Magnetoresistive sensor and manufacturing method thereof
    31.
    发明授权
    Magnetoresistive sensor and manufacturing method thereof 有权
    磁阻传感器及其制造方法

    公开(公告)号:US08289021B2

    公开(公告)日:2012-10-16

    申请号:US12826330

    申请日:2010-06-29

    IPC分类号: G01R33/02

    摘要: A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.

    摘要翻译: 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件,可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

    BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof
    32.
    发明授权
    BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof 有权
    MEMS型高灵敏度惯性传感器及其制造工艺

    公开(公告)号:US07270003B2

    公开(公告)日:2007-09-18

    申请号:US11189544

    申请日:2005-07-25

    IPC分类号: G01P15/125 G01C19/00

    CPC分类号: G01C19/5755 G01C19/5769

    摘要: The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.

    摘要翻译: 半导体惯性传感器由静电耦合在一起的转子元件和定子元件形成。 转子元件由悬挂质量和从悬浮物质延伸的多个移动电极形成。 定子元件由面对各自的移动电极的多个固定电极形成。 悬挂质量由弹性悬挂元件支撑。 悬挂质量具有第一,较大的厚度,并且弹性悬挂元件具有小于第一厚度的第二厚度。

    BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof
    33.
    发明申请
    BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof 有权
    MEMS型高灵敏度惯性传感器及其制造工艺

    公开(公告)号:US20060042385A1

    公开(公告)日:2006-03-02

    申请号:US11189544

    申请日:2005-07-25

    IPC分类号: G01P15/08 H01L21/308

    CPC分类号: G01C19/5755 G01C19/5769

    摘要: The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.

    摘要翻译: 半导体惯性传感器由静电耦合在一起的转子元件和定子元件形成。 转子元件由悬挂质量和从悬浮物质延伸的多个移动电极形成。 定子元件由面对各自的移动电极的多个固定电极形成。 悬挂质量由弹性悬挂元件支撑。 悬挂质量具有第一,较大的厚度,并且弹性悬挂元件具有小于第一厚度的第二厚度。

    MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF
    35.
    发明申请
    MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF 有权
    磁传感器及其制造方法

    公开(公告)号:US20100327864A1

    公开(公告)日:2010-12-30

    申请号:US12826330

    申请日:2010-06-29

    IPC分类号: G01R33/02

    摘要: A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.

    摘要翻译: 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件,可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
    36.
    发明授权
    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained 有权
    微机电装置,特别是光学微动开关的制造方法以及如此获得的微电子机械装置

    公开(公告)号:US07399652B2

    公开(公告)日:2008-07-15

    申请号:US10821263

    申请日:2004-04-08

    IPC分类号: H01L21/58

    摘要: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

    摘要翻译: 一种具有支撑部件和操作部件的微电子机械装置的制造方法,包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层,形成 在第二层中的装置的第一支撑部分和第一操作部分,在第一层中形成临时锚固件,以及将第一晶片结合到第二晶片,第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后,所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

    Adapter for annular fluorescent lamps having an integrated ballast and starting arrangement
    38.
    发明授权
    Adapter for annular fluorescent lamps having an integrated ballast and starting arrangement 失效
    具有集成镇流器和启动布置的环形荧光灯的适配器

    公开(公告)号:US06971763B2

    公开(公告)日:2005-12-06

    申请号:US10695783

    申请日:2003-10-30

    摘要: The invention relates to an adapter (1) having an integrated ballast and starting arrangement for annular fluorescent lamps (2) having a pin base (3) for connecting them to conventional incandescent lamp sockets. The adapter (1) has a cuboidal housing and has at each end a holder which partially encloses the pin base (3) of the fluorescent lamp (2) or the discharge vessel (12) of the fluorescent lamp (2). The first holder in this case also contains a socket for accommodating and making electrical contact with the pin base (3) and the other holder contains a sliding apparatus for locking the lamp (2).

    摘要翻译: 本发明涉及具有用于环形荧光灯(2)的集成镇流器和启动装置的适配器(1),其具有用于将它们连接到常规白炽灯插座的销座(3)。 适配器(1)具有立方体壳体,并且在每个端部具有部分地包围荧光灯(2)的引脚基座(3)或荧光灯(2)的放电容器(12)的保持器。 在这种情况下,第一保持架还包括用于容纳并与销基座(3)电接触的插座,另一个支架包含用于锁定灯(2)的滑动装置。

    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
    39.
    发明授权
    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained 有权
    微机电装置,特别是光学微动开关的制造方法以及如此获得的微电子机械装置

    公开(公告)号:US08679887B2

    公开(公告)日:2014-03-25

    申请号:US13456990

    申请日:2012-04-26

    IPC分类号: H01L21/58

    摘要: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

    摘要翻译: 一种具有支撑部件和操作部件的微电子机械装置的制造方法,包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层,形成 在第二层中的装置的第一支撑部分和第一操作部分,在第一层中形成临时锚固件,以及将第一晶片结合到第二晶片,第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后,所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

    INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY
    40.
    发明申请
    INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY 有权
    MEMS技术制造的半导体材料的集成三光子计

    公开(公告)号:US20110140693A1

    公开(公告)日:2011-06-16

    申请号:US12965491

    申请日:2010-12-10

    IPC分类号: G01R33/02

    摘要: Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.

    摘要翻译: 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动,并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的,并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。