公开(公告)号：US08553370B2

公开(公告)日：2013-10-08

申请号：US12954334

申请日：2010-11-24

申请人： Liubo Hong ,  Honglin Zhu ,  Tsann Lin ,  Zheng Gao

发明人： Liubo Hong ,  Honglin Zhu ,  Tsann Lin ,  Zheng Gao

IPC分类号： G11B5/39

CPC分类号： G11B5/3912 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932

摘要： The present invention generally relates to a TMR reader and a method for its manufacture. The TMR reader discussed herein adds a shield layer to the sensor structure. The shield layer is deposited over the capping layer so that the shield layer and the capping layer collectively protect the free magnetic layer within the sensor structure from damage during further processing. Additionally, the hard bias layer is shaped such that the entire hard bias layer underlies the hard bias capping layer so that a top lead layer is not present. By eliminating the top lead layer and including a shield layer within the sensor structure, the read gap is reduced while still protecting the free magnetic layer during later processing.

摘要翻译： 本发明一般涉及TMR读取器及其制造方法。 本文中讨论的TMR读取器将一个屏蔽层添加到传感器结构。 屏蔽层沉积在覆盖层上，使得屏蔽层和覆盖层共同保护传感器结构内的自由磁性层免受进一步处理期间的损坏。 此外，硬偏压层被成形为使得整个硬偏压层位于硬偏压覆盖层的下面，使得顶部引线层不存在。 通过消除顶部引线层并且在传感器结构内包括屏蔽层，读取间隙减小，同时在稍后处理期间仍然保护自由磁性层。

公开(公告)号：US08310785B1

公开(公告)日：2012-11-13

申请号：US13372316

申请日：2012-02-13

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136225B1

公开(公告)日：2012-03-20

申请号：US12121624

申请日：2008-05-15

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该方法还包括在掩模上提供硬掩模层并去除线。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US20110134568A1

公开(公告)日：2011-06-09

申请号：US12634514

申请日：2009-12-09

申请人： YINGJIAN CHEN ,  Liubo Hong ,  Yimin Hsu

发明人： YINGJIAN CHEN ,  Liubo Hong ,  Yimin Hsu

IPC分类号： G11B5/10

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49048

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US08233235B2

公开(公告)日：2012-07-31

申请号：US12634514

申请日：2009-12-09

申请人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu

发明人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu

IPC分类号： G11B5/147 ,  G11B5/23

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49048

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US08553360B2

公开(公告)日：2013-10-08

申请号：US12634547

申请日：2009-12-09

申请人： Liubo Hong

发明人： Liubo Hong

IPC分类号： G11B5/147 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： Embodiments of the invention provide a magnetic recording head including a write pole having increasing magnetic moment from a leading edge of the write pole to a trailing edge of the write pole, and methods for manufacturing the same. The write pole may be formed with a plurality of different magnetic material layers having different magnetic moments. A first magnetic layer may be formed with a first magnetic material adjacent a leading edge of the write pole. A second magnetic layer having a greater moment may be formed on the first magnetic layer, thereby increasing the magnetic moment from the leading edge of the write pole to the trailing edge of the write pole.

摘要翻译： 本发明的实施例提供了一种磁记录头，其包括具有从写入极的前沿到写入极的后沿的磁矩增加的写入极及其制造方法。 写极可以形成有具有不同磁矩的多个不同的磁性材料层。 第一磁性层可以形成有与写入极的前沿相邻的第一磁性材料。 可以在第一磁性层上形成具有更大力矩的第二磁性层，从而增加从写入极的前沿到写入极的后沿的磁矩。

公开(公告)号：US08427791B2

公开(公告)日：2013-04-23

申请号：US12953233

申请日：2010-11-23

申请人： Zheng Gao ,  Liubo Hong ,  Richard Hsiao ,  Sangmun Oh ,  Chando Park ,  Chang-Man Park

发明人： Zheng Gao ,  Liubo Hong ,  Richard Hsiao ,  Sangmun Oh ,  Chando Park ,  Chang-Man Park

IPC分类号： G11B5/39

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/098 ,  G11B5/3163 ,  G11B2005/3996 ,  H01F10/3254 ,  H01F10/3272 ,  H01F10/3286 ,  H01F10/3295 ,  H01F41/307 ,  H01L43/08 ,  H01L43/12 ,  Y10T428/1114 ,  Y10T428/1121

摘要： According to one embodiment, a magnetic head includes a barrier layer having a crystalline structure, a first magnetic layer above the barrier layer, a magnetic insertion layer above the first magnetic layer, and a second magnetic layer above the magnetic insertion layer, the second magnetic layer having a textured face-centered cubic (fcc) structure. The first magnetic layer comprises a high spin polarization magnetic material having a crystalline structure and a characteristic of crystallization being more similar to the crystalline structure of the barrier layer than a crystalline structure of the second magnetic layer and the magnetic insertion layer comprises a magnetic material having a crystalline structure and a characteristic of crystallization being more similar to the crystalline structure of the second magnetic layer than the crystalline structure of the barrier layer. Additional magnetic head structures and methods of producing magnetic heads are described according to more embodiments.

