公开(公告)号：US06666337B1

公开(公告)日：2003-12-23

申请号：US09782843

申请日：2001-02-14

申请人： Michael R. Conboy ,  Sam H. Allen, Jr. ,  Elfido Coss, Jr.

发明人： Michael R. Conboy ,  Sam H. Allen, Jr. ,  Elfido Coss, Jr.

IPC分类号： B07C500

CPC分类号： H01L23/544 ,  H01L2223/54406 ,  H01L2223/54493 ,  H01L2924/0002 ,  H01L2924/3511 ,  H01L2924/00

摘要： A system for identifying wafers contained in a wafer carrier includes a wafer sorter. Each wafer includes a surface terminating in an edge and a plurality of sector identification codes disposed on the surface proximate the edge. The wafer sorter is adapted to scan at least a portion of a wafer extending from the carrier and to identify at least one of the sector identification codes on the wafer independent of the orientation of the wafer in the wafer carrier. A method for identifying wafers contained in a wafer carrier is provided. Each wafer includes a surface terminating in an edge and a plurality of sector identification codes disposed on the surface proximate the edge. The method includes scanning at least a portion of a wafer extending from the carrier and identifying at least one of the sector identification codes on the wafer independent of the orientation of the wafer in the wafer carrier.

摘要翻译： 用于识别包含在晶片载体中的晶片的系统包括晶片分选器。 每个晶片包括终止于边缘的表面和设置在靠近边缘的表面上的多个扇区识别代码。 晶片分选器适于扫描从载体延伸的晶片的至少一部分，并且在晶片载体上独立于晶片的取向来识别晶片上的扇区识别码中的至少一个。 提供了一种用于识别包含在晶片载体中的晶片的方法。 每个晶片包括终止于边缘的表面和设置在靠近边缘的表面上的多个扇区识别代码。 该方法包括扫描从载体延伸的晶片的至少一部分，并且在晶片载体上独立于晶片的取向来识别晶片上的扇区识别码中的至少一个。

公开(公告)号：US06594589B1

公开(公告)日：2003-07-15

申请号：US09863822

申请日：2001-05-23

申请人： Elfido Coss, Jr. ,  Richard J. Markle ,  Patrick M. Cowan

发明人： Elfido Coss, Jr. ,  Richard J. Markle ,  Patrick M. Cowan

IPC分类号： G01B344

CPC分类号： G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P80/15 ,  Y02P90/14

摘要： A method for monitoring health of a tool includes receiving at least one tool parameter related to the processing of a workpiece in a tool; receiving a model selection trigger; selecting a tool health model based on the model selection trigger; generating at least one predicted tool parameter based on the selected tool health model; and generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter. A tool health monitor includes a library of tool health models, a model selector, and a fault detection and classification unit. The model selector is adapted to receive a model selection trigger and select a tool health model based on the model selection trigger. The fault detection and classification unit is adapted to receive at least one tool parameter related to the processing of a workpiece in a tool, generate at least one predicted tool parameter based on the selected tool health model, and generate a tool health rating for the tool based on a comparison between the received tool parameter and the predicted tool parameter.

摘要翻译： 用于监测工具健康的方法包括：接收与工具中的工件的处理有关的至少一个工具参数; 接收模型选择触发; 基于模型选择触发选择工具健康模型; 基于所选择的工具健康模型生成至少一个预测的工具参数; 并且基于所测量的工具参数和所预测的工具参数之间的比较，为所述工具生成工具健康评级。 工具健康监测器包括工具健康模型库，模型选择器和故障检测和分类单元。 模型选择器适于接收模型选择触发，并根据模型选择触发选择工具健康模型。 所述故障检测和分类单元适于接收与工具中的工件的处理有关的至少一个刀具参数，基于所选择的刀具健康模型生成至少一个预测刀具参数，并为所述刀具生成刀具健康等级 基于所接收的刀具参数与预测刀具参数之间的比较。

公开(公告)号：US06556882B1

公开(公告)日：2003-04-29

申请号：US09401089

申请日：1999-09-22

申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

IPC分类号： G06F1900

CPC分类号： H01L22/20

摘要： A method and apparatus for performing manufacturing system analysis upon a manufacturing network. Real-time production data is collected. The real-time production data is stored in a static file database. A real-time data flow is emulated using said real-time production data from said static file database. A reactive function analysis is performed.

