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公开(公告)号:US10192726B1
公开(公告)日:2019-01-29
申请号:US14518043
申请日:2014-10-20
Applicant: Elemental Scientific, Inc.
Inventor: Daniel R. Wiederin , Kyle W. Uhlmeyer , Austin Schultz , Jonathan Hein
Abstract: A sample introduction system providing variable online dilution of a sample is described. In one or more implementations, a device includes a spectrometry analysis system that employs example techniques in accordance with the present disclosure includes an inline dilution environment, including a first valve assembly configured to prepare a sample by accepting at least one of the sample, a diluent, a carrier, or an internal standard, where the first valve assembly includes a first sample loop; and a second valve assembly configured to prepare the sample by accepting the sample from the first valve assembly, where the second valve assembly is coupled to the first valve assembly, and where the second valve assembly includes a second sample loop.
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公开(公告)号:US20170162457A1
公开(公告)日:2017-06-08
申请号:US15366250
申请日:2016-12-01
Applicant: Elemental Scientific, Inc.
Inventor: Kyle W. Uhlmeyer , Jae Seok Lee , Daniel R. Wiederin , Patrick Sullivan
IPC: H01L21/66 , H01L21/67 , H01L21/306 , G01N1/10 , G01N1/38
CPC classification number: H01L21/30604 , G01N1/2035 , G01N35/1097 , G01N2001/1062 , G01N2001/2057 , H01L21/31111
Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
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公开(公告)号:US20240255390A1
公开(公告)日:2024-08-01
申请号:US18436198
申请日:2024-02-08
Applicant: Elemental Scientific, Inc.
Inventor: David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
CPC classification number: G01N1/10 , G01N1/14 , G01N35/00732 , G01N35/00871 , G01N35/1097 , H01J49/045 , G01N2001/002
Abstract: A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling system for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.
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公开(公告)号:US20230395384A1
公开(公告)日:2023-12-07
申请号:US18329798
申请日:2023-06-06
Applicant: Elemental Scientific, Inc.
Inventor: Kyle W. Uhlmeyer , Jae Seok Lee , Daniel R. Wiederin , Patrick Sullivan
IPC: H01L21/306 , G01N35/10 , G01N1/20
CPC classification number: H01L21/30604 , G01N35/1097 , G01N1/2035 , G01N2001/1062
Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
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公开(公告)号:US20230087861A1
公开(公告)日:2023-03-23
申请号:US17956229
申请日:2022-09-29
Applicant: Elemental Scientific, Inc.
Inventor: Daniel R. Wiederin , Kyle W. Uhlmeyer , Austin Schultz , Jacob Unnerstall , Kevin Wiederin
Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.
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公开(公告)号:US11056328B2
公开(公告)日:2021-07-06
申请号:US16833103
申请日:2020-03-27
Applicant: Elemental Scientific, Inc.
Inventor: Daniel R. Wiederin , Kyle W. Uhlmeyer , Austin Schultz , Jonathan Hein
Abstract: A sample introduction system providing variable online dilution of a sample is described. In one or more implementations, a device includes a spectrometry analysis system that employs example techniques in accordance with the present disclosure includes an inline dilution environment, including a first valve assembly configured to prepare a sample by accepting at least one of the sample, a diluent, a carrier, or an internal standard, where the first valve assembly includes a first sample loop; and a second valve assembly configured to prepare the sample by accepting the sample from the first valve assembly, where the second valve assembly is coupled to the first valve assembly, and where the second valve assembly includes a second sample loop.
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公开(公告)号:US10978280B2
公开(公告)日:2021-04-13
申请号:US16234935
申请日:2018-12-28
Applicant: Elemental Scientific, Inc.
Inventor: Daniel R. Wiederin , Kyle W. Uhlmeyer , Michael P. Field , Jae Seok Lee
IPC: G01J3/443 , H01J49/00 , H01J49/10 , G01N21/27 , G01N33/18 , H01J49/26 , G01J3/28 , G01N21/35 , G01N21/73
Abstract: Systems and methods are described for calibrating an analytical instrument analyzing a plurality of sample matrices in series. A system embodiment can include, but is not limited to, a sample analysis device configured to receive a plurality of samples from a plurality of remote sampling systems and to determine an intensity of one or more species of interest contained in each of the plurality of samples; and a controller configured to generate a primary calibration curve based on analysis of a first standard solution having a first sample matrix by the sample analysis device and generate at least one secondary calibration curve based on analysis of a second standard solution having a second sample matrix by the sample analysis device, the controller configured to associate the at least one secondary calibration curve with the primary calibration curve according to a matrix correction factor.
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公开(公告)号:US10585108B2
公开(公告)日:2020-03-10
申请号:US15735850
申请日:2016-06-24
Applicant: Elemental Scientific, Inc.
Inventor: David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
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公开(公告)号:US10551401B2
公开(公告)日:2020-02-04
申请号:US15735850
申请日:2016-06-24
Applicant: Elemental Scientific, Inc.
Inventor: David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
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40.
公开(公告)号:US20160370262A1
公开(公告)日:2016-12-22
申请号:US15120897
申请日:2015-02-27
Applicant: David DIAZ , Jonathan HEIN , Kyle W. UHLMEYER , Daniel R. WIEDERIN , Tyler YOST , Kevin WIEDERIN , Elemental Scientific, Inc.
Inventor: David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
CPC classification number: G01N1/10 , G01N1/14 , G01N35/00732 , G01N35/00871 , G01N35/1097 , G01N2001/002 , H01J49/045
Abstract: A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling system for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.
Abstract translation: 系统包括在第一位置处的分析系统和在远离第一位置的第二位置处的一个或多个远程采样系统。 采样系统可以被配置为接收远程液体样品。 该系统还包括被配置为将气体从第二位置输送到第一位置的样品传送管线。 样品传输线被配置为选择性地与远程采样系统耦合,以将连续的液体样品段供应到样品传送线。 该系统还可以包括在第一位置处的样本接收线。 样品接收管线被配置为选择性地与样品传送管线和分析系统连接以接收连续液体样品段并将样品供应到分析装置。
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