘要： A container for supporting substrates for processing is provided. The container includes a base, a top, and side panels connecting the base and the top. A support structure is disposed in the container. The support structure is configured to support the substrates within the container. The support structure has rows of multiple tensile members extending across a width of the container. Each row of the multiple tensile members is configured to support a substrate, wherein one of the side panels includes a moveable flexible membrane enabling access into the container. A support structure for the flexible membrane includes a synchronization mechanism for synchronizing movement of the flexible membrane with a door of a receiving module of a processing tool or a door of the processing tool.
摘要翻译： 提供了用于支撑用于处理的基板的容器。 容器包括连接底座和顶部的底座，顶部和侧面板。 支撑结构设置在容器中。 支撑结构构造成支撑容器内的基底。 支撑结构具有穿过容器宽度延伸的多个拉伸构件的行。 多个拉伸构件的每一列被构造成支撑基底，其中一个侧板包括能够进入容器的可移动柔性膜。 柔性膜的支撑结构包括同步机构，用于使柔性膜与处理工具的接收模块的门或加工工具的门的移动同步。
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公开(公告)号：US20090001616A1
公开(公告)日：2009-01-01
申请号：US12143197
申请日：2008-06-20
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译： 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。 标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。 还提供了系统，运输和标记的方法以及用于读取基板标记的装置。
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公开(公告)号：US08851820B2
公开(公告)日：2014-10-07
申请号：US12780761
申请日：2010-05-14
IPC分类号： B65G1/12 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67769 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以使得能够进行水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。
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公开(公告)号：US20100290872A1
公开(公告)日：2010-11-18
申请号：US12780761
申请日：2010-05-14
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67769 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。
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公开(公告)号：US20100034621A1
公开(公告)日：2010-02-11
申请号：US12432359
申请日：2009-04-29
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67265 , H01L21/68707
摘要： A port door providing an interface into a processing tool is provided. The port door includes first and second arms pivotably mounted on a top edge of the port door. The first and second arms are configured to extend from a plane of the port door towards a carrier containing substrates for the processing tool. The first arm has an emitter transmitting a beam that is split into a plurality of sub-beams within the first arm. The second arm has a plurality of sensors receiving corresponding sub-beams, wherein one of sub-beams provides information as to a position of an end effector relative to a gap between the substrates in the carrier.
摘要翻译： 提供了一种提供加工工具的接口的端口门。 端口门包括可枢转地安装在端口门的顶部边缘上的第一和第二臂。 第一和第二臂构造成从端口门的平面延伸到包含用于处理工具的基底的载体。 第一臂具有发射器的发射器，该射束分裂成第一臂内的多个子光束。 第二臂具有多个传感器，其接收对应的子光束，其中一个子光束提供关于末端执行器相对于载体中的基板之间的间隙的位置的信息。
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38.发明申请公开(公告)号：US20120321417A1
公开(公告)日：2012-12-20
申请号：US13464923
申请日：2012-05-04
申请人： Anthony C. Bonora , Richard Garcia
发明人： Anthony C. Bonora , Richard Garcia
IPC分类号： H01L21/677
CPC分类号： H01L21/67775 , H01L21/67265 , H01L21/68707
摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.
摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。
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公开(公告)号：US20120125808A1
公开(公告)日：2012-05-24
申请号：US13337028
申请日：2011-12-23
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B65D85/00
CPC分类号： B25J15/0028 , B65G65/00 , H01L21/67383 , H01L21/68707
摘要： The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or “grip zones” of the workpiece.
摘要翻译： 本发明包括用于存储至少一个具有底表面和周边边缘的工件的工件容器。 在一个实施例中，工件支撑结构位于容器外壳内，其在外壳内形成多个垂直堆叠的存放货架。 在一个实施例中，每个储物架包括用于以基本上水平的方向支撑工件的第一齿和第二齿。 坐在储物架上的工件的底面和周边边缘延伸超过第一齿和第二齿的外边缘。 根据本发明的端部执行器可以接合工件的这些延伸部分或“抓握区域”。
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公开(公告)号：US20120000816A1
公开(公告)日：2012-01-05
申请号：US12828236
申请日：2010-06-30
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
CPC分类号： H01L21/67772 , E06B3/50 , E06B3/5009 , E06B5/00 , E06B7/32 , H01L21/67763 , H01L21/67766 , Y10S414/135
摘要： A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.
摘要翻译： 装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。 在一个实施例中，可移动关闭机构连接到端口门并且被限定为可相对于端口门和框架以受控的方式移动。 在该实施例中，固定的封闭机构设置在靠近开口的框架上。 在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。 在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。
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