摘要翻译： 一种用于在制造网络上执行制造系统分析的方法和装置。 收集实时生产数据。 实时生产数据存储在静态文件数据库中。 使用来自所述静态文件数据库的所述实时生产数据来模拟实时数据流。 进行反应性功能分析。

公开(公告)号：US06546508B1

公开(公告)日：2003-04-08

申请号：US09430476

申请日：1999-10-29

申请人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

发明人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

IPC分类号： G06F1100

CPC分类号： G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P90/14

摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.

摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

公开(公告)号：US06403905B1

公开(公告)日：2002-06-11

申请号：US09496874

申请日：2000-02-02

申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Russel Shirley

发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Russel Shirley

IPC分类号： B07C500

CPC分类号： H01L21/67271 ,  G03F7/70741 ,  Y10S209/933

摘要： A system and method for stocking and sorting reticles used in a semiconductor fabrication facility, the facility having a material handling system that presents a reticle to a photolithography process area. In an example embodiment of the reticle management system, a reticle storage system and a reticle sorting apparatus are coupled to a host system that is adapted to track and control the movement of reticles in the material handling system. The host system is capable of interfacing with a management input module that integrates management directives into the reticle flow plan in the manufacturing process. The result is a reticle management system that is flexible enough to manage a finite number of reticles and pods in minimizing the delivery time of a reticle to the desired location while responding to changing conditions external to the manufacturing process.

摘要翻译： 一种用于在半导体制造设备中使用的放线和分类掩模版的系统和方法，该设备具有将光罩呈现于光刻工艺区域的材料处理系统。 在掩模版管理系统的示例性实施例中，掩模版存储系统和掩模版分类装置耦合到适于跟踪和控制材料处理系统中的标线的运动的主机系统。 主机系统能够与管理输入模块进行接口，管理输入模块将管理指令集成到制造过程中的标线流程图中。 结果是一种掩模版管理系统，其足够灵活以管理有限数量的光罩和荚，以最小化掩模版到所需位置的传送时间，同时响应制造过程外部的变化条件。

公开(公告)号：US06392403B1

公开(公告)日：2002-05-21

申请号：US09496531

申请日：2000-02-02

申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Russel Shirley ,  Eric Christensen

发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Russel Shirley ,  Eric Christensen

IPC分类号： G01R3128

CPC分类号： H01L21/67294 ,  G01R31/01 ,  H01L21/67271

摘要： An apparatus and a system for stocking and sorting wafers in a wafer processing system reduce cycle time in manufacturing and reduce excessive handling of delicate wafers. In an example embodiment, the apparatus includes in an enclosure having therein a scanner adapted to identify codes located on the wafer carriers that indicate the position of a wafer within the carrier. A sorting mechanism for sorting wafers and carriers within the enclosure is also included as well as a computer arrangement that communicates with the management system of the wafer processing system. One of the advantages of the present invention is the reduction in cycle time that is achieved by sorting wafers immediately on demand while at a stocking location.

摘要翻译： 用于在晶片处理系统中放置和分选晶片的装置和系统减少制造中的周期时间并减少精细晶片的过度处理。 在一个示例性实施例中，该装置包括在其中具有扫描器的外壳中，扫描器适于识别位于晶片载体上的代码，其指示晶片在载体内的位置。 还包括用于在外壳内分选晶片和载体的分拣机构以及与晶片处理系统的管理系统通信的计算机装置。 本发明的优点之一是通过在放养位置时立即分选晶片来实现循环时间的减少。

公开(公告)号：US6154043A

公开(公告)日：2000-11-28

申请号：US852316

申请日：1997-05-07

申请人： Michael R. Conboy ,  Elfido Coss, Jr.

发明人： Michael R. Conboy ,  Elfido Coss, Jr.

