PMR writer having a tapered write pole and bump layer and method of fabrication
    2.
    发明授权
    PMR writer having a tapered write pole and bump layer and method of fabrication 有权
    PMR写入器具有锥形写极点和凸起层及其制造方法

    公开(公告)号:US08233235B2

    公开(公告)日:2012-07-31

    申请号:US12634514

    申请日:2009-12-09

    IPC分类号: G11B5/147 G11B5/23

    摘要: Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

    摘要翻译: 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面(ABS)处或附近具有锥形表面,其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离,从而提高写入头的性能。

    Method for providing a perpendicular magnetic recording (PMR) transducer
    4.
    发明授权
    Method for providing a perpendicular magnetic recording (PMR) transducer 有权
    提供垂直磁记录(PMR)传感器的方法

    公开(公告)号:US08146236B1

    公开(公告)日:2012-04-03

    申请号:US12057692

    申请日:2008-03-28

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.

    摘要翻译: 公开了一种用于从极层提供垂直磁记录(PMR)换能器的方法和系统。 第一和第二平坦化停止层设置在极层上。 在第二平坦化停止层上设置掩模。 掩模的第一部分位于用于形成PMR极的极层的一部分上。 在提供面罩之后定义PMR极。 提供至少围绕PMR极的中间层。 至少在中间层上执行第一平面化。 在第一平坦化期间,去除第二平坦化停止层的一部分。 去除第二平坦化停止层的剩余部分。 执行第二平面化。 在第二平面化之后,第一平坦化停止层的一部分保留。 分别在PMR极和写间隙上提供写间隙和屏蔽。

    Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
    9.
    发明授权
    Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 有权
    使具有前缘屏蔽(LES)和前缘锥度(LET)的PMR写入器的过程

    公开(公告)号:US08400733B2

    公开(公告)日:2013-03-19

    申请号:US12954422

    申请日:2010-11-24

    IPC分类号: G11B5/147

    摘要: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极,磁性材料沉积在平坦化表面上,形成图案化的抗蚀剂材料,并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

    Method for providing a perpendicular magnetic recording (PMR) transducer
    10.
    发明授权
    Method for providing a perpendicular magnetic recording (PMR) transducer 有权
    提供垂直磁记录(PMR)传感器的方法

    公开(公告)号:US08079135B1

    公开(公告)日:2011-12-20

    申请号:US11955667

    申请日:2007-12-13

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.

    摘要翻译: 描述了一种用于提供垂直磁记录(PMR)换能器的方法。 提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。 该方法包括提供硬掩模和中间层。 硬掩模的第一部分位于PMR杆上。 硬掩模的第二部分位于另一结构上。 中间层至少包围PMR极。 该方法还包括在至少中间层上执行平面化,在PMR极上去除硬掩模的第一部分,而不必在另一个结构上完全去除硬掩模的第二部分。 该方法还包括移除另一结构上的硬掩模的剩余部分,在PMR极上提供写入间隙,并在写入间隙上提供屏蔽。