EXIT CHANNEL CONFIGURATION FOR MEMS-BASED ACTUATOR SYSTEMS

    公开(公告)号:US20230016991A1

    公开(公告)日:2023-01-19

    申请号:US17862185

    申请日:2022-07-11

    Abstract: A cooling system including a support structure, a cooling element, and a bottom plate is described. The cooling element has a central region and a perimeter. The cooling element is supported by the support structure at the central region. At least a portion of the perimeter is unpinned. The cooling element undergoes vibrational motion when actuated to drive a fluid toward a heat-generating structure. The bottom plate has orifices and at least one cavity therein. The at least one cavity is adjacent to and fluidically connected with the orifices. The at least one cavity and the orifices define an orifice distance between the orifices and the heat-generating structure and an orifice length within the bottom plate. The heat-generating structure and the bottom plate define a gap between a portion of the bottom plate and a portion of the heat-generating structure.

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