IPC分类号： G01R1/067 ,  G01R31/28 ,  G01R31/02

CPC分类号： G01R31/2884 ,  G01R1/06794 ,  G01R31/2831

摘要： An apparatus and method are presented for identifying a semiconductor die within a group of semiconductor dice formed upon a surface of the same semiconductor wafer. During wafer fabrication, several parallel-resonant electronic structures are formed within each die area of the semiconductor wafer. The parallel-resonant structures are configured such that each semiconductor die responds differently to an alternating current (a.c.) electrical signal. During an identification operation, an a.c. electrical signal is coupled to the parallel-resonant structures of a selected semiconductor die. The unique response of the parallel-resonant structures of the selected semiconductor die to the a.c. electrical signal is used to determine the position of the selected semiconductor die relative to other semiconductor dice formed from the same semiconductor wafer. The apparatus includes a includes a variable frequency oscillator configured to produce an a.c. voltage Vout, a probe, and a resistor. Voltage Vout is coupled to an inductive coil of the probe connected in series with the resistor. An a.c. voltage Vmeas developed across the resistor is used to determine the response of the selected semiconductor die to the a.c. signal. A graph of the ratio of the magnitude of voltage Vmeas to the magnitude of voltage Vout versus the corresponding frequency of the a.c. electrical signal is plotted and used to determine the position of the die relative to other semiconductor dice produced from the same semiconductor wafer.

摘要翻译： 提出了一种用于识别在同一半导体晶片的表面上形成的一组半导体晶片内的半导体管芯的装置和方法。 在晶片制造期间，在半导体晶片的每个管芯区域内形成几个并联谐振电子结构。 并联谐振结构被配置为使得每个半导体管芯与交流（a.c.）电信号的响应不同。 在识别操作期间， 电信号耦合到所选择的半导体管芯的并联谐振结构。 所选择的半导体晶体管的并联谐振结构对电流的独特响应。 电信号用于确定所选择的半导体管芯相对于由相同半导体晶片形成的其它半导体管芯的位置。 该装置包括：一个可变频率振荡器，被配置成产生一个直流 电压Vout，探头和电阻。 电压Vout耦合到与电阻器串联连接的探头的感应线圈。 一个 用于电阻器上的电压Vmeas用于确定所选择的半导体管芯对a.c.的响应。 信号。 电压Vmeas的大小与电压Vout的大小与相应的交流频率的比率的曲线图。 绘制电信号并用于确定管芯相对于由相同半导体晶片产生的其它半导体管芯的位置。

公开(公告)号：US5838566A

公开(公告)日：1998-11-17

申请号：US763233

申请日：1996-12-10

申请人： Michael R. Conboy ,  Elfido Coss, Jr.

发明人： Michael R. Conboy ,  Elfido Coss, Jr.

IPC分类号： G06Q10/08 ,  G06F19/00

CPC分类号： G06Q10/08

摘要： A system and method for managing empty carriers in an automated material handling system. The system includes a plurality of material carriers, some of which are empty, and a plurality of stock areas which store the carriers while waiting for the contained material to be processed or after having been processed. The system also includes a transportation system for moving the carriers between the stock areas. The system also includes a control system which receives status information from the transportation system and stock areas and controls the movement of carriers, in particular empty carriers, within the system in order to avoid production inefficiencies due to time delays introduced by an empty carrier not being available at a stock area when needed. The control system accomplishes this by calculating status variables, such as the empty percentage of each stock area, the current move rate of carriers in the system, and the current empty move rate in the system. The control system controls the movement of empty carriers based on the status information in relation to control parameters. The empty carrier control system attempts to keep the empty percentage of each stock area within a range defined by minimum and maximum empty percentage control parameters. The empty carrier movement is performed subject to not exceeding a maximum system move rate control parameter, which serves to avoid exceeding the physical limitations of the system, and not exceeding a maximum empty carrier move rate control parameter, which serves as a damping factor to avoid introducing system instability. In one embodiment, the system is for handling semiconductor wafers. In one embodiment, the control system is a network of computers executing a distributed software application for controlling the empty carrier movement.