摘要翻译： 根据一个实施例，磁头包括具有晶体结构的阻挡层，阻挡层上方的第一磁性层，第一磁性层上方的磁性插入层和磁性插入层上方的第二磁性层，第二磁性层 层具有纹理的面心立方（fcc）结构。 第一磁性层包括具有晶体结构的高自旋极化磁性材料，并且与第二磁性层的结晶结构相比，结晶的结晶特性与阻挡层的晶体结构更相似，并且磁性插入层包括具有 与阻挡层的晶体结构相比，晶体结构和结晶特性更类似于第二磁性层的晶体结构。 根据更多实施例描述附加的磁头结构和制造磁头的方法。

公开(公告)号：US08216481B2

公开(公告)日：2012-07-10

申请号：US12581030

申请日：2009-10-16

申请人： Liubo Hong

发明人： Liubo Hong

IPC分类号： B44C1/22

CPC分类号： B82Y10/00 ,  B82Y25/00 ,  G01R33/098 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3909 ,  G11B2005/3996

摘要： A method for manufacturing a magnetoresistive read sensor that allows the sensor to be constructed with clean well defined side junctions, even at very narrow track widths. The method involves using first and second etch mask layers, that are constructed of materials such that the second mask (formed over the first mask) can act as a mask during the patterning of the first mask (bottom mask). The first mask has a well defined thickness that is defined by deposition and which is not affected by the etching processes used to define the mask. This allows the total ion milling etch mask thickness to be well controlled before the ion milling process used to define the sensor side walls.

摘要翻译： 一种用于制造磁阻读取传感器的方法，即使在非常窄的轨道宽度下也能够使传感器构造成具有清晰良好定义的侧面接合点。 该方法包括使用由材料构成的第一和第二蚀刻掩模层，使得第二掩模（形成在第一掩模上）可以在图案化第一掩模（底掩模）期间用作掩模。 第一掩模具有由沉积限定的良好限定的厚度，并且其不受用于限定掩模的蚀刻工艺的影响。 这允许在用于限定传感器侧壁的离子铣削过程之前，完全控制总离子铣削蚀刻掩模厚度。

公开(公告)号：US07838436B2

公开(公告)日：2010-11-23

申请号：US11528877

申请日：2006-09-28

申请人： Rongfu Xiao ,  Cheng T. Horng ,  Ru-Ying Tong ,  Chyu-Jinh Torng ,  Tom Zhong ,  Witold Kula ,  Terry Kin Ting Ko ,  Wei Cao ,  Wai-Ming J. Kan ,  Liubo Hong

发明人： Rongfu Xiao ,  Cheng T. Horng ,  Ru-Ying Tong ,  Chyu-Jinh Torng ,  Tom Zhong ,  Witold Kula ,  Terry Kin Ting Ko ,  Wei Cao ,  Wai-Ming J. Kan ,  Liubo Hong

IPC分类号： H01L21/302 ,  H01L21/461

CPC分类号： H01L43/12 ,  G11C11/161 ,  H01L43/08

摘要： Formation of a bottom electrode for an MTJ device on a silicon nitride substrate is facilitated by including a layer of ruthenium near the silicon nitride surface. The ruthenium is a good electrical conductor and it responds differently from Ta and TaN to certain etchants. Adhesion to SiN is enhanced by using a TaN/NiCr bilayer as “glue”. Thus, said included layer of ruthenium may be used as an etch stop layer during the etching of Ta and/or TaN while the latter materials may be used to form a hard mask for etching the ruthenium without significant corrosion of the silicon nitride surface.

摘要翻译： 通过在氮化硅表面附近包括一层钌来促进在氮化硅衬底上形成用于MTJ器件的底部电极。 钌是良好的电导体，并且它对Ta和TaN的反应与某些蚀刻剂不同。 通过使用TaN / NiCr双层作为“胶”来增强对SiN的附着力。 因此，所述包含的钌层可以在蚀刻Ta和/或TaN期间用作蚀刻停止层，而后者可用于形成用于蚀刻钌的硬掩模，而不会对氮化硅表面产生显着的腐蚀。

公开(公告)号：US07785666B1

公开(公告)日：2010-08-31

申请号：US11955266

申请日：2007-12-12

申请人： Hai Sun ,  Liubo Hong ,  Hongping Yuan ,  Yizhong Wang ,  Winnie Yu ,  Xianzhong Zeng

发明人： Hai Sun ,  Liubo Hong ,  Hongping Yuan ,  Yizhong Wang ,  Winnie Yu ,  Xianzhong Zeng

IPC分类号： B05D1/32

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： A method and system for fabricating a magnetic recording device are described. The method and system include providing a mask layer on the magnetic recording device and imprinting a pattern in the mask layer to form a mask. The method and system also include transferring the pattern from the mask to the magnetic recording device. In another aspect, the method and system include providing a malleable mask layer on the magnetic recording device. In this aspect, the method and system also include depressing an imprint mask into the mask layer and curing the mask layer while the imprint mask is depressed into the mask layer to provide a mask having a pattern. The pattern may correspond to a read sensor and/or a perpendicular magnetic recording pole. The method and system also include transferring the pattern from the mask to the magnetic recording device.

摘要翻译： 描述了用于制造磁记录装置的方法和系统。 所述方法和系统包括在磁记录装置上设置掩模层并在掩模层中印刷图案以形成掩模。 该方法和系统还包括将图案从掩模转移到磁记录装置。 在另一方面，该方法和系统包括在磁记录装置上提供可延展的掩模层。 在这方面，该方法和系统还包括将印模掩模压入掩模层中并固化掩模层，同时将印模掩模压入掩模层中以提供具有图案的掩模。 图案可以对应于读取传感器和/或垂直磁记录极。 该方法和系统还包括将图案从掩模转移到磁记录装置。