摘要翻译： 一种用于管理自动化材料处理系统中的空载体的系统和方法。 该系统包括多个材料载体，其中一些是空的，以及存储载体的多个储存区域，同时等待待处理的所包含的材料或经处理之后。 该系统还包括用于在货盘区域之间移动承运人的运输系统。 该系统还包括控制系统，其从运输系统和库存区域接收状态信息并控制系统内的运营商，特别是空运送者的运动，以避免由于空运营商引入的时间延迟而产生的低效率 需要时可在库存区域进行。 控制系统通过计算状态变量，例如每个库存区域的空百分比，系统中运营商的当前移动速率和系统当前的空运动速率来实现。 控制系统根据与控制参数相关的状态信息来控制空载体的移动。 空承运人控制系统试图将每个库存区域的空百分比保持在由最小和最大空百分比控制参数定义的范围内。 执行空载体运动时不得超过最大系统移动速率控制参数，其用于避免超过系统的物理限制，并且不超过用作避免的阻尼因子的最大空载运移动速率控制参数 引入系统不稳定。 在一个实施例中，该系统用于处理半导体晶片。 在一个实施例中，控制系统是执行用于控制空载体运动的分布式软件应用的计算机网络。

公开(公告)号：US07788065B2

公开(公告)日：2010-08-31

申请号：US11772503

申请日：2007-07-02

申请人： Elfido Coss, Jr. ,  Eric Omar Green ,  Rajesh Vijayaraghavan

发明人： Elfido Coss, Jr. ,  Eric Omar Green ,  Rajesh Vijayaraghavan

IPC分类号： G06F11/30

CPC分类号： G06F11/273 ,  G01M99/00

摘要： A method includes collecting trace data associated with a first device tester. A tester health metric is generated for the first device tester. At least one device tested by the first device tester is retested responsive to determining the tester health metric violates a predetermined threshold. A system includes a first device tester operable to test devices and a tester monitoring unit. The tester monitoring unit is operable to collect trace data associated with the first device tester, generate a tester health metric for the first device tester, and initiate a retest of at least one device tested by the first device tester responsive to determining the tester health metric violates a predetermined threshold.

摘要翻译： 一种方法包括收集与第一设备测试器相关联的跟踪数据。 为第一台设备测试仪生成测试仪健康度量。 响应于确定测试仪健康度量违反预定阈值，重新测试由第一设备测试仪测试的至少一个设备。 系统包括可操作以测试设备的第一设备测试器和测试仪监视单元。 所述测试器监视单元可操作以收集与所述第一设备测试器相关联的跟踪数据，为所述第一设备测试器生成测试仪健康度量，以及响应于确定所述测试器健康度量，启动由所述第一设备测试仪测试的至少一个设备的测试 违反预定的门槛。

公开(公告)号：US07321993B1

公开(公告)日：2008-01-22

申请号：US10883364

申请日：2004-07-01

申请人： Richard J. Markle ,  Elfido Coss, Jr.

发明人： Richard J. Markle ,  Elfido Coss, Jr.

IPC分类号： G06F11/00

CPC分类号： G05B23/0235 ,  G05B2223/02

摘要： The present invention is generally directed to various methods and systems for fault detection control of multiple tools based upon external data. In one illustrative embodiment, the method includes monitoring each of a plurality of tools to determine if a fault condition occurs in any of the tools, each of the tools being comprised of at least one integrated metrology device, monitoring external data regarding at least one parameter that may impact an operation performed in each of the tools, and determining if an indicated fault condition in at least one of the tools is a valid fault condition or a systemic fault condition associated with a change in a value of the at least one parameter.

摘要翻译： 本发明一般涉及用于基于外部数据的多个工具的故障检测控制的各种方法和系统。 在一个说明性实施例中，该方法包括监视多个工具中的每个工具以确定是否在任何工具中发生故障状况，每个工具由至少一个集成测量装置组成，监视关于至少一个参数的外部数据 这可能影响在每个工具中执行的操作，并且确定至少一个工具中的指示的故障状况是否是与所述至少一个参数的值的变化相关联的有效故障状况或系统故障状况。